Sealing ring mounting tool for deposition pore plate

Abstract

The utility model discloses a sealing ring mounting tool for a deposition pore plate, which is applied to the field of sealing rings of the deposition pore plate and comprises a supporting component, a clamping component and a clamping component. The rolling shaft is mounted at one end of the supporting component; the pressing part moves relative to the sealing ring under the acting force of an operator and presses the sealing ring into the groove, and the pressing part is assembled on the rolling shaft and is rotationally arranged relative to the rolling shaft, or the rolling shaft is rotationally arranged relative to the supporting part; and the hooking component is installed at the end, away from the rolling shaft, of the supporting component, and the end, away from the supporting component, of the hooking component is provided with a tip used for hooking the sealing ring. According to the sealing ring installation tool for the deposition pore plate, the sealing ring does not need to be manually pressed, and harm to operators is reduced; and the old sealing ring can be pulled out of the groove more easily by adopting the acting force of the tip end, the efficiency is high, and the operation is convenient.

Description

Technical Field

[0001] The utility model relates to the field of sealing ring installation equipment for a deposition orifice plate, in particular to a sealing ring installation tool for a deposition orifice plate. Background Art

[0002] In photovoltaic cell factories, plate-type ion deposition equipment has large production capacity, low production material loss, and low energy consumption, and is favored by the majority of photovoltaic cell factories and bases.

[0003] Since each plate-type ion precipitation machine needs maintenance after about 30 days of production, 60-120 panels need to be disassembled at a time, and sealing rings need to be installed on the panels. At present, the sealing rings are generally installed manually. Since each plate-type ion precipitation equipment machine needs 60-120 panels to be disassembled at a time, the manual installation of sealing rings is time-consuming and labor-intensive, and operators are often injured; in addition, due to the large number of machines in each workshop, each machine is maintained once every 30 days, and the operators are affected by the human efficiency, resulting in the inability to guarantee the progress.

[0004] Therefore, how to improve the efficiency of sealing ring installation is a technical problem that technical personnel in this field currently need to solve. Utility Model Content

[0005] The utility model aims to provide a sealing ring installation tool for a sedimentation orifice plate, which can effectively save manpower and material resources, improve the installation efficiency of the sealing ring, and reduce costs.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A sealing ring installation tool for a deposition orifice plate, used for installing the sealing ring in a groove of the deposition orifice plate; comprising:

[0008] Support components for the operator to hold;

[0009] A roller, mounted at one end of the supporting member;

[0010] A pressing component, under the force of an operator, the pressing component moves relative to the sealing ring and presses the sealing ring into the groove, wherein the pressing component is assembled on the roller, the pressing component is rotatably arranged relative to the roller, or the roller is rotatably arranged relative to the supporting component;

[0011] The hooking component is installed at one end of the supporting component away from the roller, and the end of the hooking component away from the supporting component is provided with a tip for hooking the sealing ring.

[0012] On the other hand, the support member includes a handle and a bracket. The bracket is connected to one end of the handle, the hooking member is connected to the other end of the handle, and the roller is mounted on the bracket.

[0013] On the other hand, the bracket is U-shaped. Both ends of the roller are respectively connected to the two legs of the bracket, and the handle is connected to the bottom of the bracket.

[0014] On the other hand, both the handle and the bracket are metal parts, and the pressing member is a rubber part; and / or,

[0015] The pressing member is provided with a plurality of protrusions. The protrusions surround the circumference of the pressing member, and the width of the protrusions is not greater than the width of the groove so as to enter the groove and press the sealing ring.

[0016] On the other hand, the pressing member is detachably connected to the roller;

[0017] and / or, the roller is detachably connected to the support member.

[0018] On the other hand, the support member is provided with a counterbore and a through hole for mounting the roller. One end of the roller is provided with a step, and the step is inserted into the counterbore. After the roller passes through the through hole, it is screwed with a nut or radially inserted with a pin. The nut or the pin shaft is located outside the support member;

[0019] Or,

[0020] The support member is provided with a first hole and a second hole for the roller to pass through. One end of the roller passes through the first hole and is screwed with a nut or radially inserted with a pin shaft. The other end of the roller passes through the second hole and is screwed with a nut or radially inserted with a pin shaft; the nut or the pin is located outside the support member;

[0021] Or,

[0022] The support member is provided with a first hole and a second hole for the roller to pass through; one end of the roller is provided with an abutting portion. After the other end of the roller passes through the first hole and the second hole in sequence, it is screwed with a nut or radially inserted with a pin shaft; the nut or the pin is located outside the support member.

