Corrugated pipe leak detection device and thin film deposition equipment

Abstract

The utility model discloses a corrugated pipe leak detection device and film deposition equipment, the corrugated pipe leak detection device comprises an upper fixing plate, a lower fixing plate, a connecting assembly and an exhaust pipe, the upper fixing plate and the lower fixing plate are arranged at an interval up and down, the upper fixing plate and the lower fixing plate are detachably connected and fixed through the connecting assembly, and the exhaust pipe is connected with the connecting assembly. The exhaust pipe is arranged on the side, opposite to the lower fixing plate, of the upper fixing plate. Wherein a clamping piece is arranged between the upper fixing plate and the lower fixing plate, and the clamping piece is used for clamping a first pipe fitting and a second pipe fitting which are connected with the two ends of the corrugated pipe. According to the invention, the leak detection function is realized, the leak detection efficiency is improved, the clamping and impedance test functions are also realized, the functions are more diversified, and the requirements of the diversified function test of the corrugated pipe are met.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a bellows leak detection device and a thin film deposition device. Background Art

[0002] In the Atomic Layer Deposition (ALD) technology, the bellows, as an important component connecting various key components, plays a crucial role in ensuring the stability and purity of the internal environment of the device. ALD devices are widely used in the fields of semiconductor manufacturing, nanomaterial synthesis, etc. The sealing performance of the bellows is crucial for maintaining the vacuum degree and gas purity during the coating process. However, in the actual application process, the leak detection of the bellows often becomes a complex and time-consuming task. The traditional method for leak detection of the bellows is to conduct a leak detection test after the bellows is installed on the machine table. However, this method cannot directly determine whether there is a problem with the bellows itself. Therefore, it is necessary to replace the new bellows for leak detection and troubleshooting, which is time-consuming and laborious. Although there are currently off-line bellows leak detection devices that can perform leak detection tests on the bellows alone, the current bellows leak detection devices can only complete the leak detection function, with a single function and cannot meet the requirements of other test items for the bellows. Summary of the Utility Model

[0003] Embodiments of the utility model provide a bellows leak detection device and a thin film deposition device, aiming to solve the problem of the single function of the existing bellows leak detection device.

[0004] In a first aspect, the utility model provides a bellows leak detection device, including: an upper fixing plate, a lower fixing plate, a connecting component, and an air extraction pipe. The upper fixing plate and the lower fixing plate are arranged at an interval up and down. The upper fixing plate and the lower fixing plate are detachably connected and fixed through the connecting component. The air extraction pipe is arranged on a side of the upper fixing plate facing away from the lower fixing plate;

[0005] Wherein, a clamping member is arranged between the upper fixing plate and the lower fixing plate, and the clamping member is used for clamping a first pipe fitting and a second pipe fitting connected to two ends of the bellows.

[0006] Further, the clamping member includes an upper clamping member and a lower clamping member. The upper clamping member is arranged on a side of the upper fixing plate facing the lower fixing plate, and the lower clamping member is arranged on a side of the lower fixing plate facing the upper fixing plate. The upper clamping member and the lower clamping member are used for clamping the circumferences of the first pipe fitting and the second pipe fitting.

[0007] Further, the upper clamping member includes two upper clamping blocks, and the two upper clamping blocks are arranged along two opposite side edges of the upper fixing plate.

[0008] Further, the lower clamping member includes two lower clamping blocks, and the two lower clamping blocks are arranged along two opposite side edges of the lower fixing plate.

[0009] Further, an upper arc-shaped clamping edge is provided on one side of the upper clamping block facing the lower fixing plate; and / or,

[0010] A lower arc-shaped clamping edge is provided on one side of the lower clamping block facing the upper fixing plate.

[0011] Further, an upper locking portion is provided on the upper arc-shaped clamping edge, and the upper locking portion is recessed toward the side away from the lower fixing plate; and / or,

[0012] A lower locking portion is provided on the lower arc-shaped clamping edge, and the lower locking portion is recessed toward the side away from the upper fixing plate.

[0013] Further, the connecting assembly includes an adjusting link and a fastener. The adjusting link passes through the upper fixing plate and the lower fixing plate and is fixed to the fastener. Wherein, the upper fixing plate and the lower fixing plate can move along the axial direction of the adjusting link to adjust the distance between the upper fixing plate and the lower fixing plate.

[0014] Further, a first upper through hole is formed on the upper fixing plate, a second upper through hole is formed on the upper clamping member, a first lower through hole is formed on the lower fixing plate, and a second lower through hole is formed on the lower clamping member;

[0015] Wherein, during leak detection, the adjusting link sequentially passes through the first upper through hole, the second upper through hole, the first lower through hole and the second lower through hole and is fixed to the fastener;

[0016] During clamping, the adjusting link sequentially passes through the first upper through hole, the second upper through hole, the second lower through hole and the first lower through hole and is fixed to the fastener.

