Aluminum material machining lower cover jig

Abstract

The utility model discloses an aluminum material machining lower cover jig which comprises a lower cover jig body, screw counterbores are formed in the periphery of the lower cover jig body in the circumferential direction, machining grooves are formed in the center point of the upper portion of the lower cover jig body and around the center point in the circumferential direction, and the machining grooves are evenly distributed in the upper portion of the lower cover jig body. Vacuum vent holes are evenly formed in the surface, extending outwards, of the machining groove in the center point, of the lower cover jig, vacuum adsorption equipment is arranged to be sealed with the first vacuum air groove and the second vacuum air groove, the vacuum equipment communicates with the vacuum vent holes and the second vacuum vent holes to adsorb the upper cover jig, and firm adsorption and fixation of an upper cover jig workpiece are achieved. The technical problems that in the prior art, a workpiece is extremely prone to falling off and is firmly clamped and fixed, the glossiness of a product machined through an upper cover jig is rough are solved, efficient machining of the workpiece of the upper cover jig is improved, the flatness of the product and the glossiness of the machined product are both improved through the sealed vacuum adsorption technology, and the product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of fixtures for processing the lower cover of aluminum materials, and particularly relates to a fixture for processing the lower cover of aluminum materials. Background Art

[0002] A wafer refers to a silicon wafer used for manufacturing silicon semiconductor integrated circuits. When performing the wafer bonding process, it is usually necessary to clamp and fix the wafer and then perform the bonding process. However, the existing wafer bonding fixtures cannot clamp the wafer comprehensively during wafer bonding. Since the wafer is very thin, it is easy to warp during clamping.

[0003] Publication (Announcement) Number: CN214353422U, discloses a positioning fixture for quartz products, including a base and a suction device. A groove adapted to the shape of the quartz product is provided on the base, and a closed space is formed between the groove and the quartz product, and this space is connected to the suction device.

[0004] In the prior art, some problems will be encountered during the processing of adsorbing this product on a vacuum chuck, specifically as follows: 1. The workpiece is extremely easy to fall off; 2. The gloss of the processed product is rough; 3. There will be a step difference in the product; 4. The working efficiency is low; 5. The flatness of the product does not meet the requirements; 6. The qualified rate of the product is only below 20%;

[0005] Therefore, a fixture for processing the lower cover of aluminum materials is needed. Summary of the Utility Model

[0006] Aiming at the problems existing in the above prior art, the utility model provides a fixture for processing the lower cover of aluminum materials, aiming to design a processing fixture that conforms to the product characteristics. Its application solves the above problems. Through connection with a vacuum chuck, the product processing becomes efficient, and the qualified rate of the product is greatly improved compared with the prior art.

[0007] To achieve the above purpose, the utility model is realized through the following technical solutions: A fixture for processing the lower cover of aluminum materials, including a lower cover fixture. Screw countersunk holes are circumferentially opened on the periphery of the lower cover fixture. Processing grooves are opened at the center point of the upper part of the lower cover fixture and circumferentially around its center point, and the processing grooves are evenly distributed on the upper part of the lower cover fixture. Vacuum vent holes are evenly opened on the surface of the lower cover fixture where the processing groove at the center point extends outward, and the vacuum vent holes are arranged around all the processing grooves. A first vacuum air groove is opened in the area of the vacuum vent holes circumferentially opened on the periphery of the lower part of the lower cover fixture, a second vacuum air groove is opened in the area of the vacuum vent holes at the center of the lower part of the lower cover fixture, and vacuum vent holes two are evenly opened on the surface of the lower cover fixture circumferentially around the processing groove at the center point.

[0008] Preferably, the area formed by surrounding the vacuum vent holes is circularly arranged.

[0009] Preferably, the vacuum vent holes are opened on the surface of the lower cover fixture between the peripherally arranged processing grooves and on the surface of the lower cover fixture between the peripherally arranged processing grooves and the processing groove at the center point.

[0010] Preferably, processing positioning posts are evenly opened on the surface of the lower cover fixture in the circumferential direction of the processing groove at the center point.

[0011] Preferably, the processing positioning posts are evenly distributed within a flat angle range with the center point of the lower cover fixture as the center of the circle.

