Spraying device and wire cutting machine

Abstract

The embodiment of the utility model provides a spraying device and a wire cutting machine, and belongs to the technical field of wire cutting. The spraying device is used for the wire cutting machine and comprises a spraying assembly and an air blowing pipeline, the spraying assembly comprises a spraying pipe and a plurality of nozzles, a liquid inlet of the spraying pipe is communicated with a liquid supply system, the nozzles are arranged at intervals in the length direction of the spraying pipe, the nozzles are communicated with the interior of the spraying pipe, and the nozzles are used for spraying liquid towards a cut workpiece; the air blowing pipeline is provided with an air blowing opening, and the air blowing opening is used for blowing air towards the liquid in the nozzle in the flowing direction of the liquid in the nozzle. The spraying device can effectively improve the phenomenon that the retracting torque of the driving motor is too large.

Description

Technical Field

[0001] This application relates to the technical field of wire cutting, and more particularly, to a spray device and a wire cutting machine. Background Art

[0002] Wire cutting is a machining method in which a cutting wire moves reciprocally at a high speed and moves relative to a workpiece to be cut (such as materials like photovoltaic silicon rods, semiconductors, silicon carbide, sapphire, magnetic materials, etc.), so that the cutting wire cuts the workpiece to be cut.

[0003] During the cutting process of the wire cutting machine on the workpiece to be cut, taking the silicon rod as the workpiece to be cut as an example, after the cutting wire cuts through the workpiece to be cut to form multiple silicon wafers, it is necessary to lift the workpiece to be cut to separate it from the cutting wire, and this process is called "retracting the tool". During the retracting process, the silicon wafers come into contact with the cutting wire, and due to the resistance of the movement between the cutting wire and the silicon wafers, the retracting torque of the driving motor will be too large.

[0004] Normally, during the retracting process, a spray pipe is used to spray liquid at the side gaps of the silicon wafers to reduce the tension between the silicon wafers, thereby reducing the extrusion of the silicon wafers on the cutting wire, and further reducing the output torque of the driving motor during retracting. However, relying on the existing spray mechanism to spray liquid on the silicon wafers, there are still problems such as too large torque and difficult retracting during the retracting process. Summary of the Utility Model

[0005] An embodiment of this application provides a spray device and a wire cutting machine, and the spray device can effectively improve the phenomenon of too large retracting torque of the driving motor.

[0006] In a first aspect, an embodiment of this application provides a spray device for a wire cutting machine. The spray device includes a spray assembly and a blowing pipeline. The spray assembly includes a spray pipe and a plurality of nozzles. The liquid inlet of the spray pipe is communicated with a liquid supply system. The plurality of nozzles are arranged at intervals along the length direction of the spray pipe. The nozzles are internally communicated with the spray pipe, and the nozzles are used to spray liquid towards the workpiece to be cut; the blowing pipeline has a blowing port, and along the flowing direction of the liquid in the nozzle, the blowing port is used to blow air towards the liquid in the nozzle.

[0007] In this solution, taking a silicon rod as the workpiece to be cut as an example, when the spraying device is applied to the retraction process of the wire cutting machine, the workpiece to be cut is cut into multiple silicon wafers by the cutting wire. The spraying device includes a spraying component and a blowing pipeline. The liquid in the spraying pipe of the spraying component sprays out from multiple nozzles, and the liquid sprayed out from each nozzle faces the gap on the side of the silicon wafer. Compressed gas is blown towards the liquid in the nozzle through the blowing pipeline. Compared with the prior art where the nozzle only sprays liquid, the compressed air blown out from the air blowing port can contact and act on the liquid in the nozzle, disperse the liquid into droplets and accelerate the droplets, making the droplets sprayed out by the nozzle finer and faster. Moreover, the droplets sprayed out by the nozzle and the gas form a liquid-gas mixture. Compared with the liquid, the liquid-gas mixture can more easily enter the gap between the silicon wafers for filling, keeping the silicon wafers in a parallel state, which is beneficial to reducing the tension between the silicon wafers, thereby reducing the extrusion of the silicon wafers on the cutting wire and the resistance to the movement of the cutting wire, and further reducing the output torque of the driving motor, that is, effectively reducing the output torque of the driving motor during retraction, which is more conducive to the retraction process. In addition, the setting of the blowing pipeline, by using the liquid-gas mixture to act on the silicon wafers, can also save water resources compared with only spraying liquid.

