Horizontal pipe type diffusion furnace maintenance tool

Abstract

The horizontal tubular diffusion furnace maintenance tool comprises a connecting rod, a wiping plate and dust-free cloth, the connecting rod is an L-shaped rod and comprises a vertical rod and a horizontal rod which are vertically connected, and the wiping plate is vertically connected to the end, away from the vertical rod, of the horizontal rod; the dust-free cloth is elastically connected to the side, away from the horizontal rod, of the wiping plate through an elastic body and completely covers the wiping plate. According to the maintenance tool for the horizontal tubular diffusion furnace, the risk of scratching the furnace tube can be effectively reduced when the furnace tube is wiped and maintained, and the wiping and maintenance effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of maintenance tooling, in particular to a maintenance tool for a horizontal tube type diffusion furnace. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line, and is mainly used for processes such as diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] When the industry performs quarterly / weekly maintenance on the furnace tube cavity of the diffusion furnace, generally, a dust-free cloth is first wound around the top of the stainless tube. After being dipped in alcohol, it is moved and wiped on the inner wall of the furnace tube. There is a problem of low work efficiency. In addition, the wound dust-free cloth is also likely to scratch the furnace tube, and in severe cases, it may even cause the scrapping of the furnace tube (the furnace tube working at high temperature will crack due to the fine cracks caused by scratching). Summary of the Utility Model

[0004] An embodiment of the present application provides a maintenance tool for a horizontal tube type diffusion furnace, which can effectively reduce the risk of scratching the furnace tube when wiping and maintaining the furnace tube.

[0005] An embodiment of the present application provides a maintenance tool for a horizontal tube type diffusion furnace, including a connecting rod, a wiping plate and a dust-free cloth. The connecting rod is an L-shaped rod, including a vertical rod and a horizontal rod that are vertically connected. The wiping plate is vertically connected to one end of the horizontal rod away from the vertical rod. The dust-free cloth is elastically connected to the side of the wiping plate away from the horizontal rod through an elastic body and completely covers the wiping plate.

[0006] In a possible implementation manner, the dust-free cloth is a single-layer structure or a multi-layer structure formed by stacking and distributing.

[0007] In a possible implementation manner, an external thread is provided at one end of the vertical rod close to the horizontal rod, and a threaded hole matching the external thread is provided on the horizontal rod.

[0008] In a possible implementation manner, the wiping plate includes a bottom plate and a pressing plate that are detachably connected. The dust-free cloth is a bag structure. After completely covering the elastic body, it is covered from the outside of the pressing plate to the inside of the pressing plate and is clamped between the bottom plate and the pressing plate.

[0009] In a possible implementation manner, top ribs are arranged on the outer surface of the bottom plate on the circumferential side close to the edge. The top ribs face the inner bag of the dust-free cloth, and pressing holes matching the top ribs are provided on the inner surface of the pressing plate.

[0010] In a possible implementation, top ribs are arranged on the inner surface of the pressing plate on the circumferential side near the edge, the top ribs face the inner bag body of the dust-free cloth, and pressing holes matching the top ribs are arranged on the outer surface of the bottom plate.

[0011] In a possible implementation, the elastic body is sponge.

[0012] In a possible implementation, the connecting rod, the bottom plate and the pressing plate are all of plastic structures, and the bottom plate and the pressing plate are connected by plastic screws.

[0013] In a possible implementation, the wiping plate is of an arc structure in the horizontal direction parallel to the horizontal rod.

[0014] In a possible implementation, a rotating handle is arranged at one end of the vertical rod far from the horizontal rod.

[0015] Beneficial effects: Compared with the prior art, the horizontal tube diffusion furnace maintenance tool provided by the present application can, by arranging an elastic body between the wiping plate and the dust-free cloth, not only make the dust-free cloth better fit on the inner wall of the furnace tube under the action of the elastic body during the process of wiping the furnace tube, ensuring the wiping and maintenance effect, but also not easily damage the furnace tube;

[0016] Wherein the dust-free cloth is of a bag structure, covering the surfaces of the elastic body and the pressing plate, and being clamped by the bottom plate and the pressing plate, which can avoid falling off during the wiping process, can further protect the furnace tube, and ensure the wiping efficiency;

[0017] Wherein the cooperation of the top ribs and the pressing holes can further improve the covering firmness of the dust-free cloth;

[0018] Wherein the connecting rod, the bottom plate and the pressing plate are all of plastic structures, which are not only light, reducing the labor intensity of wiping, but also not easily touch and damage the furnace tube, and are convenient to use.

