Vacuum coating equipment and solar cell production line

Abstract

The utility model discloses vacuum coating equipment and a solar cell production line, and relates to the technical field of coating. The vacuum coating equipment can absorb the displacement of the conductive part relative to the shell, the sealing reliability of the vacuum coating equipment can be improved, the thermal deformation amount of the electrode assembly can be released, and the deformation amount of the electrode assembly can be reduced. The vacuum coating equipment comprises a shell, an electrode assembly and a first conductive part, wherein a working cavity is defined by the shell, and an air inlet channel is formed in the shell wall of the shell; the electrode assembly is located in the working cavity; the first conductive part is arranged on the shell wall of the shell in a penetrating mode and is in sealed connection with the shell wall, the end, close to the electrode assembly, of the first conductive part is connected with the electrode assembly through a connecting structure, the connecting structure can conduct current and can deform under the action of external force, and the other end of the first conductive part is used for being connected with a power supply.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular, to a vacuum coating device and a solar cell production line. Background Art

[0002] Vacuum coating technology is used in the coating process of solar cells. In a plasma enhanced chemical vapor deposition (PECVD) vacuum coating device, a parallel plate electrode plasma discharge structure is usually adopted. During the operation of the vacuum coating device, the temperature in the chamber is relatively high, resulting in a large temperature difference between the upper cover and the parallel plate electrode located in the chamber. This causes the expansion amount of the parallel plate electrode to be greater than that of the upper cover. After both the parallel plate electrode and the upper cover expand, due to the connection between the parallel plate electrode and the upper cover, the thermal expansion deformation of the parallel plate electrode will be restricted, causing the parallel plate electrode to warp or deform, thus affecting the thickness and uniformity of the film layer formed on the workpiece to be coated. Summary of the Utility Model

[0003] This application provides a vacuum coating device that can release the thermal deformation amount of the electrode assembly, which is beneficial to reducing the deformation amount of the electrode assembly.

[0004] In a first aspect of this application, a vacuum coating device is provided. The vacuum coating device includes: a housing, an electrode assembly, and a first conductive member. Among them, the housing encloses to form a working chamber, and an air inlet channel is provided on the housing wall; the electrode assembly is located in the working chamber; the first conductive member penetrates through the housing wall and is hermetically connected to the housing wall. One end of the first conductive member close to the electrode assembly is connected to the electrode assembly through a connection structure. The connection structure can conduct current and can generate deformation under the action of an external force. The other end of the first conductive member is used to connect to a power supply.

[0005] The vacuum coating equipment provided by this application can form a working chamber inside the housing, enabling the electrode assembly to be arranged inside the working chamber and a required working environment to be formed inside the working chamber. Moreover, a first conductive member is penetrated through the housing of the vacuum coating equipment, and connection points can be provided through the first conductive member, facilitating the connection of the vacuum coating equipment to a power supply through the first conductive member. At the same time, the first conductive member is connected to the electrode assembly through a connection structure, and the connection structure can deform under the action of an external force. In this way, when the electrode assembly and the housing generate relative displacement due to thermal expansion, since the connection structure can deform, during the process of the electrode assembly moving relative to the housing, the connection structure cannot drive the first conductive member to move relative to the housing, or the connection structure can drive the first conductive member to generate a slight movement relative to the housing, but it will not affect the sealed connection between the first conductive member and the housing. And when the electrode assembly undergoes thermal expansion due to temperature change, the connection structure only has a slight impact on the thermal deformation of the electrode assembly, or even does not hinder the thermal deformation of the electrode assembly, enabling the thermal deformation amount of the electrode assembly to be released, thereby reducing the deformation amount of the electrode assembly. Therefore, the vacuum coating equipment provided by this application can release the thermal deformation amount of the electrode assembly, which is beneficial to reducing the deformation amount of the electrode assembly.

[0006] In a possible implementation manner of this application, the connection structure includes a flexible member. One end of the flexible member is connected to the first conductive member, and the other end is connected to the electrode assembly. The flexible member can conduct current.

[0007] In the technical solution of this application, since the connection structure includes a flexible member that can conduct current, after connecting the first conductive member and the electrode assembly through the flexible member, because the flexible member is prone to deformation under the action of an external force, the displacement generated by the electrode assembly relative to the housing due to thermal expansion can be absorbed and offset by the flexible member, thereby reducing the pulling force received by the first conductive member and being beneficial to reducing the displacement of the first conductive member relative to the housing.

[0008] In a possible implementation manner of this application, the connection structure further includes a fixing member. The fixing member connects one end of the flexible member to the first conductive member and connects the other end of the flexible member and the electrode assembly.

[0009] In the technical solution of this application, since a fixing member is provided on the flexible member, a part of the flexible member can be fixedly connected to the first conductive member and the electrode assembly respectively through the fixing member, thereby providing support and connection for the flexible member and being beneficial to enhancing the connection strength between the flexible member and the first conductive member and the electrode assembly respectively.

[0010] In a possible implementation manner of the present application, the connection structure includes a flexible member and a second conductive member. The second conductive member is connected to the electrode assembly. One end of the flexible member is connected to the first conductive member, and the other end of the flexible member is connected to the second conductive member. The flexible member can conduct current. When the electrode assembly generates a displacement relative to the first conductive member, the electrode assembly drives the second conductive member to generate a displacement relative to the first conductive member, so that the flexible member deforms.

[0011] In the technical solution of the present application, since the connection structure includes a second conductive member, it is convenient to electrically connect the second conductive member to the electrode assembly by means of sliding contact, rolling connection, etc. And the second conductive member is connected to the first conductive member through a flexible member capable of conducting current. During the process that the second conductive member moves relative to the first conductive member with the thermal expansion deformation of the electrode assembly, the flexible member can reduce the acting force exerted by the second guiding member on the first conductive member, thereby reducing the risk of the first conductive member moving relative to the housing.

[0012] In a possible implementation manner of the present application, the second conductive member is fixedly connected to the electrode assembly, and the second conductive member is movably connected to the housing through a moving mechanism.

[0013] In the technical solution of the present application, since the second conductive member is connected to the housing through a moving mechanism, the moving mechanism can provide support for the second conductive member, and can also enable the second conductive member to move relative to the housing through the moving mechanism, thereby eliminating the acting force exerted on the housing by the electrode assembly during the thermal expansion process through the second conductive member.

[0014] In a possible implementation manner of the present application, the moving mechanism includes a cage and rolling elements. A fixing portion is provided on the second conductive member, and the fixing portion extends radially along the second conductive member. Axially along the second conductive member, a first part of the cage is connected to the fixing portion, a second part of the cage is connected to the housing, and the rolling elements are located between the first part and the second part, and the first part and the second part can generate relative movement through the rolling elements.

[0015] In the technical solution of the present application, since the moving mechanism includes a cage and rolling elements, the rolling elements can be arranged in the cage to facilitate the relative movement of the two parts of the cage through the rolling elements. And a fixing portion is provided on the second conductive member, and the fixing portion can be clamped between two cages, and a part of the cage is fixedly connected to the housing, so that the fixing portion can provide support for the second conductive member, and the fixing portion can move relative to the housing through the cage and the rolling elements.

