Laser thickness gauge

Abstract

The utility model relates to the technical field of thickness measuring equipment, and provides a laser thickness gauge, which comprises a test platform, a pair of sliding rails, a sliding table, a fixing assembly and a pair of laser probes, and is characterized in that the surface of the test platform is provided with a first hollow; the pair of sliding rails are oppositely arranged on the test platform, and the first hollow part is located between the pair of sliding rails; the sliding table is in sliding connection with the pair of sliding rails, is provided with a second hollow part, and is used for placing a sample; the fixing assembly is arranged on the test platform; the pair of laser probes is slidably connected with the fixing assembly, and the pair of laser probes are oppositely arranged on the two sides of the sliding table and are opposite to the second hollowed-out part so as to measure the thickness of the sample. According to the laser thickness gauge, the sample can move along the slide rail, so that the heavy sample can move conveniently and is not easy to scratch; the thicknesses of different positions of the sample can be measured by moving the laser probe and the sliding table; the sliding table is arranged to be of the hollowed-out structure, and the hollowed-out position provides a large space for measurement of the laser probe, so that the single-time measurement area is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of thickness measuring equipment, in particular to a laser thickness gauge. Background Technique

[0002] With the development of technology, the requirements for sample measurement are getting higher and higher. During measurement, the sample cannot be scratched or contaminated. For example, for sputtering targets used in the manufacture of large-scale integrated circuits, the target diameter can reach 450 mm or even larger, the thickness is 10 - 20 mm, and the weight is 10 - 50 kg. For tungsten targets, the processed target surface is smooth, pollution-free, and scratch-free. However, the target itself is hard and brittle, and the sample should be moved as little as possible during measurement to prevent scratching and collision of the product.

[0003] Currently, the thickness measurement methods are divided into two types: contact type and non-contact type. Among them, contact measurements such as thickness gauges have high accuracy, but the measuring head is easy to scratch and contaminate the sample surface. Non-contact measurements include ray method, ultrasonic method, and laser method, etc. The ray method has the advantages of high accuracy, non-contact, and online measurement, and is suitable for the thickness measurement of various samples. However, the equipment cost of the ray method is relatively high, and some samples may absorb or scatter rays. The ultrasonic method is simple, non-destructive, and non-radiative, especially more advantageous when measuring thickness in dangerous environments such as high temperature, high pressure, and flammable. However, for some materials with rough surfaces or complex structures, it may be limited to a certain extent. The laser method is a measurement method that measures the thickness of a sample by the opposite irradiation of upper and lower laser probes. With the continuous development of science and technology, the laser method has been greatly developed.

[0004] A laser thickness gauge generally measures the thickness of a sample by the opposite irradiation of upper and lower laser probes. The advantage of the laser thickness gauge is that it uses non-contact measurement, which is more accurate than the contact thickness gauge and will not lose accuracy due to wear. It has higher accuracy than the ultrasonic thickness gauge and no radiation pollution compared to the ray thickness gauge.

[0005] However, due to the limitation of the equipment structure of the existing laser thickness gauge, when measuring brittle, large-sized, and heavy samples, the measurement position is limited, and only the thickness of some positions of the sample can be measured. For other positions, the sample needs to be repositioned and taken and placed multiple times, which is extremely easy to cause damage or collision to the sample. Content of the Utility Model

[0006] The utility model provides a laser thickness gauge to solve the defect that the measurement position is limited when the existing laser thickness gauge measures the thickness of a sample.

[0007] The present utility model provides a laser thickness gauge, comprising: a test platform, on the surface of which there is a first hollow; a pair of slide rails, which are oppositely arranged on the test platform, and the first hollow is located between the pair of slide rails; a slide table, which is slidably connected to the pair of slide rails, the slide table can move along a first direction, the slide table is provided with a second hollow, and the slide table is used for placing a sample; a fixing component, which is arranged on the test platform; a pair of laser probes, which are respectively slidably connected to the fixing component, the laser probes can move along a second direction, the second direction is perpendicular to the first direction, the pair of laser probes are oppositely arranged on both sides of the slide table and are opposite to the second hollow to measure the thickness of the sample.

[0008] According to the laser thickness gauge provided by the present utility model, the slide table comprises a plurality of side frames, and the plurality of side frames enclose the slide table, and the middle parts of the plurality of side frames form the second hollow.

