Multi-degree-of-freedom high-precision adjusting device
By designing a multi-degree of freedom high-precision adjustment device in the production of display panels, using elastic fulcrum and lifting components to drive the micro-moving stage to adjust in the X/Y direction, combined with the rotation and lifting drive modules, the problem of insufficient freedom in the prior art is solved, and high-precision multi-degree of freedom movement is achieved.
Patent Information
- Application Number
- CN202422041869.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-08-21
AI Technical Summary
During the production process of existing display panels, the linear displacement and rotation angle of the adjustment mechanism on the X/Y/Z axis are insufficient to meet the needs of high-precision adjustment, especially in other directions, the degree of freedom adjustment integration is less.
A multi-degree of freedom high-precision adjustment device is designed. By setting an elastic fulcrum between the protruding parts in the X direction and the Y direction of the carrier plate, and using the lifting component to drive the protruding parts up and down, the micro-moving stage elastically deforms in the X and Y directions, and combining the rotary driving module and the lifting driving module, high-precision movement of multiple degrees of freedom is achieved.
It realizes multi-degree of freedom movement with high precision and high load, has a compact structure and small space occupancy, which can meet the high-precision adjustment requirements for display panel production.
Smart Images
Figure CN223147094U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of display panel production, and particularly relates to a multi-degree-of-freedom high-precision adjustment device. Background Art
[0002] With the development and progress of technology and the diversification of consumer demands, the technology and performance of display panels are also constantly developing and improving. Among them, during the production, detection, and installation of display panels, the adjustment mechanism plays an important role. By precisely adjusting the position and angle of the product, it ensures the accuracy and reliability of detection and assembly.
[0003] Currently, the existing adjustment mechanisms generally only involve linear displacement adjustment of the X / Y / Z axes and rotational angle adjustment around the Z axis, with less integration of degrees of freedom adjustment in other directions and lower adjustment accuracy, unable to meet the requirements of high-precision adjustment in the current display panel production. Summary of the Utility Model
[0004] In view of one or more of the above defects or improvement requirements of the prior art, the utility model provides a multi-degree-of-freedom high-precision adjustment device, which can achieve high-precision movement in multiple degrees of freedom.
[0005] To achieve the above object, the utility model provides a multi-degree-of-freedom high-precision adjustment device, which includes a base plate, a micro-stage, and an angle adjustment module;
[0006] The micro-stage includes at least two layers of bearing plates arranged at intervals up and down. The bearing plate includes a bearing part and protruding parts connected to both ends in the X direction and both ends in the Y direction of the bearing part;
[0007] The angle adjustment module includes elastic fulcrums and lifting components; two adjacent protruding parts in at least one direction are connected by elastic fulcrums, and elastic fulcrums are arranged at both ends of the micro-stage in the X direction and the Y direction; there are two lifting components, one lifting component corresponds to the elastic fulcrum at one end of the micro-stage in the X direction, and the other lifting component corresponds to the elastic fulcrum at one end of the micro-stage in the Y direction. The power output ends of the lifting components are connected to the protruding parts close to the base plate among the protruding parts at both ends of the corresponding elastic fulcrum. Under the action of the lifting components, the protruding parts connected to them move up and down, causing the corresponding elastic fulcrums to undergo elastic deformation, and changing the levelness of the micro-stage in the X direction and the Y direction.
[0008] As a further improvement of the utility model, the micro-stage includes three layers of bearing plates arranged at intervals up and down, which are, from the side close to the base plate upwards, the first bearing plate, the second bearing plate, and the third bearing plate;
[0009] A first elastic fulcrum is arranged between the protrusions at both ends of the first bearing plate and the second bearing plate in the X direction, and one of the lifting components is connected to the protrusion at one end of the first bearing plate in the X direction; a second elastic fulcrum is arranged between the protrusions at both ends of the second bearing plate and the third bearing plate in the Y direction, and another lifting component passes through the first bearing plate and is connected to the protrusion at one end of the second bearing plate in the Y direction.
