Heating furnace

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and discloses a heat furnace. The heating furnace comprises a cabinet body, a temperature control water way and a mirror, the cabinet body is provided with an adjusting bin, the adjusting bin is provided with an opening, the temperature control water way comprises at least two adjusting valves, at least one of the adjusting valves is provided with a window and a first adjusting part, the at least two adjusting valves are arranged in the adjusting bin, and the operation direction of the first adjusting part faces the opening; the mirror and the window are fixedly arranged in the adjusting bin in a two-face included angle mode, and the mirror face of the mirror is closer to the first adjusting part than the back face and used for displaying mirror images of the window in the opening direction. The regulating valves are arranged in a centralized mode, the mirror is utilized, the operation directions of the first regulating parts face the opening, and the window content of part of the regulating valves can be read at the same time through the opening, so that a temperature control water path can be read and regulated at the same time conveniently, the debugging and regulating process of the heating furnace can be simplified, and the debugging efficiency is improved. And the temperature control waterway can be conveniently adjusted with relatively high precision.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a thermal furnace. Background Art

[0002] A large amount of heat is generated during and after the heat treatment process of the thermal furnace. Excessive temperature may damage multiple components or parts of the thermal furnace. Therefore, it is necessary to systematically cool these components or parts effectively. However, the cooling systems in the prior art often have a large number of components and are difficult to control, resulting in high difficulty in the debugging and adjustment processes.

[0003] Based on the above, there is an urgent need for a thermal furnace to solve the above technical problems. Summary of the Utility Model

[0004] An object of the utility model is to provide a thermal furnace that can meet the cooling requirements of the thermal furnace with high precision and is easy to debug and adjust.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A thermal furnace, comprising a cabinet body, a temperature control water circuit and a mirror. The cabinet body is provided with an adjustment chamber, and the adjustment chamber has an opening. The temperature control water circuit is used to adjust the temperature of the thermal furnace, and it includes at least two regulating valves. At least one of the at least two regulating valves has a viewing window and a first adjustment part. All the at least two regulating valves of the temperature control water circuit are arranged in the adjustment chamber, and the operation directions of the first adjustment parts all face the opening. The mirror is fixedly arranged in the adjustment chamber at a dihedral angle with the viewing window. The mirror surface of the mirror is closer to the first adjustment part than the back surface, and is used to display the mirror image of the viewing window in the direction of the opening.

[0007] The beneficial effect of the utility model is that by centrally arranging the regulating valves of the temperature control water circuit in the adjustment chamber in the thermal furnace and using the mirror, the operation directions of the first adjustment parts of the regulating valves all face the opening, and the viewing window contents of some regulating valves can be read simultaneously through the opening, thus greatly facilitating the simultaneous reading and adjustment of the refrigerant flow rate in the temperature control water circuit, greatly simplifying the debugging and adjustment processes of the thermal furnace, and facilitating the adjustment of the temperature control water circuit with high precision.

[0008] In some embodiments, the temperature control water circuit includes an inlet water pipe, at least one temperature control branch and an outlet water pipe. The refrigerant flows into the temperature control branch from the inlet water pipe and then flows out from the outlet water pipe to adjust the temperature of the thermal furnace. The regulating valve includes a flow valve and a switch valve. The flow valve has a viewing window and a first adjustment part, and the switch valve has a second adjustment part. At least one flow valve and at least one switch valve are arranged on each temperature control branch, and the operation directions of the second adjustment parts all face the opening. The flow rate can be controlled by the flow valve, and whether the refrigerant flows can be controlled by the switch valve, thus facilitating debugging, adjustment and maintenance.

[0009] In some embodiments, the water inlet pipeline and the water outlet pipeline are arranged in the adjustment chamber, and a liquid leakage detector is arranged at the bottom of the adjustment chamber. The liquid leakage detector is used to detect the liquid leakage of the water inlet pipeline, the water outlet pipeline and the regulating valve. Through this liquid leakage detector, the liquid leakage of the water inlet pipeline, the water outlet pipeline and each regulating valve can be detected, so as to realize the detection of multiple components or parts by one liquid leakage detector, greatly reducing the detection cost.

[0010] In some embodiments, the flow valve arranged in one temperature control branch and the flow valve arranged in another temperature control branch are fixedly connected, so as to improve the structural stability of the whole temperature control water circuit.

[0011] In some embodiments, the hot furnace further includes an adjusting member. The flow valve arranged in one temperature control branch and the flow valve arranged in another temperature control branch are adjustably positioned through the adjusting member, so that when there are installation position errors or installation angle errors, the flow valves can still be reliably fixedly connected, improving the structural stability of the whole temperature control water circuit.

[0012] In some embodiments, the adjusting member is provided with a kidney-shaped hole, the flow valve is provided with a threaded hole, and the hot furnace further includes a connecting member. The connecting member passes through the kidney-shaped hole and is connected to the threaded hole to fix the adjusting member and the flow valve, and the connecting member is adjustably arranged along the length direction of the kidney-shaped hole, so that the flow valve arranged in one temperature control branch and the flow valve arranged in another temperature control branch are adjustably connected.