[0008] In some embodiments, the blowing pipeline includes a main pipeline and multiple branch pipelines. One end of the main pipeline is connected to the gas supply system, and the other end is closed; the multiple branch pipelines are spaced apart along the length direction of the main pipeline. One end of each branch pipeline is connected to the main pipeline, and the other end is an air blowing port, and the air blowing port extends into the nozzle. The positions and numbers of the multiple branch pipelines correspond one-to-one to the positions and numbers of the multiple nozzles.

[0009] In the above technical solution, by connecting the main pipeline to the gas supply system, the gas supply system can provide a gas source for the main pipeline. Under the conveying action of the main pipeline, the gas is conveyed to the multiple branch pipelines. The positions and numbers of the multiple branch pipelines correspond one-to-one to the positions and numbers of the multiple nozzles. In this way, each nozzle can correspond to a branch pipeline. By using the air outlet of the branch pipeline to extend into the nozzle and the air blowing port to blow air towards the liquid in the nozzle, the liquid flowing in each nozzle can be refined and accelerated, making it easier to keep the adjacent two silicon wafers in a parallel state and reducing the risk of excessive retraction torque of the driving motor during retraction.

[0010] In some embodiments, the main pipeline is located outside the spraying pipe, and part of the branch pipeline is located in the nozzle.

[0011] In the above technical solution, by locating the main pipeline outside the spraying pipe, the main pipeline and the spraying pipe are independently arranged, and the media flowing in them do not interfere with each other. The compressed gas in the main pipeline extends into the nozzle through the branch pipeline to blow the liquid in the nozzle.

[0012] In some embodiments, the spray pipe has a first flow channel extending in a first direction, and the nozzle has a second flow channel extending in a second direction. The second flow channel is in communication with the first flow channel. The first direction is the axial direction of the spray pipe, and the second direction is the flow direction of the liquid in the second flow channel. The second direction is perpendicular to the first direction.

[0013] In the above technical solution, by making the extension direction of the second flow channel of the nozzle perpendicular to the extension direction of the first flow channel of the spray pipe, it is beneficial to vertically arrange a plurality of nozzles on the spray pipe, which is convenient for processing, occupies a small space, and is easy to implement.

[0014] In some embodiments, the branch passes through the first flow channel in the second direction, and the air blowing port is located in the second flow channel.

[0015] In the above technical solution, since the fluid in the spray pipe enters the nozzle, the flow direction of the fluid in the nozzle is the second direction. In order to make the compressed gas blown out from the air blowing port better disperse and accelerate the liquid in the nozzle, by passing the branch through the first flow channel in the second direction, the flow direction of the gas in the branch is exactly the same as the flow direction of the liquid in the nozzle. The compressed gas blown out from the air blowing port can blow out more directly along the flow direction of the liquid, which can better disperse and accelerate the liquid in the nozzle, making it easier for the kinetic energy of the compressed air and the kinetic energy of the liquid in the nozzle to be superimposed on each other, reducing energy loss. Under the impact of the compressed air, the compressed air acts on and impacts the liquid droplets, making the liquid droplets sprayed by the nozzle finer and the flow rate larger, so that it can more easily enter the gaps between the silicon wafers, more easily keep the silicon wafers parallel, and is more conducive to reducing the tension between the silicon wafers, thereby achieving the effect of reducing the output torque of the driving motor when retracting the tool.

[0016] In some embodiments, the branch is coaxially arranged with the second flow channel, and there is a water passing gap between the outer peripheral wall of the branch and the inner wall of the second flow channel.

[0017] In the above technical solution, by coaxially arranging the branch with the second flow channel, the compressed gas ejected from the branch is located in the center line direction of the nozzle, and the compressed gas can more evenly disperse the liquid in the nozzle, and there will be no phenomenon of excessive local impact force, so that the liquid in the nozzle can be sprayed out more evenly towards the silicon wafer. The branch is coaxially arranged with the second flow channel, and there is a water passing gap between the outer peripheral wall of the branch and the inner wall of the second flow channel, realizing the conduction of the liquid in the spray pipe and the nozzle. And in the circumferential direction of the branch, the water passing gap between the outer peripheral wall of the branch and the inner wall of the second flow channel is equal everywhere, and the liquid in the spray pipe can uniformly enter the nozzle from the water passing gap, and there is no easy occurrence of turbulent flow in the nozzle.

