Split type groove sealing structure
By connecting three flanges to the outer wall of the quartz tube, setting radial and axial sealing grooves and sealing rings, and using bolt tightening to achieve multi-step sealing, the sealing instability problem at the connection between the quartz tube and the cavity wall is solved, and the efficient connection between the quartz tube and the cavity wall is achieved, reducing the leakage rate of gas medium, and is suitable for high vacuum environments.
Patent Information
- Application Number
- CN202421817551.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-07-30
AI Technical Summary
In the prior art, it is difficult to achieve efficient sealing at the connection between the quartz tube and the cavity wall, especially in the case of large processing errors, resulting in unstable vacuum sealing performance of the far-infrared laser polarization interferometer.
A split groove sealing structure is adopted, by connecting three flanges to the outer wall of the quartz tube, radial and axial sealing grooves and sealing rings respectively, and multi-step sealing is achieved by tightening bolts to ensure a stable connection between the quartz tube and the cavity wall.
In the case of large outer diameter error of quartz tube, efficient sealing between the quartz tube and the cavity wall is achieved, reducing the leakage rate of gas medium and achieving a low leakage rate of 10-6Pa·m3/s, which is suitable for high vacuum environments.
Smart Images
Figure CN223152750U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of laser polarization interference measurement, in particular to a split groove sealing structure. Background Art
[0002] The plasma density is not only one of the important indicators in magnetic confinement fusion reactors, but also a key parameter for controlling and studying the plasma density limit. Reliably and accurately measuring the plasma electron density using a far-infrared laser polarization interferometer has become an indispensable conventional tool in magnetic confinement fusion research. In the far-infrared laser polarization interferometer, in order to avoid the generation of high-order modes of the laser, the position of the quartz tube needs to be accurately fixed during the laser output process. The end face of the quartz tube should penetrate the through hole of the stainless steel cavity and extend into the cavity, which is a flange structure of a "piston rod-like" static sealing system.
[0003] However, in the prior art, due to the large errors in the inner diameter and outer diameter blown during the industrial production of quartz tubes and often only one key dimension can be ensured to be correct. When the inner diameter dimension needs to be ensured to be accurate, it is difficult for the quartz tube to be accurately matched and installed with the installation and assembly cone of the closed groove in the prior art. The high requirements for vacuum sealing in the far-infrared laser polarization interferometer make it impossible to simply use ordinary clamping structures such as the KF series to seal and fix the connection of the quartz tube. Instead, a better sealing flange structure is required to ensure the stability and accuracy of the sealing performance at the installation position of the quartz tube. Summary of the Utility Model
[0004] The technical problem to be solved by the utility model is: how to improve the sealing performance at the installation of the quartz tube in the far-infrared laser polarization interferometer. To solve the above technical problem, the utility model provides a split groove sealing structure for sealing the connection between the quartz tube and the cavity wall, which is characterized in that it includes a first flange, a second flange and a third flange sequentially sleeved on the outer wall of the quartz tube. The first flange, the second flange and the third flange are all fixedly connected to the cavity wall, and the first flange abuts against the cavity wall;
[0005] A first sealing groove is provided on the surface of the first flange facing the cavity wall, and a first sealing ring abutting against the cavity wall is provided in the first sealing groove; a second sealing groove is formed between the second flange and the first flange, and a third sealing groove is formed between the third flange and the second flange. Second sealing rings and third sealing rings abutting against the outer wall of the quartz tube are respectively provided in the second sealing groove and the third sealing groove.
[0006] Preferably, a first step is provided on one side of the first flange away from the cavity wall, a first protrusion is provided on the second flange corresponding to the first step, and a second sealing groove is formed between the first step and the first protrusion; a second step is provided on one side of the second flange away from the first flange, a second protrusion is provided on the third flange corresponding to the second step, and a third sealing groove is formed between the second step and the second protrusion.
[0007] Preferably, the cross-sections of the first sealing groove, the second sealing groove and the third sealing groove are all rectangular.
[0008] Preferably, bolt holes for installation are provided on the cavity wall, and through holes are provided on the first flange, the second flange and the third flange corresponding to the bolt holes.
[0009] Preferably, there are six bolt holes.
