Narrow surface density and thickness measurement all-in-one machine

Abstract

The utility model relates to the technical field of measuring equipment, in particular to a narrow surface density and thickness measuring all-in-one machine which comprises a base and a supporting frame horizontally and movably arranged at the top end of the base through a linear driving mechanism, and a receding groove with an opening in one side is formed in the middle of the supporting frame and used for allowing a measured base material to continuously penetrate through. A surface density measuring mechanism and a thickness measuring mechanism are installed on the side, close to an opening of the receding groove, of the supporting frame, and the surface density measuring mechanism and the thickness measuring mechanism are arranged on the same straight line in the moving direction of the supporting frame. The overall width of the equipment is reduced, the occupied space of the equipment is saved, meanwhile, the measuring surface can be narrowed, and the influence of shaking of the material measuring surface on measurement is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of measuring equipment, in particular to a narrow-type surface density thickness measuring integrated machine. Background Art

[0002] The traditional all-in-one radiation source measurement module and the optical thickness measurement module are all combined in a structure arranged parallel to the scanning direction (the measurement spots of the two groups of measurement modules are arranged parallel to the scanning direction). For example, in the Chinese Patent Literature Library, a measuring device disclosed in Application No. 202320997792.9 makes the equipment wider as a whole. At the same time, due to the wide measuring surface in the scanning direction, the measurement is greatly affected by the jitter of the measured material, which ultimately affects the measurement accuracy and performance. Summary of the invention

[0003] The purpose of the utility model is to provide a narrow-type surface density and thickness measuring integrated machine to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a narrow surface density and thickness measuring integrated machine, comprising a base and a support frame horizontally movably arranged on the top of the base through a linear drive mechanism, a clearance groove with an opening on one side is arranged in the middle of the support frame, which is used to accommodate the measured substrate to pass through continuously, and a surface density measuring mechanism and a thickness measuring mechanism are installed on the side of the support frame close to the opening of the clearance groove, and the surface density measuring mechanism and the thickness measuring mechanism are respectively arranged on the same straight line along the moving direction of the support frame.

[0005] Furthermore, the surface density measuring mechanism comprises a first transmitting end and a first receiving end which are parallel to each other and opposite to each other, and a gap is reserved between the first transmitting end and the first receiving end to accommodate the substrate to be measured to pass through.

[0006] Furthermore, the surface density measurement mechanism is an X / β-ray measurement module.

[0007] Furthermore, the thickness measuring mechanism comprises a second transmitting end and a second receiving end which are parallel to each other and opposite to each other, and a gap is reserved between the second transmitting end and the second receiving end for accommodating the substrate to be measured to pass through.

[0008] Furthermore, the thickness measuring mechanism is a laser, spectral confocal or white light interference optical measurement module.

[0009] Furthermore, the thickness measuring mechanism is installed on a support frame, and the surface density measuring mechanism is installed on a side of the thickness measuring mechanism away from the support frame through a third bracket.

[0010] Furthermore, the surface density measuring mechanism and the thickness measuring mechanism are both installed on the support frame through a third bracket, and the thickness measuring mechanism is located on a side close to the support frame.

[0011] Further, it further includes a first standard sheet mounted by a first bracket and a second standard sheet mounted by a second bracket. The first bracket and the second bracket are fixed relative to the base. The first standard sheet is used for calibrating the areal density measurement mechanism, and the second standard sheet is used for calibrating the thickness measurement mechanism. The first standard sheet and the second standard sheet are respectively arranged on the same straight line along the moving direction of the support frame.

[0012] Further, the linear drive mechanism includes a lead screw horizontally installed inside the base, a motor for driving the rotation of the lead screw, and a sliding seat horizontally and slidably arranged at the top of the base. The top of the sliding seat is fixedly connected to the support frame, and the sliding seat is threadedly connected to the lead screw. A guiding module parallel to the lead screw is arranged on the base, and the sliding seat is slidably connected to the guiding module.