[0023] On the other hand, it further includes:

[0024] A bearing. The inner ring of the bearing is sleeved on the roller, the pressing member is sleeved on the outer ring of the bearing, and the pressing member is detachably connected to the bearing;

[0025] Or,

[0026] A bearing, which is sleeved between the roller shaft and the support member.

[0027] On the other hand, one end of the hooking member away from the tip is screwed to the support member.

[0028] On the other hand, the hooking member includes a hooking body and a tip member. Both the hooking body and the tip member are metal parts. One end of the hooking body is fixedly connected to the support member, and the other end is detachably connected to the tip member.

[0029] On the other hand, it further includes a housing, which is detachably connected to the support member. There is a cavity inside the housing, and the housing covers the outside of the hooking member; there is also an anti-detachment rope between the housing and the support member.

[0030] The sealing ring installation tooling for a deposition orifice plate provided by the present utility model is used to install a sealing ring in a groove of the deposition orifice plate; it includes: a support member for an operator to hold; a roller shaft installed at one end of the support member; a pressing member, under the action of the operator's force, the pressing member moves relative to the sealing ring and presses the sealing ring into the groove. Among them, the pressing member is assembled on the roller shaft, and the pressing member is rotatably arranged relative to the roller shaft, or the roller shaft is rotatably arranged relative to the support member; a hooking member installed at the end of the support member away from the roller shaft, and a tip for hooking the sealing ring is provided at one end of the hooking member away from the support member. The sealing ring installation tooling for a deposition orifice plate provided by the present utility model, through the setting of the support member, can facilitate the operator to hold. By installing the roller shaft at one end of the support member, the pressing member is installed on the roller shaft, and the pressing member can rotate relative to the roller shaft, or the roller shaft can rotate relative to the support member; when installing the sealing ring, only need to place the sealing ring on the surface of the groove of the deposition orifice plate, and then move the pressing member close to the sealing ring. By moving the support member, the pressing member can be driven to rotate, and the protrusions on the pressing member enter the grooves of the deposition orifice plate one by one, pressing and filling the sealing ring, and the sealing ring can be quickly installed into the groove of the deposition orifice plate; moreover, through the setting of the hooking member, after disassembling the deposition orifice plate, the old sealing ring in the groove of the deposition orifice plate can be removed by the tip in the hooking member, without manually pressing the sealing ring by hand, reducing the harm to the operator; at the same time, in order to facilitate the quick removal of the old sealing ring, a tip for hooking the sealing ring is provided on the hooking member. By using the acting force of the tip and inserting it into the old sealing ring, the old sealing ring can be more easily pulled out from the groove, with high efficiency and convenient operation. Description of the Drawings

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0032] Figure 1 It is a schematic structural diagram of the deposition orifice plate applied to the tooling provided by the present invention.

[0033] Figure 2 It is a schematic structural diagram of a specific embodiment of the sealing ring installation tooling for the deposition orifice plate provided by the present invention;

[0034] Figure 3 It is a front view of a specific embodiment of the sealing ring installation tooling for the deposition orifice plate provided by the present invention;

[0035] Figure 4 It is a front view of another specific embodiment of the sealing ring installation tooling for the deposition orifice plate provided by the present invention;

[0036] Figure 5 It is a front view of a third specific embodiment of the sealing ring installation tooling for the deposition orifice plate provided by the present invention;

[0037] Figure 6 It is a front view of a fourth specific embodiment of the sealing ring installation tooling for the deposition orifice plate provided by the present invention;

[0038] Reference numerals:

[0039] Deposition orifice plate 01; groove 02; deposition hole 03;

[0040] Support member 1; handle 11; bracket 12; connecting platform 13; roller 2; nut 21; pressing member 3; protrusion 31; hooking member 4; tip member 41; housing 5; anti-detachment rope 51. Specific embodiments

[0041] The core of the present invention is to provide a sealing ring installation tooling for a deposition orifice plate, which can facilitate the installation of the sealing ring on the deposition orifice plate, improve efficiency, and ensure progress.

