Clean workshop for gallium nitride semiconductor production

Abstract

The utility model discloses a clean workshop for gallium nitride semiconductor production, which belongs to the technical field of gallium nitride semiconductors and comprises a bottom plate, a workshop body arranged at the top of the bottom plate, a sleeve fixedly mounted at the top of the workshop body, a first air inlet pipe rotatably mounted in the sleeve, and an air inlet communicated with one end of the first air inlet pipe. A filtering assembly is arranged at the other end of the air inlet pipe I; the device comprises a box body, a filter element and two groups of mounting seats, a turntable is rotatably mounted on one side of the box body, a handle is fixedly mounted on one side of the turntable, two groups of support rods I are hinged to the other side of the turntable, support rods II are hinged to one ends of the two groups of support rods I, and the two groups of support rods II are slidably mounted in the corresponding mounting seats; the quick disassembly structure enables the replacement process of the filter element to be quick and efficient, the filter element needs to be regularly maintained and replaced in the operation of a clean workshop so as to ensure the filtering effect of the filter element, and the quick disassembly design greatly shortens the operation time and reduces the downtime of a production line.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium nitride semiconductors, in particular to a clean workshop for the production of gallium nitride semiconductors. Background Art

[0002] With the rapid development of technology, gallium nitride semiconductors are increasingly widely used in the fields of electronics, communication, lighting, etc. Gallium nitride semiconductors have excellent properties such as high electron mobility, high breakdown electric field, and high thermal conductivity. However, the requirements for the production environment are extremely harsh.

[0003] In the existing technology, for the workshops used in semiconductor production, after the filter element has been used for too long, due to the difficulty of disassembly, the filter element may not be replaced according to the specified time and frequency. After the filter element has been used for a period of time, the filtering effect will gradually decline. If it cannot be replaced in time, the air quality entering the clean workshop will not meet the requirements, thereby increasing the risk of product contamination; therefore, we propose a clean workshop for the production of gallium nitride semiconductors to solve this problem. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a clean workshop for the production of gallium nitride semiconductors to solve the problems raised in the above background art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A clean workshop for the production of gallium nitride semiconductors, comprising: a bottom plate, a workshop body is arranged on the top of the bottom plate, a sleeve is fixedly installed on the top of the workshop body, an air inlet pipe I is rotatably installed inside the sleeve, one end of the air inlet pipe I is communicated with an air inlet, a filtering component is arranged at the other end of the air inlet pipe I, and the filtering component includes; a box body, a filter element and two groups of mounting seats, a turntable is rotatably installed on one side of the box body, a handle is fixedly installed on one side of the turntable, two groups of support rods I are hinged on the other side of the turntable, one end of each of the two groups of support rods I is hinged with a support rod II, the two groups of support rods II are slidably installed inside the corresponding mounting seats, one end of each of the two groups of support rods II is fixedly installed with a connecting plate, a plug rod is fixedly installed on one side of each of the two groups of connecting plates, the two groups of plug rods are slidably installed on both sides of the box body, the two groups of plug rods are movably inserted into both sides of the filter element, the filter element is slidably installed inside the box body, a pull ring is fixedly installed on one side of the filter element, an air inlet pipe II is communicated with one side of the box body, and an air outlet pipe is communicated with one side of the air inlet pipe II.

[0007] Preferably, a circular guide rail is fixedly installed on the inner wall of the top of the factory building body, a circular rotating seat is rotatably installed inside the circular guide rail, the circular rotating seat is fixedly installed on the top of the box body, a motor is fixedly installed on one side of the air outlet pipe, and an output end of the motor is fixedly installed with a fan, and the fan is arranged inside the air outlet.

[0008] Preferably, two sets of insertion holes are formed on both sides of the filter element, and the two sets of insertion rods are movably inserted into the corresponding insertion holes.

[0009] Preferably, sliding grooves are arranged inside the two sets of mounting seats, and the two sets of second support rods are slidably installed in the corresponding sliding grooves.

[0010] Preferably, two sets of closing doors are arranged on one side of the factory building body, and a pull handle is fixedly installed on one side of each of the two sets of closing doors.

[0011] Preferably, four sets of support legs are fixedly installed on the inner wall of the bottom of the factory building body, a workbench is fixedly installed on the tops of the four sets of support legs, a plurality of monitors are arranged on the top of the workbench, and anti-slip pads are fixedly installed on the bottoms of the four sets of support legs.