[0010] As a further improvement of the present invention, the bearing plates are all made of elastic material and are integrally arranged with the elastic fulcrum;
[0011] The first elastic fulcrum is in an eight-shaped shape and extends continuously along the X direction; the second elastic fulcrum is in an inverted eight-shaped shape and extends continuously along the Y direction.
[0012] As a further improvement of the utility model, it further comprises a rotation drive module and a lifting drive module, so that the rotation drive module drives the micro-motion table to rotate along its own axis, and the lifting drive module drives the micro-motion table to perform lifting motion.
[0013] As a further improvement of the present invention, the lifting drive module includes a voice coil motor and a lifting encoder, one end of the voice coil motor is fixed on the base plate, and the other end is connected to the micro-motion stage as an output end, so as to drive the micro-motion stage to perform lifting movement through the voice coil motor, and monitor and feedback the lifting position of the micro-motion stage through the lifting encoder.
[0014] As a further improvement of the utility model, a plurality of adsorption holes are opened on the top of the bearing part of the bearing plate on the side of the micro-motion table away from the bottom plate, and an adsorption cavity is arranged inside the bearing part, and the adsorption cavity is connected with the adsorption holes to adsorb the product to be processed on the bearing part by negative pressure adsorption.
[0015] As a further improvement of the utility model, it also includes a guide module, and the guide module includes a moving shaft and an air flotation block;
[0016] The moving shaft is mounted on the lifting drive module and can rotate along its own axis. The micro-movement platform is coaxially mounted on the top of the moving shaft. The lifting assembly is mounted on the side wall of the moving shaft.
[0017] The air floating block is installed on the bottom plate, and a plurality of air floating blocks are arranged at intervals along the outer circumference of the moving shaft, and are distributed in an annular manner staggered with the protrusions of the micro-motion stage; a gap is arranged between the air floating block and the moving shaft, so that an air film is formed by passing gas into the gap, and the rotation and lifting movement of the micro-motion stage are guided by the force of the air film.
[0018] As a further improvement of the utility model, the side of the air floating block facing the moving shaft is an arc-shaped surface matching the outer peripheral wall of the moving shaft to ensure the uniformity of the air film force in the gap.
[0019] As a further improvement of the utility model, a first magnet is arranged on the side of the air floating block facing the base plate, and a second magnet is arranged on the side of the moving shaft away from the base plate; the first magnet and the second magnet are arranged at intervals up and down to balance the dead weight of the micro-motion table and the moving shaft through the attraction or repulsion between the first magnet and the second magnet.
[0020] As a further improvement of the utility model, a shell is provided on the outer periphery of the moving shaft, and the shell is fixedly connected to the moving shaft.
[0021] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.
[0022] In general, compared with the prior art, the above technical solutions conceived by the utility model have the following beneficial effects:
[0023] (1) The multi-degree-of-freedom high-precision adjustment device of the utility model is provided with elastic fulcrums between the protrusions at both ends of the upper and lower spaced supporting plates in the X direction and the Y direction, and the protrusions at one end in each direction are driven up and down by a lifting assembly, so that the corresponding elastic fulcrums are elastically deformed, thereby adjusting the horizontality of the micro-motion stage in the X direction and the Y direction.
[0024] (2) The multi-degree-of-freedom high-precision adjustment device of the utility model is provided with an air floating block spaced apart from the moving shaft so as to guide the rotation and lifting motion of the micro-motion table through the force of the air film between the moving shaft and the air floating block, so that the micro-motion table is subjected to the forces from all sides and always keeps the central axis unchanged; and the first magnet and the second magnet are provided on the air floating block and the moving shaft respectively so as to utilize the suction force or repulsion force generated between the first magnet and the second magnet to offset part or all of the self-weight of the micro-motion table, the moving shaft, etc., thereby reducing the load of the voice coil motor and the continuous output, and reducing the heat generation of the voice coil motor.
[0025] (3) The multi-degree-of-freedom high-precision adjustment device of the utility model has a simple structure, a reasonable and compact layout of each structure, and occupies a small space. It can achieve high-precision, high-load, and multi-degree-of-freedom movement, and has good application prospects and promotion value. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] To more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.