[0013] In some embodiments, the hot furnace further includes a fixing bracket. The fixing bracket is fixedly connected to the flow valve, and the mirror is fixedly installed on the fixing bracket, so as to arrange the mirror based on the flow valve, which is convenient to arrange the mirror in the reading direction of the window.

[0014] In some embodiments, the temperature control water circuit includes at least two temperature control branches, and each temperature control branch is provided with a refrigerant flow channel structure. When the refrigerant flows through the refrigerant flow channel structure, it can exchange heat with the hot furnace, and a liquid leakage detector is arranged below two adjacent refrigerant flow channel structures, so as to detect the liquid leakage of multiple refrigerant flow channel structures through one liquid leakage detector, reducing the detection cost.

[0015] In some embodiments, the water inlet end of the temperature control branch is connected to the water inlet pipeline, the water outlet end of the temperature control branch is connected to the water outlet pipeline, a flow valve and a switch valve are arranged at the water inlet end of the temperature control branch, and a switch valve is also arranged at the water outlet end of the temperature control branch. The refrigerant flow channel structure is arranged between the switch valve at the water inlet end and the switch valve at the water outlet end, so that the regulating valve, the water inlet pipeline and the water outlet pipeline are adjacent to each other, which is convenient to detect the liquid leakage of the regulating valve, the water inlet pipeline and the water outlet pipeline through one liquid leakage detector, reducing the detection cost.

[0016] In some embodiments, the temperature-controlled water circuit at least includes a first temperature control branch and a second temperature control branch. The first temperature control branch and the second temperature control branch are connected in parallel between the water inlet pipe and the water outlet pipe. At least one refrigerant flow channel structure is respectively arranged in the first temperature control branch and the second temperature control branch. Moreover, the two refrigerant flow channel structures located in the first temperature control branch and the second temperature control branch are arranged above a liquid leakage detector, so that a liquid leakage detector can simultaneously detect the liquid leakage conditions of at least two refrigerant flow channel structures, thereby detecting the liquid leakage of multiple refrigerant flow channel structures located in different temperature control branches through one liquid leakage detector, and reducing the detection cost. Description of the Drawings

[0017] Figure 1 is a partial structural schematic diagram of the thermal furnace provided by the present utility model;

[0018] Figure 2 is a partial structural schematic diagram of the thermal furnace provided by the present utility model with the chamber door hidden;

[0019] Figure 3 is a three-dimensional view of a partial structure in the temperature-controlled water circuit;

[0020] Figure 4 is Figure 3 a partial enlarged view of part A in

[0021] Figure 5 is Figure 4 a partial enlarged view of part F in

[0022] Figure 6 is a pipeline schematic diagram of the temperature-controlled water circuit;

[0023] Figure 7 is Figure 6 a partial enlarged view of part E in

[0024] In the figure:

[0025] 100, cabinet; 101, adjustment chamber; 102, chamber door;

[0026] 200, upper flange; 201, manifold; 202, lower flange;

[0027] 1, water inlet pipe; 10, water source; 11, water blowing nozzle;

[0028] 21. First temperature control branch; 210. First switching valve; 211. First temperature control sub-branch; 2110. First flow valve; 2111. First refrigerant flow channel structure; 2112. Second refrigerant flow channel structure; 2113. Third refrigerant flow channel structure; 2114. First three-way valve; 2115. Second three-way valve; 2116. Third three-way valve; 212. Second temperature control sub-branch; 2120. Second flow valve; 2121. Fourth refrigerant flow channel structure; 213. Fifth switching valve

[0029] 22. Second temperature control branch; 220. Second switching valve; 221. Third flow valve; 222. Fifth refrigerant flow channel structure; 223. Sixth refrigerant flow channel structure; 224. Sixth switching valve

[0030] 23. Third temperature control branch; 230. Third switching valve; 231. Third temperature control sub-branch; 2310. Fourth flow valve; 2311. Seventh refrigerant flow channel structure; 232. Fourth temperature control sub-branch; 2320. Fifth flow valve; 2321. Eighth refrigerant flow channel structure; 233. Seventh switching valve

[0031] 24. Fourth temperature control branch; 240. Fourth switching valve; 241. Sixth flow valve; 242. Ninth refrigerant flow channel structure; 243. Eighth switching valve

[0032] 3. Outlet water pipeline; 30. Temperature control device

[0033] 4. Leakage detector

[0034] 50. Window; 51. Adjusting handle; 52. Pipeline connector; 53. Adjusting part; 531. Kidney-shaped hole; 54. Fixed bracket; 55. Mirror Detailed implementation mode

[0035] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that, for the convenience of description, only the parts related to the present utility model are shown in the drawings, rather than all the structures.

[0036] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be a connection indicating a positional relationship or a connection indicating pipeline communication; it can be directly connected or indirectly connected through an intermediate medium, and it can be the connection inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0037] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on the top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0038] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0039] The following will introduce the thermal furnace provided by the present utility model according to the attached Figure 1 to the attached Figure 7 As shown in FIGS.

