Alarm device for improving line breaking sensitivity of machine table in crystal bar cutting process

Abstract

The utility model discloses an alarm device for improving the line breaking sensitivity of a machine table in the crystal bar cutting process. The alarm device comprises a proximity switch, an alarm module, an alarm line stretching across the upper portion of a cutting steel wire net, a first support and a second support, wherein the first support and the second support are arranged on the two sides of the cutting steel wire net. A sensing block is arranged on the second bracket; one end of the induction block can rotate up and down around the second support, and when rotating to different positions, the induction block can be inducted by the proximity switch or cannot be inducted by the proximity switch; the proximity switch is electrically connected with the alarm module and feeds back induction detection information of the induction block to the alarm module in real time. According to the alarm device provided by the invention, the broken line detection sensitivity of the line cutting machine can be improved, and the slice yield loss caused by the broken line is reduced to a certain extent.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production, and in particular relates to an alarm device for improving the wire break sensitivity of a machine during a crystal rod cutting process. Background Art

[0002] In the semiconductor wafer manufacturing process, cutting the crystal rod is a very important step; its main purpose is to place the bonded crystal rod on the wire cutting machine, use well-proportioned mortar as cooling and cutting medium, and cut the crystal rod into pieces of uniform thickness during the high-speed reciprocating motion of the steel wire, which is convenient for the subsequent process.

[0003] In the actual cutting process, due to impurities or foreign matter mixed in the mortar, quality problems of the steel wire itself, and abnormalities in the machine transmission mechanism, the steel wire may break. The structure of the machine's built-in wire break detection device is as follows: Figure 1 As shown: there are two spindle electrodes 15 1.5 cm above the steel wire 13, and the other end of the electrode is connected to the alarm module 10. In the normal cutting process, the steel wire does not touch the electrode; only when the wire is broken, the broken end of the steel wire will touch the electrode, at this time, there will be an electrical signal fed back to the alarm module, and the alarm module will trigger an alarm after receiving the signal, causing the machine to stop.

[0004] However, in actual processing, since the electrodes are covered with mortar, which reduces their conductivity, when a wire break occurs, the signal cannot be fed back to the alarm module in time, and the machine fails to stop immediately, causing the steel wire to be entangled on the main roller of the machine, resulting in a decrease in the slicing yield. In severe cases, the entire crystal rod will be scrapped, causing huge losses.

[0005] Therefore, the improvement of how to improve the sensitivity of wire break detection has great economic value in improving the yield of slicing. Utility Model Content

[0006] The purpose of the utility model is to solve the deficiencies of the prior art and provide an alarm device for improving the wire break sensitivity of a machine during a crystal rod cutting process.

[0007] The purpose of this utility model is achieved by the following technical solutions:

[0008] An alarm device for improving the wire break sensitivity of a machine during the crystal rod cutting process, comprising a proximity switch, an alarm module, an alarm line across the cutting steel wire net, and a first bracket and a second bracket arranged on both sides of the cutting steel wire net;

[0009] The second bracket is provided with a sensing block; one end of the sensing block can rotate up and down around the second bracket, and when rotated to different positions, it can be sensed by the proximity switch or cannot be sensed by the proximity switch;

[0010] The proximity switch is electrically connected to the alarm module, and is used to detect the induction block and feed back the induction detection information of the induction block to the alarm module in real time;

[0011] One end of the alarm wire is fixed on the first bracket, and the other end spans across the cutting steel wire mesh and is fixed on the second bracket to generate a pulling force to pull up the other end of the induction block; when the cutting steel wire mesh breaks, the broken steel wire cuts off the alarm wire, the induction block loses support and rotates and drops, and the induction information of the proximity switch changes and is fed back to the alarm module to trigger an alarm.

[0012] Preferably, when the induction block is pulled up by the alarm wire to be in the first position, it can be sensed by the proximity switch, and when it loses the support of the alarm wire and rotates downward to leave the first position, it cannot be sensed by the proximity switch.

[0013] Preferably, a first fixing post is provided on the first bracket;

[0014] A second fixing post and a third fixing post are provided on the second bracket;

[0015] One end of the alarm wire is fixed on the first fixing post, and the other end spans across the cutting steel wire mesh and is wound around the second fixing post and the third fixing post in sequence to pull up the other end of the induction block.

[0016] Preferably, the connection line between the first fixing post and the second fixing post is perpendicular to the cutting steel wire;

[0017] The included angle between the connection line between the third fixing post and the second fixing post and the connection line between the first fixing post and the second fixing post is 80-90°.