[0012] In summary, the present utility model provides a lower cover fixture for aluminum material processing. In order to realize the vacuum adsorption and fixation of the lower cover fixture and the upper cover fixture, vacuum vent holes are evenly opened on the surface of the lower cover fixture extending outward from the processing groove at the center point, and the vacuum vent holes are surrounded by all the processing grooves. A first vacuum groove is opened in the area of the vacuum vent holes in the circumferential direction of the periphery of the lower cover fixture at its lower part, and a second vacuum groove is opened in the area of the vacuum vent holes at the center of the lower part of the lower cover fixture. Vacuum vent holes II are evenly opened on the surface of the lower cover fixture in the circumferential direction of the processing groove at the center point. Preferably, the aperture of the vacuum vent holes II is larger than the aperture of the first vacuum groove to ensure firm vacuum adsorption of the lower cover fixture and the upper cover fixture in cooperation; specifically: the vacuum adsorption device is hermetically arranged with the first vacuum groove and the second vacuum groove, and the vacuum device communicates with each vacuum vent hole and the vacuum vent holes II to adsorb the upper cover fixture, realizing firm adsorption and fixation of the upper cover fixture workpiece, solving the problems that the workpiece is extremely easy to fall off and firmly clamping and fixing in the prior art, and realizing the solution to the technical problem of the rough glossiness of the processed product of the upper cover fixture, improving the efficient processing of the upper cover fixture workpiece, the flatness of the product, and the glossiness of the processed product through the sealed vacuum adsorption technology, and obtaining the improvement of the product quality. Description of the Drawings

[0013] Figure 1 is a schematic structural diagram of the upper surface of the lower cover fixture of the present utility model;

[0014] Figure 2 is a schematic structural diagram of the lower surface of the lower cover fixture of the present utility model;

[0015] In the figure: lower cover fixture 1, screw counterbore 2, processing groove 3, vacuum vent hole 4, first vacuum groove 5, second vacuum groove 6, processing positioning post 7, vacuum vent hole II 11. Detailed Embodiments

[0016] The present utility model will be further described below with reference to the drawings.

[0017] As Figures 1 to 2 shown:

[0018] The utility model discloses a lower cover jig for processing aluminum material, comprising a lower cover jig 1, a screw countersunk hole 2 is opened in the outer circumferential direction of the lower cover jig 1, and the screw countersunk hole 2 plays the role of fixing the lower cover jig 1; a processing groove 3 is opened at the center point of the upper part of the lower cover jig 1 and in the circumferential direction around the center point, and the processing groove 3 is evenly distributed on the upper part of the lower cover jig 1, the processing groove 3 is installed in alignment with the corresponding notch of the upper cover jig, the upper cover jig is positioned and matched and installed on the lower cover jig 1, and then the upper cover jig is vacuum adsorbed on the lower cover jig 1 through vacuum adsorption, so as to firmly fix the upper cover jig, so as to realize precise processing of the flatness and glossiness of the upper cover jig, so as to ensure that in the subsequent wafer processing process, the wafer is clamped and fixed by the upper cover jig, so as to firmly fix the wafer and improve the processing accuracy of the wafer.

[0019] In order to achieve vacuum adsorption fixation of the lower cover jig 1 and the upper cover jig, the structure adopted is: vacuum vent holes 4 are evenly opened on the surface of the lower cover jig 1 extending outward from the processing groove 3 at the center point, and the vacuum vent holes 4 are surrounded and arranged around all the processing grooves 3, and the vacuum vent holes 4 are opened in the peripheral circumferential area of the lower part of the lower cover jig 1. Vacuum air grooves 1 5 are opened in the vacuum vent holes 4 area at the center of the lower part of the lower cover jig 1. Vacuum air grooves 2 6 are opened in the vacuum vent holes 4 area at the center of the lower part of the lower cover jig 1. Vacuum vent holes 2 11 are evenly opened on the surface of the lower cover jig 1 in the circumferential direction of the processing groove 3 at the center point. Preferably, the aperture of the vacuum vent holes 2 11 is larger than the vacuum air grooves The aperture of 1-5 is to ensure the firm vacuum adsorption of the lower cover jig 1 and the upper cover jig; specifically: the vacuum adsorption equipment is sealed with the vacuum air groove 1 5 and the vacuum air groove 2 6, and the vacuum equipment is connected to each vacuum vent hole 4 and the vacuum vent hole 2 11 to adsorb the upper cover jig, so as to achieve firm adsorption and fixation of the upper cover jig workpiece, solve the problem that the workpiece is very easy to fall off in the prior art, and firmly clamp and fix it, so as to solve the technical problem of rough gloss of the upper cover jig processing product, improve the efficient processing of the upper cover jig workpiece, the flatness of the product, and the gloss of the processed product are all improved through the sealed vacuum adsorption technology, so as to improve the product quality.