[0040] As Figure 1 , Figure 2 shown, the thermal furnace includes a cabinet body 100, and the cabinet body 100 can be installed with structures such as a furnace body (not shown in the figure) to realize the heat treatment of materials. The cabinet body 100 is provided with an adjustment chamber 101 and a chamber door 102. The adjustment chamber 101 has an opening, and the chamber door 102 is movably arranged at the opening to achieve the effect of closing and opening the opening. As Figure 2 , Figure 3 shown, the thermal furnace further includes a temperature control water circuit. At least part of the temperature control water circuit is arranged inside the cabinet body 100 and can form a heat exchange with the thermal furnace to adjust the temperature inside the thermal furnace and ensure the safety of the thermal furnace and the normal progress of the heat treatment process.

[0041] As Figure 3 , Figure 4 shown, the temperature control water circuit includes at least two regulating valves. The regulating valves can control whether there is refrigerant flowing through the temperature control water circuit and the flow rate of the refrigerant, so as to adjust the temperature regulation condition of the temperature control water circuit for the thermal furnace. As Figure 4As shown, at least one of the at least two regulating valves has a viewing window 50 and a first regulating part. Through the viewing window 50, the refrigerant flow rate flowing through the regulating valve can be read and observed. The first regulating part uses an adjusting handle 51. By rotating the adjusting handle 51, the opening degree of the regulating valve can be changed, so as to adjust the refrigerant flow rate allowed to pass through. All the regulating valves of the temperature control water circuit are arranged in the adjusting bin 101, and the operating directions of the adjusting handles 51 of each regulating valve (i.e., the rotation axes, such as Figure 4 shown by the arrow C in) are all arranged facing the opening, so as to facilitate centralized debugging and adjustment of the temperature control water circuit. Of course, in some embodiments, the first regulating part can also adopt structures such as an adjusting knob, a button, etc., which also fall within the scope of protection of the present utility model.

[0042] In this embodiment, the reading direction of the viewing window 50 (such as Figure 4 shown by the arrow B in) is arranged in the opposite direction to the operating direction of the adjusting handle 51, which is not conducive to the operator conveniently operating the adjusting handle 51 while reading the content of the viewing window 50. To overcome this defect, a mirror 55 is also arranged in the adjusting bin 101. The mirror 55 is fixedly arranged in the adjusting bin 101 at a dihedral angle with the viewing window 50. The mirror surface of the mirror 55 is closer to the adjusting handle 51 than the back surface, and is used to display the mirror image of the viewing window 50 in the direction of the opening. Exemplarily, the mirror 55 is fixedly arranged in the reading direction of the viewing window 50, and can reflect the content of the viewing window 50 in the same direction as the operating direction of the adjusting handle 51 (such as Figure 4 shown by the arrow D in), so that the operating direction of the adjusting handle 51 and the reflection direction of the content of the viewing window 50 both face the opening, so that the operator can read and adjust simultaneously, and the temperature control water circuit can also adapt to a smaller cabinet 100, further reducing its required installation volume and improving its adaptability to small spaces.

[0043] Of course, in some other embodiments, it may also be that only some of the multiple regulating valves are set so that the operating direction of the adjusting handle 51 faces the opening and the reading direction of the viewing window 50 does not face the opening, but as long as a mirror 55 is arranged to display the content of this part of the viewing window 50 in the form of a mirror image in the direction of the opening, it falls within the scope of protection of the present utility model.

[0044] By centrally arranging the regulating valves of the temperature control water circuit in the adjusting bin 101 in the hot furnace and using the mirror 55, the operating directions of the adjusting handles 51 of the regulating valves all face the opening, and through the opening, the content of the viewing window 50 of the part of the regulating valves corresponding to the arranged mirror 55 can be read, thus greatly facilitating the simultaneous reading and adjustment of the refrigerant flow rate in the temperature control water circuit, greatly simplifying the debugging and adjustment process of the hot furnace, and facilitating the adjustment of the temperature control water circuit with high precision.

[0045] As shown in Figure 4 、 Figure 6 the temperature control water circuit includes an inlet water pipe 1, at least one temperature control branch, and an outlet water pipe 3. The refrigerant flows into the temperature control branch from the inlet water pipe 1 and then flows out from the outlet water pipe 3 to adjust the temperature of the hot furnace. Specifically, in this embodiment, the inlet water pipe 1 is connected to a water source 10, which can access water at a preset temperature, so as to adjust the temperature inside the hot furnace. The temperature control water circuit includes four temperature control branches, namely a first temperature control branch 21, a second temperature control branch 22, a third temperature control branch 23, and a fourth temperature control branch 24. The four temperature control branches are connected in parallel between the inlet water pipe 1 and the outlet water pipe 3. The outlet water pipe 3 is connected to a temperature control device 30, which is used to adjust the temperature of the refrigerant, so as to circulate the refrigerant at a preset temperature into the inlet water pipe 1, thereby recycling the refrigerant and reducing the temperature control cost.