[0010] Compared with the prior art, the beneficial effect of the split groove sealing structure provided in the embodiment of the present invention is as follows:
[0011] In this embodiment, the first flange, the second flange and the third flange are all sleeved on the outer wall of the quartz tube and are all fixedly connected to the cavity wall. The opening of the first sealing groove provided on the first flange faces the cavity wall, and the first sealing ring provided therein can seal the quartz tube radially, thereby preventing media such as gas from entering the connection between the quartz tube and the cavity wall in the radial direction of the quartz tube and then entering the cavity. The second sealing ring and the third sealing ring are respectively abutted against the outer wall of the quartz tube, so that when the machining error of the outer wall of the quartz tube is relatively large, a second-order axial seal can be provided for the quartz tube to prevent media such as gas from entering the cavity along the axis direction of the quartz tube. Description of the Drawings
[0012] Figure 1 is a cross-sectional structural view of the present invention;
[0013] Figure 2 is a top view of the third flange of the present invention.
[0014] In the figure: 1, first flange; 11, first sealing groove; 12, first sealing ring; 13, first step;
[0015] 2, second flange; 21, second sealing groove; 22, second sealing ring; 23, first protrusion; 24, second step;
[0016] 3, third flange; 31, third sealing groove; 32, third sealing ring; 33, second protrusion;
[0017] 4, quartz tube;
[0018] 5, cavity wall; 51, bolt hole; 6, through hole. Detailed implementation manners
[0019] The following combines the accompanying drawings and embodiments to further describe in detail the specific implementation manners of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.
[0020] As Figure 1 and Figure 2 shown, a preferred embodiment of the present utility model provides a split groove sealing structure, which is used to seal the connection between the quartz tube 4 and the cavity wall 5. It includes a first flange 1, a second flange 2, and a third flange 3 that are sequentially sleeved on the outer wall of the quartz tube 4. The first flange 1, the second flange 2, and the third flange 3 are all fixedly connected to the cavity wall 5, and the first flange 1 abuts against the cavity wall 5;
[0021] A first sealing groove 11 is provided on the surface of the first flange 1 facing the cavity wall 5, and a first sealing ring 12 that abuts against the cavity wall 5 is provided in the first sealing groove 11; a second sealing groove 21 is formed between the second flange 2 and the first flange 1, and a third sealing groove 31 is formed between the third flange 3 and the second flange 2. A second sealing ring 22 and a third sealing ring 32 that abut against the outer wall of the quartz tube 4 are respectively provided in the second sealing groove 21 and the third sealing groove 31.
[0022] Specifically, in the existing solution, due to the large machining error in the outer diameter of the quartz tube 4, when the quartz tube 4 is inserted through the cavity wall 5, the size of the gap between the outer wall of the quartz tube 4 and the inner side of the hole in the cavity wall 5 cannot be controlled, resulting in poor sealing performance and instability. In the present utility model, three flanges are stacked and sleeved on the outer wall of the quartz tube 4. The first flange 1 serves as a base, and a first sealing groove 11 is provided on the side facing the cavity wall 5. A first sealing ring 12 is provided in the first sealing groove 11, and the first sealing ring 12 can prevent media such as gas from flowing in the radial direction of the quartz tube 4, thereby achieving radial sealing. The second sealing ring 22 provided in the second sealing groove 21 formed during the stacking process of the second flange 2 and the first flange 1 and the third sealing ring 32 in the third sealing groove 31 formed during the stacking process of the third flange 3 and the second flange 2 are both in contact with the outer wall of the quartz tube 4. Depending on the different stacking states, that is, the different distances between the flanges, the second sealing ring 22 and the third sealing ring 32 will be squeezed and deformed to different degrees, so as to be in close contact with the outer wall of the quartz tube 4 to achieve axial sealing, preventing media such as gas from entering the cavity through the gap between the quartz tube 4 and the hole in the cavity wall 5 along the axial direction of the quartz tube 4. And because two sealing rings are arranged in the axial direction, it can better reduce the problem of poor sealing performance caused by the large machining error of the outer wall of the quartz tube 4, that is, the connection sealing performance between the quartz tube 4 and the cavity wall 5 can be adjusted and ensured by adjusting the distance between the flanges and cooperating with the two sealing rings. Further, in this embodiment, the two sealing rings in the axial direction are sealed separately, achieving secondary sealing in the axial direction, and the first sealing ring 12 is also sealed separately in the radial direction. During the entire sealing process, each sealing ring works independently, without worrying about the accumulation of sealing gaps caused by the accumulation of machining errors, resulting in poor sealing effect. Each sealing is independent, and the radial sealing and the axial sealing are also separated. Each sealing ring only needs to seal a main sealing surface, without having to perform sealing in multiple directions, and the sealing effect is naturally better.