[0019] These and other objects, features and advantages of the present utility model are fully embodied through the following detailed description. Description of the Drawings

[0020] Figure 1 The structural schematic diagram of the horizontal tube diffusion furnace maintenance tool of the present application is shown.

[0021] Figure 2 The partial structural schematic diagram of the horizontal tube diffusion furnace maintenance tool of the present application is shown.

[0022] Figure 3 The present application is shown Figure 2 of the exploded structural schematic diagram. Detailed Embodiments

[0023] The following description is used to disclose the present utility model so that those skilled in the art can implement the present utility model. The preferred embodiments in the following description are only examples, and those skilled in the art can think of other obvious variations. The basic principles of the present utility model defined in the following description can be applied to other implementation schemes, deformation schemes, improvement schemes, equivalent schemes, and other technical schemes without departing from the spirit and scope of the present utility model.

[0024] Those skilled in the art should understand that in the disclosure of the specification, the orientation or positional relationship indicated by terms such as "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on the present utility model.

[0025] It can be understood that the term "one" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in other embodiments, the number of the element can be multiple. The term "one" should not be construed as a limitation on the quantity.

[0026] Reference Figures 1 to 3 , an embodiment of the present application provides a maintenance tool for a horizontal tube diffusion furnace, including a connecting rod 10, a wiping plate 20, and a clean cloth 30. The connecting rod 10 is an L-shaped rod, including a vertical rod 11 and a horizontal rod 12 that are vertically connected. The vertical rod 11 is used for a worker to hold and rotate. In addition, in order to improve the flexibility and convenience of rotation, a rotating handle 13 is further provided at one end of the vertical rod 11 away from the horizontal rod 12. The wiping plate 20 is vertically connected to one end of the horizontal rod 11 away from the vertical rod 12. At the same time, the clean cloth 30 is elastically connected to the side of the wiping plate 20 away from the horizontal rod 12 through an elastic body 40 and completely covers the wiping plate 20. Thus, a worker can hold the vertical rod 11 and insert the horizontal rod 12 and the wiping plate 20 into the lumen of the furnace tube, and wipe and maintain the tube wall through the clean cloth 30 on the surface of the wiping plate 20. The operation is convenient. In addition, since an elastic body 40 is also clamped between the wiping plate 20 and the clean cloth 30, the clean cloth 30 can better fit on the surface of the tube wall to ensure the wiping and maintenance effect. In addition, based on the elastic action of the elastic body 40, during the wiping and maintenance process, the clean cloth 30 is not easy to damage the tube wall, and the use is safer.

[0027] The clean cloth 30 can be a single-layer structure or a multi-layer structure composed in a stacked distribution form.

[0028] In addition, the elastomer 40 is preferably implemented as a sponge, which not only has an elastic effect but also has an adsorption effect. The wiping alcohol required by the non-woven fabric 30 will penetrate into the sponge. During the wiping and maintenance process, the elastomer 40 is squeezed, and it can continuously supply the non-woven fabric 30 for use, thereby avoiding the problem that the volatilization of alcohol affects the wiping and maintenance effect.

[0029] For convenient assembly, an external thread is provided at one end of the vertical rod 11 close to the horizontal rod 12. Correspondingly, the horizontal rod 12 is provided with a threaded hole 101 that matches the external thread, so as to facilitate the quick assembly and disassembly of the connecting rod 10.

[0030] In one embodiment, the wiping plate 20 includes a detachable bottom plate 21 and a pressing plate 22. At the same time, the non-woven fabric 30 is a bag structure. After completely covering the elastomer 40, the non-woven fabric 30 is covered from the outside of the pressing plate 22 to the inside of the pressing plate 22 and is clamped between the bottom plate 21 and the pressing plate 22. Therefore, it can be firmly clamped and fixed by the bottom plate 21 and the pressing plate 22, and is not easy to fall off during the wiping and maintenance process, which can ensure the working efficiency and avoid the non-woven fabric 30 falling off and damaging the furnace tube.