[0046] More specifically, in this embodiment, the types of regulating valves include flow valves and on-off valves. The flow valve has a window 50 and a first adjusting part, while the on-off valve only has a second adjusting part, such as a switch handle, a switch button, a switch knob, etc. Each temperature control branch is provided with at least one flow valve and at least one on-off valve. The flow valve can read the current refrigerant flow rate and can adjust the size of the flow rate, while the on-off valve can control the on-off of the temperature control branch. The operating directions of the first adjusting part and the second adjusting part are both set towards the opening, so that the operator can conveniently observe the content of the window 50 of the flow valve through a mirror 55 and adjust the flow valve and the on-off valve based on this.

[0047] Each temperature control branch is provided with at least one refrigerant flow channel structure. When the refrigerant flows through the refrigerant flow channel structure, it can exchange heat with the hot furnace, thereby adjusting the temperature of the hot furnace. The refrigerant flow channel structure is arranged inside the structure to be cooled or heated, or adjacent to the components or parts to be cooled or heated. When the refrigerant flows through the refrigerant flow channel structure, heat exchange can occur between the refrigerant and the components or parts to be cooled or heated, thereby adjusting the temperature of the components or parts to be cooled or heated. Exemplarily, the components or parts to be cooled include the furnace door. The refrigerant flow channel structure adopts a pipe passing through the inside of the furnace door or a flow channel integrally formed inside the furnace door. The refrigerant is water. When the water flows through the refrigerant flow channel structure, it can absorb or release heat to the furnace door. By adjusting the flow valve and the on-off valve, the heat exchange rate or whether heat exchange occurs between each refrigerant flow channel structure of each temperature control branch and the hot furnace can be controlled, so as to achieve precise adjustment of the temperature of the components or parts inside the hot furnace.

[0048] Exemplarily, as shown in Figure 6 、 Figure 7As shown, in this embodiment, the first temperature control branch 21 includes a first switching valve 210, a first temperature control shunt 211, a second temperature control shunt 212, and a fifth switching valve 213. The first switching valve 210 is disposed at the water inlet end of the first temperature control branch 21, and the fifth switching valve 213 is disposed at the water outlet end of the first temperature control branch 21. The first temperature control shunt 211 and the second temperature control shunt 212 are arranged in parallel and connected between the first switching valve 210 and the fifth switching valve 213.

[0049] Among them, the first temperature control shunt 211 includes a first flow valve 2110, a first refrigerant flow channel structure 2111, a second refrigerant flow channel structure 2112, a third refrigerant flow channel structure 2113, a first three-way valve 2114, a second three-way valve 2115, and a third three-way valve 2116 (it should be noted that the three-way valve does not belong to the regulating valve defined in the present invention). The first flow valve 2110 is used to adjust the flow rate of the refrigerant flowing into the first temperature control shunt 211, so as to control the overall heat absorption and release effect of the first temperature control branch 21. When water flows through the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113, it can absorb or release heat. The first three-way valve 2114 is used to adjust the flow rate of the refrigerant flowing into the first refrigerant flow channel structure 2111, the second three-way valve 2115 is used to adjust the flow rate of the refrigerant flowing into the second refrigerant flow channel structure 2112, and the third three-way valve 2116 is used to adjust the flow rate of the refrigerant flowing into the third refrigerant flow channel structure 2113. The three three-way valves can respectively adjust the heat absorption and release effects of the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113. By adjusting the flow rate of water through the first three-way valve 2114, the second three-way valve 2115, and the third three-way valve 2116, it is possible to adjust whether the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113 absorb or release heat, or adjust the rate of heat absorption and release of the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113, so as to meet the temperature control requirements of different components or parts in the hot furnace.

[0050] Specifically, each three-way valve includes a water inlet end and two water outlet ends, and can adjust the flow rate between the two water outlet ends to adaptively change the flow rate of the refrigerant passing through the corresponding refrigerant flow channel structure. For example Figure 6As shown, the water inlet end of the first flow valve 2110 is connected to the water inlet pipeline 1, and the water outlet end of the first flow valve 2110 is connected to the water inlet end of the first three-way valve 2114. One water outlet end of the first three-way valve 2114 is connected to the water inlet end of the second three-way valve 2115, and the water outlet end of the first refrigerant flow channel structure 2111 is connected to the water inlet end of the second three-way valve 2115. The other water outlet end of the first three-way valve 2114 is connected to the water inlet end of the first refrigerant flow channel structure 2111. One water outlet end of the second three-way valve 2115 is connected to the water inlet end of the third three-way valve 2116, and the water outlet end of the second refrigerant flow channel structure 2112 is connected to the water inlet end of the third three-way valve 2116. The other water outlet end of the second three-way valve 2115 is connected to the water inlet end of the second refrigerant flow channel structure 2112. One water outlet end of the third three-way valve 2116 is connected to the water outlet pipeline 3, and the other water outlet end is connected to the water inlet end of the third refrigerant flow channel structure 2113. The water outlet end of the third refrigerant flow channel structure 2113 is connected to the water outlet pipeline 3. By adjusting the first three-way valve 2114, the second three-way valve 2115, and the third three-way valve 2116 respectively, the heat absorption and release efficiency and whether heat absorption and release occur of the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113 can be correspondingly adjusted to meet the local temperature control requirements of more components or parts.