[0018] In some embodiments, along the second direction, the branch path includes a first pipe section and a second pipe section. The first pipe section is located outside the spray pipe. One end of the first pipe section communicates with the main pipeline, and the other end communicates with the second pipe section. The second pipe section penetrates through the spray pipe along the second direction. The first pipe section and the second pipe section are detachably connected.

[0019] In the above technical solution, by including the first pipe section and the second pipe section in the branch path, with the first pipe section located outside the spray pipe, the second pipe section penetrating through the spray pipe, and the first pipe section and the second pipe section being detachably connected, it is convenient for the installation and disassembly of the branch path. When the first pipe section is damaged, the first pipe section can be directly removed and replaced without replacing the entire branch path, reducing the replacement difficulty and cost.

[0020] In some embodiments, along the second direction, the second flow channel includes a first part and a second part. One end of the first part communicates with the first flow channel, and the other end communicates with the second part. Along the second direction, the aperture of the second part gradually increases.

[0021] In the above technical solution, by including the second part in the second flow channel, with the aperture of the second part gradually increasing, that is, the water outlet of the nozzle being flared, the water sprayed by the nozzle forms conical mist droplets on the surface of the silicon wafer, with a wider coverage area and a better spraying effect on the silicon wafer.

[0022] The flow channel apertures of the first part can be equal or unequal. In this embodiment, along the second direction, the apertures of the first part are equal.

[0023] In some embodiments, a valve is provided on the air blowing pipeline, and the valve is used to adjust the pressure or flow rate of the air flow in the air blowing pipeline.

[0024] In the above technical solution, by providing a valve on the air blowing pipeline, the staff can adjust the opening degree of the valve according to the actual working conditions of the spraying device to adjust the air pressure or flow rate of the air flow in the air blowing pipeline, which is beneficial to effectively reducing the retraction torque.

[0025] In some embodiments, the spraying device further includes a pressure monitoring component and a controller. The pressure monitoring component is used to monitor the pressure of the air flow in the air blowing pipeline. The pressure monitoring component and the valve are both electrically connected to the controller. The controller is used to control the valve according to the monitoring data of the pressure monitoring component so that the pressure of the air flow in the air blowing pipeline is maintained within a preset range.

[0026] In the above technical solution, through the settings of the pressure monitoring component and the controller, the pressure monitoring component can monitor the air pressure of the blowing pipeline in real time, and the controller can receive the monitored air pressure of the pressure monitoring component in real time. When the air pressure of the airflow in the blowing pipeline does not meet the requirements, the controller can automatically control the valve to adjust the air pressure of the airflow in the blowing pipeline, so that the air pressure of the airflow in the blowing pipeline is always maintained within the preset range, without manual intervention, realizing the automatic control of the air pressure in the blowing pipeline.

[0027] In a second aspect, an embodiment of the present application further provides a wire cutting machine, which includes a frame, a cutting unit, and the spraying device of any of the foregoing embodiments. The cutting unit and the spraying device are arranged on the frame. The cutting unit is used to cut the workpiece to be cut, and the nozzle of the spraying device is arranged facing the workpiece to be cut.

[0028] In some embodiments, the wire cutting machine is a slicing machine.