[0009] According to the laser thickness gauge provided by the present utility model, the plurality of side frames enclose a square structure.

[0010] According to the laser thickness gauge provided by the present utility model, the plurality of side frames include opposite first side frames and second side frames, the first side frames and the second side frames are respectively slidably connected to the slide rails; the distance between the first side frames and the second side frames is equal to the distance between the pair of slide rails.

[0011] According to the laser thickness gauge provided by the present utility model, the slide rails are damping slide rails.

[0012] According to the laser thickness gauge provided by the present utility model, the fixing component comprises: a fixing column, which is connected to the test platform; a pair of fixing rods, which are respectively connected to the fixing column, the pair of fixing rods are respectively located on both sides of the slide table, and each fixing rod is connected to a laser probe, and the laser probe can slide along the fixing rod.

[0013] According to the laser thickness gauge provided by the present utility model, it further comprises a plurality of first stop bars, and the plurality of first stop bars are arranged on the test platform and are respectively arranged at both ends of the slide rails.

[0014] According to the laser thickness gauge provided by the present utility model, it further comprises a plurality of second stop bars, and the plurality of second stop bars are arranged on the test platform, and the plurality of second stop bars are arranged on at least one side of the pair of slide rails.

[0015] According to the laser thickness gauge provided by the present utility model, the test platform comprises: a platform, on which the first hollow is provided, and the fixing component is connected to the platform; a plurality of support columns, and the first ends of the plurality of support columns are respectively connected to the platform.

[0016] According to a laser thickness gauge provided by the present utility model, the test platform further includes a plurality of rollers, and the second end of each support column is connected to one of the rollers.

[0017] In the laser thickness gauge provided by the present utility model, by providing a pair of slide rails and a slide table, the sample can be moved along the slide rails, which is convenient for moving heavier samples and is not likely to cause scratches; by moving the laser probe and the slide table, the thickness of different positions of the sample can be measured; by setting the slide table into a hollow structure, the hollow part provides a large space for the laser probe to measure, increasing the single measurement area and avoiding multiple pick-up and placement, which may cause damage or collision to the sample. Description of the Drawings

[0018] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 is a schematic structural diagram of the laser thickness gauge provided by the present utility model.

[0020] Figure 2 is Figure 1 the side view of...

[0021] Figure 3 is Figure 1 a schematic structural diagram of the slide table shown in...

[0022] Reference Signs:

[0023] 1, test platform; 2, slide rail; 3, slide table; 4, fixing component; 5, laser probe; 7, processor;

[0024] 11, platform; 12, support column; 31, first frame; 32, second frame; 41, fixing column; 42, fixing rod; 61, first stop bar; 62, second stop bar; 100, sample; 101, first hollow; 301, second hollow. Detailed Embodiments

[0025] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without making creative efforts shall fall within the protection scope of the present utility model.

[0026] The following will be combined with Figures 1 - 3 to describe the laser thickness gauge of the present utility model.

[0027] As Figure 1 shown, in the embodiment of the present utility model, the laser thickness gauge includes: a test platform 1, a pair of slide rails 2, a slide table 3, a fixing component 4 and a pair of laser probes 5. A first hollow 101 is provided on the surface of the test platform 1, and the pair of slide rails 2 are oppositely arranged on the test platform 1, and the first hollow 101 is located between the pair of slide rails 2. The slide table 3 is slidably connected to the pair of slide rails 2, the slide table 3 can move along the first direction, the slide table 3 is provided with a second hollow 301, and the slide table 3 is used for placing a sample 100. The fixing component 4 is arranged on the test platform 1, and the pair of laser probes 5 are respectively slidably connected to the fixing component 4, the laser probes 5 can move along the second direction, the second direction is perpendicular to the first direction, the pair of laser probes 5 are oppositely arranged on both sides of the slide table 3, and are opposite to the second hollow 301 to measure the thickness of the sample 100.