[0018] Preferably, the third fixing post is located on the induction block.

[0019] Preferably, the first bracket includes a first bracket body and a first support plate, and the first fixing post is fixed on the first support plate;

[0020] A first connection hole is provided on the first bracket body, a first waist-shaped hole is provided on the first support plate, and the first support plate is fixed on the first bracket body through a first bolt sequentially passing through the first waist-shaped hole and the first connection hole, and by changing the position of the first bolt passing through the first waist-shaped hole, the position of the first support plate fixed on the first bracket body can be adjusted, and further the position of the first fixing post can be adjusted.

[0021] Preferably, the proximity switch is located on the second bracket.

[0022] Preferably, the alarm module is electrically connected to the machine tool. When the alarm module triggers an alarm, the machine tool stops the cutting operation.

[0023] Preferably, the second bracket includes a second bracket body and a second support plate fixed to the second bracket body;

[0024] The second fixing column is located on the second support plate;

[0025] The second bracket body is provided with a second connection hole, and the second support plate is provided with a second slotted hole. The second support plate is fixed to the second bracket body by a second bolt sequentially passing through the second slotted hole and the second connection hole. By changing the position of the second bolt passing through the second slotted hole, the position of the second support plate fixed to the second bracket body can be adjusted, and thus the position of the second fixing column can be adjusted.

[0026] Preferably, the alarm wire is a cotton thread;

[0027] The sensing block is a steel block.

[0028] For the alarm device provided by the present application, the alarm wire located above the cutting steel wire does not need to be conductive, which will not cause signal delay. The proximity switch is located on one side of the steel wire and will not be contaminated by mortar during the cutting process, affecting signal transmission. When a wire break occurs, the alarm wire can be immediately cut off. At the same moment, the sensing block loses support and moves away from the proximity switch sensing area, triggering the alarm module to immediately issue an alarm and stop the machine tool. The above process is almost completed at the same time. Therefore, the present application can improve the wire break detection sensitivity of the wire cutting machine and reduce the loss of slicing yield caused by wire break to a certain extent. In summary, the alarm device provided by the present application has good application value and technical improvement significance in the crystal bar cutting process. Description of the Drawings

[0029] Figure 1 is a schematic structural diagram of a wire break detection device provided in the prior art;

[0030] Figure 2 is a schematic structural diagram of the first bracket in the alarm device provided by the present application;

[0031] Figure 3 is a schematic structural diagram of the second bracket in the alarm device provided by the present application;

[0032] Figure 4 is a reference diagram of the application state of the alarm device provided by the present application;

[0033] Among them, 1 - the first bracket body; 2 - the first threaded hole; 3 - the first connection hole; 4 - the first support plate; 5 - the first fixing column; 6 - the second bracket body; 7 - the induction block; 8 - the third fixing column; 9 - the proximity switch; 10 - the alarm module; 11 - the second fixing column; 12 - the second threaded hole; 13 - the steel wire; 14 - the alarm wire; 15 - the electrode; 16 - the second waist-shaped hole. Detailed implementation manner

[0034] The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process provided by this application, as Figures 2 to 4 shown, includes a proximity switch 9, an alarm module 10, an alarm wire 14 spanning above the cutting wire mesh, and a first bracket and a second bracket provided on both sides of the cutting wire mesh for fixing both ends of the alarm wire 14.

[0035] An induction block 7 is provided on the second bracket; one end of the induction block 7 can rotate up and down around the second bracket, and when rotating to different positions, it can be sensed by the proximity switch 9 or cannot be sensed by the proximity switch 9; one end of the induction block 7 can be rotatably connected to the second bracket through a rotating shaft or the like. Preferably, when the induction block rotates upward to the first position, it can be sensed by the proximity switch 9, and when rotating downward away from the first position, it leaves the sensing area of the proximity switch 9, so that it cannot be sensed by the proximity switch.

[0036] The proximity switch 9 is electrically connected to the alarm module 10, and is used to perform induction detection on the induction block and feedback the induction detection information of the induction block to the alarm module 10 in real time. The alarm module 10 can be an audible and visual alarm or the like. Preferably, the alarm module is electrically connected to the machine tool, and when the alarm module triggers an alarm, the machine tool immediately stops the cutting work.