[0029] Other features and advantages of the present application will be described in detail in the subsequent specific implementation section. Description of the Drawings

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0031] Figure 1 It is a schematic structural diagram of a tool withdrawal spraying assembly in the prior art;

[0032] Figure 2 It is a schematic structural diagram of the spraying device provided by some embodiments of the present application;

[0033] Figure 3 It is a cross-sectional view of the spraying device provided by some embodiments of the present application;

[0034] Figure 4 For Figure 3 It is a schematic diagram of the conical spraying form of the nozzle in

[0035] Icons: 100 - Spraying device; 10 - Spraying assembly; 11 - Spraying pipe; 111 - First flow channel; 112 - Liquid inlet; 12 - Nozzle; 121 - Second flow channel; 1211 - First part; 1212 - Second part; 20 - Blowing pipeline; 21 - Main pipeline; 22 - Branch; 221 - First pipe section; 222 - Second pipe section; 223 - Blowing port; 200 - Workpiece to be cut; 201 - Silicon wafer; 300 - Existing spraying pipe; 301 - Existing nozzle; X - First direction; Y - Second direction. Detailed implementation manners

[0036] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some but not all of the embodiments of the present application. The components of the embodiments of the present application usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the scope of protection of the present application.

[0038] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0039] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the application is usually placed during use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present application, it should also be noted that unless otherwise clearly specified and defined, the terms "set" and "connected" should be understood in a broad sense. For example, they can be fixedly connected, detachably connected, or integrally connected; they can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0041] In the related art, as Figure 1 shown, after the silicon rod is cut, the cutting wire needs to be separated from the silicon wafer, and a retraction process is required. In the retraction process, an existing spray pipe 300 and an existing nozzle 301 are used to form a retraction spray assembly. The retraction spray assembly sprays liquid through the existing nozzle 301 towards the side gap of the silicon wafer to reduce the tension between the silicon wafers, thereby reducing the extrusion of the silicon wafers on the cutting wire and reducing the output torque of the driving motor during retraction. However, only relying on the existing spray pipe 300 to provide liquid and using the existing nozzle 301 to spray liquid on the workpiece to be cut not only wastes water resources, but there is still a phenomenon that the torque of the driving motor is too large and the retraction is difficult during the retraction process.

[0042] An embodiment of the present application provides a spray device for a wire cutting machine. Please refer to Figure 2 , Figure 3 and Figure 4 . The spray device 100 includes a spray assembly 10 and a blow air pipeline 20. The spray assembly 10 includes a spray pipe 11 and a plurality of nozzles 12. The liquid inlet 112 of the spray pipe 11 is communicated with a liquid supply system. The plurality of nozzles 12 are arranged at intervals along the length direction of the spray pipe 11. The nozzles 12 are communicated with the inside of the spray pipe 11. The nozzles 12 are used to spray liquid towards the workpiece 200 to be cut; the blow air pipeline 20 has a blow air port 223. Along the flow direction of the liquid in the nozzle 12, the blow air port 223 is used to blow air towards the liquid in the nozzle 12.

[0043] In this solution, taking the silicon rod as an example of the workpiece 200 to be cut, when the spraying device 100 is applied to the retraction process of the wire saw, the workpiece 200 to be cut is cut into a plurality of silicon wafers 201. The spraying device 100 includes a spraying assembly 10 and a blowing pipeline 20. The liquid in the spraying pipe 11 of the spraying assembly 10 sprays out from a plurality of nozzles 12, and the liquid sprayed out from each nozzle 12 faces the gap on the side of the silicon wafer 201. At the same time, compressed gas is blown towards the liquid in the nozzle 12 through the blowing pipeline 20. Compared with the prior art where the existing nozzle 301 only sprays liquid, in this solution, the compressed air blown out from the air outlet 223 can contact the liquid in the nozzle 12 and act on the liquid, dispersing the liquid into droplets and accelerating the droplets, so that the droplets sprayed out by the nozzle 12 are finer and faster. And the droplets sprayed out by the nozzle 12 form a liquid-gas mixture with the gas. Compared with the liquid, the liquid-gas mixture can more easily enter the gap between the silicon wafers 201 for filling, keeping the silicon wafers 201 in a parallel state, which is beneficial to reducing the tension between the silicon wafers 201, thereby reducing the extrusion of the silicon wafers 201 on the cutting wire, reducing the resistance to the movement of the cutting wire, and further reducing the output torque of the driving motor, that is, effectively reducing the effect of the output torque of the driving motor during retraction, and being more conducive to the retraction process. In addition, the setting of the blowing pipeline 20, using the liquid-gas mixture to act on the silicon wafers 201, can also play the function of saving water resources compared with only spraying liquid.