[0042] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0043] In this embodiment, the sealing ring installation tooling for the deposition orifice plate is used to install the sealing ring in the groove 02 of the deposition orifice plate 01. As Figure 1 shown, a number of deposition holes 03 are provided on the deposition orifice plate 01, and grooves 02 are arranged between some of the deposition holes 03. The grooves 02 are waist-shaped or rectangular, and the sealing ring is sleeved on the grooves 02.

[0044] As Figure 2 shown, the sealing ring installation tooling for the deposition orifice plate includes:

[0045] A support member 1 for the operator to hold. The operator can be a person or a machine, and it is only necessary to be able to pick up and move the support member 1;

[0046] A roller 2 is installed at one end of the support member 1;

[0047] A pressing member 3 moves relative to the sealing ring under the action of the operator's force and presses the sealing ring into the groove 02. Among them, the pressing member 3 is assembled on the roller 2, and the pressing member 3 is rotatably arranged relative to the roller 2, or the roller 2 is rotatably arranged relative to the support member 1;

[0048] A hooking member 4 is installed at the end of the support member 1 away from the roller 2. A tip for hooking the sealing ring is provided at the end of the hooking member 4 away from the support member 1; in practical applications, the hooking member 4 can be a hook type or a straight thorn type, and any structure that can conveniently hook out the sealing ring is acceptable.

[0049] Since the sealing ring around the deposition orifice plate 01 needs to be replaced regularly, but the installation of the sealing ring is difficult. By manually pressing, the efficiency is low and the hand is easily injured. By using this tooling, it replaces manual pressing of the sealing ring, with high efficiency and not easily injured. For the pressing action of the sealing ring, it can be achieved by relying on the protrusions 31 on the pressing component 3. Specifically, the protrusions 31 on the pressing component 3 can be machined by mechanical processing or formed by integral casting. The pressing component 3 is preferably made of a material with a certain elastic deformation ability, such as rubber. Due to the good elasticity of rubber, it can better abut against the sealing ring and is not easy to damage the sealing ring, ensuring the service life of the sealing ring. The width of the protrusion 31 can be slightly smaller than the width of the groove 02, allowing the protrusion 31 to be placed into the groove 02. The pressing component 3 is detachably connected to the roller 2, and different types of pressing components 3 can be replaced. For example, the distance between adjacent protrusions 31 is larger or smaller, the number of protrusions 31 is different, and the material and size of the pressing component 3 are different, etc. According to the size and position of the groove 02 on the deposition orifice plate 01, a matching pressing component 3 can be selected to improve the scope of application. When the roller 2 is detachably connected to the pressing component 3, only the pressing component 3 needs to be replaced. When the roller 2 is fixedly connected to the pressing component 3 and the roller 2 is detachably connected to the support component 1, only the roller 2 needs to be replaced. The hook component 4 and the support component 1 can be detachably connected or fixedly connected. When the hook component 4 and the support component 1 are detachably connected, the hook component 4 needs to be disassembled and assembled as required. When the hook component 4 and the support component 1 are fixedly connected, protective operations should be set to avoid the hook component 4 from causing harm to the operator.

[0050] The sealing ring installation tooling for the deposition orifice plate provided by the present utility model, through the setting of the support component 1, can facilitate the operator to hold. By installing the roller 2 at one end of the support component 1, a pressing component 3 is installed on the roller 2, and the pressing component 3 can rotate relative to the roller 2, or the roller 2 can rotate relative to the support component 1. When installing the sealing ring, only need to place the sealing ring on the surface of the groove 02 of the deposition orifice plate 01, and then bring the pressing component 3 close to the sealing ring. By moving the support component 1, the pressing component 3 can be driven to rotate, and the protrusions 31 on the pressing component 3 enter the grooves 02 of the deposition orifice plate 01 one by one, pressing and filling the sealing ring, and the sealing ring can be quickly installed into the groove 02 of the deposition orifice plate 01. And, through the setting of the hook component 4, after the deposition orifice plate 01 is disassembled, the old sealing ring in the groove 02 of the deposition orifice plate 01 can be removed by the tip in the hook component 4, without manually pressing the sealing ring by hand, reducing the harm to the operator. At the same time, in order to facilitate the quick removal of the old sealing ring, by using the acting force of the tip component 41 and inserting it into the old sealing ring, it is easier to pull the old sealing ring out of the groove 02, with high efficiency and convenient operation.