[0017] Further, the adjusting link is a long bolt, the fastener is a nut, and the long bolt is threadedly fastened to the nut.

[0018] The present utility model also provides a thin film deposition device, including a bellows and a bellows leak detection device. The bellows leak detection device is the above-mentioned bellows leak detection device, and the bellows is leak-detected through the bellows leak detection device.

[0019] The present utility model also provides a method for using a bellows leak detection device, which is applied to the above-mentioned bellows leak detection device. The method includes:

[0020] If the bellows leak detection device is used for bellows leak detection, the upper and lower ends of the bellows are respectively fixed to the upper fixing plate and the lower fixing plate, and the exhaust pipe is connected to the leak detector, and the bellows is leak-detected through the leak detector;

[0021] If the corrugated pipe leak detection device is used for auxiliary clamping, the clamping member is clamped on the circumferences of the first pipe fitting and the second pipe fitting, and the upper fixing plate and the lower fixing plate are fixed through the connecting component, wherein the first pipe fitting and the second pipe fitting are connected to both ends of the corrugated pipe;

[0022] If the corrugated pipe leak detection device is used for impedance testing of the corrugated pipe, the element to be tested is installed inside the upper and lower ends of the corrugated pipe, and the upper and lower ends of the corrugated pipe are respectively fixed to the upper fixing plate and the lower fixing plate, and the impedance between the corrugated pipe and the element to be tested is measured by an impedance tester.

[0023] The present utility model provides a corrugated pipe leak detection device and a thin film deposition device. The corrugated pipe leak detection device includes: an upper fixing plate, a lower fixing plate, a connecting component and an air extraction pipe. The upper fixing plate and the lower fixing plate are arranged at intervals up and down. The upper fixing plate and the lower fixing plate are detachably connected and fixed through the connecting component. The air extraction pipe is arranged on the upper fixing plate. The upper fixing plate is provided with an upper clamping member, and the lower fixing plate is provided with a lower clamping member. With the corrugated pipe leak detection device of the present application, during corrugated pipe leak detection, vacuum is extracted through the air extraction pipe for leak detection; during auxiliary clamping, the circumferences of the first pipe fitting and the second pipe fitting at both ends of the corrugated pipe are clamped by the upper clamping member and the lower clamping member to prevent it from sagging naturally; during impedance testing of the corrugated pipe, the element to be tested is arranged inside the upper and lower ends of the corrugated pipe, and the impedance between the corrugated pipe and the element to be tested can be directly measured by an impedance tester. Thus, it can be seen that not only the leak detection function is realized and the leak detection efficiency is improved, but also the clamping and impedance testing functions are realized, the functions are more diversified, and the requirements for diversified function testing of the corrugated pipe are met. Description of the Drawings

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 Shows a schematic diagram of the corrugated pipe leak detection device of the embodiment of the present utility model when auxiliary clamping the pipeline;

[0026] Figure 2 Shows an exploded schematic diagram of the corrugated pipe leak detection device of the embodiment of the present utility model;

[0027] Figure 3 Shows a front view schematic diagram of the assembly during leak detection of the corrugated pipe leak detection device of the embodiment of the present utility model;

[0028] Figure 4Shows a side view schematic diagram of the assembly during leak detection of the bellows leak detection device according to an embodiment of the present utility model;

[0029] Figure 5 Shows a schematic diagram of the assembly during auxiliary clamping of the bellows leak detection device according to an embodiment of the present utility model;

[0030] Figure 6 Shows a schematic diagram of the assembly during impedance testing of the bellows leak detection device according to an embodiment of the present utility model;

[0031] Reference numerals:

[0032] 1. Upper fixing plate; 11. First upper through hole; 2. Lower fixing plate; 21. First lower through hole; 3. Upper clamping member; 31. Upper clamping block; 32. Upper arc-shaped clamping edge; 33. Upper locking part; 4. Lower clamping member; 41. Lower clamping block; 42. Lower arc-shaped clamping edge; 43. Lower locking part; 5. Exhaust pipe; 6. Adjusting connecting rod; 7. Fastening piece; 8. Bellows; 81. Upper flange; 82. Lower flange; 9. Element to be tested; First pipe fitting 101; Second pipe fitting 102. Detailed implementation manners

[0033] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0034] The directional terms mentioned in the present utility model, such as "upper", "lower", "front", "rear", "left", "right", "inside", "outside", "side surface", etc., are only references to the directions in the attached drawings. Therefore, the directional terms used are for explaining and understanding the present utility model, rather than for limiting the present utility model. In addition, in the drawings, structures that are similar or the same are denoted by the same reference numerals.