[0016] In a possible implementation manner of the present application, a first insulating member is sleeved on the second conductive member, and the fixing portion is formed by extending from the outer wall of the first insulating member.

[0017] In the technical solution of the present application, since the first insulating member is sleeved on the second conductive member, it is beneficial to reduce the surface of the second conductive member exposed to the process gas.

[0018] In a possible implementation manner of the present application, the fixing portion extends from the second conductive member, the first insulating member is coated on the second conductive member, and the second portion of the cage abuts against the housing through the second insulating member.

[0019] In the technical solution of the present application, since the fixing portion extends from the second conductive member, the second conductive member can be supported by the fixing portion on the second conductive member, which is beneficial to improving the reliability of the support for the second conductive member. And a second insulating member is provided between the cage and the housing, and the current between the second conductive member and the housing can be isolated through the second insulating member, which is beneficial to improving the insulation performance of the vacuum coating equipment.

[0020] In a possible implementation manner of the present application, the housing has a fixing hole, and the vacuum coating equipment further includes a fixing component matching the fixing hole. The fixing component is sleeved on the first conductive member and fixedly connected to the fixing hole. A first sealing member is provided between the first conductive member and the fixing component, and a second sealing member is provided between the fixing component and the fixing hole.

[0021] In the technical solution of the present application, since the fixing hole is provided on the housing, it is convenient to arrange the fixing component in the fixing hole to fixedly connect the fixing component to the housing. And the fixing component is sleeved on the first conductive member, and a first sealing member is provided between the first conductive member and the fixing component, which can not only fix and limit the first conductive member, but also realize the sealed connection between the first conductive member and the fixing component. At the same time, a second sealing member is provided between the fixing component and the fixing hole of the housing, which can realize the sealed connection between the fixing component and the housing, so as to realize the sealed connection between the first conductive member and the housing, which is beneficial to improving the sealing performance of the working chamber.

[0022] In a possible implementation manner of the present application, the fixing component includes a first fixing ring and a second fixing ring; the first fixing ring is fixedly connected to the fixing hole, a third insulating member and a fourth insulating member are sleeved on the first conductive member, the third insulating member passes through the first fixing ring, the fourth insulating member is sleeved on the first conductive member and abuts against the abutting portion extending radially on the first conductive member; the first sealing member is located between the first conductive member and the third insulating member, the second sealing member is located between the first fixing ring and the fixing hole, and a third sealing member is provided between the third insulating member and the first fixing ring; the second fixing ring is sleeved on the fourth insulating member, the second fixing ring is fixedly connected to the first fixing ring, and the third insulating member is pressed and abutted in the first fixing ring through the fourth insulating member.

[0023] In the technical solution of the present application, since the fixing component includes a first fixing ring and a second fixing ring, a third insulating member and a fourth insulating member can be arranged between the first fixing ring and the second fixing ring, and the first conductive member can be passed through the third insulating member and the fourth insulating member, so that an insulating connection between the first conductive member and the fixing component can be achieved. A third sealing member is arranged between the third insulating member and the first fixing ring, and a sealed connection between the first fixing ring and the third insulating member can be realized through the third sealing member, which is beneficial to improving the sealing performance between the first conductive member and the housing.

[0024] In a possible implementation manner of the present application, the electrode assembly includes a first electrode member, a second electrode member and a spraying member; the second electrode member is connected to the housing, the connection structure is connected to the second electrode member, the second electrode member has a plurality of air inlet holes, and the air inlet holes are communicated with the air inlet channel. The spraying member is located between the first electrode member and the second electrode member, and an air distribution space is formed by enclosing between the second electrode member and the spraying member. There is a working space between the first electrode member and the spraying member, and the spraying member has a plurality of spraying holes. The working space is communicated with the air distribution space through the spraying holes.

[0025] In the technical solution of the present application, since the electrode assembly includes a second electrode member and a spraying member, an air distribution space can be formed by enclosing between the spraying member and the second electrode member, and there is a working space between the first electrode member and the spraying member. In this way, after the process gas enters the air distribution space through the air inlet on the second electrode member, the process gas can first fill the air distribution space. After the air distribution space is filled or nearly filled with the process gas, the process gas then flows from the plurality of spraying holes to the working space, which is beneficial to improving the uniformity of the distribution of the process gas in the working space.

[0026] The second aspect of the present application provides a solar cell production line, which includes: a transfer device and the vacuum coating device provided in any one of the first aspects above; the transfer device is used to transport the solar cell to the vacuum coating device, and / or remove the solar cell from the vacuum coating device.

[0027] In the solar cell production line provided by the present application, since it includes the vacuum coating device provided in any one of the first aspects above, the thermal deformation amount of the electrode assembly can be released, which is beneficial to reducing the deformation amount of the electrode assembly. Description of the Drawings

[0028] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present application. Moreover, in all the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0029] Figure 1Schematic structural diagram of the vacuum coating equipment provided by this application;

[0030] Figure 2 Provided by this application Figure 1 Partial enlarged view of part A in Figure 1 ;

[0031] Figure 3 Provided by this application Figure 1 Partial enlarged view of part A in Figure 2 .

[0032] Explanation of reference numerals:

[0033] 1 - Outer shell; 11 - Housing; 12 - End cover; 13 - Intake channel; 14 - Fixing hole; 2 - Electrode assembly; 21 - Spraying assembly; 211 - Second electrode member; 212 - Spraying member; 213 - Intake hole; 214 - Gas - equalizing space; 22 - First electrode member; 23 - Spraying hole; 24 - Working space; 25 - Connecting rod; 26 - Connecting plate; 3 - First conductive member; 31 - Contact portion; 4 - Connection structure; 41 - Flexible member; 42 - Second conductive member; 5 - Moving mechanism; 51 - Cage; 511 - First part; 512 - Second part; 52 - Rolling element; 53 - Second insulating member; 6 - First insulating member; 61 - Fixing portion; 7 - Fixing assembly; 71 - First fixing ring; 72 - Second fixing ring; 73 - Third insulating member; 74 - Fourth insulating member; 81 - First sealing member; 82 - Second sealing member; 83 - Third sealing member; 91 - Power supply; 92 - Substrate; Z - Axial direction. Detailed implementation manners

[0034] Hereinafter, embodiments of the technical solutions of this application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of this application, so they are only examples and cannot be used to limit the protection scope of this application.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and the above - mentioned accompanying drawings of this application are intended to cover non - exclusive inclusion.

[0036] In the description of the embodiments of this application, technical terms such as "first", "second", "third", etc. are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity, specific order or primary - secondary relationship of the indicated technical features. In the description of the embodiments of this application, "a plurality" means more than two unless otherwise specifically defined.