[0028] Specifically, the pair of slide rails 2 are oppositely arranged on the test platform 1, and the first hollow 101 is between the pair of slide rails 2. The slide table 3 is provided with a second hollow 301 so that the pair of laser probes 5 can measure the thickness of the sample 100 through the second hollow 301, and the laser beams emitted by the pair of laser probes 5 are perpendicular to the sample 100. In this embodiment, the slide table 3 can slide along the pair of slide rails 2, and the length direction of the slide rails 2 is the first direction, so that the pair of laser probes 5 can measure the thickness of the sample 100 at different positions along the first direction; the pair of laser probes 5 can slide along the fixing component 4, and its sliding direction is perpendicular to the first direction, that is, the second direction is the extending direction of the width between the pair of slide rails 2, so as to measure the thickness of the sample 100 at different positions along the second direction, realizing multi-position measurement of the sample thickness.

[0029] Furthermore, the size of the second hollow 301 should be as large as possible to provide a larger measurement space for the laser probe 5 and increase the area of a single measurement.

[0030] In this embodiment, the laser thickness gauge is particularly suitable for samples such as tungsten target materials that are hard and brittle and have a relatively heavy weight. By setting the slide rails and the slide table, the tungsten target material sample can be moved along the slide rails, and then the thickness of the tungsten target material sample at different positions can be measured.

[0031] The laser thickness gauge provided by the embodiment of the present utility model can move the sample along the slide rail by setting a pair of slide rails and a slide table, which facilitates the movement of heavier samples and is not prone to scratching. By moving the laser probe and the slide table, the thickness of different positions of the sample can be measured. By setting the slide table into a hollow structure, a large space is provided for the laser probe to measure at the hollow part, increasing the single measurement area and avoiding multiple pick - and - place operations that may cause damage or bumps to the sample.

[0032] As Figure 3 As shown, in the embodiment of the present utility model, the slide table 3 includes a plurality of frames. The plurality of frames enclose the slide table 3, and a second hollow 301 is formed in the middle of the plurality of frames. In this embodiment, on the one hand, the frames are used to contact the slide rail 2 and slide along the slide rail 2; on the other hand, the frames are used to place the sample 100 and drive the sample 100 to move.

[0033] Furthermore, in the embodiment of the present utility model, the plurality of frames enclose a square structure.

[0034] Specifically, when the frames enclose a square structure, the second hollow 301 inside is also square. When the diameter is equal to the side length, designing the second hollow 301 as a square has a larger hollow area, so as to provide a larger measurement area for a single measurement of the laser probe 5.

[0035] In the embodiment of the present utility model, the plurality of frames include opposite first frames 31 and second frames 32. The first frames 31 and the second frames 32 are respectively slidably connected to the slide rail 2. The distance between the first frame 31 and the second frame 32 is equal to the distance between a pair of slide rails 2.

[0036] Specifically, in this embodiment, the width of the first hollow 101 is equal to the width of the second hollow 301, so that the sample 100 has the largest exposed area to increase the measurement area during a single measurement.

[0037] Furthermore, in the embodiment of the present utility model, the slide rail 2 is a damping slide rail to prevent measurement errors caused by slight vibrations when the slide table 3 slides.

[0038] As Figure 2 As shown, in the embodiment of the present utility model, the fixing assembly 4 includes: a fixing column 41 and a pair of fixing rods 42. The fixing column 41 is connected to the test platform 1, the pair of fixing rods 42 are respectively connected to the fixing column 41, the pair of fixing rods 42 are respectively located on both sides of the slide table 3, and each fixing rod 42 is connected to a laser probe 5. The laser probe 5 can slide along the fixing rod 42.

[0039] Specifically, in this embodiment, by moving the laser probe 5, the thickness of different positions of the sample 100 along the second direction can be measured.

[0040] The laser thickness gauge provided by the embodiment of the present utility model can measure the thickness at different positions on the same straight line of a sample by setting a slide rail and a slide table. When moving the slide table, the position of the laser probe can be changed by slidably connecting the laser probe to a fixed rod, so as to measure the thickness at different positions of the sample, with a large amount of measurement data and high accuracy.

[0041] As Figure 1 shown, in the embodiment of the present utility model, the laser thickness gauge further includes a plurality of first stop bars 61, and the plurality of first stop bars 61 are arranged on the test platform 1 and are respectively arranged at both ends of the slide rail 2.

[0042] Specifically, first stop bars 61 are respectively arranged at both ends of the test platform 1 to prevent the slide table 3 from sliding out of the slide rail 2 during the sliding process along the slide rail 2. In this embodiment, the length of the first stop bar 61 is equal to the width of the test platform 1.