[0044] Of course, in addition to being used in the retraction process of the wire saw, the spraying device 100 can also be used in the cutting process of the wire saw, and the workpiece 200 to be cut can be spray-cooled during the cutting process through the spraying device 100.

[0045] The liquid supply system provides liquid for the spraying pipe 11. The liquid supply system has a flow regulating valve to control the liquid supply flow rate, and the on-off of the liquid is automatically controlled by an electromagnetic valve.

[0046] In some embodiments, the blowing pipeline 20 includes a main pipeline 21 and a plurality of branch pipelines 22. One end of the main pipeline 21 is communicated with the gas supply system, and the other end is closed. The plurality of branch pipelines 22 are distributed at intervals along the length direction of the main pipeline 21. One end of the branch pipeline 22 is communicated with the main pipeline 21, and the other end is a blowing port 223. The blowing port 223 extends into the nozzle 12. The positions and numbers of the plurality of branch pipelines 22 correspond to the positions and numbers of the plurality of nozzles 12 one by one. By connecting the main pipeline 21 with the gas supply system, the gas supply system can provide a gas source for the main pipeline 21. Under the conveying action of the main pipeline 21, the gas is conveyed to the plurality of branch pipelines 22. The positions and numbers of the plurality of branch pipelines 22 correspond to the positions and numbers of the plurality of nozzles 12 one by one. In this way, each nozzle 12 can correspondingly have a branch pipeline 22. By using the air outlet of the branch pipeline 22 to extend into the nozzle 12 and the blowing port 223 to blow air towards the liquid in the nozzle 12, the liquid flowing in each nozzle 12 can be refined and accelerated, making it easier to keep the adjacent two silicon wafers 201 parallel to each other, and reducing the risk of excessive retraction torque of the driving motor during retraction.

[0047] Among them, the position of the main pipeline 21 can be determined according to the actual situation. For example, the main pipeline 21 can be located inside the spray pipe 11 or on the outer side of the spray pipe 11.

[0048] When the main pipeline 21 is located inside the spray pipe 11, the main pipeline 21 will occupy the flow channel space inside the spray pipe 11, and the production and processing are relatively complex, but it has the advantages of high integration and small volume.

[0049] When the main pipeline 21 is located outside the spray pipe 11, the spray pipe 11 and the main pipeline 21 are arranged adjacent to each other, and their extending directions can be the same. In this way, the main pipeline 21 does not occupy the flow channel space inside the spray pipe 11, and the production and processing are also relatively convenient, but the volume of the spraying device 100 is relatively larger.

[0050] Exemplarily, the main pipeline 21 is located outside the spray pipe 11, and a part of the branch pipeline 22 is located inside the nozzle 12. By locating the main pipeline 21 outside the spray pipe 11, the main pipeline 21 and the spray pipe 11 are independently arranged, and the media flowing inside them do not interfere with each other. The compressed gas in the main pipeline 21 extends into the nozzle 12 through the branch pipeline 22 to realize blowing air on the liquid in the nozzle 12.

[0051] In some embodiments, the spray pipe 11 has a first flow channel 111 extending along the first direction X, and the nozzle 12 has a second flow channel 121 extending along the second direction Y. The second flow channel 121 communicates with the first flow channel 111. The first direction X is the axial direction of the spray pipe 11, and the second direction Y is the flowing direction of the liquid in the second flow channel 121. The second direction Y is perpendicular to the first direction X. By making the extending direction of the second flow channel 121 of the nozzle 12 perpendicular to the extending direction of the first flow channel 111 of the spray pipe 11, it is beneficial to vertically arrange a plurality of nozzles 12 on the spray pipe 11, which is convenient for processing, occupies a small space, and is easy to implement.

[0052] Among them, there are various arrangement ways for the branch 22 to extend into the nozzle 12. For example, the branch 22 can directly penetrate into the interior of the nozzle 12 from the outside. Of course, the branch 22 can penetrate through the spray pipe 11 along the second direction Y and then extend into the nozzle 12 along the extending direction of the second flow channel 121 of the nozzle 12.