[0051] In some embodiments, the support member 1 includes a handle 11 and a bracket 12. The bracket 12 is connected to one end of the handle 11, the hooking member 4 is connected to the other end of the handle 11, and the roller 2 is mounted on the bracket 12. Specifically, the handle 11 may be provided with concave-convex portions or patterned portions to increase friction and facilitate gripping; the handle 11 may have a cylindrical structure, and the first diameter of the handle 11 is greater than that of the other end, and the diameter of the handle 11 gradually transitions from one end to the other end. The end of the handle 11 with a larger diameter is connected to the bracket 12. Such a setting is to improve the connection stability between the handle 11 and the bracket 12; the roller 2 is mounted on the bracket 12 and can be rotatably mounted on the bracket 12 through a bearing or fixed on the bracket 12 through a fastener. The fastener may be a bolt and a nut 21.

[0052] In some embodiments, the bracket 12 is U-shaped, both ends of the roller 2 are connected to the two legs of the bracket 12 respectively, and the handle 11 is connected to the bottom of the bracket 12. Specifically, the U-shaped bracket 12 provides sufficient space for the installation of the roller 2 and the rotation of the pressing member 3. The handle 11 is connected to the middle position of the bottom of the bracket 12 to ensure stability.

[0053] In some embodiments, both the handle 11 and the bracket 12 are metal parts, and the handle 11 and the bracket 12 are fixed by welding, which is convenient for operation and has high connection strength. Specifically, both the handle 11 and the bracket 12 may be alloy parts with a long service life. Of course, other structural parts with sufficient strength, such as plastic parts, may also be selected.

[0054] In some embodiments, the pressing member 3 is a rubber part, which reduces damage to the sealing ring, has a low hardness, and has a higher pressing effect on the sealing ring.

[0055] In some embodiments, a plurality of protrusions 31 are provided on the pressing member 3. The protrusions 31 surround the circumference of the pressing member 3. The width of the protrusions 31 is adapted to the width of the groove 02 to enter the groove 02 and press the sealing ring. Through the setting of the protrusions 31, on the one hand, the efficiency of pressing the sealing ring into the groove 02 can be improved, and on the other hand, it can be applicable to the scenario where the depth of the groove 02 is greater than the cross-sectional diameter of the sealing ring, thereby increasing the applicable range.

[0056] In some embodiments, the pressing member 3 is detachably connected to the roller 2; through the detachable connection between the pressing member 3 and the roller 2, different models of the pressing member 3 can be replaced, thereby increasing the applicable range. Also, a new pressing member 3 can be replaced after the protrusions 31 on the pressing member 3 are worn.

[0057] In some embodiments, the roller 2 is detachably connected to the support member 1. The detachable connection between the roller 2 and the support member 1 facilitates assembly. The pressing member 3 can be a rubber member, a plastic member, or alternatively, the main body of the pressing member 3 can be made of metal, and the protrusion 31 can be made of rubber or plastic. This arrangement can improve the overall lifespan of the pressing member 3. In one example, the pressing member 3 is fixedly connected to the roller 2. A plurality of annular grooves 02 are provided axially on the pressing member 3. There are also a plurality of annular collars, which can be made of rubber. The annular collars are sleeved on the annular grooves 02, and a part of the annular collars protrudes from the surface of the annular grooves 02 to form the protrusions 31. When the annular collars are worn, only the annular collars need to be replaced, without replacing the main part of the pressing member 3, further reducing the cost. It should be noted here that at least one end of the roller 2 can be separated from the bracket 12, creating a certain distance between the roller 2 and the bracket 12 for the disassembly of the pressing member 3 or the annular collars.

[0058] Specifically, as Figures 3 to 5 shown, the dimensions of the pressing member 3 can be different, the spacing between the protrusions 31 on the pressing member 3 can be different, or alternatively, on the same roller 2, two or more pressing members 3 can be installed to use different types of deposition orifice plates 01.