[0031] In one embodiment, on the outer surface of the bottom plate 21, top ribs 211 are arranged on the circumferential side near the edge. At the same time, the top ribs 211 face the inner bag body 31 of the non-woven fabric 30. Correspondingly, on the inner surface of the pressing plate 22, there are pressing holes 201 that match the top ribs 211. In this way, after the non-woven fabric 30 is covered, on the basis of the bottom plate 21 and the pressing plate 22 clamping the non-woven fabric 30, the non-woven fabric 30 can be further firmly fixed through the cooperation of the top ribs 211 and the pressing holes 201, which can enhance the firmness of the non-woven fabric 30 and avoid the non-woven fabric 30 falling off.

[0032] In addition, the top ribs 211 can also be arranged on the inner surface of the pressing plate 22. Correspondingly, the pressing holes 201 are arranged on the outer surface of the bottom plate 21, and the effect is similar, so it will not be elaborated in detail here.

[0033] In one embodiment, the connecting rod 10, the bottom plate 21, and the pressing plate 22 are all made of plastic. And the bottom plate 21 and the pressing plate 22 are connected by plastic screws, so that the maintenance tool is lighter and more convenient to operate. In addition, the plastic structure is not easy to damage the furnace tube when touching the furnace tube.

[0034] In one embodiment, the wiping plate 20 is an arc-shaped structure, or a tile structure, in the horizontal direction parallel to the horizontal rod 12, so that the non-woven fabric 30 on the convex surface of the wiping plate 20 can better fit on the wall surface of the furnace tube, and has a large wiping area and high wiping efficiency.

[0035] Those skilled in the art should understand that the embodiments of the present utility model described above and shown in the accompanying drawings are only examples and do not limit the present utility model. The advantages of the present utility model have been fully and effectively realized. The functions and structural principles of the present utility model have been demonstrated and explained in the embodiments. Without departing from the said principles, any variations or modifications can be made to the embodiments of the present utility model.

Claims

1. Maintenance tools for horizontal tube diffusion furnaces, characterized in that, It includes a connecting rod, a wiping plate and a cleanroom cloth. The connecting rod is an L-shaped rod, including a vertical rod and a horizontal rod that are vertically connected. The wiping plate is vertically connected to one end of the horizontal rod away from the vertical rod. The cleanroom cloth is elastically connected to the side of the wiping plate away from the horizontal rod through an elastomer and completely covers the wiping plate.

2. The maintenance tool for the horizontal tube diffusion furnace according to claim 1, characterized in that The cleanroom cloth is a single-layer structure or a multi-layer structure composed in a stacked distribution form.

3. The maintenance tool for the horizontal tube diffusion furnace according to claim 1, characterized in that, An external thread is provided at one end of the vertical rod close to the horizontal rod, and a threaded hole matching the external thread is provided on the horizontal rod.

4. The maintenance tool for a horizontal tube diffusion furnace according to claim 1, wherein The wiping plate includes a detachable bottom plate and a pressing plate. The cleanroom cloth is a bag structure. After completely covering the elastomer, it is covered from the outside of the pressing plate to the inside of the pressing plate and is clamped between the bottom plate and the pressing plate.

5. The maintenance tool for a horizontal tube diffusion furnace according to claim 4, characterized in that, On the outer surface of the bottom plate, top ribs are arranged on the peripheral side close to the edge. The top ribs face the inner bag of the cleanroom cloth, and pressing holes matching the top ribs are provided on the inner surface of the pressing plate.

6. The maintenance tool for a horizontal tube diffusion furnace according to claim 4, wherein, On the inner surface of the pressing plate, top ribs are arranged on the peripheral side close to the edge. The top ribs face the inner bag of the cleanroom cloth, and pressing holes matching the top ribs are provided on the outer surface of the bottom plate.

7. The maintenance tool for the horizontal tube diffusion furnace according to claim 5 or 6, characterized in that, The elastomer is sponge.

8. The maintenance tool for a horizontal tube diffusion furnace according to claim 4, wherein The connecting rod, the bottom plate and the pressing plate are all plastic structures, and the bottom plate and the pressing plate are connected by plastic screws.

9. The maintenance tool for a horizontal tube diffusion furnace according to claim 1, wherein The wiping plate is an arc-shaped structure in the horizontal direction parallel to the horizontal rod.

10. The maintenance tool for the horizontal tube diffusion furnace according to claim 1, wherein, A rotating handle is provided at one end of the vertical rod away from the horizontal rod.

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