[0053] Exemplarily, the branch 22 penetrates through the first flow channel 111 along the second direction Y, and the air blowing port 223 is located in the second flow channel 121. Since the fluid in the spray pipe 11 enters the nozzle 12, the flowing direction of the fluid in the nozzle 12 is the second direction Y. In order to make the compressed gas blown out by the air blowing port 223 better disperse and accelerate the liquid in the nozzle 12, by penetrating the branch 22 through the first flow channel 111 along the second direction Y, the flowing direction of the gas in the branch 22 is completely the same as the flowing direction of the liquid in the nozzle 12. The compressed gas blown out by the air blowing port 223 can be blown out more directly along the flowing direction of the liquid, which can better disperse and accelerate the liquid in the nozzle 12, making it easier for the kinetic energy of the compressed air and the kinetic energy of the liquid in the nozzle 12 to be superimposed on each other, reducing energy loss. Under the impact of the compressed air, the compressed air acts on and impacts the liquid droplets, making the liquid droplets sprayed by the nozzle 12 finer and the flow rate greater, so that it can more easily enter the gaps between the silicon wafers 201, more easily keep the silicon wafers 201 parallel, and is more conducive to reducing the tension between the silicon wafers 201, thereby achieving the effect of reducing the output torque of the driving motor during retraction.

[0054] It should be noted that the branch 22 penetrates through the spray pipe 11 along the second direction Y, so that the gas blown out by the air blowing port 223 of the branch 22 is completely in contact with the liquid droplets in the nozzle 12. Compared with the case where the gas blown out by the air blowing port 223 of the branch 22 has an inclination angle with the flowing direction of the liquid in the nozzle 12, the probability of the gas blowing the liquid droplets to impact the inner wall of the nozzle 12 is reduced, making it easier for the kinetic energy of the compressed air and the kinetic energy of the liquid in the nozzle 12 to be superimposed on each other, reducing energy loss, and there will be no large noise at the outlet of the nozzle 12.

[0055] In some embodiments, the branch 22 is coaxially arranged with the second flow channel 121, and there is a water passing gap between the outer peripheral wall of the branch 22 and the inner wall of the second flow channel 121. By coaxially arranging the branch 22 with the second flow channel 121, the compressed gas ejected from the branch 22 is located in the center line direction of the nozzle 12, and the compressed gas can more evenly disperse the liquid in the nozzle 12, without the phenomenon of excessive local impact force, so that the liquid in the nozzle 12 can be sprayed more evenly towards the silicon wafer 201. The branch 22 is coaxially arranged with the second flow channel 121, and there is a water passing gap between the outer peripheral wall of the branch 22 and the inner wall of the second flow channel 121, realizing the conduction of the liquid between the spray pipe 11 and the nozzle 12. And in the circumferential direction of the branch 22, the water passing gaps between the outer peripheral wall of the branch 22 and the inner wall of the second flow channel 121 are equal everywhere, and the liquid in the spray pipe 11 can uniformly enter the nozzle 12 from the water passing gap, and the phenomenon of turbulent flow is not likely to occur in the nozzle 12.

[0056] It can be understood that the coaxial arrangement of the branch 22 and the second flow channel 121 means that the branch 22 and the second flow channel 121 of the nozzle 12 are arranged on the same axis, that is, the branch 22 is located at the center of the second flow channel 121 of the nozzle 12. The aperture size of the second flow channel 121 can be 2 - 5 mm.

[0057] In some embodiments, along the second direction Y, the branch 22 includes a first pipe section 221 and a second pipe section 222. The first pipe section 221 is located outside the spray pipe 11. One end of the first pipe section 221 is communicated with the main pipeline 21, and the other end is communicated with the second pipe section 222. The second pipe section 222 penetrates through the spray pipe 11 along the second direction Y; the first pipe section 221 and the second pipe section 222 are detachably connected. By including the first pipe section 221 and the second pipe section 222 in the branch 22, the first pipe section 221 is located outside the spray pipe 11, the second pipe section 222 penetrates through the spray pipe 11, and the first pipe section 221 and the second pipe section 222 are detachably connected, which facilitates the installation and disassembly of the branch 22. When the first pipe section 221 is damaged, the first pipe section 221 can be directly removed and replaced, without the need to replace the entire branch 22, reducing the replacement difficulty and cost.