[0035] As one of the key components in atomic layer deposition (ALD) equipment, the sealing performance of the bellows directly affects the deposition process and thus has an important impact on the stability of the coating. Traditional bellows leak detection is usually carried out after the bellows are installed on the machine. Once the leak detection result is abnormal, it is impossible to directly determine whether there is a problem with the bellows itself. Therefore, if it is necessary to check whether there is a problem with the bellows, a new bellows needs to be replaced for leak detection and troubleshooting. Repeated disassembly is difficult, time-consuming and laborious, and the troubleshooting time is long. Therefore, the current method is to use a special leak detection device to perform off-line leak detection on the bellows, which does not need to be installed on the machine and can directly detect the bellows for leaks. However, to ensure the stability and reliability of the bellows during operation, in addition to leak detection tests, there are other functional test items for the bellows. For example, for bellows impedance testing, in the traditional usage method, to measure the connection impedance between the bellows and the radio frequency export components (with different surface treatments), these components usually need to be installed on the machine first, and then the impedance measurement is carried out. This method has a complex operation process, consumes a lot of time and manpower, and affects the overall production and debugging progress. Another example is during the installation test. Since the Foreline pipeline (the pipeline between the vacuum pump and the chamber) contains bellows, and the two ends of the bellows are respectively connected to the first pipe fitting and the second pipe fitting, the connection between the first pipe fitting and the second pipe fitting is a flexible connection without a fixing device. Therefore, under the action of gravity, the first pipe fitting or the second pipe fitting will naturally sag, and usually, a special technician needs to hold it by hand to keep its position stable to prevent affecting the accuracy of the test results. This manual fixing method not only increases the complexity and difficulty of the operation but also greatly reduces the test efficiency. It can be seen that the current leak detection device can only achieve a single leak detection function and cannot provide impedance testing and auxiliary clamping functions, and its functions are relatively single.

[0036] Therefore, the embodiment of the present utility model proposes a bellows leak detection device, which solves the problem of the single function of the existing bellows leak detection equipment. By using a clamping member to clamp the circumferences of the first pipe fitting and the second pipe fitting, the device can not only achieve the leak detection function but also the auxiliary clamping function, meeting the requirements of multi-functional test items.

[0037] The specific idea of the embodiment of the present utility model to solve the above problem of single function is as follows:

[0038] A multi-functional bellows leak detection device designed specifically for off-line use. This device adopts the off-line leak detection method, that is, it is not necessary to install the bellows on the machine table for leak detection, but directly conduct leak detection tests through this device. Therefore, the leak detection efficiency can be greatly improved. Specifically, the device includes two upper and lower fixing plates. The bellows is fixed between the two upper and lower fixing plates. The two upper and lower fixing plates are connected and fixed by a connecting component. An air extraction pipe is provided on the upper fixing plate. During leak detection, the upper end of the bellows is fixed to the upper fixing plate, and the lower end of the bellows is fixed to the lower fixing plate. The air extraction pipe is connected to the inside of the bellows, and the bellows is subjected to a leak detection test by evacuating through the air extraction pipe. During impedance testing, first install the radio frequency export components at the upper and lower ends of the bellows, and then fix the upper end of the bellows to the upper fixing plate and the lower end of the bellows to the lower fixing plate. The impedance tester contacts the bellows to test the connection impedance between it and the radio frequency export components, thus completing the impedance test. During auxiliary clamping, an upper clamping member is provided on the upper fixing plate, and a lower clamping member is provided on the lower fixing plate. The upper and lower clamping members enclose a circle and clamp the circumferences of the first pipe fitting and the second pipe fitting at both ends of the bellows. In this way, the pipeline can be supported during the installation test, will not sag, and does not require manual fixing. Therefore, through the above structural design, a single leak detection device integrates multiple functions, solves the problem of low efficiency faced by each test item, and meets the requirements of multi-functional test items.

[0039] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific implementation manners.