[0012] In the present utility model, for the clean factory building for gallium nitride semiconductor production, by connecting the first air inlet pipe, the box body, the second air inlet pipe and the air outlet pipe, and by arranging a motor to drive a fan to rotate in the air outlet pipe, the air delivery inside the factory building body is realized, and by arranging a filter element, the filtration of the gas outside the factory building body is realized;

[0013] In the present utility model, for the clean factory building for gallium nitride semiconductor production, by arranging a circular guide rail and a circular rotating seat, while the driving force generated by the operation of the fan driven by the motor is realized, the air outlet can conduct multi-directional air delivery through the circular rotating seat and the running guide rail;

[0014] The structure of the present utility model is reasonably designed. By arranging a handle to drive a turntable to rotate, the first support rod is driven to rotate relatively, and then the second support rod is driven to slide relatively inside the mounting seat, thereby driving the connecting plate and the insertion rod to move relatively, so as to realize the fixation and unlocking of the filter element. The quick-disassembly structure makes the replacement process of the filter element rapid and efficient. During the operation of the clean factory building, the filter element needs to be regularly maintained and replaced to ensure its filtering effect. This quick-disassembly design greatly shortens the operation time, reduces the downtime of the production line, and improves the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 FIG. is a schematic three-dimensional structure diagram of a clean factory building for gallium nitride semiconductor production proposed by the present utility model;

[0016] Figure 2Schematic cross-sectional structure diagram of a clean workshop for gallium nitride semiconductor production proposed by the present utility model;

[0017] Figure 3 Partial three-dimensional structure diagram of a clean workshop for gallium nitride semiconductor production proposed by the present utility model;

[0018] Figure 4 Three-dimensional structure diagram of a filter assembly of a clean workshop for gallium nitride semiconductor production proposed by the present utility model

[0019] Figure 5 Schematic cross-sectional structure diagram of a filter assembly of a clean workshop for gallium nitride semiconductor production proposed by the present utility model

[0020] Figure 6 Schematic cross-sectional structure diagram of a motor, a fan and an air outlet pipe of a clean workshop for gallium nitride semiconductor production proposed by the present utility model.

[0021] In the figure: 1. Workshop body; 2. Air inlet; 3. Bottom plate; 4. Sealing door; 5. Sleeve; 6. Circular guide rail; 7. First intake pipe; 8. Circular rotating base; 9. Filter assembly; 901. Box body; 902. Turntable; 903. Handle; 904. First support rod; 905. Second support rod; 906. Mounting seat; 907. Connecting plate; 908. Insert rod; 909. Filter element; 910. Pull ring; 10. Second intake pipe; 11. Air outlet pipe; 12. Motor; 13. Fan; 14. Workbench; 15. Display; 16. Support leg. Specific implementation manners

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0023] Refer to Figure 1-6, A clean workshop for gallium nitride semiconductor production, comprising: a bottom plate 3, a workshop body 1 is arranged on the top of the bottom plate 3, a sleeve 5 is fixedly installed on the top of the workshop body 1, an air inlet pipe 7 is rotatably installed inside the sleeve 5, one end of the air inlet pipe 7 is communicated with an air inlet 2, and the other end of the air inlet pipe 7 is provided with a filtering component 9. The filtering component 9 includes: a box body 901, a filter element 909 and two groups of mounting seats 906. One side of the box body 901 is rotatably installed with a turntable 902, a handle 903 is fixedly installed on one side of the turntable 902, and two groups of first support rods 904 are hinged on the other side of the turntable 902. One end of each of the two groups of first support rods 904 is hinged with a second support rod 905. The two groups of second support rods 905 are slidably installed inside the corresponding mounting seats 906. One end of each of the two groups of second support rods 905 is fixedly installed with a connecting plate 907. One side of each of the two groups of connecting plates 907 is fixedly installed with an inserting rod 908. The two groups of inserting rods 908 are slidably installed on both sides of the box body 901. The two groups of inserting rods 908 are movably inserted into both sides of the filter element 909. The filter element 909 is slidably installed inside the box body 901. A pull ring 910 is fixedly installed on one side of the filter element 909. One side of the box body 901 is communicated with an air inlet pipe 10, and one side of the air inlet pipe 10 is communicated with an air outlet pipe 11.

[0024] In this embodiment, a circular guide rail 6 is fixedly installed on the inner wall of the top of the workshop body 1. A circular rotating seat 8 is rotatably installed inside the circular guide rail 6. The circular rotating seat 8 is fixedly installed on the top of the box body 901. One side of the air outlet pipe 11 is fixedly installed with a motor 12. The output end of the motor 12 is fixedly installed with a fan 13. The fan 13 is arranged inside the air outlet. The rotation of the air outlet can make the sent air more evenly distributed in the entire clean workshop space, avoiding the situation of insufficient local air supply or excessive concentration.

[0025] In this embodiment, two groups of jacks are opened on both sides of the filter element 909. The two groups of inserting rods 908 are movably inserted into the corresponding jacks. This quick-disassembly design greatly shortens the operation time, reduces the downtime of the production line, and improves the production efficiency.

[0026] In this embodiment, chutes are arranged inside the two groups of mounting seats 906. The two groups of second support rods 905 are slidably installed in the corresponding chutes. The chutes enable the second support rods 905 to flexibly move their positions according to specific working scenarios and requirements.

[0027] In this embodiment, two groups of closing doors 4 are arranged on one side of the workshop body 1. Pull handles are fixedly installed on one side of each of the two groups of closing doors 4. The closing doors 4 can effectively block pollutants such as dust, impurities, and microorganisms from the outside from entering the clean workshop, which is crucial for maintaining the high cleanliness environment required for gallium nitride semiconductor production.