[0023] In some embodiments, a first step 13 is provided on the side of the first flange 1 away from the cavity wall 5, and a first protrusion 23 is provided on the second flange 2 corresponding to the first step 13. A second sealing groove 21 is formed between the first step 13 and the first protrusion 23; a second step 24 is provided on the side of the second flange 2 away from the first flange 1, and a second protrusion 33 is provided on the third flange 3 corresponding to the second step 24. A third sealing groove 31 is formed between the second step 24 and the second protrusion 33.
[0024] Specifically, the first sealing ring 12 is arranged at the first step 13, and then the second flange 2 is stacked above the first flange 1. The first protrusion 23 starts to abut and press the first sealing ring 12, causing the sealing ring to deform. The second sealing ring 22 abuts against the outer wall of the quartz tube 4 to achieve a first-order seal in the axial direction. As the distance between the second flange 2 and the first flange 1 decreases, the second flange 2 and the first flange 1 are stacked more closely, and the extrusion deformation of the second sealing ring 22 will be greater, so that it can fit more closely to the outer wall of the quartz tube 4, providing better and more stable sealing performance. The same is true for the third sealing ring 32 arranged between the second flange 2 and the third flange 3. The smaller the distance between the third flange 3 and the second flange 2, the greater the pressure deformation of the third sealing ring 32, and the more closely it can fit to the outer wall of the quartz tube 4, thus providing a better and more stable second-order sealing effect in the axial direction.
[0025] Certainly, in some other embodiments, a ring-shaped protrusion structure is arranged on the side of the first flange 1 away from the cavity wall 5, and the second flange 2 is provided with a stepped depression corresponding to the ring-shaped protrusion structure, thereby forming a second sealing groove 21. Similarly, a ring-shaped protrusion is arranged on the side of the second flange 2 facing the third flange 3, and the third flange 3 is provided with a stepped depression corresponding to the ring-shaped protrusion, thereby forming a third sealing groove 31, which can also form a stable and efficient second-order sealing effect.
[0026] In some embodiments, the cross-sections of the first sealing groove 11, the second sealing groove 21 and the third sealing groove 31 are all rectangular. Setting the sealing groove to a rectangular structure can ensure that there is only one main sealing surface that determines the leakage rate in each sealing groove, thereby improving the sealing effect and sealing stability and avoiding leakage problems.
[0027] In some embodiments, during installation, the mold joint lines of the first sealing ring 12, the second sealing ring 22 and the third sealing ring 32 face the auxiliary sealing surfaces of the first sealing groove 11, the second sealing groove 21 and the third sealing groove 31 respectively. Specifically, the mold joint line of the sealing ring is generated during its production process, and its dimensional error is relatively large. The mold joint line facing the auxiliary sealing surface makes the smooth part of the sealing ring face the main sealing surface of the sealing groove, so that when the sealing ring is extruded and deformed, the deformation consistency is higher, and the sealing ring can fit more comprehensively and closely to the quartz tube 4 or the cavity wall 5, thus ensuring the high efficiency and stability of the seal and not easily causing problems such as leakage.
[0028] In some embodiments, the cavity wall 5 is provided with bolt holes 51 for installation, and the first flange 1, the second flange 2, and the third flange 3 are each provided with through holes 6 corresponding to the bolt holes 51. Specifically, during actual installation, the through holes 6 on the first flange 1, the second flange 2, and the third flange 3 are aligned with the bolt holes 51 on the cavity wall 5, and then the bolts are tightened one by one with a hex wrench. As the bolts are tightened, the third flange 3, the second flange 2, and the first flange 1 are gradually squeezed towards the cavity wall 5, and the distance between the flanges is gradually reduced, thereby squeezing the first sealing ring 12, the second sealing ring 22, and the third sealing ring 32. That is, by tightening the bolts, multi-stage sealing in the radial and axial directions is achieved simultaneously, preventing the inside of the vacuum chamber from directly facing the atmospheric pressure, reducing the leakage conductance, and achieving a better sealing effect. Moreover, the operation during the sealing process is simpler and more efficient. Even for fluororubber sealing rings that are difficult to install due to the large compression force required in the circumferential direction in the prior art, efficient and stable sealing can be achieved by tightening multiple bolts. In addition, since the multiple bolt holes 51 are evenly arranged, the extrusion force acts evenly on all parts of each sealing ring, which also makes the sealing effect better and more stable.