[0040] Please refer to Figures 1-6 , an embodiment of the present invention shows a bellows leak detection device, including: an upper fixing plate 1, a lower fixing plate 2, a connecting component, and an air extraction pipe 5. The upper fixing plate 1 and the lower fixing plate 2 are arranged at intervals up and down. The upper fixing plate 1 and the lower fixing plate 2 are detachably connected and fixed by the connecting component. The air extraction pipe 5 is arranged on the side of the upper fixing plate 1 facing away from the lower fixing plate 2; wherein, a clamping member is arranged between the upper fixing plate 1 and the lower fixing plate 2, and the clamping member is used for clamping a first pipe fitting 101 and a second pipe fitting 102 connected to both ends of the bellows 8

[0041] Specifically, the upper fixing plate 1 and the lower fixing plate 2 are rectangular plates respectively. The upper fixing plate 1 and the lower fixing plate 2 are separated from each other by a certain distance vertically. A space for accommodating the bellows 8 is defined between the upper fixing plate 1 and the lower fixing plate 2. The connecting components are respectively connected to the upper fixing plate 1 and the lower fixing plate 2 to fix the two. The connecting components can be various connecting structures, which are not limited herein. The connecting components and the upper fixing plate 1 and the lower fixing plate 2 are detachably connected, so that the upper fixing plate 1 and the lower fixing plate 2 can be disassembled, which is convenient for changing the installation and fixing state when performing different project tests, or when testing bellows 8 of different specifications, disassembling and reassembling. On the side of the upper fixing plate 1 facing away from the lower fixing plate 2, that is, on the upper end face of the upper fixing plate 1, an air extraction pipe 5 is provided. The air extraction pipe 5 is perpendicular to the center position of the upper fixing plate 1. The air extraction pipe 5 is a hollow pipe, and one end of the inlet has an enlarged diameter port for convenient connection to a leak detector, and the other end of the outlet is connected to the upper fixing plate 1 and penetrates through the upper fixing plate 1, so as to facilitate the connection between the air extraction pipe 5 and the inside of the bellows 8 for convenient vacuum pumping. There is usually a flexible connection of the bellows 8 in the Foreline pipeline. The two ends of the bellows 8 are respectively connected to two pipe fittings in the Foreline pipeline. For example, the two ends of the bellows 8 are respectively connected to the first pipe fitting 101 and the second pipe fitting 102. In order to prevent the flexible connection from having no fixing device and the pipeline from sagging naturally, a clamping member is provided between the upper fixing plate 1 and the lower fixing plate 2. When performing auxiliary clamping, the clamping member can clamp the first pipe fitting 101 and the second pipe fitting 102 to prevent them from sagging. It should be noted that the structure of the clamping member can be in various forms, such as a telescopic claw structure or a collar structure, etc. No matter what structure it is, as long as it can support the pipeline and prevent it from sagging naturally, it is not limited herein.

[0042] Through this embodiment, the air extraction pipe 5 is used to pump vacuum and cooperate with a leak detector to complete the sealing test of the bellows 8, realizing the leak detection function. Moreover, a clamping member is added between the upper fixing plate 1 and the lower fixing plate 2. During the installation test, the first pipe fitting 101 and the second pipe fitting 102 can be clamped by the clamping member to prevent them from sagging naturally and avoid manual hand-held fixation, realizing the auxiliary clamping function. Thus, the device integrates multiple functions, making the functions more diversified and meeting the needs of diversified function tests of the bellows 8.

[0043] Refer to Figure 1, in one embodiment, the clamping member includes an upper clamping member 3 and a lower clamping member 4. The upper clamping member 3 is disposed on one side of the upper fixing plate facing the lower fixing plate, and the lower clamping member 4 is disposed on one side of the lower fixing plate facing the upper fixing plate. The upper clamping member 3 and the lower clamping member 4 are used to clamp the circumferences of the first pipe fitting 101 and the second pipe fitting 102. Specifically, the clamping member adopts an upper and lower clamping structure. The clamping member includes the upper clamping member 3 disposed on the upper fixing plate and the lower clamping member 4 disposed on the lower fixing plate. The upper clamping member 3 and the lower clamping member 4 are arranged oppositely. Since the pipeline is usually a circular pipe structure and the two ends of the corrugated pipe are respectively connected to the first pipe fitting 101 and the second pipe fitting 102, the upper clamping member 3 clamps the upper semi-circumference of the first pipe fitting 101 and the second pipe fitting 102, and the lower clamping member 4 clamps the lower semi-circumference of the first pipe fitting 101 and the second pipe fitting 102. The upper clamping member 3 and the lower clamping member 4 jointly clamp the circumferences of the entire first pipe fitting 101 and the second pipe fitting 102, ensuring the stability of the first pipe fitting 101 and the second pipe fitting 102 without shaking, preventing them from sagging naturally, eliminating the need for manual support, saving manpower, and being easy to operate.