[0037] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0038] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0039] In the description of the embodiments of the present application, the orientation or position relationship indicated by technical terms such as "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", and "circumferential" are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed, operated or used in a specific orientation. Therefore, they should not be understood as limitations on the embodiments of the present application.

[0040] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0041] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, the technical term "contact" should be understood in a broad sense, and may be direct contact or contact through an intermediate medium layer. It may be contact with essentially no interaction force between the two contacting parties, or it may be contact with interaction force between the two contacting parties.

[0042] Plasma enhanced chemical vapor deposition (PECVD) technology is a commonly used coating technology at present. Under the action of an electric field, plasma is generated, and gaseous substances containing film-forming atoms are chemically reacted by means of the plasma to deposit and form a film layer on the surface of a substrate.

[0043] In a PECVD vacuum coating device, usually two parallel electrode plates are provided, and the two parallel electrode plates are used as a plasma discharge structure. One of the electrode plates is electrically connected to a high-frequency power supply, such as electrically connecting the electrode plate to a 13.56 MHz high-frequency power supply through a conductive member to apply a voltage to the two electrode plates. The process gas between the two electrode plates is deposited on the surface of the electrode plate of the workpiece to be coated under the action of the plasma. However, after coating the substrate by the PECVD vacuum coating device, there is a problem of uneven film thickness on the substrate.

[0044] There are two ways to feed the power supply into the electrode plates in the PECVD vacuum coating device, one is intermediate feeding, and the other is multi-point feeding around. The multi-point feeding method is mostly used on large-area parallel plate electrodes, and the distances from each feeding point to the center point of the cavity are relatively large. Since the conductive member needs to pass through the upper cover of the cavity and be connected to the electrode plate. And the electrode plate is in a cavity with a relatively high temperature, resulting in a large temperature difference between the electrode plate and the upper cover, and the temperature difference is about 120 to 200 °C. Although both the upper cover and the electrode plate can be made of aluminum alloy to make the upper cover and the electrode plate have the same coefficient of thermal expansion. However, due to the temperature difference, different thermal expansion amounts will be generated between the upper cover and the electrode plate, that is, the thermal expansion amount of the electrode plate is large, and the thermal expansion amount of the upper cover is small. And there is a connection between the electrode plate and the upper cover, and the conductive member between the electrode plate and the upper cover will make the extra thermal expansion amount (thermal expansion deformation amount) of the electrode plate relative to the upper cover have nowhere to be released, resulting in the warping or sagging of the electrode plate, thereby causing a change in the distance between the two electrode plates, that is, the parallelism of the two electrode plates no longer meets the use requirements, and further affecting the electromagnetic field formed between the two electrode plates, and thus affecting the uniformity of the film layer formed on the substrate.

[0045] The embodiment of the present application provides a vacuum coating device. Refer to Figure 1 、 Figure 2 and Figure 3 , Figure 1 which is a schematic structural diagram of the vacuum coating device provided by the present application, Figure 2 is the Figure 1 partial enlarged schematic diagram of part A in Figure 1 , Figure 3 is the Figure 1 partial enlarged schematic diagram of part A in Figure 2。The vacuum coating equipment provided by the embodiments of the present application can reduce the movement of the conductive member relative to the housing, which is beneficial to improving the sealing reliability of the vacuum coating equipment.

[0046] The vacuum coating equipment provided by the embodiments of the present application includes: a housing 1, an electrode assembly 2, and a first conductive member 3. Among them, the housing 1 encloses to form a working chamber, and an air inlet channel 13 is provided on the housing wall of the housing 1; the electrode assembly 2 is located in the working chamber; the first conductive member 3 penetrates through the housing wall of the housing 1 and is hermetically connected to the housing wall. One end of the first conductive member 3 close to the electrode assembly 2 is connected to the electrode assembly 2 through a connection structure 4. The connection structure 4 can conduct current and can generate deformation under the action of an external force. The other end of the first conductive member 3 is used to be connected to a power supply 91.

[0047] In the embodiments of the present application, the housing 1 is used to arrange other components in the vacuum coating equipment and can form a working chamber in the housing 1. For example, the working chamber is set as a sealed cavity, and a negative pressure pump or the like is used to suck the working chamber so as to form a negative pressure state (vacuum environment) that meets the use requirements in the working chamber.

[0048] Exemplarily, as Figure 1 shown, the housing 1 can be set to include a housing body 11 and an end cover 12. For example, the housing body 11 can be a cuboid box-shaped structure with a receiving groove, and the plate-shaped end cover 12 can be hermetically covered on the opening of the housing body 11 to form the housing 1 with a working chamber. Both the housing body 11 and the end cover 12 can be made of materials such as aluminum or aluminum alloy.

[0049] In another example, an air inlet channel 13 can be provided on the housing wall of the housing 1 to facilitate connecting the working chamber of the housing 1 to the gas source of the process gas through the air inlet channel 13. For example, a through hole serving as the air inlet channel 13 can be provided on the end cover 12, and the through hole is connected to the gas source through a pipeline or the like. In this way, the process gas can enter the working chamber of the housing 1 through the pipeline and the air inlet channel 13.

[0050] In the embodiments of the present application, the electrode assembly 2 is used to form an electromagnetic field in the working chamber so that plasma can be generated in the working chamber. For example, the electrode assembly 2 can be set to include a structure of two parallel electrode plates. The two parallel electrode plates are both fixed in the working chamber of the housing 1, that is, one electrode plate can be connected to the end cover 12, and the other electrode plate can be connected to the inner wall of the housing body 11. And there is a gap between the two electrode plates, then the substrate 92 to be coated can be placed in the gap between the two electrode plates. After applying a voltage to the two electrode plates, an electromagnetic field can be formed between the two electrode plates, so that plasma is generated in the gap between the two electrode plates, and the process gas undergoes a polymerization reaction in the plasma environment, so that a film layer can be formed on the surface of the substrate 92 to be coated.

[0051] In the embodiment of the present application, the electrode assembly 2 needs to be connected to the power supply 91 to apply a voltage to the electrode assembly 2. A first conductive member 3 can be provided in the vacuum coating equipment, and the first conductive member 3 is connected to the electrode assembly 2, so that the first conductive member 3 is used as a feeding point and connected to the power supply 91.

[0052] Exemplarily, the first conductive member 3 can be made of a metal material capable of conducting current, such as aluminum, copper, aluminum alloy, copper alloy, etc. The first conductive member 3 can be set as a rod-shaped structure, such as a cylindrical shape. Correspondingly, a through hole for the first conductive member 3 to pass through can be provided on the housing 1. For example, a through hole can be provided on the end cap 12 in the housing 1, then the first conductive member 3 can pass through the through hole on the end cap 12, so that a part of the first conductive member 3 is located in the working chamber, and the other part is located outside the housing 1. The part of the first conductive member 3 located outside the housing 1 can be electrically connected to the power supply 91 through a cable or the like. And the first conductive member 3 can be hermetically connected to the edge of the through hole on the end cap 12, such as the first conductive member 3 is hermetically abutted against the hole wall of the through hole on the end cap 12 through a sealing ring, or the first conductive member 3 is bonded in the through hole of the end cap 12 through a sealant to achieve the sealing connection between the first conductive member 3 and the end cap 12.