[0051] Through the first temperature control branch 211, the flow rate of the refrigerant flowing through at least two refrigerant flow channel structures can be finely adjusted in the way of one flow valve plus at least two three-way valves, realizing precise temperature control with a relatively simple structure, reducing the overall volume of the hot furnace, and greatly reducing the manufacturing cost and use cost of the hot furnace.

[0052] More specifically, in this embodiment, the hot furnace is a vertical furnace. The first refrigerant flow channel structure 2111 is used to adjust the temperature of the upper flange 200, the second refrigerant flow channel structure 2112 is used to adjust the temperature of the manifold 201, and the third refrigerant flow channel structure 2113 is used to adjust the temperature of the lower flange 202. Inside the vertical furnace, the upper flange 200, the manifold 201, and the lower flange 202 are arranged from top to bottom. During operation, the upper flange 200, the manifold 201, and the lower flange 202 need to be heated to a certain temperature. When the temperature is too low, a large amount of silicon oxide by-products will be generated on the upper flange 200, the manifold 201, and the lower flange 202, affecting the normal production process. Of course, the temperature cannot be too high either, as too high a temperature will cause phenomena such as damage to the sealing ring and also have a negative impact on production. Preferably, the upper flange 200, the manifold 201, and the lower flange 202 are respectively provided with thermocouples for detecting the real-time temperature, so as to conveniently adjust the first three-way valve 2114, the second three-way valve 2115, and the third three-way valve 2116 according to the real-time temperature. Of course, for other types of hot furnaces, as long as the temperature of specific positions can be controlled through the first refrigerant flow channel structure 2111, the second refrigerant flow channel structure 2112, and the third refrigerant flow channel structure 2113, it also falls within the scope of protection of the present utility model.

[0053] Continuing to refer to Figure 4 、 Figure 6 As shown, the second temperature control branch 212 includes a second flow valve 2120 and a fourth refrigerant flow channel structure 2121. The second flow valve 2120 is used to adjust the flow rate of the refrigerant flowing into the fourth refrigerant flow channel structure 2121. In this embodiment, the fourth refrigerant flow channel structure 2121 is used to adjust the temperature of the dummy furnace door. By adjusting the second flow valve 2120, the heat absorption and release efficiency of the fourth refrigerant flow channel structure 2121 or whether heat absorption and release occur can be changed, so that the dummy furnace door is at a relatively stable operating temperature. It should be noted that by providing the second temperature control branch 212, compared with directly connecting the dummy furnace door to the water inlet pipe 1 and the water outlet pipe 3 through a separately provided temperature control branch, the pipeline length required to lay to the dummy furnace door can be saved, thereby reducing the structural cost. Moreover, in the present utility model, there is no specific limitation on whether to provide the second temperature control branch 212. As long as the above-mentioned first temperature control branch 211 is provided, it falls within the scope of protection of the present utility model.

[0054] As Figure 6As shown, the second temperature control branch 22 is connected between the water inlet pipe 1 and the water outlet pipe 3. The second temperature control branch 22 includes a third flow valve 221, a fifth refrigerant flow channel structure 222, and a sixth refrigerant flow channel structure 223 connected in series. The fifth refrigerant flow channel structure 222 is used to adjust the temperature of the first heat exchanger, and the sixth refrigerant flow channel structure 223 is used to adjust the temperature of the second heat exchanger. The third flow valve 221 is used to adjust the flow rate of the refrigerant flowing through the fifth refrigerant flow channel structure 222 and the sixth refrigerant flow channel structure 223, so as to control the temperature of other components or parts in the hot furnace.

[0055] Similar to the first temperature control branch 21, a second switching valve 220 is provided at the water inlet end of the second temperature control branch 22. The second switching valve 220 is connected to the water inlet pipe 1. Moreover, a sixth switching valve 224 is provided at the water outlet end of the second temperature control branch 22. The sixth switching valve 224 is connected to the water outlet pipe 3. By means of the second switching valve 220, it is possible to control whether the refrigerant flows into the second temperature control branch 22, that is, whether temperature adjustment is carried out. By means of the sixth switching valve 224, it is possible to control whether the refrigerant flows from the second temperature control branch 22 into the water outlet pipe 3, thus facilitating operations such as maintenance.

[0056] Continue to refer to Figure 6 As shown, the third temperature control branch 23 is connected between the water inlet pipe 1 and the water outlet pipe 3, and it includes a third temperature control sub-branch 231 and a fourth temperature control sub-branch 232 connected in parallel.