[0044] Referring to Figures 1-4 , in one embodiment, the upper clamping member 3 includes two upper clamping blocks 31, and the two upper clamping blocks 31 are arranged along two opposite side edges of the upper fixing plate 1. Specifically, the upper clamping member 3 includes a pair of upper clamping blocks 31, namely the left upper clamping block 31 and the right upper clamping block 31. Both the left upper clamping block 31 and the right upper clamping block 31 are disposed on the side of the upper fixing plate 1 facing away from the air extraction pipe 5, that is, the lower end surface of the upper fixing plate 1, opposite to the air extraction pipe 5 to avoid mutual interference. The upper fixing plate 1 is rectangular. The left upper clamping block 31 is arranged along the left edge of the rectangular upper fixing plate 1, and the right clamping plate is arranged along the right edge of the rectangular upper fixing plate 1. The left upper clamping block 31 and the right upper clamping block 31 are kept at a relatively large distance so that when assisting in clamping, the left upper clamping block 31 clamps the first pipe fitting 101 and the right upper clamping block 31 clamps the second pipe fitting 102. In addition, since the lower end surface of the upper fixing plate 1 is fixed to the upper end of the corrugated pipe 8 during leak detection, most of the lower end surface area of the corrugated pipe 8 is occupied by the upper end of the corrugated pipe 8. Therefore, setting the left upper clamping block 31 and the right upper clamping block 31 on both side edges can avoid this area and prevent interference with the leak detection of the corrugated pipe 8.

[0045] Referring to Figures 1-4, in this embodiment, the lower clamping member 4 includes two lower clamping blocks 41, and the two lower clamping blocks 41 are arranged along the two opposite side edges of the lower fixing plate 2. Specifically, the lower clamping member 4 also includes a pair of lower clamping blocks 41, namely the left lower clamping block 41 and the right lower clamping block 41 respectively. The left lower clamping block 41 and the right lower clamping block 41 can be arranged on the upper end surface of the lower fixing plate 2 or on the lower end surface of the lower fixing plate 2. This is because there is no air extraction pipe 5 on the lower fixing plate 2, so the lower clamping member 4 can be arranged on the upper end surface of the lower fixing plate 2 or on the lower end surface of the lower fixing plate 2. If the left lower clamping block 41 and the right lower clamping block 41 are arranged on the lower end surface of the lower fixing plate 2, then the upper end surface of the lower fixing plate 2 is used to be fixed to the lower end of the bellows 8 during leak detection. When assisting in clamping, the lower fixing plate 2 is turned over with the lower end surface facing up, so that the left lower clamping block 41 and the right lower clamping block 41 face up for clamping. The lower fixing plate 2 is rectangular. The left lower clamping block 41 is arranged along the left edge of the rectangular lower fixing plate 2, and the right clamping plate is arranged along the right edge of the rectangular lower fixing plate 2. The left lower clamping block 41 and the right lower clamping block 41 are kept at a relatively long distance, so that when assisting in clamping, the left lower clamping block 41 clamps the first pipe fitting 101 and the right lower clamping block 41 clamps the second pipe fitting 102.

[0046] Referring to Figure 5 , in a specific implementation, an upper arc-shaped clamping edge 32 is provided on the side of the upper clamping block 31 facing the lower fixing plate 2; and / or, a lower arc-shaped clamping edge 42 is provided on the side of the lower clamping block 41 facing the upper fixing plate 1. Specifically, the upper clamping block 31 and the lower clamping block 41 have the same shape and are in an overall crescent-shaped structure. The upper clamping block 31 is fixed on the upper fixing plate 1, and its lower side edge is the upper arc-shaped clamping edge 32 with an arc matching the arc of the circumferences of the first pipe fitting 101 and the second pipe fitting 102, so that the upper clamping block 31 can clamp the upper semi-circular circumferences of the first pipe fitting 101 and the second pipe fitting 102. Similarly, the lower clamping block 41 is fixed on the lower fixing plate 2, and its upper side edge is the lower arc-shaped clamping edge 42 with an arc matching the arc of the circumferences of the first pipe fitting 101 and the second pipe fitting 102, so that the lower clamping block 41 can clamp the lower semi-circular circumferences of the first pipe fitting 101 and the second pipe fitting 102. The upper arc-shaped clamping edge 32 and the lower arc-shaped clamping edge 42 can clamp the entire circumferences of the first pipe fitting 101 and the second pipe fitting 102, improving the clamping stability and reliability.