[0053] Another example, as Figure 1 and Figure 2 shown, one end of the first conductive member 3 located in the working chamber can be connected to the electrode assembly 2 through a connection structure 4. The connection structure 4 can be made of a material capable of conducting current, such as metal materials like copper, aluminum, alloy, etc. And the connection structure 4 can be set as a structure capable of deforming. For example, the connection structure 4 can be a flexible cable, a conductive elastic sheet, an elastic contact conductive component, etc. In this way, one end of the connection structure 4 can be fixedly connected to the first conductive member 3, and the other end of the connection structure 4 can be electrically connected to the electrode assembly 2, so that the first conductive member 3 and the electrode assembly 2 can be connected in a current-conducting manner.

[0054] The vacuum coating equipment provided by the embodiments of the present application can form a working cavity within the outer shell 1, enabling the electrode assembly 2 to be disposed within the working cavity and creating a desired working environment within the working cavity. Additionally, a first conductive member 3 is passed through the outer shell 1 of the vacuum coating equipment, providing a connection point through which the vacuum coating equipment can be connected to a power supply 91 via the first conductive member 3. Meanwhile, the first conductive member 3 is connected to the electrode assembly 2 through a connection structure 4, and the connection structure 4 is capable of deforming under the action of an external force. In this way, in the case where the electrode assembly 2 and the outer shell 1 undergo relative displacement due to thermal expansion, since the connection structure 4 can deform, during the movement of the electrode assembly 2 relative to the outer shell 1, the connection structure 4 cannot drive the first conductive member 3 to move relative to the outer shell 1, or the connection structure 4 can drive the first conductive member 3 to move slightly relative to the outer shell 1, but it does not affect the sealed connection between the first conductive member 3 and the outer shell 1. Moreover, when the electrode assembly 2 undergoes thermal expansion due to temperature change, the connection structure 4 only has a slight impact on the thermal deformation of the electrode assembly 2, or even does not impede the thermal deformation of the electrode assembly 2, allowing the thermal deformation amount of the electrode assembly 2 to be released, thereby reducing the deformation amount of the electrode assembly 2. Therefore, the vacuum coating equipment provided by the present application can not only absorb the displacement of the first conductive member 3 relative to the outer shell 1, which is beneficial to improving the reliability of the seal of the vacuum coating equipment, but also release the thermal deformation amount of the electrode assembly 2, which is beneficial to reducing the deformation amount of the electrode assembly 2.

[0055] In some possible embodiments of the present application, the connection structure 4 includes a flexible member 41. One end of the flexible member 41 is connected to the first conductive member 3, and the other end is connected to the electrode assembly 2. The flexible member 41 can conduct current.

[0056] In the embodiments of the present application, as Figure 2 and Figure 3 shown, the connection structure 4 can adopt the flexible member 41 to achieve a movable connection between the first conductive member 3 and the electrode assembly 2 through the easily deformable characteristic of the flexible member 41 itself.

[0057] Exemplarily, the flexible member 41 can adopt a flexible conductive sheet. For example, the flexible conductive sheet can be made of a metal material and is configured in an approximately S-shaped structure so that the flexible conductive sheet is prone to deformation under the action of an external force without being damaged such as breaking. One end of the flexible conductive sheet can be welded to the first conductive member 3, and the other end can be welded to the electrode assembly 2.

[0058] In the above embodiments, since the connection structure 4 includes a flexible member 41 capable of conducting current, after connecting the first conductive member 3 and the electrode assembly 2 through the flexible member 41, because the flexible member 41 is prone to deformation under the action of an external force, the flexible member 41 can be used to absorb and offset the displacement of the electrode assembly 2 relative to the housing 1 due to thermal expansion. Furthermore, the pulling force on the first conductive member 3 can be reduced, which is beneficial to reducing the displacement of the first conductive member 3 relative to the housing 1.

[0059] In some possible embodiments of the present application, the connection structure 4 further includes a fixing member (not shown in the figure). The fixing member connects one end of the flexible member 41 to the first conductive member 3, and the fixing member connects the other end of the flexible member 41 and the electrode assembly 2.

[0060] In the embodiments of the present application, a fixing member can be provided in the connection structure 4 to support and fix the flexible member 41 through the fixing member.

[0061] Exemplarily, the fixing member can be sleeved on the flexible member 41. For example, the fixing member can be set in the structural form of a flange, and through holes can be provided on the fixing member. The flexible member 41 can be passed through the through holes on the flange, and the flexible member 41 and the flange can be fixedly connected through an insulating material. Among them, along the axial direction Z of the first conductive member 3, the thickness of the flange is less than the length of the flexible member 41. For example, insulating plastic can be provided on the flexible member 41, and the insulating plastic can be fixedly connected to the hole wall of the through hole on the flange. One fixing member can be provided at each end of the flexible member 41. One fixing member is fixedly connected to the first conductive member 3, and the other fixing member is fixedly connected to the electrode assembly 2.

[0062] In the above embodiments, since a fixing member is provided on the flexible member 41, a part of the flexible member 41 can be fixedly connected to the first conductive member 3 and the electrode assembly 2 respectively through the fixing member, so as to provide support and connection for the flexible member 41, which is beneficial to improving the connection strength between the flexible member 41 and the first conductive member 3 and the electrode assembly 2 respectively.

[0063] In some possible embodiments of the present application, the connection structure 4 includes a flexible member 41 and a second conductive member 42. The second conductive member is connected to the electrode assembly. One end of the flexible member is connected to the first conductive member, and the other end of the flexible member is connected to the second conductive member. The flexible member can conduct current; when the electrode assembly generates a displacement relative to the first conductive member, the electrode assembly drives the second conductive member to generate a displacement relative to the first conductive member, so that the flexible member deforms.

[0064] In the embodiments of the present application, such as Figure 2 and Figure 3As shown, the connection structure 4 can be set to include a flexible member 41 and a second conductive member 42. Among them, the second conductive member 42 is connected to the electrode assembly 2, and the flexible member 41 is connected between the first conductive member 3 and the second conductive member 42.

[0065] Exemplarily, the second conductive member 42 can be made of metal materials such as aluminum, copper, aluminum alloy or copper alloy. The second conductive member 42 can be set in a cylindrical shape, or can be set in a cuboid shape or other shapes. The second conductive member 42 can be in sliding contact or rolling contact with the electrode assembly 2. For example, conductive balls are provided on the second conductive member 42, so that the second conductive member 42 is in rolling contact with the electrode assembly 2 through the balls, or elastic contacts are provided on the second conductive member 42, so that the second conductive member 42 is in sliding contact with the electrode assembly 2 through the elastic contacts, and there is a gap between the second conductive member 42 and the first conductive member 3. The second conductive member 42 can be connected to the housing 1 through a flexible material to provide support for the second conductive member 42 through the housing 1. In this way, during the process of deformation of the electrode assembly 2 due to thermal expansion, the second conductive member 42 can slide relative to the electrode assembly 2, or the second conductive member 42 is always in contact with the electrode assembly 2 through the elastic contacts.

