CVD (Chemical Vapor Deposition) reaction furnace with tail gas filtering structure

Abstract

The utility model discloses a CVD (Chemical Vapor Deposition) reaction furnace with a tail gas filtering structure, which comprises a furnace body, a control switch is arranged at the front end of the furnace body, a feeding pipe is arranged at the side end of the furnace body, a tail gas filtering mechanism is arranged at the top of the furnace body, and the tail gas filtering mechanism can filter tail gas of the CVD reaction furnace. A tail gas filtering mechanism is arranged on a CVD reaction furnace, metal particles in tail gas are filtered and removed through a first filtering box and a second filtering box, a vacuum pump is prevented from being damaged, then the tail gas of the CVD reaction furnace is filtered through a filtering box, finally, the tail gas flows back into the CVD reaction furnace through a backflow pipe, and the tail gas is ignited and combusted through an igniter. The combustible gas in the tail gas is recycled, so that the resource waste is reduced.

Description

Technical Field

[0001] The utility model relates to the field of CVD equipment, in particular to a CVD reaction furnace with a tail gas filtering structure. Background Technique

[0002] The main function of the CVD reaction furnace is used for experimental research in the fields of materials science, physics, chemistry, etc. It can prepare various high-performance materials and thin films through chemical vapor deposition technology in a high-temperature environment. The main characteristics of the CVD reaction furnace include high-temperature stability, precise temperature control, and efficient CVD deposition. It is made of high-quality materials and has excellent high-temperature stability, capable of operating stably for a long time in a high-temperature environment. The tail gas generated during the production of the CVD reaction furnace is extracted by a vacuum pump. The metal particles in the tail gas will adsorb and accumulate on the inner wall of the pump cavity, which will reduce the efficiency of the vacuum pump and cause damage. After the tail gas of the CVD reaction furnace is discharged, it will not only cause pollution but also cause waste of resources;

[0003] Therefore, it is very necessary to propose a CVD reaction furnace with a tail gas filtering structure. Content of the Utility Model

[0004] The purpose of the utility model is to provide a CVD reaction furnace with a tail gas filtering structure to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] A CVD reaction furnace with a tail gas filtering structure includes a furnace body. A control switch is installed at the front end of the furnace body, a feed pipe is installed at the side end of the furnace body, and a tail gas filtering mechanism is arranged at the top of the furnace body, and the tail gas filtering mechanism can filter the tail gas of the CVD reaction furnace;

[0007] The tail gas filtering mechanism includes a first vacuum pump, a first conduit, and a first filter box. The first vacuum pump is installed at the top of the furnace body, the first filter box is installed at the side end of the furnace body, and a first conduit is installed between the first vacuum pump and the first filter box.

[0008] Preferably, a top cover is installed on the top of the first filter box through screws, a second filter box is installed at the side end of the first filter box, a bottom cover is installed at the bottom of the second filter box, and a magnet is installed on the bottom cover, and the magnet is inserted into the inside of the second filter box.

[0009] Preferably, a support cylinder is slidably arranged inside the first filter box, rock wool is installed inside the support cylinder, and a hydraulic rod is also installed at the side end of the first filter box, and the output end of the hydraulic rod is connected to the support cylinder.

[0010] Preferably, a filter box is installed on the top of the furnace body. Partition plates are evenly installed inside the filter box, and filter cotton, a water tank and an activated carbon plate are respectively arranged inside the filter box.

[0011] Preferably, a box cover is installed on the top of the filter box. A first air pipe, a second air pipe and a third air pipe are respectively installed on the box cover, and the first air pipe, the second air pipe and the third air pipe are respectively inserted into the filter box.

[0012] Preferably, a second vacuum pump is installed on the top of the furnace body. One end of the second vacuum pump is connected to the filter box through a second conduit, and an exhaust pipe is installed at the other end of the second vacuum pump.