[0029] Furthermore, when leak detection needs to be performed using a helium mass spectrometer, the second flange 2 and the third flange 3 can be removed first, and then the third flange 3 can be directly placed above the first flange 1 to form a first-stage seal between the first flange 1 and the third flange 3, thus facilitating the detection of leakage points.
[0030] Even further, the sealing rings in the multiple sealing grooves perform independent sealing, so that the multi-stage sealing can make the sum of the leakage rate and the outgassing rate of the chamber system lower than the order of 10 -6 Pa·m3 / s, and a high-vacuum environment of the order of 10 -4 Pa can be achieved under the vacuum pumping of a molecular pump.
[0031] Particularly, there are six bolt holes 51. Of course, in other embodiments, the bolt holes 51 can also be set to eight or twelve, etc.
[0032] In summary, the embodiment of the present utility model provides a split groove sealing structure. When it is necessary to seal the connection between the quartz tube 4 and the cavity wall 5, first, the first sealing ring 12, the first flange 1, the second sealing ring 22, the second flange 2, the third sealing ring 32 and the third flange 3 are successively sleeved on the outer wall of the quartz tube 4, so that the first sealing ring 12, the second sealing ring 22 and the third sealing ring 32 are respectively located in their respective sealing grooves, and the mold clamping line of the sealing ring is adjusted to be in the auxiliary sealing surface. At the same time, the through holes 6 on each flange are aligned with the bolt holes 51 on the cavity wall 5. Then, the bolts are tightened to fixedly connect the first flange 1, the second flange 2 and the third flange 3 with the cavity wall 5 together. By tightening the bolts, the embodiment of the present utility model can reduce the distance between the flanges, and thus reduce the width of the main sealing surface in the second sealing groove 21 and the third sealing groove 31, so that the second sealing ring 22 and the third sealing ring 32 are extruded and deformed, and further the second sealing ring 22 and the third sealing ring 32 contract circumferentially and fit more tightly with the outer wall of the quartz tube 4, finally realizing axial second-order sealing, and multi-order sealing can be achieved only by tightening the bolts, and the operation is simpler and more efficient, without the need to use a special assembly cone.
[0033] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present utility model.
Claims
1. A split groove sealing structure for sealing the connection between a quartz tube and a cavity wall, characterized in that It includes a first flange, a second flange and a third flange that are successively sleeved on the outer wall of the quartz tube. The first flange, the second flange and the third flange are all fixedly connected to the cavity wall, and the first flange abuts against the cavity wall. A first sealing groove is provided on the surface of the first flange facing the cavity wall, and a first sealing ring abutting against the cavity wall is provided in the first sealing groove; a second sealing groove is formed between the second flange and the first flange, and a third sealing groove is formed between the third flange and the second flange. A second sealing ring and a third sealing ring abutting against the outer wall of the quartz tube are respectively provided in the second sealing groove and the third sealing groove.
2. The split groove sealing structure according to claim 1, characterized in that, A first step is provided on the side of the first flange away from the cavity wall. The second flange is provided with a first protrusion corresponding to the first step, and the second sealing groove is formed between the first step and the first protrusion; a second step is provided on the side of the second flange away from the first flange. The third flange is provided with a second protrusion corresponding to the second step, and the third sealing groove is formed between the second step and the second protrusion.
3. The split groove sealing structure according to claim 2, wherein, The cross sections of the first sealing groove, the second sealing groove and the third sealing groove are all rectangular.
4. The split groove sealing structure according to claim 1, wherein, The cavity wall is provided with bolt holes for installation, and the first flange, the second flange and the third flange are all provided with through holes corresponding to the bolt holes.
5. The split groove sealing structure according to claim 4, characterized in that, There are six bolt holes.