[0013] Further, protective covers for shielding the lead screw and the guiding module are arranged on both sides of the sliding seat along its moving direction.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows: By arranging the areal density measurement mechanism and the thickness measurement mechanism on the same straight line along the moving direction of the support frame, the overall width of the device is reduced, saving the floor space of the device. At the same time, the measurement surface can be made narrower, reducing the influence of the jitter of the material measurement surface on the measurement. Description of the Drawings

[0015] Figure 1 is a schematic three-dimensional structure diagram of the present utility model;

[0016] Figure 2 is a schematic installation structure diagram of the areal density measurement mechanism and the thickness measurement mechanism in Embodiment 1 of the present utility model;

[0017] Figure 3 is a schematic three-dimensional structure diagram of the linear drive mechanism of the present utility model;

[0018] Figure 4 is a schematic installation structure diagram of the areal density measurement mechanism and the thickness measurement mechanism in Embodiment 2 of the present utility model.

[0019] In the figure: 1, base; 2, linear drive mechanism; 201, lead screw; 202, motor; 203, sliding seat; 204, guiding module; 3, support frame; 301, relief groove; 4, areal density measurement mechanism; 401, first emission end; 402, first receiving end; 5, thickness measurement mechanism; 501, second emission end; 502, second receiving end; 6, first bracket; 7, first standard sheet; 8, second bracket; 9, second standard sheet; 10, third bracket; 11, protective cover; 12, base material to be measured. Detailed Embodiments

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. In the description of the utility model, it should be noted that the terms "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the utility model. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" can explicitly or implicitly include at least one of the features. In order to make the terms "including" and any variations of them in the specification and claims of the utility model and the above-mentioned drawings, it is intended to cover non-exclusive inclusions.

[0021] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, in the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside" and the like indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model.

[0022] Example 1, please refer to Figures 1-3 The utility model provides an embodiment: a narrow surface density and thickness measuring integrated machine, comprising a base 1 and a support frame 3 horizontally movably arranged on the top of the base 1 through a linear drive mechanism 2, a clearance groove 301 with an opening on one side is arranged in the middle of the support frame 3, for accommodating the measured substrate 12 to pass through continuously, a surface density measuring mechanism 4 and a thickness measuring mechanism 5 are installed on the side of the support frame 3 close to the opening of the clearance groove 301, and the surface density measuring mechanism 4 and the thickness measuring mechanism 5 are respectively arranged on the same straight line along the moving direction of the support frame 3. When working, the linear drive mechanism 2 drives the support frame 3 to move horizontally along the width direction of the measured substrate 12, and then drives the surface density measuring mechanism 4 and the thickness measuring mechanism 5 to move synchronously along the width direction of the measured substrate 12 to perform surface density measurement and thickness measurement, reduce the overall width of the equipment, save the space occupied by the equipment, and at the same time make the measuring surface narrower, reduce the influence of the material measuring surface jitter on the measurement.

[0023] In this embodiment, the linear drive mechanism 2 includes a screw rod 201 horizontally installed inside the base 1, a motor 202 that drives the screw rod 201 to rotate, and a sliding seat 203 that is horizontally slidably arranged at the top of the base 1. The top of the sliding seat 203 is fixedly connected to the support frame 3, and the sliding seat 203 is threadedly connected to the screw rod 201 through a screw nut. A guide module 204 parallel to the screw rod 201 is provided on the base 1, and the sliding seat 203 is slidably connected to the guide module 204. The guide module 204 is specifically a slide rail, and can also be set as a linear bearing, etc. The screw rod 201 is driven to rotate by the motor 202, and then the sliding seat 203 and the support frame 3 are driven to move back and forth horizontally at the top of the base 1. Furthermore, the linear drive mechanism 2 can also be set as other structures such as a conveyor belt.

[0024] In this embodiment, protective covers 11 for shielding the screw rod 201 and the guide module 204 are provided on both sides of the sliding seat 203 along the moving direction thereof.