[0013] Preferably, a tee joint and a first valve are respectively installed on the exhaust pipe. A reflux pipe is connected between the lower end of the tee joint and the furnace body. A second valve is installed on the reflux pipe, and an igniter is also installed on the side end of the furnace body.

[0014] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model.

[0015] Beneficial effects:

[0016] By providing an exhaust gas filtering mechanism on the CVD reaction furnace, metal particles in the exhaust gas are first filtered and removed by the first filter box and the second filter box to avoid damaging the vacuum pump. Then, the exhaust gas of the CVD reaction furnace is filtered by the filter box. Finally, the exhaust gas is refluxed into the CVD reaction furnace through the reflux pipe and ignited by the igniter for combustion, so that the combustible gas in the exhaust gas can be reused, reducing resource waste. Description of the drawings

[0017] Figure 1 Schematic diagram of a CVD reaction furnace with an exhaust gas filtering structure;

[0018] Figure 2 Schematic diagram of a CVD reaction furnace with an exhaust gas filtering structure;

[0019] Figure 3 Structural diagram of the first filter box and the second filter box in a CVD reaction furnace with an exhaust gas filtering structure;

[0020] Figure 4 Schematic diagram of the installation of magnets in a CVD reaction furnace with an exhaust gas filtering structure;

[0021] Figure 5 Structural diagram of the filter box in a CVD reaction furnace with an exhaust gas filtering structure;

[0022] Figure 6 Structural diagram of the box cover in a CVD reaction furnace with an exhaust gas filtering structure.

[0023] In the figure: 1. Furnace body; 11. Control switch; 12. Feed pipe; 2. Tail gas filtering mechanism; 21. First vacuum pump; 22. First conduit; 23. First filter box; 231. Top cover; 24. Second filter box; 241. Bottom cover; 242. Magnet; 25. Hydraulic rod; 251. Support cylinder; 252. Rock wool; 26. Filter box; 261. Partition board; 27. Filter cotton; 271. Water tank; 272. Activated carbon plate; 28. Box cover; 281. First air pipe; 282. Second air pipe; 283. Third air pipe; 29. Second vacuum pump; 291. Second conduit; 292. Exhaust pipe; 293. Three-way joint; 294. First valve; 295. Return pipe; 296. Second valve; 297. Igniter. Detailed implementation mode

[0024] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0025] As Figures 1-6 ;

[0026] It includes a furnace body 1. A control switch 11 is installed at the front end of the furnace body 1. The CVD reaction furnace is controlled by the control switch 11. The model of the CVD reaction furnace is KJ-T1200. A feed pipe 12 is installed at the side end of the furnace body 1. Materials are fed into the furnace body 1 through the feed pipe 12. A tail gas filtering mechanism 2 is provided at the top of the furnace body 1. The tail gas filtering mechanism 2 can filter the tail gas of the CVD reaction furnace;

[0027] The tail gas filtering mechanism 2 includes a first vacuum pump 21, a first conduit 22 and a first filter box 23. The first vacuum pump 21 is installed at the top of the furnace body 1. The model of the first vacuum pump 21 is SKA-5121. The first vacuum pump 21 is used to extract the tail gas in the furnace body 1. The first filter box 23 is installed at the side end of the furnace body 1. The first filter box 23 supports and installs the support cylinder 251 and the second filter box 24. A first conduit 22 is installed between the first vacuum pump 21 and the first filter box 23. The tail gas is guided through the first conduit 22 so that the tail gas can be sucked into the first vacuum pump 21;