[0037] Both ends of the alarm wire are respectively fixed on the first bracket and the second bracket, and normally one end of the alarm wire can pull up the induction block. When the steel wire breaks, the broken steel wire can cut off the alarm wire, so that the induction block loses support and rotates and drops, causing the induction information of the proximity switch to change. When the alarm module receives the information feedback, it triggers an alarm, so that the machine tool can stop. Specifically:

[0038] Under normal circumstances, one end of the alarm line 14 is fixed on the first bracket, and the other end is fixed on the second bracket across the cutting steel wire net and generates a pulling force that can pull the other end of the sensing block to the first position, so that it can be detected by the proximity switch. The first position is preferably parallel to the proximity switch. When the cutting steel wire net is broken, the broken steel wire 13 bounces up instantly, and the force generated can cut off the alarm line 14. At this time, the tension generated by the alarm line disappears, and the sensing block 7 loses support and is rapidly rotated downward by gravity and falls away from the first position. When the sensing block leaves the proximity switch sensing area, the proximity switch loses its sensing feedback to the alarm module, which immediately triggers the alarm, thereby stopping the machine immediately. At the same time, an audible and visual alarm alerts the staff.

[0039] The alarm device provided by the present application is such that the alarm line located above the cutting steel wire no longer needs to be conductive and will not cause signal delays. The proximity switch is located on one side of the steel wire and will not be contaminated with mortar during the cutting process, affecting signal transmission. When a wire break occurs, the alarm line can be cut off immediately, and at the same moment the sensing block loses support and moves away from the proximity switch sensing area, triggering the alarm module to immediately sound an alarm and shut down the machine. The above process is completed almost at the same time. Therefore, the present application can improve the wire break detection sensitivity of the wire cutting machine and reduce the slicing yield loss caused by wire breakage to a certain extent. In summary, the alarm device provided by the present application has good use value and technical improvement significance in the crystal rod cutting process.

[0040] The present application can be used in conjunction with a wire break detection device provided with the wire cutting machine, thereby further improving the wire break detection sensitivity.

[0041] As can be understood by those skilled in the art, the alarm line 14 should be made of a material that has a certain flexibility to pull up the sensing block and can be easily cut by the steel wire, preferably a cotton thread. The sensing block 7 should have a certain weight so that it can rotate and fall quickly when the tension of the alarm line is lost. Therefore, the sensing block is preferably a steel block.

[0042] Preferably, the first bracket is provided with a first fixing column 5; the second bracket is provided with a second fixing column 11 and a third fixing column 8. One end of the alarm line 14 is fixed to the first fixing column 5, and the other end crosses the cutting wire mesh and is sequentially wound around the second fixing column 11 and the third fixing column 8 to pull up the other end of the sensor block 7. The alarm line is tightly wound around the first fixing column, the second fixing column and the third fixing column, thereby generating a pulling force that can pull up the sensor block.

[0043] Further preferably, the connection line between the first fixing post 5 and the second fixing post 8 is perpendicular to the cutting steel wire 13. When the alarm wire is perpendicular to the steel wire, the broken steel wire can cut the alarm wire faster and more easily. The included angle between the connection line between the third fixing post 8 and the second fixing post 11 and the connection line between the first fixing post 5 and the second fixing post 8 is 80 - 90°. Through this setting, the alarm wire between the first bracket and the second bracket is turned, so that a better pulling force can be generated to pull up the induction block.

[0044] Preferably, the third fixing post 8 is located on the induction block 7, and the wound alarm wire can pull up the third fixing post and the induction block connected to the third fixing post.

[0045] Preferably, the first bracket includes a first bracket body 1 and a first support plate 4, and the first fixing post 5 is fixed on the first support plate 4; a first connection hole 3 is provided on the first bracket body 1, and a first waist-shaped hole is provided on the first support plate 4. The first support plate is fixed on the first bracket body by a first bolt sequentially passing through the first waist-shaped hole and the first connection hole, and the position of the first support plate fixed on the first bracket body can be adjusted by changing the position of the first bolt passing through the first waist-shaped hole, so that the position of the first fixing post can be adjusted, which is convenient for use.

[0046] Preferably, the second bracket includes a second bracket body 6 and a second support plate fixed on the second bracket body; the second fixing post 11 is located on the second support plate. Further preferably, a second connection hole is provided on the second bracket body, and a second waist-shaped hole 16 is provided on the second support plate. The second support plate is fixed on the second bracket body by a second bolt sequentially passing through the second waist-shaped hole and the second connection hole, and the position of the second support plate fixed on the second bracket body can be adjusted by changing the position of the second bolt passing through the second waist-shaped hole, and then the position of the second fixing post can be adjusted, which is convenient for use. The proximity switch can be arranged on the second bracket or at other positions as long as it can be aligned with the induction block. Preferably, the proximity switch 9 is located on the second bracket body 6, which is convenient for use.