[0027] Figure 1 It is a schematic diagram of the overall structure of the multi-degree-of-freedom high-precision adjustment device in the embodiment of the present utility model;
[0028] Figure 2 It is a top-view structural schematic diagram of the micro stage in the embodiment of the present utility model;
[0029] Figure 3 It is a front-view structural schematic diagram of the micro stage in the embodiment of the present utility model;
[0030] Figure 4 It is a side-view structural schematic diagram of the micro stage in the embodiment of the present utility model;
[0031] Figure 5 It is a schematic diagram of the overall structure of the micro stage in the embodiment of the present utility model;
[0032] Figure 6 It is a schematic diagram of the overall structure of the multi-degree-of-freedom high-precision adjustment device without installing the micro stage.
[0033] In all the drawings, the same reference numerals represent the same technical features, specifically: 1. Base plate; 2. Micro stage; 201. Carrying part; 202. Protruding part; 203. First carrier plate; 204. Second carrier plate; 205. Third carrier plate; 3. Angle adjustment module; 301. Elastic fulcrum; 3011. First elastic fulcrum; 3012. Second elastic fulcrum; 302. Lifting component; 3021. Lead screw; 3022. Frameless motor; 3023. Ring encoder; 4. Lifting drive module; 401. Lifting encoder; 5. Guide module; 501. Moving shaft; 502. Air bearing block; 503. First magnet; 504. Second magnet; 6. Housing. Specific embodiments
[0034] In order to make the purpose, technical solutions and advantages of the present utility model more clear, the following further details the present utility model in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model. In addition, the technical features involved in the various embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.
[0035] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.
[0036] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.
[0037] In the present utility model, unless otherwise clearly specified and defined, terms such as "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0038] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.
[0039] Embodiment:
[0040] Please refer to Figures 1 to 6 , the multi-degree-of-freedom high-precision adjustment device in the preferred embodiment of the present utility model includes a bottom plate 1 and a rotation drive module, a lifting drive module 4, and an angle adjustment module 3 provided on the bottom plate 1, realizing the adjustment of the micro-stage 2 in multiple degrees-of-freedom directions.
[0041] Specifically, as Figures 2 to 5 shown, the flexure stage 2 in the preferred embodiment includes at least two carrier plates arranged at intervals up and down, and there is a gap between adjacent carrier plates. Each carrier plate includes a carrying portion 201 and protruding portions 202 connected to both ends in the X direction and both ends in the Y direction of the carrying portion 201. In actual setting, the protruding portion 202 and the carrying portion 201 can be integrally provided or connected and installed.
[0042] At the same time, as Figure 2 shown, the carrier plate on the side of the flexure stage 2 away from the bottom plate 1 is used as a carrier table for carrying the product to be processed, and a plurality of suction holes are opened at the top of the carrying portion 201 of the carrier table, and a suction cavity is provided inside the carrier table, and the suction cavity is communicated with the suction holes to adsorb the product to be processed on the carrying portion 201 through negative pressure adsorption.
[0043] As Figure 3 and Figure 4 shown in the preferred embodiment, the flexure stage 2 includes three carrier plates arranged at intervals up and down. From the side close to the bottom plate 1, that is, from bottom to top, they are the first carrier plate 203, the second carrier plate 204, and the third carrier plate 205 in sequence, and the third carrier plate 205 is used as the carrier table.
[0044] Furthermore, the angle adjustment module 3 in the preferred embodiment includes elastic fulcrums 301 and lifting components 302; two adjacent protruding portions 202 in at least one direction are connected by elastic fulcrums 301, and elastic fulcrums 301 are provided at both ends in the X direction and the Y direction; correspondingly, two lifting components 302 are provided, one lifting component 302 corresponds to the elastic fulcrum 301 at one end in the X direction, and the other lifting component 302 corresponds to the elastic fulcrum 301 at one end in the Y direction, and the power output ends of the lifting components 302 are connected to the protruding portions 202 close to the bottom plate 1 among the protruding portions 202 at both ends of the corresponding elastic fulcrum 301. Under the action of the lifting components 302, the protruding portions 202 connected to the lifting components 302 move up and down, causing the corresponding elastic fulcrums 301 to undergo elastic deformation, changing the levelness of the flexure stage 2 in the X direction and the Y direction, and further adjusting the horizontal tilt angle of the product to be processed placed on the flexure stage 2.