[0025] In this embodiment, the surface density measurement mechanism 4 is an X / β-ray measurement module, including a first transmitting end 401 and a first receiving end 402 which are parallel and opposite to each other, and a gap is reserved between the first transmitting end 401 and the first receiving end 402 to accommodate the passage of the measured substrate 12. The measured substrate 12 passes between the first transmitting end 401 and the first receiving end 402, and the surface density of the measured substrate 12 is measured according to the attenuation law of the rays.

[0026] In this embodiment, the thickness measuring mechanism 5 can specifically be any one of a laser, spectral confocal or white light interference optical measurement module, and the thickness measuring mechanism 5 includes a second transmitting end 501 and a second receiving end 502 which are parallel and opposite to each other, and a gap is reserved between the second transmitting end 501 and the second receiving end 502 to accommodate the measured substrate 12 to pass through. The measured substrate 12 passes through the second transmitting end 501 and the second receiving end 502 to measure the thickness of the measured substrate 12.

[0027] Reference Figure 2 In this embodiment, the thickness measuring mechanism 5 is installed on the support frame 3, the second transmitting end 501 and the second receiving end 502 are respectively installed at the upper and lower ends of the opening of the make way slot 301, and the surface density measuring mechanism 4 is installed on the side of the thickness measuring mechanism 5 away from the support frame 3 through the third bracket 10. Specifically, the first transmitting end 401 and the first receiving end 402 are respectively installed at the upper and lower ends of the opening of the make way slot 301 through the third bracket 10. When the support frame 3 moves horizontally, the substrate 12 to be measured can pass through the first transmitting end 401 and the first receiving end 402 and between the second transmitting end 501 and the second receiving end 502 in sequence, and then be inserted into the make way slot 301.

[0028] In this embodiment, the narrow-type surface density and thickness measurement integrated machine further includes a first standard sheet 7 installed through a first bracket 6 and a second standard sheet 9 installed through a second bracket 8. The first bracket 6 and the second bracket 8 are fixed relative to the base 1. The first standard sheet 7 is used for calibrating the surface density measurement mechanism 4, and the second standard sheet 9 is used for calibrating the thickness measurement mechanism 5. The first standard sheet 7 and the second standard sheet 9 are respectively arranged on the same straight line along the moving direction of the support frame 3 and are coplanar with the substrate 12 to be measured. Specifically, the first bracket 6 is installed on one side of the base 1, and the second bracket 8 is installed above the base 1. During operation, the substrate 12 to be measured passes through between the first bracket 6 and the support frame 3 through the auxiliary roller assembly and moves along a direction perpendicular to the support frame 3. Then, the support frame 3 drives the surface density measurement mechanism 4 and the thickness measurement mechanism 5 to move along the width direction of the substrate 12 to be measured for measurement. At the same time, when the support frame 3 is driven to move horizontally, the first standard sheet 7 is made to pass through between the first transmitting end 401 and the first receiving end 402 to calibrate the surface density measurement mechanism 4, and the second standard sheet 9 is made to pass through between the second transmitting end 501 and the second receiving end 502 to calibrate the thickness measurement mechanism 5, reducing the measurement error caused by changes in the external environment.

[0029] Working principle: During measurement, the linear drive mechanism 2 drives the support frame 3 to move horizontally along the width direction of the substrate 12 to be measured. The substrate 12 to be measured passes through between the first transmitting end 401 and the first receiving end 402 for surface density measurement, and the substrate 12 to be measured passes through between the second transmitting end 501 and the second receiving end 502 for thickness measurement. At the same time, the linear drive mechanism 2 regularly drives the support frame 3 to move horizontally. The first standard sheet 7 is inserted between the first transmitting end 401 and the first receiving end 402 for calibration, and the second standard sheet 9 is inserted between the second transmitting end 501 and the second receiving end 502 for calibration, reducing the measurement error caused by changes in the external environment.