[0028] Further, the top of the first filter cartridge 23 is installed with a top cover 231 through screws. The top cover 231 can be opened. A rubber gasket is arranged between the first filter cartridge 23 and the top cover 231. The second filter cartridge 24 is installed at the side end of the first filter cartridge 23. The bottom cover 241 is installed at the bottom of the second filter cartridge 24. The bottom cover 241 can be opened. A rubber gasket is arranged between the second filter cartridge 24 and the bottom cover 241. A magnet 242 is installed on the bottom cover 241. The magnet 242 is inserted into the interior of the second filter cartridge 24. The magnet 242 adsorbs metal impurities in the tail gas, causing the metal impurities to concentrate inside the second filter cartridge 24. A support cylinder 251 is slidably arranged inside the first filter cartridge 23. The support cylinder 251 is used for supporting and installing the rock wool 252. The rock wool 252 is installed inside the support cylinder 251. The support cylinder 251 can slide inside the first filter cartridge 23. A hydraulic rod 25 is also installed at the side end of the first filter cartridge 23. The output end of the hydraulic rod 25 is connected to the support cylinder 251. The hydraulic rod 25 is used to push the support cylinder 251 to slide inside the first filter cartridge 23;

[0029] Further, a filter box 26 is installed at the top of the furnace body 1. The filter box 26 is used for filtering the tail gas. Partition plates 261 are evenly installed inside the filter box 26. The filter cotton 27, the water tank 271 and the activated carbon plate 272 are separated by the partition plates 261 respectively. The filter cotton 27, the water tank 271 and the activated carbon plate 272 are respectively arranged inside the filter box 26. The tail gas is first filtered by the filter cotton 27, then filtered by the water in the water tank 271, and finally filtered by the multi-layer activated carbon plate 272;

[0030] Further, a box cover 28 is installed at the top of the filter box 26. The box cover 28 is used for sealing and covering the top of the filter box 26. The box cover 28 can also be disassembled and removed. A drain pipe is arranged at the side end of the filter box 26 for draining and filling water in the water tank 271. The first air pipe 281, the second air pipe 282 and the third air pipe 283 are respectively installed on the box cover 28. The first air pipe 281, the second air pipe 282 and the third air pipe 283 are all high at one end and low at the other end. The lowest end of the first air pipe 281 is inserted into the bottom of the filter cotton 27. The lowest end of the second air pipe 282 is inserted into the bottom of the water tank 271. The lowest end of the third air pipe 283 is inserted into the bottom of the activated carbon plate 272. The first air pipe 281, the second air pipe 282 and the third air pipe 283 are respectively inserted into the filter box 26;

[0031] Further, a second vacuum pump 29 is installed at the top of the furnace body 1. The model of the second vacuum pump 29 is SKA-5121. The second vacuum pump 29 is used to extract the tail gas in the filter box 26 to accelerate the flow of the tail gas. One end of the second vacuum pump 29 is connected to the filter box 26 through a second conduit 291. The filtered tail gas in the filter box 26 is introduced into the second vacuum pump 29 through the second conduit 291. The other end of the second vacuum pump 29 is installed with an exhaust pipe 292. The filtered tail gas of the CVD reaction furnace can be discharged through the exhaust pipe 292. A tee 293 and a first valve 294 are respectively installed on the exhaust pipe 292. A reflux pipe 295 is connected to the exhaust pipe 292 through the tee 293. The opening and closing of the exhaust pipe 292 are controlled by the first valve 294. A reflux pipe 295 is connected between the lower end of the tee 293 and the furnace body 1. The tail gas is refluxed into the furnace body 1 through the reflux pipe 295. A second valve 296 is installed on the reflux pipe 295. The opening and closing of the reflux pipe 295 are controlled by the second valve 296. An igniter 297 is also installed on the side end of the furnace body 1. The igniter 297 ignites the combustible gas refluxed into the furnace body 1 for repeated use.