[0066] In another example, the flexible member 41 can be located in the gap between the first conductive member 3 and the second conductive member 42. The flexible member 41 can be a flexible conductive sheet, such as an S-shaped elastic sheet, or the flexible member 41 can also be a flexible cable with a length greater than the width of the gap between the first conductive member 3 and the second conductive member 42. One end of the flexible member 41 can be welded or bonded to the first conductive member 3, and the other end of the flexible member 41 can be welded or bonded to the second conductive member 42 to realize the connection between the first conductive member 3 and the second conductive member 42.

[0067] In the above embodiments, since the connection structure 4 includes the second conductive member 42, it is convenient to realize electrical connection by means of sliding contact, rolling connection, etc. between the second conductive member 42 and the electrode assembly 2. And the second conductive member 42 is connected to the first conductive member 3 through the flexible member 41 capable of conducting current. During the process of relative movement of the second conductive member 42 relative to the first conductive member 3 due to the thermal expansion deformation of the electrode assembly 2, the flexible member 41 can reduce the force exerted by the second guiding member on the first conductive member 3, thereby reducing the risk of relative movement of the first conductive member 3 with respect to the housing 1.

[0068] In some possible embodiments of the present application, the second conductive member 42 is fixedly connected to the electrode assembly 2, and the second conductive member 42 is movably connected to the housing 1 through a moving mechanism 5.

[0069] In the embodiments of the present application, such as Figure 2 and Figure 3As shown, the second conductive member 42 can be fixedly connected to the electrode assembly 2 by means of welding, bonding, etc., and a gap can be provided between the second conductive member 42 and the first conductive member 3. A moving mechanism 5 can be provided for the second conductive member 42 to movably connect one end of the second conductive member 42 close to the first conductive member 3 to the housing 1 through the moving mechanism 5, so as to limit and support the second conductive member 42. For example, the moving mechanism 5 can adopt a linear bearing, etc. The linear bearing is sleeved on the second conductive member 42 and the linear bearing is connected to the housing 1.

[0070] In the above embodiment, since the second conductive member 42 is connected to the housing 1 through the moving mechanism 5, the moving mechanism 5 can provide support for the second conductive member 42, and the second conductive member 42 can also move relative to the housing 1 through the moving mechanism 5, so that the force exerted on the housing 1 by the electrode assembly 2 during thermal expansion through the second conductive member 42 can be eliminated.

[0071] In some possible embodiments of the present application, the moving mechanism 5 includes a cage 51 and rolling elements 52. A fixing portion 61 is provided on the second conductive member 42, and the fixing portion 61 extends radially along the second conductive member 42; along the axial direction Z of the second conductive member 42, a first portion 511 of the cage 51 is connected to the fixing portion 61, a second portion 512 of the cage 51 is connected to the housing 1, the rolling elements 52 are located between the first portion 511 and the second portion 512 of the cage 51, and the first portion 511 and the second portion 512 of the cage 51 can generate relative movement through the rolling elements 52.

[0072] In the embodiments of the present application, as Figure 2 and Figure 3 shown, a groove for installing the moving mechanism 5 can be provided on the housing 1. For example, a groove matching the moving mechanism 5 can be provided on the end cover 12. The moving mechanism 5 can be set to include a cage 51 and rolling elements 52. Then, the cage 51 can be fixedly installed in the groove on the end cover 12, the second conductive member 42 is abutted against the cage 51, and the rolling elements 52 are arranged in the cage 51, so that the two parts of the cage 51 can generate relative movement through the rolling elements 52.

[0073] Exemplarily, a stepped hole can be provided on the end cover 12, and a part of the stepped hole close to the working chamber can be used as a groove for arranging the cage 51, and the second conductive member 42 can be extended into the stepped hole. For example, the first part 511 of the cage 51 can be set as the structure of the first gasket ring, and the second part 512 of the cage 51 can be set as the structure of the second gasket ring. Both the first gasket ring and the second gasket ring can be made of metal materials. Wherein, the first gasket ring and the second gasket ring can be sheet-like annular structures, and the diameters of the through holes on the first gasket ring and the second gasket ring are both larger than the outer diameter of the second conductive member 42. For example, annular grooves can be provided on the opposite surfaces of the first gasket ring and the second gasket ring, and the shape of the annular groove matches the shape of the rolling element 52. The rolling element 52 can be a spherical ball or the like. The spherical ball can be clamped between the first gasket ring and the second gasket ring, so that the first gasket ring and the second gasket ring can move radially along the second conductive member 42 through the spherical ball. For example, the second gasket ring can be fixedly connected to the end cover 12, and the first gasket ring can be connected to the second conductive member 42 through the fixing part 61 on the first insulating member 6, that is, the first gasket ring is fitted with the fixing part 61.

[0074] In another example, a fixing part 61 extending radially along the second conductive member 42 can be provided on the second conductive member 42. Along the axial direction Z of the second conductive member 42, a cage 51 can be provided on both sides (such as the upper and lower sides shown in Figure 2 the figure) of the fixing part 61 respectively, so as to clamp the fixing part 61 between the two cages 51, and then the fixing part 61 can move relative to the end cover 12 through the cage 51 and the rolling element 52.

[0075] In the embodiment of the present application, as shown in Figure 2 the figure, a first insulating member 6 is sleeved on the second conductive member 42, and the fixing part 61 extends from the outer wall of the first insulating member 6.

[0076] Exemplarily, a first insulating member 6 can be sleeved on the second conductive member 42. The first insulating member 6 can be made of materials that cannot conduct current, such as plastics, ceramics, glass, etc. For example, the first insulating member 6 is made of phenolic or fluoroplastics. The first insulating member 6 can be coated on the surface of the second conductive member 42 and abutted against the electrode assembly 2 to reduce the surface of the second conductive member 42 exposed to the process gas.

[0077] In another example, the fixing portion 61 can be formed by extending radially from the outer wall of the first insulating member 6 along the second conductive member 42. For example, the fixing portion 61 can be a circular convex ring formed by extending from the outer wall of the first insulating member 6, or the fixing portion 61 can be a plurality of ribs or bumps formed by extending from the outer wall of the first insulating member 6. Then, the fixing portion 61 located on the first insulating member 6 can be clamped between two cages 51, facilitating the support and fixation of the second conductive member 42 by supporting and fixing the first insulating member 6.

[0078] In the embodiment of the present application, as Figure 3 shown, the fixing portion 61 is formed by extending from the second conductive member 42. The second conductive member 42 is coated with the first insulating member 6, and the second part 512 of the cage 51 abuts against the housing 1 through the second insulating member 53.