[0057] Among them, the third temperature control sub-branch 231 includes a fourth flow valve 2310 and a seventh refrigerant flow channel structure 2311 connected in series. The fourth flow valve 2310 is used to adjust the flow rate of the refrigerant flowing into the seventh refrigerant flow channel structure 2311. The seventh refrigerant flow channel structure 2311 is used to adjust the temperature of the furnace door. By adjusting the fourth flow valve 2310, it is possible to change the heat absorption and release efficiency of the seventh refrigerant flow channel structure 2311 to the furnace door and whether heat is absorbed or released, so that the furnace door is stabilized within an appropriate temperature range. The fourth temperature control sub-branch 232 includes a fifth flow valve 2320 and an eighth refrigerant flow channel structure 2321 connected in series. The fifth flow valve 2320 is used to adjust the flow rate of the refrigerant flowing into the eighth refrigerant flow channel structure 2321. The eighth refrigerant flow channel structure 2321 is used to adjust the temperature of the susceptor rotation mechanism. By adjusting the fifth flow valve 2320, it is possible to change the heat absorption and release efficiency of the eighth refrigerant flow channel structure 2321 to the susceptor rotation mechanism and whether heat is absorbed or released, so that the susceptor rotation mechanism is stabilized within an appropriate temperature range.

[0058] Preferably, compared with separately providing independent temperature control branches for the furnace door and the susceptor rotation mechanism, in this embodiment, through a third temperature control branch 23, when it reaches the furnace door, it is divided into the above-mentioned third temperature control sub-branch 231 and fourth temperature control sub-branch 232, which can save the length of pipeline setting, avoid the situation of mutual interference, and is also conducive to later maintenance and repair.

[0059] Similar to the first temperature control branch 21, a third switch valve 230 is provided at the water inlet end of the third temperature control branch 23. The third switch valve 230 is connected to the water inlet pipeline 1. And a seventh switch valve 233 is provided at the water outlet end of the third temperature control branch 23. The seventh switch valve 233 is connected to the water outlet pipeline 3. Through the third switch valve 230, it is possible to control whether the refrigerant flows into the third temperature control branch 23, that is, whether temperature adjustment is carried out. Through the seventh switch valve 233, it is possible to control whether the refrigerant flows from the third temperature control branch 23 into the water outlet pipeline 3, thus facilitating operations such as maintenance.

[0060] Continue to refer to Figure 6 As shown, the fourth temperature control branch 24 is connected between the water inlet pipeline 1 and the water outlet pipeline 3. It includes a sixth flow valve 241 and a ninth refrigerant flow path structure 242 connected in series. The sixth flow valve 241 is used to adjust the flow rate of the refrigerant flowing into the ninth refrigerant flow path structure 242, and the ninth refrigerant flow path structure 242 is used to adjust the temperature of the thermal field. By adjusting the sixth flow valve 241, it is possible to change the heat absorption and release efficiency of the ninth refrigerant flow path structure 242 to the thermal field and whether heat is absorbed or released, so that the thermal field is stabilized within an appropriate temperature range.

[0061] Similar to the first temperature control branch 21, a fourth switch valve 240 is provided at the water inlet end of the fourth temperature control branch 24. The fourth switch valve 240 is connected to the water inlet pipeline 1. And an eighth switch valve 243 is provided at the water outlet end of the fourth temperature control branch 24. The eighth switch valve 243 is connected to the water outlet pipeline 3. Through the fourth switch valve 240, it is possible to control whether the refrigerant flows into the fourth temperature control branch 24, that is, whether temperature adjustment is carried out. Through the eighth switch valve 243, it is possible to control whether the refrigerant flows from the fourth temperature control branch 24 into the water outlet pipeline 3, thus facilitating operations such as maintenance.

[0062] It should be noted that in some other embodiments, at least one of the second temperature control branch 22, the third temperature control branch 23, and the fourth temperature control branch 24 may also be provided on the basis of the first temperature control branch 21, and these all fall within the scope protected by the present invention.

[0063] Such as Figure 4As shown, the hot stove further includes a pipeline connector 52 and an adjusting member 53. Among them, the pipeline connector 52 can connect and fixedly connect two flow valves, and the adjusting member 53 can fixedly connect two flow valves, thereby enhancing the structural stability of the temperature control water circuit. Exemplarily, when adjusting the flow valve, it is necessary to rotate the adjusting handle 51 of the flow valve. At this time, a certain external force will be applied to the flow valve, and the pipeline connected to the flow valve is likely to be bent and other phenomena. After bending, the sealing performance of the pipeline and the pipeline connection will decrease, resulting in a risk of liquid leakage. After connecting multiple flow valves through the pipeline connector 52 and the adjusting member 53, the overall anti-bending ability will be enhanced, thereby reducing the risk of bending and liquid leakage. Of course, in some embodiments, only the pipeline connector 52 or only the adjusting member 53 can be used, and these all fall within the scope of protection of the present invention.

[0064] Specifically, in this embodiment, the first flow valve 2110 and the second flow valve 2120 are connected and fixedly connected through the pipeline connector 52, and the sixth flow valve 241 and the second flow valve 2120 are fixedly connected through the adjusting member 53, so that the first flow valve 2110, the second flow valve 2120 and the sixth flow valve 241 are fixedly connected. The fourth flow valve 2310 and the fifth flow valve 2320 are connected and fixedly connected through the pipeline connector 52, and the third flow valve 221 and the fourth flow valve 2310 are fixedly connected through the adjusting member 53, so that the third flow valve 221, the fourth flow valve 2310 and the fifth flow valve 2320 are fixedly connected.