[0059] In some embodiments, the support member 1 is provided with a counterbore and a through-hole for installing the roller 2. One end of the roller 2 is provided with a step, which is inserted into the counterbore. After the roller passes through the through-hole, it is screwed with a nut 21 or a pin is inserted radially. The nut or the pin shaft is located outside the support member 1. At this time, if the roller 2 is rotatably arranged with the support member 1, the step is movably inserted and abuts against the counterbore, and the nut fits against the support member 1 (there can also be a certain gap between the two, but it cannot be greater than the size of the step extending into the counterbore to prevent the roller 2 from falling off the support member 1); if the roller 2 is fixedly installed on the support member 1 and the pressing member 3 rolls on the roller 2, the nut abuts against the support member 1 to prevent the roller 2 from rotating.

[0060] In some embodiments, the support member 1 is provided with a first hole and a second hole through which the roller 2 passes. One end of the roller 2 passes through the first hole and is screwed with a nut 21 or a pin is inserted radially. The other end of the roller 2 passes through the second hole and is screwed with a nut 21 or a pin is inserted radially. The nut 21 or the pin is located outside the support member 1. Both the first hole and the second hole are through-holes. The roller 2 can be disassembled from either the first hole or the second hole, making disassembly and assembly more convenient. Moreover, if the roller 2 is rotatably arranged with the support member 1, the nut 21 or the pin can fit against the support member 1 with a certain gap to facilitate the rotation of the roller 2; if the roller 2 is fixedly installed on the support member 1 and the pressing member 3 rolls on the roller 2, the nut 21 or the pin can abut against the support member 1 to prevent the roller 2 from rotating.

[0061] In some embodiments, the support member 1 is provided with a first hole and a second hole through which the roller 2 passes; one end of the roller 2 is provided with an abutting portion, and the other end of the roller 2 passes through the first hole and the second hole in sequence and is screwed with a nut 21 or a pin is radially inserted; the nut 21 or the pin is located outside the support member 1; specifically, the roller 2 can directly adopt a screw rod, which is convenient for obtaining materials. Moreover, if the roller 2 is rotatably arranged with the support member 1, the nut 21 or the pin fits against the support member 1 and can have a certain gap to facilitate the rotation of the roller 2; if the roller 2 is fixedly installed on the support member 1 and the pressing member 3 is rotatably arranged on the roller 2, the nut 21 or the pin can abut against the support member 1 to prevent the roller 2 from rotating.

[0062] In some embodiments, the support member 1 is provided with a first hole and a second hole through which the roller 2 passes, and the first hole and the second hole are respectively located at both ends of the roller 2; one end of the roller 2 is provided with a step, and the step is clamped with the first hole, and the other end of the roller 2 is provided with an external thread for connecting the nut 21, and the nut 21 is clamped with the second hole. Specifically, the first hole and the second hole are respectively located on two legs of the U-shaped bracket 12, preferably at the outer ends of the two legs of the U-shaped bracket 12. The roller 2 can be a screw rod, and through cooperation with the nut 21, the assembly and disassembly of the roller 2 and the support member 1 can be realized, and the operation is convenient. Of course, external threads for connecting the nut 21 can also be provided at both ends of the roller 2, and both ends of the roller 2 can be disassembled.

[0063] In some embodiments, a bearing is further included. The inner ring of the bearing is sleeved on the roller 2, the pressing member 3 is sleeved on the outer ring of the bearing, and the pressing member 3 is detachably connected to the bearing. Specifically, through the arrangement of the bearing, the size of the pressing member 3 can be reduced and the cost can be reduced. Specifically, after the bearing is installed, the pressing member 3 can be sleeved on the outer ring of the bearing, and the operation is convenient. Through the arrangement of the bearing, the rotation of the pressing member 3 is more flexible and the use is more convenient.