[0045] It can be understood that when the lifting component 302 is activated, the elastic fulcrum 301 provided in its corresponding direction undergoes elastic deformation, and the lifting component 302 drives the protruding portion 202 at one end to move up or down, then the protruding portion 202 at the other end in the same direction moves in the opposite direction, forming a movement mode similar to a seesaw, thereby changing the tilt angle of the flexure stage 2 in this direction.
[0046] Preferably, the bearing plates in the micro stage 2 are all made of elastic materials and are integrally provided with the elastic fulcrums 301.
[0047] In Figure 1 the preferred embodiment shown, the elastic fulcrum 301 includes a first elastic fulcrum 3011 and a second elastic fulcrum 3012; wherein, the first elastic fulcrum 3011 is in an inverted V shape, and is arranged between the upper and lower convex parts 202 at both ends of the first bearing plate 203 and the second bearing plate 204 in the X direction, and continuously extends along the X direction, thereby forming a first inclined gap and a second inclined gap between the upper and lower convex parts 202 in the X direction, and the two gaps are not connected to each other, thereby connecting the first bearing plate 203 and the second bearing plate 204 together, and are both connected to the gap formed between the first bearing plate 203 and the second bearing plate 204.
[0048] Correspondingly, the second elastic fulcrum 3012 is in a V shape, and is arranged between the upper and lower convex parts 202 at both ends of the second bearing plate 204 and the third bearing plate 205 in the Y direction, and continuously extends along the Y direction.
[0049] Meanwhile, one of the lifting components 302 is connected to the convex part 202 at one end of the first bearing plate 203 in the X direction, and the other lifting component 302 passes through the first bearing plate 203 and is connected to the convex part 202 at one end of the second bearing plate 204 in the Y direction, so as to respectively control the tilting angles of the micro stage 2 in two orthogonal directions through the two lifting components 302.
[0050] Preferably, as Figure 6 shown in, the lifting component 302 in the preferred embodiment includes a high-precision lead screw 3021, a frameless motor 3022 and a ring encoder 3023, wherein the frameless motor 3022 is connected to the lead screw 3021 to drive the lead screw 3021 to perform a linear motion, the lead screw 3021 is connected to the bearing plate, and the ring encoder 3023 is arranged corresponding to the frameless motor 3022 to monitor the driving amount of the frameless motor 3022.
[0051] Furthermore, the lifting drive module 4 in the preferred embodiment includes a lifting encoder 401 and a voice coil motor. Among them, one end of the voice coil motor is fixedly arranged on the bottom plate 1, and the other end is used as an output end to be connected to the micro stage 2, so as to drive the micro stage 2 to perform a lifting motion under the drive of the voice coil motor; meanwhile, the lifting position of the micro stage 2 is monitored and fed back through the lifting encoder 401.
[0052] Furthermore, the output end of the rotation drive module in the preferred embodiment is connected to the micro stage 2 to drive the micro stage 2 to rotate along its own axis.
[0053] Furthermore, the multi-degree-of-freedom high-precision adjustment device in the preferred embodiment also includes a guide module 5, which includes a moving shaft 501 and an air floating block 502, wherein the moving shaft 501 is mounted on the lifting drive module 4 and can rotate along its own axial direction relative to the lifting drive module 4, and the fine-motion stage 2 is mounted on the top of the moving shaft 501, so that the fine-motion stage 2 and the moving shaft 501 can be driven to perform lifting and axial rotation movements respectively through the lifting drive module 4 and the rotation drive module. At the same time, the lifting assembly 302 is mounted on the side wall of the moving shaft 501 to perform lifting and axial rotation movements with the fine-motion stage 2.