[0079] Exemplarily, the fixing portion 61 can be provided on the second conductive member 42, that is, the fixing portion 61 is formed by extending radially from the surface of the second conductive member 42. For example, the fixing portion 61 can be a circular convex ring formed by extending from the circumferential surface of the second conductive member 42, or the fixing portion 61 can be a plurality of ribs or bumps formed by extending from the circumferential surface of the second conductive member 42. Then, the fixing portion 61 located on the second conductive member 42 can be clamped between two cages 51.

[0080] In another example, if the fixing portion 61 is formed by extending from the second conductive member 42, there is a possibility of a conducting current between the moving mechanism 5 and the second conductive member 42. As Figure 3 shown, a second insulating member 53 can be provided between the cage 51 and the stepped hole in the end cap 12, that is, the cage 51 abuts against the end cap 12 through the second insulating member 53 to isolate the current between the cage 51 and the end cap 12 by using the second insulating member 53, thereby realizing the insulated connection between the second conductive member 42 and the end cap 12. For example, the second insulating member 53 can be made of materials that cannot conduct current, such as plastics, ceramics, glass, etc.

[0081] In yet another example, the first insulating member 6 can be coated on the second conductive member 42. For example, the first insulating member 6 can be made of plastic, and the plastic can be coated on the circumferential surface of the second conductive member 42, and the first insulating member 6 is made to abut against the electrode assembly 2, thereby reducing the surface area of the second conductive member 42 in contact with the process gas.

[0082] In the above embodiments, since the moving mechanism 5 includes a cage 51 and rolling elements 52, the rolling elements 52 can be arranged inside the cage 51 so as to enable relative movement between the two parts of the cage 51 through the rolling elements 52. And a fixing portion 61 is provided on the second conductive member 42. The fixing portion 61 can be clamped between the two cages 51, and a part of the cage 51 is fixedly connected to the housing 1, so that the second conductive member 42 can be supported by the fixing portion 61, and the fixing portion 61 can move relative to the housing 1 through the cage 51 and the rolling elements 52.

[0083] In some possible embodiments of the present application, the housing 1 has a fixing hole 14, and the vacuum coating apparatus further includes a fixing assembly 7 matching the fixing hole 14. The fixing assembly 7 is sleeved on the first conductive member 3 and fixedly connected to the fixing hole 14. A first seal 81 is provided between the first conductive member 3 and the fixing assembly 7, and a second seal 82 is provided between the fixing assembly 7 and the fixing hole 14.

[0084] In the embodiments of the present application, as Figure 2 and Figure 3 shown, the first conductive member 3 can be passed through the end cover 12 of the housing 1, that is, a fixing hole 14 is provided in the end cover 12. The fixing hole 14 can be in the structure form of a stepped hole. The first conductive member 3 and the fixing assembly 7 are arranged at the end of the stepped hole far from the electrode assembly 2.

[0085] Exemplarily, a through hole matching the first conductive member 3 can be provided on the fixing assembly 7. The first conductive member 3 is passed through the through hole on the fixing assembly 7, and a first seal 81 is provided between the through hole of the fixing assembly 7 and the first conductive member 3. For example, the first seal 81 can be an O-ring, such as two O-rings are provided between the first conductive member 3 and the fixing assembly 7. And a second seal ring can be provided between the fixing assembly 7 and the hole wall of the fixing hole 14 on the end cover 12. The second seal ring can also be an O-ring.

[0086] In another example, at least a part of the fixing assembly 7 can be made of an insulating material, so as to realize an insulating connection between the first conductive member 3 and the housing 1.

[0087] In the above embodiments, since the fixing holes 14 are provided on the outer shell 1, it is convenient to dispose the fixing component 7 in the fixing holes 14 to fixedly connect the fixing component 7 to the outer shell 1. And the fixing component 7 is sleeved on the first conductive member 3, and a first sealing member 81 is provided between the first conductive member 3 and the fixing component 7, which can not only fix and limit the first conductive member 3, but also realize the sealed connection between the first conductive member 3 and the fixing component 7. Meanwhile, a second sealing member 82 is provided between the fixing component 7 and the fixing holes 14 of the outer shell 1, which can realize the sealed connection between the fixing component 7 and the outer shell 1, so as to realize the sealed connection between the first conductive member 3 and the outer shell 1, which is beneficial to improving the sealing performance of the working cavity.

[0088] In some possible embodiments of the present application, as Figure 2 and Figure 3 shown, the fixing component 7 includes a first fixing ring 71 and a second fixing ring 72; the first fixing ring 71 is fixedly connected to the fixing hole 14, a third insulating member 73 and a fourth insulating member 74 are sleeved on the first conductive member 3, the third insulating member 73 passes through the first fixing ring 71, the fourth insulating member 74 is sleeved on the first conductive member 3 and abuts against the abutting portion 31 formed by the first conductive member 3 extending radially; the first sealing member 81 is located between the first conductive member 3 and the third insulating member 73, the second sealing member 82 is located between the first fixing ring 71 and the fixing hole 14, and a third sealing member 83 is provided between the third insulating member 73 and the first fixing ring 71; the second fixing ring 72 is sleeved on the fourth insulating member 74, the second fixing ring 72 is fixedly connected to the first fixing ring 71, and the third insulating member 73 is pressed and abutted in the first fixing ring 71 through the fourth insulating member 74.

[0089] In the embodiments of the present application, the fixing component 7 can be configured to include a structure of a first fixing ring 71 and a second fixing ring 72. For example, the first fixing ring 71 can be configured to match the end of the fixing hole 14 away from the electrode assembly 2. External threads can be provided on the first fixing ring 71, and internal threads matching the external threads can be provided on the hole wall of the fixing hole 14, and the first fixing ring 71 and the fixing hole 14 can be detachably connected by a threaded connection method. And a second sealing member 82 can be provided between the first fixing ring 71 and the hole wall of the fixing hole 14.

[0090] Exemplarily, a stepped hole may be provided in the first fixing ring 71, and a third insulating member 73 matching the stepped hole may be provided, and the third insulating member 73 may be inserted into the stepped hole in the first fixing ring 71. For example, a third sealing member 83 may be provided between the third insulating member 73 and the first fixing ring 71, and the third sealing member 83 may be an O-ring. A through hole matching the first conductive member 3 may also be provided in the third insulating member 73, so that a part of the first conductive member 3 may be inserted into the third insulating member 73. And a fourth insulating member 74 matching the first conductive member 3 may be provided, and the fourth insulating member 74 may be sleeved on one end of the first conductive member 3 away from the electrode assembly 2, so that the first conductive member 3 passes through the fourth insulating member 74 and extends to the outside of the housing 1. The first sealing member 81 may be provided between the first conductive member 3 and the third insulating member 73. A contact portion 31 extending radially may also be provided on the first conductive member 3. For example, the contact portion 31 may be provided in a structure of a convex ring, so that the convex ring is located between the third insulating member 73 and the fourth insulating member 74, and the fourth insulating member 74 is pressed against the convex ring.