[0047] Continuing to refer to Figure 5, in one embodiment, the upper arc-shaped clamping edge 32 is provided with an upper locking portion 33, and the upper locking portion 33 is recessed toward the side facing away from the lower fixing plate 2; and / or, the lower arc-shaped clamping edge 42 is provided with a lower locking portion 43, and the lower locking portion 43 is recessed toward the side facing away from the upper fixing plate 1. Specifically, the upper locking portion 33 is used to lock the upper flange 81 of the corrugated pipe 8 and the edge of the first pipe fitting 101, so as to lock and fix one end of the corrugated pipe 8 to the first pipe fitting 101. Specifically, the upper locking portion 33 is an arc-shaped groove formed on the upper arc-shaped clamping edge 32, and the upper flange 81 of the corrugated pipe 8 and the edge of the first pipe fitting 101 are embedded into the arc-shaped groove and fixed by screws, or by interference fit, or by snap fixation. Similarly, the lower locking portion 43 is used to lock the lower flange 82 of the corrugated pipe 8 and the edge of the second pipe fitting 102, so as to lock and fix the other end of the corrugated pipe 8 to the second pipe fitting 102. Specifically, the lower locking portion 43 is an arc-shaped groove formed on the lower arc-shaped clamping edge 42, and the lower flange 82 of the corrugated pipe 8 and the edge of the second pipe fitting 102 are embedded into the arc-shaped groove and fixed by screws, or by interference fit, or by snap fixation. By adding the upper locking portion 33 to directly lock the corrugated pipe 8 and the first pipe fitting 101, and the lower locking portion 43 to directly lock the corrugated pipe 8 and the second pipe fitting 102, the existing snap components for clamping the corrugated pipe 8 and the first pipe fitting 101, and the existing snap components for clamping the corrugated pipe 8 and the second pipe fitting 102 can be omitted, reducing the number of parts, saving the assembly steps, with a simple structure and easy operation.

[0048] Refer to Figure 1 and Figure 2, in one embodiment, the connection assembly includes an adjustment link 6 and a fastener 7. The adjustment link 6 passes through the upper fixing plate 1 and the lower fixing plate 2 and is fixed to the fastener 7. Wherein, the upper fixing plate 1 and the lower fixing plate 2 can move axially along the adjustment link 6 to adjust the distance between the upper fixing plate 1 and the lower fixing plate 2. Specifically, the connection assembly of this embodiment has a length adjustment function and can adapt to bellows 8 of different length specifications, with high versatility. Specifically, the adjustment link 6 has a certain length. It passes through the upper fixing plate 1 and the lower fixing plate 2, enabling the upper fixing plate 1 and the lower fixing plate 2 to move along the length direction of the adjustment link 6. The distance between the upper fixing plate 1 and the lower fixing plate 2 is adjustable, so as to adapt to bellows 8 of different lengths. After adjusting the distance between the upper fixing plate 1 and the lower fixing plate 2, the upper fixing plate 1 and the lower fixing plate 2 are fixed by fastening the fastener 7 to the adjustment link 6. It should be noted that there are various structures of the fastener 7, which are not limited herein. Moreover, during auxiliary clamping, pipes of different diameters can also be clamped. For example, when the first pipe fitting 101 and the second pipe fitting 102 are large-diameter pipes, the distance between the upper fixing plate 1 and the lower fixing plate 2 is increased so that the upper clamping member 3 and the lower clamping member 4 can clamp the large-diameter first pipe fitting 101 and the second pipe fitting 102. Another example is that when the first pipe fitting 101 and the second pipe fitting 102 are small-diameter pipes, the distance between the upper fixing plate 1 and the lower fixing plate 2 is decreased so that the upper clamping member 3 and the lower clamping member 4 can clamp the small-diameter first pipe fitting 101 and the second pipe fitting 102. Through this embodiment, by means of the structure of the adjustment link 6 passing through the plates, the distance between the plates is adjustable, so as to adapt to bellows 8 of different length specifications and clamp pipes of different diameters, improving the versatility of the device.