[0064] In some embodiments, one end of the hooking member 4 away from the tip is screwed to the supporting member 1, that is, the hooking member 4 and the supporting member 1 can be connected by matching an internal thread with an external thread. Specifically, a connecting post is provided at one end of the hooking member 4 away from the tip, an external thread is provided on the connecting post, and a threaded hole is provided on the supporting member 1. The external thread of the connecting post is adapted to the threaded hole of the supporting member 1. Specifically, through the arrangement of the connecting post and the threaded hole, the detachable connection between the hooking member 4 and the supporting member 1 is realized, and the hooking member 4 can be disassembled and assembled as needed; with the above arrangement, after the deposition orifice plate 01 is removed from the plate-type ion deposition device, the hooking member 4 is installed on the supporting member 1, and then all the old sealing rings on the deposition orifice plate 01 are taken out by using the hooking member 4, and then the hooking member 4 is disassembled from the supporting member 1, and a new sealing ring can be installed. At this time, since the hooking member 4 has been disassembled from the supporting member 1, it will not cause harm to the operator and is safer to use.

[0065] In some embodiments, the hooking member 4 includes a hooking main body and a tip member 41. Both the hooking main body and the tip member 41 are metal parts. One end of the hooking main body is fixedly connected to the supporting member 1, and the other end is detachably connected to the tip member 41. With such an arrangement, the tip member 41 can be processed with a material having a higher hardness, a greater strength, and a higher cost, and other structural parts, such as the hooking main body, can be processed with a material having a lower cost, thereby reducing the overall consumable cost.

[0066] In some embodiments, as Figure 6 shown, it further includes a housing 5. The housing 5 is detachably connected to the supporting member 1. A cavity is provided inside the housing 5, and the housing 5 covers the outside of the hooking member 4; an anti-detachment rope 51 is further provided between the housing 5 and the supporting member 1. When the hooking member 4 and the supporting member 1 are not detachably connected, in order to ensure the safety of the operator, the housing 5 can be provided to protect the hooking member 4, and the anti-detachment rope 51 is further provided between the housing 5 and the supporting member 1 to prevent the housing 5 from being lost after being disassembled. The housing 5 and the supporting member 1 can be connected by threads or inserted, and any structure that can ensure the stable installation of the housing 5 on the supporting member 1 is acceptable; further, in order to facilitate the installation of the housing 5, a connecting platform 13 is provided on the supporting member 1. The connecting platform 13 is located on the handle 11, and the housing 5 and the connecting platform 13 can be assembled by threaded connection.

[0067] In a specific embodiment, a roller 2 and a pressing member 3 for pressing a new sealing ring to the outer peripheral side of the deposition orifice plate 01 are installed at one end of a handle 11 of the sealing ring installation tooling for the deposition orifice plate. The pressing member 3 includes a bearing and a rubber sheath. The rubber sheath is sleeved on the outer side of the bearing, and the bearing is installed on the roller 2, so that the rubber sheath can be rotatably installed on the roller 2; alternatively, the rubber sheath is directly sleeved on the roller 2, and the roller 2 is rotatably installed on a bracket 12 through a bearing or directly, and the rotation of the roller 2 drives the rubber sheath to rotate; or, the rubber sheath is detachably installed on a pressing main body of the pressing member 3, that is, the pressing member 3 includes a pressing main body and a pressing sleeve, and the pressing sleeve can be a rubber sheath and is sleeved on the surface of the pressing main body. In this way, the service life of the product can be extended by replacing the rubber sheath, saving costs; in addition, a hooking member 4, such as a removal hook, is provided at the other end of the handle 11 for hooking out the old sealing ring to be replaced, without manual picking, with high efficiency and safety; the removal hook is detachably assembled and disassembled on the handle 11, such as by plugging or thread connection; it can also be covered by a housing 5 to prevent the removal hook from accidentally injuring people. At this time, the removal hook is preferably fixedly installed on the handle 11, and the housing 5 is installed on the handle 11 by plugging or threading.

[0068] The sealing ring installation tooling for the deposition orifice plate facilitates the current manual installation, greatly improves the manual installation efficiency, can save 80%-90% of the labor cost, and effectively improves the safety and installation speed of the operator.

[0069] In addition to the above-mentioned sealing ring installation tooling for the deposition orifice plate, the present invention also provides a plate-type ion deposition device including the above-mentioned sealing ring installation tooling for the deposition orifice plate. For the structures of other parts of the plate-type ion deposition device, reference can be made to the prior art and will not be elaborated herein.

[0070] In this specification, the various embodiments are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts among the various embodiments can be referred to each other.