[0091] In another example, the second fixing ring 72 may be provided in a circular ring structure, and the through hole in the second fixing ring 72 may be matched with the fourth insulating member 74, so that the second fixing ring 72 may be sleeved on the fourth insulating member 74, and the second fixing ring 72 and the first fixing ring 71 may be fixedly connected by welding, bonding, screwing, etc., so that the third insulating member 73 may be pressed against and abutted in the first fixing ring 71 through the fourth insulating member 74, thereby the first sealing member 81 and the third sealing member 83 may be pressed, and further a good sealing effect may be achieved between the first sealing member 81 and the third sealing member 83.

[0092] In the above embodiments, since the fixing assembly 7 includes the first fixing ring 71 and the second fixing ring 72, the third insulating member 73 and the fourth insulating member 74 may be provided between the first fixing ring 71 and the second fixing ring 72, and the first conductive member 3 may be inserted into the third insulating member 73 and the fourth insulating member 74, so that an insulating connection between the first conductive member 3 and the fixing assembly 7 may be achieved. And a third sealing member 83 is provided between the third insulating member 73 and the first fixing ring 71, and a sealed connection between the first fixing ring 71 and the third insulating member 73 may be achieved through the third sealing member 83, which is beneficial to improving the sealing performance between the first conductive member 3 and the housing 1.

[0093] In some possible embodiments of the present application, such as Figure 1As shown, the electrode assembly 2 includes a spraying assembly 21 and a first electrode member 22; the spraying assembly 21 is fixedly connected to the housing 1, the connecting structure 4 is connected to the spraying assembly 21, the first electrode member 22 is disposed on a side of the spraying assembly 21 away from the connecting structure 4, there is a working space 24 between the first electrode member 22 and the spraying assembly 21, and spraying holes 23 are formed on a surface of the spraying assembly 21 close to the first electrode member 22, and the air inlet channel 13 is communicated with the spraying holes 23.

[0094] In the embodiment of the present application, the spraying assembly 21 and the first electrode member 22 can be arranged in the electrode assembly 2 to form a placement position and a working space 24 for placing the electrode sheet to be coated through the spraying assembly 21 and the first electrode member 22, and an electromagnetic field can be formed between the spraying assembly 21 and the first electrode member 22.

[0095] Exemplarily, the spraying assembly 21 can be arranged as a plate-like structure, the spraying assembly 21 can be fixedly connected to the end cover 12 of the housing 1 through parts such as a connecting rod 25, and the flexible member 41 or the second conductive member 42 serving as the connecting structure 4 is fixedly connected to the spraying assembly 21. The first electrode member 22 can be arranged as a plate-like structure, and the size and shape of the first electrode member 22 are basically the same as those of the spraying assembly 21. The first electrode member 22 can be fixed at the bottom inside the housing 11, and the first electrode member 22 can be grounded. Among them, the first electrode member 22 and the spraying assembly 21 can be parallel or nearly parallel to each other, and there is a gap with a preset distance between the first electrode member 22 and the spraying assembly 21, so as to form a working space 24 between the first electrode member 22 and the spraying assembly 21. In this way, the substrate 92 can be placed on the first electrode member 22, and by applying a relatively high voltage to the spraying assembly 21, an electromagnetic field can be formed in the working space 24 between the spraying assembly 21 and the first electrode member 22.

[0096] In another example, a plurality of spraying holes 23 can be formed in the spraying assembly 21, for example, a plurality of uniformly distributed spraying holes 23 are formed on a side of the spraying assembly 21 close to the first electrode member 22, and each spraying hole 23 is communicated with the air inlet channel 13. Then, the process gas can be uniformly sprayed into the working space 24 between the spraying assembly 21 and the first electrode member 22 through the plurality of spraying holes 23.

[0097] In the above embodiment, since the electrode assembly 2 includes the spraying assembly 21 and the first electrode member 22, a working space 24 and a placement position for placing the member to be coated can be formed between the spraying assembly 21 and the first electrode member 22. A plurality of spraying holes 23 communicated with the air inlet channel 13 are formed in the spraying assembly 21, and the process gas can be sprayed into the working space 24 through the plurality of spraying holes 23, which is beneficial to forming a relatively uniform gas field in the working space 24.

[0098] In some possible embodiments of the present application, such as Figure 1 shown, the spraying assembly 21 includes a second electrode member 211 and a spraying member 212. The second electrode member 211 is connected to the housing 1, the connecting structure 4 is fixedly connected to the second electrode member 211. The second electrode member 211 has a plurality of air inlet holes 213, and the air inlet holes 213 are communicated with the air inlet channel 13. The spraying member 212 is located between the first electrode member 22 and the second electrode member 211, and an air equalizing space 214 is formed by enclosing between the second electrode member 211 and the spraying member 212. The spraying member 212 has a plurality of spraying holes 23.

[0099] In the embodiments of the present application, the spraying assembly 21 can be set to a structure including the spraying member 212 and the second electrode member 211. For example, both the spraying member 212 and the second electrode member 211 can be set to a flat plate structure. The second electrode member 211 can be fixedly connected to the end cover 12 in the housing 1 through a connecting rod 25, such as arranging a plurality of connecting rods 25 between the end cover 12 and the second electrode member 211. The connecting structure 4 is fixedly connected to the second electrode member 211 of the electrode assembly 2. And the spraying member 212 and the second electrode member 211 can be fixedly connected through a connecting plate 26, so that the spraying member 212 is located between the second electrode member 211 and the first electrode member 22. For example, along the circumferential direction of the spraying member 212, a plurality of connecting plates 26 can be arranged between the spraying member 212 and the second electrode member 211, and the length of the connecting plate 26 can be set according to the distance between the second electrode member 211 and the spraying member 212. In this way, the air equalizing space 214 can be formed by enclosing the second electrode member 211, the connecting plate 26 and the spraying plate.

[0100] Exemplarily, a plurality of air inlet holes 213 can be arranged on the second electrode member 211. The air inlet holes 213 are formed by extending from the side of the second electrode member 211 far from the spraying member 212 to the side close to the spraying member 212. For example, one end of each air inlet hole 213 far from the spraying member 212 can be communicated with the air inlet channel 13 through a pipeline, or an air flow channel can be formed on the second electrode member 211 to communicate a plurality of air inlet holes 213, and then the air flow channel is communicated with the air inlet channel 13. For example, the air flow channel can be a plurality of pore channels.

[0101] In another example, a plurality of spraying holes 23 can be arranged on the spraying member 212. The spraying holes 23 can be through holes in an approximate trumpet shape, that is, the diameter of one end of the spraying hole 23 close to the first electrode member 22 is larger than the diameter of the end of the spraying hole 23 far from the first electrode member 22. A plurality of spraying holes 23 can be evenly distributed on the spraying member 212, that is, the distance between two adjacent spraying holes 23 is equal or approximately equal.