[0049] Refer to Figure 1 and Figure 4, in this embodiment, a first upper through-hole 11 is formed in the upper fixing plate 1, a second upper through-hole (not shown in the figure) is formed in the upper clamping member 3, a first lower through-hole 21 is formed in the lower fixing plate 2, and a second lower through-hole (not shown in the figure) is formed in the lower clamping member 4; wherein, during leak detection, the adjusting link 6 sequentially passes through the first upper through-hole 11, the second upper through-hole, the first lower through-hole 21 and the second lower through-hole and is fixed to the fastener 7; during clamping, the adjusting link 6 sequentially passes through the first upper through-hole 11, the second upper through-hole, the second lower through-hole and the first lower through-hole 21 and is fixed to the fastener 7. Specifically, the number of the adjusting links 6 is four, and the number of the fasteners 7 is also four. The first upper through-holes 11 are respectively formed at the four corners of the upper fixing plate 1, and the first lower through-holes 21 are also respectively formed at the four corners of the lower fixing plate 2. Second upper through-holes are also formed at both ends of the left upper clamping block 31 and the right upper clamping block 31 of the upper clamping member 3, and second lower through-holes are also formed at both ends of the left lower clamping block 41 and the right lower clamping block 41 of the lower clamping member 4. During leak detection, the four adjusting links 6 first pass through the four first upper through-holes 11 of the upper fixing plate 1, then pass through the second upper through-holes of the left upper clamping block 31 and the right upper clamping block 31, then pass through the four first lower through-holes 21 of the lower fixing plate 2, and finally pass out from the second lower through-holes of the left lower clamping block 41 and the right lower clamping block 41 and are respectively connected and fastened to the four fasteners 7. During auxiliary clamping, the lower fixing plate 2 needs to be reversed. Therefore, the four adjusting links 6 first pass through the four first upper through-holes 11 of the upper fixing plate 1, then pass through the second upper through-holes of the left upper clamping block 31 and the right upper clamping block 31, then first pass through the second lower through-holes of the left lower clamping block 41 and the right lower clamping block 41, and finally pass out from the four first lower through-holes 21 of the lower fixing plate 2 and are respectively connected and fastened to the four fasteners 7. Among them, the adjusting link 6 can be a long bolt, and the fastener 7 can be a nut. The long bolt and the nut are threadedly fastened to complete the fastening assembly. Through this embodiment, by respectively forming hole positions on the upper and lower fixing plates 2 and the upper and lower clamping members 4, the adjusting link 6 can pass through and be fastened one by one, the number of parts used is small, the structure is simple, and the installation is convenient.

[0050] An embodiment of the present invention provides a thin film deposition device, including a bellows 8 and a bellows leak detection device. The bellows leak detection device is the above-mentioned bellows leak detection device, and the bellows 8 is leak-detected by the bellows leak detection device. Specifically, the bellows leak detection device has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.

[0051] In this embodiment, a bellows leak detection device with multiple functions is adopted. It can not only perform off-line leak detection tests on the bellows 8, saving the troubleshooting time, greatly improving the leak detection efficiency, saving time and labor, but also assist in clamping the first pipe fitting 101 and the second pipe fitting 102 connected to the bellows 8 during the installation test, preventing them from sagging naturally, without the need for personnel to manually hold the first pipe fitting 101 and the second pipe fitting 102, and the operation is simple.

[0052] The embodiment of the present utility model also provides a method for using a bellows leak detection device, which is applied to the bellows leak detection device in the above embodiment. The method includes: S1 - S3.

[0053] S1. If the bellows leak detection device is used for leak detection of the bellows 8, fix the upper and lower ends of the bellows 8 to the upper fixing plate 1 and the lower fixing plate 2 respectively, connect the exhaust pipe 5 to the leak detector, and perform leak detection on the bellows 8 through the leak detector.

[0054] Specifically, first fix the upper flange 81 of the bellows 8 to the upper flange 81 end of the upper fixing plate 1, and the lower flange 82 of the bellows 8 to the lower flange 82 end of the lower fixing plate 2, and adjust the distance between the upper fixing plate 1 and the lower fixing plate. Then, sequentially pass the long screw through the upper fixing plate 1, the upper clamping member 3, the lower fixing plate 2, and the lower clamping member 4 and fasten it with a nut, so as to axially fix the bellows 8 between the upper fixing plate 1 and the lower fixing plate 2. Next, connect the leak detector to the exhaust pipe 5. The leak detector can adopt a helium mass spectrometer leak detector, which is a high-sensitivity leak detection device. It uses helium as a tracer gas and accurately locates and quantifies leak points by detecting the leakage of helium. The leak detector first evacuates through the exhaust pipe 5, and then sprays helium outside the bellows 8. By tracking the helium, the leakage point on the bellows 8 can be accurately found, thus completing the leak detection test.

[0055] S2. If the bellows leak detection device is used for auxiliary clamping, clamp the clamping members on the circumferences of the first pipe fitting 101 and the second pipe fitting 102, and fix the upper fixing plate 1 and the lower fixing plate 2 through a connecting component, where the first pipe fitting 101 and the second pipe fitting 102 are connected to both ends of the bellows 8.

[0056] Specifically, first clamp the left upper clamping block 31 and the right upper clamping block 31 of the upper fixing plate 1 on the upper semi-circular circumferences of the first pipe fitting 101 and the second pipe fitting 102 respectively, and the left lower clamping block 41 and the right lower clamping block 42 of the lower fixing plate 2 clamp on the lower semi-circular circumferences of the first pipe fitting 101 and the second pipe fitting 102. Then, sequentially pass the long screw through the upper fixing plate 1, the upper clamping member 3, the lower clamping member 4, and the lower fixing plate 2 and fasten it with a nut, so as to clamp the first pipe fitting 101 and the second pipe fitting 102, prevent them from sagging naturally, avoid manual holding, and save labor.