[0028] In this embodiment, four sets of support legs 16 are fixedly installed on the bottom inner wall of the factory building body 1. The tops of the four sets of support legs 16 are fixedly installed with a workbench 14. Multiple monitors 15 are arranged on the top of the workbench 14. Anti-slip pads are fixedly installed at the bottoms of the four sets of support legs 16. During the production process of gallium nitride semiconductors, various small precision parts, tools, and materials may be placed on the workbench 14. The anti-slip pads can increase the friction between the items and the workbench 14, effectively preventing them from accidentally slipping, avoiding damage to the products and potential injury risks to the operators.

[0029] In this embodiment, during use, the motor 12 is started to drive the fan 13 to rotate in the air outlet pipe 11, so as to draw air into the factory building body 1 through the second air inlet pipe, the box body 901, the first air inlet pipe, and the air inlet 2. The filter screen is provided to filter the pumped air. The filter element 909 can filter out tiny particles, dust, fibers, and other pollutants in the air, ensuring that the air entering the clean factory building meets extremely high cleanliness standards. By rotating the handle 903 to drive the turntable 902 to rotate, the first support rod 904 can be driven to rotate relatively, and then the second support rod 905 can be driven to slide horizontally relatively in the mounting frame. Thus, the insertion rod 908 can be driven by the connecting plate 907 to fix and unlock the filter element 909. By pulling the pull ring 910, the filter element 909 can be detached from the box body 901, thus realizing the detachable property of the filter element 909. The first air inlet pipe 7 rotates in the sleeve 5, and the second air inlet pipe 10 is inclined. Thus, while the motor 12 drives the fan 13 to rotate and discharge air, the air outlet pipe 11 has a driving force, and thus rotates through the circular rotating seat 8 in the circular guide rail 6, thereby realizing multi-directional air supply in the factory building body 1.

[0030] The above has introduced in detail a clean factory building for the production of gallium nitride semiconductors provided by the present utility model. Specific embodiments are used in this article to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present utility model, several improvements and modifications can still be made to the present utility model, and these improvements and modifications also fall within the protection scope of the claims of the present utility model.

Claims

1. A clean workshop for the production of gallium nitride semiconductors, characterized in that, Including: A bottom plate (3), on the top of the bottom plate (3) there is a factory building body (1), on the top of the factory building body (1) there is a sleeve (5) fixedly installed, inside the sleeve (5) there is an air inlet pipe one (7) rotatably installed, one end of the air inlet pipe one (7) is communicated with an air inlet (2), the other end of the air inlet pipe one (7) is provided with a filtering component (9), the filtering component (9) includes: a box body (901), a filter element (909) and two groups of mounting seats (906), on one side of the box body (901) there is a turntable (902) rotatably installed, on one side of the turntable (902) there is a handle (903) fixedly installed, on the other side of the turntable (902) there are two groups of support rods one (904) hinged, one ends of the two groups of support rods one (904) are respectively hinged with a support rod two (905), the two groups of support rods two (905) are slidably installed inside the corresponding mounting seats (906), one ends of the two groups of support rods two (905) are respectively fixedly installed with a connecting plate (907), on one side of each of the two groups of connecting plates (907) there is a plug rod (908) fixedly installed, the two groups of plug rods (908) are slidably installed on both sides of the box body (901), the two groups of plug rods (908) are movably inserted into both sides of the filter element (909), the filter element (909) is slidably installed inside the box body (901), on one side of the filter element (909) there is a pull ring (910) fixedly installed, on one side of the box body (901) there is an air inlet pipe two (10) communicated, on one side of the air inlet pipe two (10) there is an air outlet pipe (11) communicated.

2. The clean workshop for gallium nitride semiconductor production according to claim 1, wherein On the top inner wall of the factory building body (1) there is a circular guide rail (6) fixedly installed, inside the circular guide rail (6) there is a circular rotating seat (8) rotatably installed, the circular rotating seat (8) is fixedly installed on the top of the box body (901), on one side of the air outlet pipe (11) there is a motor (12) fixedly installed, the output end of the motor (12) is fixedly installed with a fan (13), the fan (13) is arranged inside the air outlet.

3. The clean workshop for the production of gallium nitride semiconductors according to claim 1, characterized in that, On both sides of the filter element (909) there are two groups of jacks, the two groups of plug rods (908) are movably inserted into the corresponding jacks.

4. A clean workshop for gallium nitride semiconductor production according to claim 1, characterized in that, Inside the two groups of mounting seats (906) there are chutes, the two groups of support rods two (905) are slidably installed in the corresponding chutes.

5. The clean workshop for gallium nitride semiconductor production according to claim 1, wherein, On one side of the factory building body (1) there are two groups of closing doors (4), on one side of each of the two groups of closing doors (4) there is a pull handle fixedly installed.

6. The clean workshop for gallium nitride semiconductor production according to claim 1, characterized in that, On the bottom inner wall of the factory building body (1) there are four groups of support legs (16) fixedly installed, on the top of the four groups of support legs (16) there is a workbench (14) fixedly installed, on the top of the workbench (14) there are multiple groups of monitors (15), on the bottom of each of the four groups of support legs (16) there is an anti-slip pad fixedly installed.

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