[0054] Correspondingly, the air floating blocks 502 are installed on the bottom plate 1, and a plurality of air floating blocks 502 are arranged at intervals along the outer circumference of the moving shaft 501, and are circumferentially staggered with the protrusions 202 of the fine-motion stage 2. At the same time, there is a vertical gap between the air floating blocks 502 and the fine-motion stage 2, so that an air film is formed by introducing gas into the gap, and the force of the plurality of air films in the circumferential direction is utilized to enable the fine-motion stage 2 to always maintain the axial position unchanged during the rotation and lifting process, thereby achieving the guidance of the rotation and lifting movements of the fine-motion stage 2.
[0055] Preferably, the side of the air-floating block 502 close to the fine-motion stage 2 is set to be an arc-shaped surface matching the outer peripheral wall of the moving shaft 501 to ensure the uniformity of the air film force in the gap.
[0056] like Figure 6 In the preferred embodiment shown, four air floating blocks 502 are provided, which are evenly distributed on the outer periphery of the moving shaft 501 along the circumferential direction and are staggered with the four protrusions 202 on the bearing plate.
[0057] Preferably, a first magnet 503 is arranged on the side of each air floating block 502 facing the base plate 1, and a second magnet 504 is arranged on the side of the movable shaft 501 away from the base plate 1. At the same time, the first magnet 503 and the second magnet 504 are arranged with intervals up and down to balance the dead weight of the micro-motion table 2 and the movable shaft 501 through the attraction or repulsion between the first magnet 503 and the second magnet 504, thereby reducing the load of the lifting drive module 4.
[0058] In actual production, when the multi-degree-of-freedom high-precision adjustment device is required to be installed, that is, Figure 1 As shown in the figure, the base plate 1 is at the bottom, and the micro-motion stage 2 is at the top. The first magnet 503 and the second magnet 504 are set to have different magnetic properties. The first magnet 503 and the second magnet 504 attract each other with opposite polarities, so that the suction force can balance the dead weight of the micro-motion stage 2, the moving shaft 501, etc., reduce the load of the voice coil motor, and reduce the heat generation of the voice coil motor.
[0059] Accordingly, when the multi-degree-of-freedom high-precision adjustment device needs to be installed upside down, that is, the bottom plate 1 is on the top and the micro-stage 2 is on the bottom, the first magnet 503 and the second magnet 504 are set to have the same magnetism, and the like-sex repulsion between the first magnet 503 and the second magnet 504 is used to balance the self-weights of the micro-stage 2, the moving shaft 501, etc.
[0060] In actual setting, the counterweight of the magnet can be used to ensure that the generated magnetic force does not affect the rotational movement and lifting movement of the micro-stage 2 while ensuring the balance of the micro-stage 2.
[0061] Preferably, it further includes a housing 6, which is of a hollow structure and surrounds the outside of the moving shaft 501 and the lifting drive module 4 to protect each structure. At the same time, the housing 6 is fixedly connected to the moving shaft 501 to perform lifting and rotational movements along with the moving shaft 501. At this time, the micro-stage 2 is installed on the top of the housing 6, and the second magnet 504 is arranged on the top of the housing 6.
[0062] The multi-degree-of-freedom high-precision adjustment device of the present invention has a simple structure, reasonable and compact layout of each structure, small space occupation, can achieve high-precision, high-load, multi-degree-of-freedom movement, and has good application prospects and promotion value.
[0063] It is easy for those skilled in the art to understand that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims
1. A multi-degree-of-freedom high-precision adjustment device, characterized in that, It includes a base plate, a micro-motion stage and an angle adjustment module; The micro-motion stage comprises at least two layers of carrier plates spaced apart from each other, the carrier plates comprising a carrier portion and protruding portions connected along both ends of the carrier portion in the X direction and both ends of the carrier portion in the Y direction; The angle adjustment module includes an elastic fulcrum and a lifting assembly; two adjacent protrusions in at least one direction are connected by an elastic fulcrum, and elastic fulcrums are arranged at both ends of the micro-motion stage in the X direction and the Y direction; there are two lifting assemblies, one of which corresponds to the elastic fulcrum at one end of the micro-motion stage in the X direction, and the other corresponds to the elastic fulcrum at one end of the micro-motion stage in the Y direction, and the power output ends of the lifting assemblies are connected to the protrusions close to the bottom plate among the protrusions at both ends of the corresponding elastic fulcrums, and under the action of the lifting assemblies, the protrusions connected thereto move up and down, so that the corresponding elastic fulcrums are elastically deformed, thereby changing the horizontality of the micro-motion stage in the X direction and the Y direction.