[0058] Wherein, a locking member can be arranged at one end of the first pipe section 221 close to the second pipe section 222. The locking member can be a locking nut. The first pipe section 221 and the second pipe section 222 are connected by the locking nut. When disassembly is required, only the locking member needs to be removed to disassemble the first pipe section 221.

[0059] In some embodiments, along the second direction Y, the second flow channel 121 includes a first part 1211 and a second part 1212. One end of the first part 1211 communicates with the first flow channel 111, and the other end communicates with the second part 1212; along the second direction Y, the aperture of the second part 1212 gradually increases. By including the second part 1212 in the second flow channel 121 and the aperture of the second part 1212 gradually increasing, that is, the water outlet of the nozzle 12 is in a flared shape, the water sprayed from the nozzle 12 forms conical mist droplets on the surface of the silicon wafer 201, with a wider coverage area and better spraying effect on the silicon wafer 201.

[0060] The flow channel apertures of the first part 1211 can be equal or unequal. In this embodiment, along the second direction Y, the apertures of the first part 1211 are equal.

[0061] In some embodiments, a valve is provided on the air blowing pipeline 20, and the valve is used to adjust the pressure or flow rate of the air flow in the air blowing pipeline 20. By providing a valve on the air blowing pipeline 20, the staff can adjust the opening degree of the valve according to the actual working conditions of the spraying device to adjust the air pressure or air flow rate of the air flow in the air blowing pipeline 20, which is beneficial to effectively reducing the retraction torque of the driving motor.

[0062] Among them, the valve can include a pressure reducing valve, a solenoid valve, and a flow control valve. The pressure reducing valve controls the incoming air pressure, the solenoid valve automatically controls the on / off of the air, and the flow control valve is used to control the air flow rate.

[0063] In some embodiments, the spraying device 100 further includes a pressure monitoring component and a controller. The pressure monitoring component is used to monitor the pressure of the air flow in the air blowing pipeline 20; both the pressure monitoring component and the valve are electrically connected to the controller; the controller is used to control the valve according to the monitoring data of the pressure monitoring component so that the pressure of the air flow in the air blowing pipeline 20 is maintained within a preset range. Through the settings of the pressure monitoring component and the controller, the pressure monitoring component can monitor the air pressure of the air blowing pipeline 20 in real time, the controller can receive the monitored air pressure of the pressure monitoring component in real time, and when the air pressure of the air flow in the air blowing pipeline 20 does not meet the requirements, the controller can automatically control the valve to adjust the air pressure of the air flow in the air blowing pipeline 20 so that the air pressure of the air flow in the air blowing pipeline 20 is always maintained within the preset range, without manual intervention, realizing the automatic control of the air pressure in the air blowing pipeline 20.

[0064] The embodiment of the present application also provides a wire cutting machine, which includes a frame, a cutting unit, and the spraying device 100 of any of the foregoing embodiments. The cutting unit and the spraying device 100 are arranged on the frame, and the cutting unit is used to cut the workpiece to be cut, and the nozzle 12 of the spraying device 100 is arranged facing the workpiece to be cut.

[0065] In some embodiments, the wire cutting machine is a slicing machine, and the workpiece to be cut can be a photovoltaic silicon rod, semiconductor, silicon carbide, sapphire, magnetic material, etc. Taking the silicon rod as an example of the workpiece to be cut.

[0066] The cutting unit includes a driving motor, a plurality of cutting wheels, and a cutting wire wound around the plurality of cutting wheels. The plurality of cutting wheels are mounted on a frame, and the driving motor drives the cutting wheels to rotate to drive the cutting wire to move. The cutting unit performs wire cutting on the workpiece to be cut by driving the cutting wire to move at a high speed. The cutting wire can be a diamond wire. Under the cutting action of the diamond wire, the silicon rod is cut into a plurality of silicon wafers.

[0067] The spraying device 100 further includes a liquid storage tank, and the liquid storage tank is communicated with the spray pipe through a pipeline. The liquid storage tank provides liquid for the spray tank. After the cutting unit finishes cutting the silicon rod, the silicon rod is cut into a plurality of silicon wafers, and the cutting wire is located between two adjacent silicon wafers.