[0065] Of course, in some other embodiments, the sixth flow valve 241 and the first flow valve 2110 can also be fixedly connected through the adjusting member 53, or the third flow valve 221 and the fifth flow valve 2320 can be fixedly connected through the adjusting member 53, and these also fall within the scope of protection of the present invention.

[0066] Preferably, as Figure 5 shown, the flow valve is provided with a threaded hole, and the adjusting member 53 is provided with a waist-shaped hole 531, so that the adjusting member 53 and the flow valve can be connected in a position-adjustable manner. As Figure 5 shown, through the waist-shaped hole 531, when there is an installation position error or an installation angle error in a single flow valve, two flow valves can still be reliably fixedly connected through the adjusting member 53, thereby improving the structural stability of the temperature control water circuit.

[0067] Furthermore, in this embodiment, the hot furnace further includes a fixing bracket 54. The fixing bracket 54 is provided with mounting holes, and the hot furnace further includes a connecting member (such as a bolt). Through the connecting member, the mounting holes, and the threaded holes provided on the flow valve, the fixing bracket 54 is fixedly connected to the flow valve, and the mirror 55 is fixedly installed on the fixing bracket 54 by various optional methods such as bolt connection and adhesive connection, so that the mirror 55 can be set based on the flow valve, facilitating the operator to set the mirror 55 in the reading direction of the viewing window 50.

[0068] Continuing to refer to Figure 6 As shown, the water inlet pipe 1 is provided with a water blowing nozzle 11. Through the water blowing nozzle 11, gas can be input into the water inlet pipe 1, so as to quickly discharge the refrigerant in the temperature control water circuit, facilitating the maintenance and repair of the temperature control water circuit and saving the maintenance cost.

[0069] As Figures 3 to 6 As shown, in this embodiment, the water inlet ends of the respective temperature control branches are connected to the water inlet pipe 1, the water outlet ends of the respective temperature control branches are connected to the water outlet pipe 3, the water inlet ends of the respective temperature control branches are provided with a flow valve and a switching valve, and the water outlet ends of the temperature control branches are provided with a switching valve. The refrigerant flow channel structure is arranged between the switching valve at the water inlet end and the switching valve at the water outlet end. In this way, the water inlet pipe 1 and the water outlet pipe 3 can be arranged adjacent to the respective regulating valves, so that the water inlet pipe 1, the water outlet pipe 3, and the respective regulating valves are all arranged in the regulating chamber 101. A liquid leakage detector 4 is provided at the bottom of the regulating chamber 101. Through this liquid leakage detector 4, the liquid leakage conditions of the water inlet pipe 1, the water outlet pipe 3, and the respective regulating valves can be detected, so as to realize the detection of multiple components by one liquid leakage detector 4, greatly reducing the detection cost.

[0070] Optionally, in some embodiments, a liquid leakage detector 4 may also be provided below the first switching valve 210, the second switching valve 220, the third switching valve 230, the fourth switching valve 240, the first flow valve 2110, the second flow valve 2120, the third flow valve 221, the fourth flow valve 2310, the fifth flow valve 2320, and the sixth flow valve 241. The liquid leakage detector 4 can detect whether there is leakage in the first switching valve 210, the second switching valve 220, the third switching valve 230, the fourth switching valve 240, the first flow valve 2110, the second flow valve 2120, the third flow valve 221, the fourth flow valve 2310, the fifth flow valve 2320, the sixth flow valve 241, and the pipelines adjacent thereto. Meanwhile, another liquid leakage detector 4 is provided below the fifth switching valve 213, the sixth switching valve 224, the seventh switching valve 233, and the eighth switching valve 243. The liquid leakage detector 4 can detect whether there is leakage in the fifth switching valve 213, the sixth switching valve 224, the seventh switching valve 233, the eighth switching valve 243, and the pipelines adjacent thereto. By providing two liquid leakage detectors 4 to detect different components respectively, it is convenient for the operator to determine the specific liquid leakage point, thereby improving the repair speed and reducing the repair cost.

[0071] Similarly, the first refrigerant flow channel structures 2111, 2112, 2113, and 2121 in the first temperature control branch 21 are arranged adjacent to each other, and there is a liquid leakage detector 4 on the outer wall of the top of the loading chamber of the hot furnace. The liquid leakage detector 4 can detect whether there is leakage in the first refrigerant flow channel structures 2111, 2112, 2113, and 2121, and the pipelines adjacent thereto. The seventh refrigerant flow channel structure 2311 and the eighth refrigerant flow channel structure 2321 are arranged adjacent to each other, and a liquid leakage detector 4 is also provided below. The liquid leakage detector 4 can detect whether there is leakage in the seventh refrigerant flow channel structure 2311 and the eighth refrigerant flow channel structure 2321, and the pipelines adjacent thereto. A liquid leakage detector 4 is also provided below the ninth refrigerant flow channel structure 242. The liquid leakage detector 4 can detect whether there is leakage in the ninth refrigerant flow channel structure 242 and the pipelines adjacent thereto.