2. The multi-degree-of-freedom high-precision adjustment device according to claim 1, wherein The micro-motion stage comprises three layers of support plates spaced apart from each other, which are sequentially arranged upward from the side close to the bottom plate as follows: a first support plate, a second support plate and a third support plate; A first elastic fulcrum is arranged between the protrusions at both ends of the first bearing plate and the second bearing plate in the X direction, and one of the lifting components is connected to the protrusion at one end of the first bearing plate in the X direction; a second elastic fulcrum is arranged between the protrusions at both ends of the second bearing plate and the third bearing plate in the Y direction, and another lifting component passes through the first bearing plate and is connected to the protrusion at one end of the second bearing plate in the Y direction.
3. The multi-degree-of-freedom high-precision adjustment device according to claim 2, wherein The bearing plates are made of elastic material and are integrally arranged with the elastic fulcrum; The first elastic fulcrum is in an eight-shaped shape and extends continuously along the X direction; the second elastic fulcrum is in an inverted eight-shaped shape and extends continuously along the Y direction.
4. The multi-degree-of-freedom high-precision adjustment device according to any one of claims 1 to 3, characterized in that It also includes a rotation drive module and a lifting drive module, so that the rotation drive module drives the micro-motion platform to rotate along its own axis, and the lifting drive module drives the micro-motion platform to perform lifting motion.
5. The multi-degree-of-freedom high-precision adjustment device according to claim 4, wherein The lifting drive module includes a voice coil motor and a lifting encoder. One end of the voice coil motor is fixed on the bottom plate, and the other end is connected to the micro-motion stage as an output end, so as to drive the micro-motion stage to perform lifting movement through the voice coil motor, and monitor and feedback the lifting position of the micro-motion stage through the lifting encoder.
6. The multi-degree-of-freedom high-precision adjustment device according to claim 1, characterized in that, A plurality of adsorption holes are provided on the top of the bearing part of the bearing plate on the side of the micro-motion stage away from the bottom plate, and an adsorption cavity is provided inside the bearing part, the adsorption cavity is connected with the adsorption holes, so that the product to be processed can be adsorbed on the bearing part by negative pressure adsorption.
7. The multi-degree-of-freedom high-precision adjustment device according to claim 4, wherein It also includes a guide module, which includes a moving shaft and an air flotation block; The moving shaft is mounted on the lifting drive module and can rotate along its own axis. The micro-movement platform is coaxially mounted on the top of the moving shaft. The lifting assembly is mounted on the side wall of the moving shaft. The air floating block is installed on the bottom plate, and a plurality of air floating blocks are arranged at intervals along the outer circumference of the moving shaft, and are distributed in an annular manner staggered with the protrusions of the micro-motion stage; a gap is arranged between the air floating block and the moving shaft, so that an air film is formed by passing gas into the gap, and the rotation and lifting movement of the micro-motion stage are guided by the force of the air film.
8. The multi-degree-of-freedom high-precision adjustment device according to claim 7, characterized in that, The side of the air floating block facing the moving shaft is an arc-shaped surface matching the outer peripheral wall of the moving shaft to ensure the uniformity of the air film force in the gap.
9. The multi-degree-of-freedom high-precision adjustment device according to claim 7, wherein A first magnet is arranged on a side of the air floating block facing the bottom plate, and a second magnet is arranged on a side of the moving shaft away from the bottom plate; the first magnet and the second magnet are arranged with an interval up and down to balance the deadweight of the micro-motion stage and the moving shaft through the attraction or repulsion between the first magnet and the second magnet.
10. The multi-degree-of-freedom high-precision adjustment device according to claim 9, wherein, A shell is arranged on the outer periphery of the moving shaft, and the shell is fixedly connected to the moving shaft.