[0043] As Figure 1 shown, the laser thickness gauge further includes a plurality of second stop bars 62, and the plurality of second stop bars 62 are arranged on the test platform 1, and the plurality of second stop bars 62 are arranged on at least one side of a pair of slide rails 2.

[0044] Specifically, in this embodiment, a plurality of second stop bars 62 are arranged on one side of the test platform 1, and the length of the plurality of second stop bars 62 after being connected is equal to the length of the test platform 1. The first stop bar 61 and the second stop bar 62 surround a pair of slide rails 2, and the first stop bar 61 and the second stop bar 62 are used to protect the sample 100 to prevent the sample 100 from falling off the slide table 3.

[0045] As Figure 1 shown, in the embodiment of the present utility model, the test platform 1 includes: a platform 11 and a plurality of support columns 12. The platform 11 is provided with a first hollow 101, and the fixing assembly 4 is connected to the platform 11. The first ends of the plurality of support columns 12 are respectively connected to the platform 11, and the second end of each support column 12 is connected to a roller so that the test platform 1 can move.

[0046] In the embodiment of the present utility model, the materials of the test platform 1, the fixing column 41, the fixing rod 42, the slide table 3, the first stop bar 61, and the second stop bar 62 are all aluminum alloy.

[0047] In the embodiment of the present utility model, the laser thickness gauge further includes a processor 7, and the processor 7 is provided with a laser measurement and coordinate positioning system. When the laser probe 5 and the slide table 3 move, the processor 7 can locate the measurement points of the sample 100 and complete the acquisition of thickness data. At the same time, the processor 7 can store the measurement data to form a measurement report.

[0048] The laser thickness gauge provided by the embodiment of the present utility model has a simple structure, convenient operation, good use effect and low equipment cost, and is suitable for wide promotion and application.

[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A laser thickness gauge, characterized in that, Comprising: A test platform, on the surface of which there is a first hollow-out; A pair of slide rails, which are oppositely arranged on the test platform, and the first hollow-out is located between the pair of slide rails; A slide table, which is slidably connected to the pair of slide rails, the slide table can move in a first direction, the slide table is provided with a second hollow-out, and the slide table is used for placing a sample; A fixing component, which is arranged on the test platform; A pair of laser probes, which are respectively slidably connected to the fixing component, the laser probes can move in a second direction, the second direction is perpendicular to the first direction, the pair of laser probes are oppositely arranged on both sides of the slide table and are opposite to the second hollow-out to measure the thickness of the sample.

2. The laser thickness gauge according to claim 1, characterized in that, The slide table includes a plurality of side frames, and the plurality of side frames enclose the slide table, and the middle parts of the plurality of side frames form the second hollow-out.

3. The laser thickness gauge according to claim 2, characterized in that, The plurality of side frames enclose a square structure.

4. The laser thickness gauge according to claim 2, characterized in that, The plurality of side frames include opposite first side frames and second side frames, and the first side frame and the second side frame are respectively slidably connected to the slide rails; The distance between the first side frame and the second side frame is equal to the distance between the pair of slide rails.

5. The laser thickness gauge according to claim 1, characterized in that, The slide rails are damping slide rails.

6. The laser thickness gauge according to claim 1, characterized in that, The fixing component includes: A fixing column, which is connected to the test platform; A pair of fixing rods, which are respectively connected to the fixing column, the pair of fixing rods are respectively located on both sides of the slide table, and each fixing rod is connected to one laser probe, and the laser probe can slide along the fixing rod.

7. The laser thickness gauge according to claim 1, characterized in that, It further includes a plurality of first stop bars, which are arranged on the test platform and are respectively arranged at both ends of the slide rails.

8. The laser thickness gauge according to claim 7, characterized in that, It further includes a plurality of second stop bars, which are arranged on the test platform, and the plurality of second stop bars are arranged on at least one side of the pair of slide rails.

9. The laser thickness gauge according to claim 1, characterized in that, The test platform includes: A platform, on which the first hollow-out is provided, and the fixing component is connected to the platform; A plurality of support columns, and the first ends of the plurality of support columns are respectively connected to the platform.

10. The laser thickness gauge according to claim 9, characterized in that, The test platform further includes a plurality of rollers, and the second end of each support column is connected to one roller.

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