[0072] Of course, in some other embodiments, the temperature-controlled water circuit may also include two temperature control branches, and at least one refrigerant flow channel structure is respectively provided in each of the two temperature control branches (such as the first temperature control branch 21 and the second temperature control branch 22 described above). Moreover, at least two of the refrigerant flow channel structures are arranged adjacent to each other, and the adjacent refrigerant flow channel structures are arranged above a liquid leakage detector 4, so that a liquid leakage detector 4 can simultaneously detect the liquid leakage conditions of the refrigerant flow channel structures on at least two temperature control branches. Therefore, in the present utility model, the number of refrigerant flow channel structures included in each temperature control branch and the parts where heat exchange is achieved are not specifically limited. As long as a liquid leakage detector 4 can be used to detect the liquid leakage of multiple refrigerant flow channel structures, regardless of whether the multiple refrigerant flow channel structures belong to the same temperature control branch, they all fall within the scope of protection of the present utility model.

[0073] Obviously, the above-mentioned embodiments of the present utility model are merely examples for clearly explaining the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.

Claims

1. A hot stove, characterized in that, Including: A cabinet body, the cabinet body is provided with an adjustment chamber, and the adjustment chamber has an opening; A temperature control water circuit, the temperature control water circuit is used to adjust the temperature of the hot furnace; The temperature control water circuit includes at least two regulating valves, at least one of the at least two regulating valves has a window and a first adjusting part, the at least two regulating valves of the temperature control water circuit are all arranged in the adjustment chamber, and the operating directions of the first adjusting parts all face the opening; A mirror, the mirror is fixedly arranged in the adjustment chamber at a dihedral angle with the window, the mirror surface of the mirror is closer to the first adjusting part than the back surface, and is used to display the mirror image of the window in the direction of the opening.

2. The hot furnace according to claim 1, characterized in that The temperature control water circuit includes a water inlet pipeline, at least one temperature control branch pipeline and a water outlet pipeline, and the refrigerant flows into the temperature control branch pipeline from the water inlet pipeline and then flows out from the water outlet pipeline to adjust the temperature of the hot furnace; The regulating valve includes a flow valve and a switch valve, the flow valve has the window and the first adjusting part, the switch valve has a second adjusting part, at least one flow valve and at least one switch valve are arranged in each temperature control branch pipeline, and the operating directions of the second adjusting parts all face the opening.

3. The hot furnace according to claim 2, characterized in that The water inlet pipeline and the water outlet pipeline are arranged in the adjustment chamber, and a liquid leakage detector is arranged at the bottom of the adjustment chamber, and the liquid leakage detector is used to detect the liquid leakage conditions of the water inlet pipeline, the water outlet pipeline and the regulating valve.

4. The hot furnace according to claim 2, characterized in that The flow valve arranged in one temperature control branch pipeline and the flow valve arranged in another temperature control branch pipeline are fixedly connected.

5. The hot furnace according to claim 4, characterized in that The hot furnace further includes an adjusting member, and the flow valve arranged in one temperature control branch pipeline and the flow valve arranged in another temperature control branch pipeline are connected through the adjusting member in a position-adjustable manner.

6. The hot furnace according to claim 5, characterized in that The adjusting member is provided with a kidney-shaped hole, the flow valve is provided with a threaded hole, the hot furnace further includes a connecting member, the connecting member passes through the kidney-shaped hole and is connected to the threaded hole to fix the adjusting member and the flow valve, and the connecting member is arranged in a position-adjustable manner along the length direction of the kidney-shaped hole.

7. The hot furnace according to claim 6, characterized in that The hot furnace further includes a fixing bracket, the fixing bracket is fixedly connected to the flow valve, and the mirror is fixedly installed on the fixing bracket.

8. The hot furnace according to claim 2, characterized in that The temperature control water circuit includes at least two temperature control branch pipelines, each temperature control branch pipeline is provided with a refrigerant flow channel structure, when the refrigerant flows through the refrigerant flow channel structure, it can exchange heat with the hot furnace, and a liquid leakage detector is arranged below two adjacent refrigerant flow channel structures.

9. The hot furnace according to claim 8, characterized in that The water inlet end of the temperature control branch is connected to the water inlet pipeline, the water outlet end of the temperature control branch is connected to the water outlet pipeline, the flow valve and the switch valve are arranged at the water inlet end of the temperature control branch, the switch valve is also arranged at the water outlet end of the temperature control branch, and the refrigerant flow channel structure is arranged between the switch valve at the water inlet end and the switch valve at the water outlet end.

10. The hot furnace according to claim 8, wherein The temperature control water circuit at least includes a first temperature control branch and a second temperature control branch. The first temperature control branch and the second temperature control branch are connected in parallel between the water inlet pipeline and the water outlet pipeline. At least one refrigerant flow channel structure is respectively arranged on the first temperature control branch and the second temperature control branch. Moreover, the two refrigerant flow channel structures located on the first temperature control branch and the second temperature control branch are arranged above a liquid leakage detector, so that a liquid leakage detector can simultaneously detect the liquid leakage conditions of at least two refrigerant flow channel structures.

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