[0071] The above has introduced in detail the sealing ring installation tooling for the deposition orifice plate provided by the present invention. Specific examples are used herein to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. A sealing ring installation tool for a deposition orifice plate, which is used to install a sealing ring in a groove (02) of the deposition orifice plate (01); characterized in that, include: A support component (1) for an operator to hold; A roller (2) mounted on one end of the supporting component (1); a pressing component (3), wherein under the force of an operator, the pressing component (3) moves relative to the sealing ring and presses the sealing ring into the groove (02), wherein the pressing component (3) is mounted on the roller (2), the pressing component (3) is rotatably arranged relative to the roller (2), or the roller (2) is rotatably arranged relative to the supporting component (1); The hooking component (4) is mounted on an end of the supporting component (1) away from the roller (2), and the end of the hooking component (4) away from the supporting component (1) is provided with a tip for hooking the sealing ring.

2. The installation tooling for the sealing ring of the deposition orifice plate according to claim 1, characterized in that The support component (1) comprises a handle (11) and a bracket (12), the bracket (12) being connected to one end of the handle (11), the hook component (4) being connected to the other end of the handle (11), and the roller (2) being mounted on the bracket (12).

3. The sealing ring installation tooling for the deposition orifice plate according to claim 2, characterized in that, The bracket (12) is U-shaped, the two ends of the roller (2) are respectively connected to the two legs of the bracket (12), and the handle (11) is connected to the bottom of the bracket (12).

4. The installation tooling for the sealing ring of the deposition orifice plate according to claim 2, characterized in that, The handle (11) and the bracket (12) are both metal parts, and the pressing component (3) is a rubber component; and / or, The pressing component (3) is provided with a plurality of protrusions (31), the protrusions (31) surround the pressing component (3) along the circumference, and the width of the protrusions (31) is not greater than the width of the groove (02) so as to enter the groove (02) and press the sealing ring.

5. The seal ring installation tooling for the deposition orifice plate according to any one of claims 1 to 4, characterized in that, The pressing component (3) is detachably connected to the roller (2); And / or, the roller (2) is detachably connected to the supporting component (1).

6. The installation tooling for the sealing ring of the deposition orifice plate according to claim 5, characterized in that, The support component (1) is provided with a countersunk hole and a through hole for mounting the roller (2); one end of the roller (2) is provided with a step, the step is inserted into the countersunk hole; the roller passes through the through hole and is screwed to a nut (21) or radially inserted with a pin; the nut or pin is located outside the support component (1); or, The support component (1) is provided with a first hole and a second hole for the roller (2) to pass through; one end of the roller (2) passes through the first hole and is screwed to a nut (21) or is radially inserted with a pin; the other end of the roller (2) passes through the second hole and is screwed to a nut (21) or is radially inserted with a pin; the nut (21) or the pin is located outside the support component (1); or, The support component (1) is provided with a first hole and a second hole for the roller (2) to pass through; one end of the roller (2) is provided with an abutment portion, and the other end of the roller (2) passes through the first hole and the second hole in sequence and is then screwed to a nut (21) or radially inserted with a pin; the nut (21) or the pin is located outside the support component (1).

7. The installation tooling for the sealing ring of the deposition orifice plate according to claim 6, characterized in that, Also includes: A bearing, an inner ring of the bearing is sleeved on the roller (2), the pressing member (3) is sleeved on an outer ring of the bearing, and the pressing member (3) is detachably connected to the bearing; Or, A bearing, the bearing is sleeved between the roller (2) and the supporting member (1).

8. The installation tooling for the sealing ring of the deposition orifice plate according to any one of claims 1 to 4, characterized in that One end of the hooking member (4) away from the tip is screwed to the supporting member (1).

9. The installation tooling for the sealing ring of the deposition orifice plate according to any one of claims 1 to 4, characterized in that The hooking member (4) includes a hooking main body and a tip member (41), both the hooking main body and the tip member (41) are metal parts, one end of the hooking main body is fixedly connected to the supporting member (1), and the other end is detachably connected to the tip member (41).

10. The installation tooling for the sealing ring of the deposition orifice plate according to any one of claims 1 to 4, characterized in that, It further includes a housing (5), the housing (5) is detachably connected to the supporting member (1), a cavity is provided in the housing (5), and the housing (5) covers the outside of the hooking member (4); an anti-detachment rope (51) is further provided between the housing (5) and the supporting member (1).

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