[0020] At least in one embodiment, in order to achieve coordination with the circumferentially distributed processing grooves 3 and the processing grooves 3 set at the center, and to provide wafer processing flatness for the subsequent use of the upper cover jig to clamp and position the wafer, the vacuum adsorption structure of the upper cover jig and the lower cover jig 1 is set as follows: the area surface enclosed by the vacuum vent holes 4 is set in a circular shape, so as to achieve vacuum sealing coordination between the lower cover jig 1 and the upper cover jig, so as to ensure that the upper cover jig workpiece is firmly fixed to the lower cover jig 1 for precision processing.

[0021] In at least one embodiment, in order to improve the vacuum adsorption and fixation of the workpiece of the upper cover fixture on the surface of the lower cover fixture 1, so as to improve the machining accuracy and avoid the problems of falling off or loosening, the vacuum ventilation holes 4 are arranged on the surface of the lower cover fixture 1 between the peripherally arranged machining grooves 3, and on the surface of the lower cover fixture 1 between the peripherally arranged machining grooves 3 and the machining grooves 3 at the center point.

[0022] In at least one embodiment, in order to improve the quick installation and vacuum adsorption and sealing fixation of the cooperation between the lower cover fixture 1 and the upper cover fixture, the structure is as follows: machining positioning posts 7 are evenly arranged on the surface of the lower cover fixture 1 in the circumferential direction of the machining groove 3 at the center point. Through the positioning of the machining positioning posts 7 and the fixing holes on the upper cover fixture, the position installation and positioning of the lower cover fixture 1 and the upper cover fixture are realized, and more stable vacuum sealing fixation is achieved.

[0023] In at least one embodiment, in order to realize the quick and accurate position installation and positioning of the lower cover fixture 1 and the upper cover fixture, it is opened in a flat angle range: specifically, the machining positioning posts 7 are evenly distributed in a flat angle range with the center point of the lower cover fixture 1 as the center of the circle.

[0024] The embodiments in the present invention are only used to illustrate the present invention and do not constitute a limitation to the scope of the claims. Other substantially equivalent alternatives that can be conceived by those skilled in the art are within the protection scope of the present invention.

Claims

1. An aluminum material processing lower cover fixture, characterized in that, The lower cover jig (1) comprises a screw countersunk hole (2) provided on the outer circumference of the lower cover jig (1), a processing groove (3) provided at the center point of the upper part of the lower cover jig (1) and in a circumferential direction around the center point, and the processing grooves (3) are evenly distributed on the upper part of the lower cover jig (1), a vacuum vent hole (4) is evenly provided on the surface of the lower cover jig (1) extending outward from the processing groove (3) at the center point, and the vacuum vent hole (4) is surrounded and arranged around all the processing grooves (3), a vacuum vent hole (1) (5) is provided in the area of the vacuum vent hole (4) provided on the outer circumference of the lower part of the lower cover jig (1), a vacuum vent hole (4) (6) is provided in the area of the vacuum vent hole (4) at the center of the lower part of the lower cover jig (1), and a vacuum vent hole (11) is evenly provided on the surface of the lower cover jig (1) in a circumferential direction around the processing groove (3) at the center point.

2. The aluminum material processing lower cover fixture according to claim 1, wherein The area enclosed by the vacuum vent holes (4) is arranged in a circular shape.

3. The aluminum material processing lower cover fixture according to claim 2, characterized in that, The vacuum vent holes (4) are provided on the surface of the lower cover jig (1) between the processing grooves (3) arranged at the periphery, and on the surface of the lower cover jig (1) between the processing grooves (3) arranged at the periphery and the processing groove (3) at the center point.

4. The aluminum material processing lower cover fixture according to claim 1, characterized in that, Machining positioning columns (7) are evenly provided on the surface of the lower cover fixture (1) in the circumferential direction of the machining groove (3) at the center point.

5. The aluminum material processing lower cover fixture according to claim 4, wherein The processing positioning columns (7) are evenly distributed in a flat angle range with the center point of the lower cover fixture (1) as the center of the circle.

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