[0047] The first bracket and the second bracket can be fixed on the wire cutting machine table, or a support device can be additionally arranged on both sides of the steel wire for installing the first bracket and the second bracket. For the convenience of connection, a first threaded hole 2 is provided on the first bracket, and a second threaded hole 12 is provided on the second bracket. The first bracket and the second bracket can be quickly fixed at the target position by bolts.

[0048] Although the preferred embodiments of the present utility model have been described, those skilled in the art can make additional changes and modifications to these embodiments once they know the basic creative concept. Therefore, the appended claims are intended to be construed as including the preferred embodiments as well as all changes and modifications falling within the scope of the present utility model. Obviously, those skilled in the art can make various changes and variations to the present utility model without departing from the spirit and scope of the present utility model. Thus, if these modifications and variations of the present utility model fall within the scope of the claims of the present utility model and its equivalent technologies, the present utility model is also intended to include these modifications and variations.

Claims

1. An alarm device for improving the wire break sensitivity of a machine during the crystal bar cutting process, characterized in that, It includes a proximity switch, an alarm module, an alarm wire spanning above the cutting wire mesh, and a first bracket and a second bracket provided on both sides of the cutting wire mesh; An induction block is provided on the second bracket; one end of the induction block can rotate up and down around the second bracket, and when rotating to different positions, it can be sensed by the proximity switch or cannot be sensed by the proximity switch; The proximity switch is electrically connected to the alarm module, and is used to perform induction detection on the induction block and feedback the induction detection information of the induction block to the alarm module in real time; One end of the alarm wire is fixed on the first bracket, and the other end spans the cutting wire mesh and is fixed on the second bracket to generate a pulling force to pull up the other end of the induction block; When the cutting wire mesh breaks, the broken wire cuts off the alarm wire, the induction block loses support and rotates and drops, and the induction information of the proximity switch changes and is fed back to the alarm module to trigger an alarm.

2. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 1, characterized in that When the induction block is pulled up by the alarm wire and is in the first position, it can be sensed by the proximity switch, and when it loses the support of the alarm wire and rotates downward away from the first position, it cannot be sensed by the proximity switch.

3. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 1, characterized in that A first fixing column is provided on the first bracket; A second fixing column and a third fixing column are provided on the second bracket; One end of the alarm wire is fixed on the first fixing column, and the other end spans the cutting wire mesh and is wound around the second fixing column and the third fixing column in sequence to pull up the other end of the induction block.

4. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 3, characterized in that The connection line between the first fixing column and the second fixing column is perpendicular to the cutting wire; The included angle between the connection line between the third fixing column and the second fixing column and the connection line between the first fixing column and the second fixing column is 80-90°.

5. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 3, characterized in that The third fixing column is located on the induction block.

6. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 3, characterized in that The first bracket includes a first bracket body and a first support plate, and the first fixing column is fixed on the first support plate; A first connection hole is provided on the first bracket body, a first waist-shaped hole is provided on the first support plate, and the first support plate is fixed on the first bracket body by a first bolt sequentially passing through the first waist-shaped hole and the first connection hole, and by changing the position of the first bolt passing through the first waist-shaped hole, the position of the first support plate fixed on the first bracket body can be adjusted, and further the position of the first fixing column can be adjusted.

7. The alarm device for improving the wire break sensitivity of the machine tool during the crystal bar cutting process according to claim 1, characterized in that The proximity switch is located on the second bracket.

8. The alarm device for improving the wire break sensitivity of the machine during the ingot cutting process according to claim 1, characterized in that the alarm module is electrically connected to the machine, and when the alarm module triggers an alarm, the machine stops the cutting work.

9. The alarm device for improving the wire break sensitivity of the machine during the ingot cutting process according to claim 3, characterized in that the second bracket includes a second bracket body and a second support plate fixed on the second bracket body; the second fixing column is located on the second support plate; a second connection hole is provided on the second bracket body, a second slotted hole is provided on the second support plate, and the second support plate is fixed on the second bracket body by a second bolt sequentially passing through the second slotted hole and the second connection hole, and by changing the position of the second bolt passing through the second slotted hole, the position of the second support plate fixed on the second bracket body can be adjusted, and thus the position of the second fixing column can be adjusted.

10. The alarm device for improving the wire break sensitivity of the machine during the ingot cutting process according to claim 1, characterized in that the alarm wire is a cotton thread; the induction block is a steel block.

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