[0068] During the tool retraction process, compressed gas is blown into the liquid in the nozzle 12 through the air blowing pipeline 20. The compressed air blown out from the air blowing port 223 can contact and act on the liquid in the nozzle 12, disperse the liquid into droplets and accelerate the droplets, so that the droplets sprayed out by the nozzle 12 are finer, can more easily enter the gaps between the silicon wafers 201, and more easily keep the silicon wafers 201 in a parallel state, which is beneficial to reducing the tension between the silicon wafers 201, thereby reducing the extrusion of the silicon wafers 201 on the cutting wire, reducing the resistance of the cutting wire to move, and further reducing the output torque of the driving motor, that is, effectively reducing the output torque of the driving motor during tool retraction, which is more conducive to the progress of the tool retraction process.

[0069] It should be noted that, without conflict, the features in the embodiments of the present application can be combined with each other.

[0070] The above are only the preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A spraying device for a wire cutting machine, characterized in that, Comprising: A spray assembly, including a spray pipe and a plurality of nozzles. The liquid inlet of the spray pipe is communicated with a liquid supply system. The plurality of nozzles are arranged at intervals along the length direction of the spray pipe. The nozzles are communicated with the inside of the spray pipe, and the nozzles are used for spraying liquid towards the workpiece to be cut. A blow air pipeline, having a blow air port; along the flowing direction of the liquid in the nozzle, the blow air port is used for blowing air towards the liquid in the nozzle.

2. The spray device according to claim 1, characterized in that, The blow air pipeline includes: A main pipeline, one end of which is communicated with an air supply system and the other end is closed; A plurality of branch pipelines, which are distributed at intervals along the length direction of the main pipeline. One end of each branch pipeline is communicated with the main pipeline, and the other end is the blow air port. The blow air port extends into the nozzle. The positions and quantities of the plurality of branch pipelines correspond one by one to the positions and quantities of the plurality of nozzles.

3. The spray device according to claim 2, characterized in that, The main pipeline is located outside the spray pipe, and a part of the branch pipeline is located in the nozzle.

4. The spray device according to claim 3, characterized in that, The spray pipe has a first flow channel extending along a first direction, and the nozzle has a second flow channel extending along a second direction. The second flow channel is communicated with the first flow channel. The first direction is the axial direction of the spray pipe, and the second direction is the flowing direction of the liquid in the second flow channel. The second direction is perpendicular to the first direction.

5. The spray device according to claim 4, characterized in that, The branch pipeline penetrates through the first flow channel along the second direction, and the blow air port is located in the second flow channel.

6. The spray device according to claim 5, characterized in that, The branch pipeline is coaxially arranged with the second flow channel, and there is a water passing gap between the outer peripheral wall of the branch pipeline and the inner wall of the second flow channel.

7. The spraying device according to claim 5, wherein Along the second direction, the branch pipeline includes a first pipe section and a second pipe section. The first pipe section is located outside the spray pipe. One end of the first pipe section is communicated with the main pipeline, and the other end is communicated with the second pipe section. The second pipe section penetrates through the spray pipe along the second direction. The first pipe section and the second pipe section are detachably connected.

8. The spraying device according to claim 4, characterized in that, Along the second direction, the second flow channel includes a first part and a second part. One end of the first part is communicated with the first flow channel, and the other end is communicated with the second part; along the second direction, the aperture of the second part gradually increases.

9. The spray device according to claim 1, characterized in that, A valve is arranged on the blow air pipeline, and the valve is used for adjusting the pressure or flow rate of the air flow in the blow air pipeline.

10. The spraying device according to claim 9, characterized in that, The spray device further includes: A pressure monitoring component, which is used for monitoring the pressure of the air flow in the blow air pipeline; A controller, the pressure monitoring component and the valve are both electrically connected to the controller; the controller is used for controlling the valve according to the monitoring data of the pressure monitoring component so as to maintain the pressure of the air flow in the blow air pipeline within a preset range.

11. A wire cutting machine, characterized in that, Comprising a frame, a cutting unit and the spray device according to any one of claims 1-10. The cutting unit and the spray device are arranged on the frame. The cutting unit is used for cutting the workpiece to be cut, and the nozzle of the spray device is arranged towards the workpiece to be cut.

12. The wire cutting machine according to claim 11, wherein, The wire cutting machine is a slicing machine.

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