[0030] Embodiment 2, please refer to Figure 4 , the difference between this embodiment and Embodiment 1 is that both the surface density measurement mechanism 4 and the thickness measurement mechanism 5 are installed on the support frame 3 through a third bracket 10, and the thickness measurement mechanism 5 is located on the side close to the support frame 3, that is, the order of thickness measurement and surface density measurement of the substrate 12 to be measured is opposite to that in Embodiment 1.

[0031] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model. Any reference signs in the claims should not be construed as limiting the claims involved.

Claims

1. A narrow type integrated machine for measuring surface density and thickness, comprising a base (1) and a support frame (3) horizontally movably arranged at the top of the base (1) through a linear drive mechanism (2). A relief groove (301) with an opening on one side is arranged in the middle of the support frame (3) for accommodating a base material to be measured (12) to continuously pass through it. It is characterized in that: A surface density measuring mechanism (4) and a thickness measuring mechanism (5) are installed on one side of the support frame (3) close to the opening of the clearance groove (301), and the surface density measuring mechanism (4) and the thickness measuring mechanism (5) are respectively arranged on the same straight line along the moving direction of the support frame (3).

2. The integrated narrow surface density and thickness measuring machine according to claim 1, wherein: The surface density measuring mechanism (4) comprises a first transmitting end (401) and a first receiving end (402) which are parallel to each other and opposite to each other, and a gap is reserved between the first transmitting end (401) and the first receiving end (402) for accommodating the substrate (12) to be measured to pass through.

3. The integrated narrow surface density and thickness measuring machine according to claim 1, characterized in that: The surface density measurement mechanism (4) is an X / β-ray measurement module.

4. A narrow type surface density and thickness measurement integrated machine according to claim 1, characterized in that: The thickness measuring mechanism (5) comprises a second transmitting end (501) and a second receiving end (502) which are parallel to each other and opposite to each other, and a gap is reserved between the second transmitting end (501) and the second receiving end (502) for accommodating the substrate (12) to be measured to pass through.

5. The narrow type surface density and thickness measurement integrated machine according to claim 1, characterized in that: The thickness measuring mechanism (5) is a laser, spectral confocal or white light interference optical measurement module.

6. The narrow type surface density and thickness measurement integrated machine according to claim 1, characterized in that: The thickness measuring mechanism (5) is mounted on the support frame (3), and the surface density measuring mechanism (4) is mounted on a side of the thickness measuring mechanism (5) away from the support frame (3) via a third bracket (10).

7. A narrow type surface density and thickness measurement integrated machine according to claim 1, characterized in that: The surface density measuring mechanism (4) and the thickness measuring mechanism (5) are both mounted on the support frame (3) via a third bracket (10), and the thickness measuring mechanism (5) is located on a side close to the support frame (3).

8. The integrated narrow surface density and thickness measuring machine according to claim 1, characterized in that: The device also comprises a first standard sheet (7) installed via a first bracket (6) and a second standard sheet (9) installed via a second bracket (8); the first bracket (6) and the second bracket (8) are fixed relative to the base (1); the first standard sheet (7) is used for calibrating the surface density measuring mechanism (4); the second standard sheet (9) is used for calibrating the thickness measuring mechanism (5); and the first standard sheet (7) and the second standard sheet (9) are respectively arranged on the same straight line along the moving direction of the support frame (3).

9. The integrated narrow surface density and thickness measuring machine according to claim 1, characterized in that: The linear drive mechanism (2) comprises a screw (201) installed horizontally inside the base (1), a motor (202) driving the screw (201) to rotate, and a sliding seat (203) arranged horizontally and slidably at the top of the base (1), the top of the sliding seat (203) being fixedly connected to the support frame (3), and the sliding seat (203) being threadedly connected to the screw (201), and a guide module (204) parallel to the screw (201) being arranged on the base (1), and the sliding seat (203) being slidably connected to the guide module (204).

10. The narrow type surface density and thickness measurement integrated machine according to claim 9, characterized in that: Protective covers (11) for shielding the screw rod (201) and the guide module (204) are provided on both sides of the sliding seat (203) along the moving direction thereof.

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