[0032] The working principle of the present utility model is as follows: The first vacuum pump 21 extracts the tail gas in the furnace body 1 through the first conduit 22. The tail gas first enters the second filter box 24, and the metal impurities in the tail gas are adsorbed by the magnet 242, so that the metal impurities are concentrated in the second filter box 24. The metal impurities can be taken out by disassembling the bottom cover 241. Then the tail gas enters the first filter box 23 and is filtered by the rock wool 252. The first vacuum pump 21 transports the tail gas to the bottom of the filter cotton 27. First, it is filtered by the filter cotton 27, and then the tail gas enters the bottom of the water tank 271 through the first air pipe 281 and is filtered by the water in the water tank 271. The tail gas enters the bottom of the activated carbon plate 272 through the second air pipe 282 and is filtered by the activated carbon plate 272. Finally, the second vacuum pump 29 extracts the tail gas through the second conduit 291. The filtered tail gas of the CVD reaction furnace can be discharged through the exhaust pipe 292. The opening and closing of the exhaust pipe 292 are controlled by the first valve 294. The opening and closing of the reflux pipe 295 are controlled by the second valve 296. The tail gas is refluxed into the furnace body 1 through the reflux pipe 295. Then the igniter 297 is started to ignite the combustible gas refluxed into the furnace body 1 for repeated use.

[0033] Although the present utility model has been described above with reference to the embodiments, various improvements can be made to it and its components can be replaced with equivalents without departing from the scope of the present utility model. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present utility model can be combined with each other in any way. The exhaustive description of these combinations is not given in this specification only for the sake of saving space and resources. Therefore, the present utility model is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A CVD reactor with an exhaust gas filtering structure, comprising a furnace body (1). A control switch (11) is installed at the front end of the furnace body (1), and a feed pipe (12) is installed at the side end of the furnace body (1). It is characterized in that: An exhaust gas filtering mechanism (2) is provided at the top of the furnace body (1), and the exhaust gas filtering mechanism (2) can filter the exhaust gas of the CVD reactor; The exhaust gas filtering mechanism (2) includes a first vacuum pump (21), a first conduit (22) and a first filter box (23). The first vacuum pump (21) is installed at the top of the furnace body (1), the first filter box (23) is installed at the side end of the furnace body (1), and the first conduit (22) is installed between the first vacuum pump (21) and the first filter box (23).

2. The CVD reaction furnace with a tail gas filtration structure according to claim 1, characterized in that: The top of the first filter box (23) is installed with a top cover (231) by screws. A second filter box (24) is installed at the side end of the first filter box (23). A bottom cover (241) is installed at the bottom of the second filter box (24), and a magnet (242) is installed on the bottom cover (241), and the magnet (242) is inserted into the interior of the second filter box (24).

3. The CVD reactor with a tail gas filtration structure according to claim 2, wherein: A support cylinder (251) is slidably arranged inside the first filter box (23), rock wool (252) is installed inside the support cylinder (251), and a hydraulic rod (25) is also installed at the side end of the first filter box (23), and the output end of the hydraulic rod (25) is connected to the support cylinder (251).

4. A CVD reactor with a tail gas filtration structure according to claim 1, characterized in that: A filter box (26) is installed at the top of the furnace body (1). Partition plates (261) are evenly installed inside the filter box (26), and filter cotton (27), a water tank (271) and an activated carbon plate (272) are respectively arranged inside the filter box (26).

5. The CVD reactor with a tail gas filtration structure according to claim 4, characterized in that: A box cover (28) is installed at the top of the filter box (26). A first air pipe (281), a second air pipe (282) and a third air pipe (283) are respectively installed on the box cover (28), and the first air pipe (281), the second air pipe (282) and the third air pipe (283) are respectively inserted into the filter box (26).

6. The CVD reactor with a tail gas filtration structure according to claim 5, characterized in that: A second vacuum pump (29) is installed at the top of the furnace body (1). One end of the second vacuum pump (29) is connected to the filter box (26) through a second conduit (291), and the other end of the second vacuum pump (29) is installed with an exhaust pipe (292).

7. The CVD reaction furnace with a tail gas filtration structure according to claim 6, characterized in that: A tee (293) and a first valve (294) are respectively installed on the exhaust pipe (292). A reflux pipe (295) is connected between the lower end of the tee (293) and the furnace body (1), a second valve (296) is installed on the reflux pipe (295), and an igniter (297) is also installed at the side end of the furnace body (1).

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