[0102] In the above embodiments, since the spraying assembly 21 includes the second electrode member 211 and the spraying member 212, the uniform gas space 214 can be formed by enclosing the spraying member 212 and the second electrode member 211. In this way, after the process gas enters the uniform gas space 214 through the air inlet on the second electrode member 211, the process gas can first fill the uniform gas space 214. After the uniform gas space 214 is filled with or nearly filled with the process gas, the process gas then flows from the plurality of spraying holes 23 to the working space 24, which is beneficial to improving the uniformity of the distribution of the process gas in the working space 24.

[0103] In addition, an embodiment of the present application further provides a solar cell production line, which includes: a transfer device and the vacuum coating device provided in any one of the above embodiments; the transfer device is used to transport the solar cell to the vacuum coating device, and / or remove the solar cell from the vacuum coating device.

[0104] In the embodiment of the present application, the transfer device may include a transport device capable of transporting solar cells, or may include a grasping device capable of grasping solar cells. For example, the transport device may be an Automated Guided Vehicle (AGV), a belt transport device, etc. The grasping device may be a manipulator, etc. The specific structure of the transfer device in the embodiment of the present application is not limited. Through the transfer device, the solar cell to be coated can be transported from the production device to the vacuum coating device and placed in the vacuum coating device. It is also possible to take out the coated solar cell from the vacuum coating device through the transfer device and transport it to the storage station or the next production station.

[0105] Since the solar cell production line provided by the embodiment of the present application includes the vacuum coating device provided in the above embodiment, it can not only absorb the displacement of the first conductive member relative to the housing, which is beneficial to improving the sealing reliability of the vacuum coating device, but also release the thermal deformation amount of the electrode assembly, which is beneficial to reducing the deformation amount of the electrode assembly.

[0106] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be covered by the scope of the description of the present application. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way.

Claims

1. A vacuum coating equipment, characterized in that, Comprising: A housing (1), the housing (1) enclosing to form a working chamber, and an air inlet channel (13) being provided on the housing wall of the housing (1); An electrode assembly (2), the electrode assembly (2) being located within the working chamber; A first conductive member (3), the first conductive member (3) being inserted through the housing wall of the housing (1) and being sealingly connected to the housing wall. One end of the first conductive member (3) close to the electrode assembly (2) is connected to the electrode assembly (2) through a connection structure (4). The connection structure (4) can conduct current and can generate deformation under the action of an external force. The other end of the first conductive member (3) is used for connection to a power supply (91).

2. The vacuum coating equipment according to claim 1, characterized in that The connection structure (4) includes a flexible member (41), one end of the flexible member (41) being connected to the first conductive member (3) and the other end being connected to the electrode assembly (2), and the flexible member (41) being able to conduct current.

3. The vacuum coating equipment according to claim 2, characterized in that, The connection structure (4) further includes a fixing member, the fixing member connecting one end of the flexible member (41) to the first conductive member (3) and connecting the other end of the flexible member (41) to the electrode assembly (2).

4. The vacuum coating equipment according to claim 1, characterized in that, The connection structure (4) includes a flexible member (41) and a second conductive member (42), the second conductive member (42) being connected to the electrode assembly (2), one end of the flexible member (41) being connected to the first conductive member (3), and the other end of the flexible member (41) being connected to the second conductive member (42). The flexible member (41) can conduct current; in the case where the electrode assembly (2) generates displacement relative to the first conductive member (3), the electrode assembly (2) drives the second conductive member (42) to generate displacement relative to the first conductive member (3), so that the flexible member (41) generates deformation.

5. The vacuum coating equipment according to claim 4, characterized in that, The second conductive member (42) is fixedly connected to the electrode assembly (2), and the second conductive member (42) is movably connected to the housing (1) through a moving mechanism (5).

6. The vacuum coating equipment according to claim 5, characterized in that, The moving mechanism (5) includes a cage (51) and rolling elements (52). A fixing portion (61) is provided on the second conductive member (42), and the fixing portion (61) extends radially along the second conductive member (42); axially along the second conductive member (42), a first portion (511) of the cage (51) is connected to the fixing portion (61), a second portion (512) of the cage (51) is connected to the housing (1), the rolling elements (52) are located between the first portion (511) and the second portion (512), and the first portion (511) and the second portion (512) can generate relative movement through the rolling elements (52).

7. The vacuum coating equipment according to claim 6, characterized in that, A first insulating member (6) is sleeved on the second conductive member (42), and the fixing portion (61) is formed by extending from the outer wall of the first insulating member (6); alternatively, the fixing portion (61) is formed by extending from the second conductive member (42), and the second conductive member (42) is coated with the first insulating member (6), and the second portion (512) abuts against the housing (1) through a second insulating member (53).

8. The vacuum coating equipment according to claim 1, characterized in that, The housing (1) is provided with a fixing hole (14), and the vacuum coating device further includes a fixing component (7) matching the fixing hole (14). The fixing component (7) is sleeved on the first conductive member (3) and fixedly connected to the fixing hole (14). A first sealing member (81) is provided between the first conductive member (3) and the fixing component (7), and a second sealing member (82) is provided between the fixing component (7) and the fixing hole (14).

9. The vacuum coating equipment according to claim 8, characterized in that, The fixing component (7) includes a first fixing ring (71) and a second fixing ring (72); the first fixing ring (71) is fixedly connected to the fixing hole (14). A third insulating member (73) and a fourth insulating member (74) are sleeved on the first conductive member (3). The third insulating member (73) passes through the first fixing ring (71). The fourth insulating member is sleeved on the first conductive member (3) and abuts against an abutting portion (31) formed by extending radially along the first conductive member (3). The first sealing member (81) is located between the first conductive member (3) and the third insulating member (73), and the second sealing member (82) is located between the first fixing ring (71) and the fixing hole (14). A third sealing member (83) is provided between the third insulating member (73) and the first fixing ring (71); the second fixing ring (72) is sleeved on the fourth insulating member (74), and the second fixing ring (72) is fixedly connected to the first fixing ring (71), and presses the third insulating member (73) against the first fixing ring (71) through the fourth insulating member (74).

10. The vacuum coating equipment according to any one of claims 1 to 9, characterized in that, The electrode assembly (2) includes a first electrode member (22), a second electrode member (211), and a spraying member (212); the second electrode member (211) is connected to the housing (1), the connecting structure (4) is connected to the second electrode member (211), and the second electrode member (211) is provided with a plurality of air inlet holes (213) communicating with the air inlet channel (13). The spraying member (212) is located between the first electrode member (22) and the second electrode member (211). An air distribution space (214) is formed by enclosing between the second electrode member (211) and the spraying member (212). A working space (24) is provided between the first electrode member (22) and the spraying member (212). The spraying member (212) is provided with a plurality of spraying holes (23), and the working space (24) communicates with the air distribution space (214) through the spraying holes (23).

11. A solar cell production line, characterized in that, Including: The vacuum coating equipment according to any one of claims 1 to 10; A transfer device, which is used to transport a solar cell to the vacuum coating equipment and / or remove the solar cell from the vacuum coating equipment.

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