[0057] S3. If the bellows leak detection device is used for impedance testing of the bellows 8, install the element to be tested 9 at the upper and lower ends inside the bellows 8, fix the upper and lower ends of the bellows 8 to the upper fixing plate 1 and the lower fixing plate 2 respectively, and measure the impedance between the bellows 8 and the element to be tested 9 with an impedance tester.

[0058] Specifically, grooves are provided on the inner sides of the upper flange 81 and the lower flange 82 of the bellows 8. The grooves are used to install the element to be tested 9, and the element to be tested 9 can be a radio frequency lead-out element (gasket or bal seal). First, install the gasket or bal seal into the grooves on the inner sides of the upper flange 81 and the lower flange 82. Then, fix the upper flange 81 of the bellows 8 to the upper flange 81 end of the upper fixing plate 1, and fix the lower flange 82 of the bellows 8 to the lower flange 82 end of the lower fixing plate 2. Adjust the distance between the upper fixing plate 1 and the lower fixing plate. Then, pass the long screw through the upper fixing plate 1, the upper clamping member 3, the lower fixing plate 2 and the lower clamping member 4 in sequence and fasten it with a nut, so as to axially fix the bellows 8 between the upper fixing plate 1 and the lower fixing plate 2. Next, connect and contact the impedance tester with the bellows 8 to test the connection impedance between the bellows 8 and the gasket or bal seal, and judge whether the measured impedance value meets the conditions, so as to complete the impedance test. The test can be completed without being put on the machine, and the operation is simple, convenient, time-saving and labor-saving.

[0059] In summary, through the bellows leak detection device with multiple functions in this embodiment, the leak detection test of the bellows 8 can be completed to improve the leak detection efficiency; during the installation test, it can also assist in clamping the pipeline, eliminating the need to hold it by hand for fixation, saving labor; and it can directly test the connection impedance between the bellows 8 and the element to be tested 9, without being installed on the machine for testing, and the operation is convenient and fast.

[0060] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A bellows leak detection device, characterized in that, Comprising: An upper fixing plate, a lower fixing plate, a connecting component and an exhaust pipe. The upper fixing plate and the lower fixing plate are arranged at an interval in the up-and-down direction. The upper fixing plate and the lower fixing plate are detachably connected and fixed by the connecting component. The exhaust pipe is arranged on one side of the upper fixing plate facing away from the lower fixing plate. Wherein, a clamping member is arranged between the upper fixing plate and the lower fixing plate. The clamping member is used for clamping a first pipe fitting and a second pipe fitting connected to both ends of the corrugated pipe.

2. The bellows leak detection device according to claim 1, characterized in that, The clamping member includes an upper clamping member and a lower clamping member. The upper clamping member is arranged on one side of the upper fixing plate facing the lower fixing plate. The lower clamping member is arranged on one side of the lower fixing plate facing the upper fixing plate. The upper clamping member and the lower clamping member are used for clamping the circumferences of the first pipe fitting and the second pipe fitting.

3. The bellows leak detection device according to claim 2, characterized in that, The upper clamping member includes two upper clamping blocks, and the two upper clamping blocks are arranged along two opposite side edges of the upper fixing plate.

4. The bellows leak detection device according to claim 3, characterized in that, The lower clamping member includes two lower clamping blocks, and the two lower clamping blocks are arranged along two opposite side edges of the lower fixing plate.

5. The bellows leak detection device according to claim 4, wherein, One side of the upper clamping block facing the lower fixing plate is provided with an upper arc-shaped clamping edge; and / or One side of the lower clamping block facing the upper fixing plate is provided with a lower arc-shaped clamping edge.

6. The bellows leak detection device according to claim 5, characterized in that, The upper arc-shaped clamping edge is provided with an upper locking portion, and the upper locking portion is recessed toward the side away from the lower fixing plate; and / or The lower arc-shaped clamping edge is provided with a lower locking portion, and the lower locking portion is recessed toward the side away from the upper fixing plate.

7. The bellows leak detection device according to any one of claims 2-6, characterized in that, The connecting component includes an adjusting link and a fastening member. The adjusting link passes through the upper fixing plate and the lower fixing plate and is fixed to the fastening member. Wherein, the upper fixing plate and the lower fixing plate can move axially along the adjusting link to adjust the distance between the upper fixing plate and the lower fixing plate.

8. The bellows leak detection device according to claim 7, characterized in that, A first upper through hole is formed on the upper fixing plate. A second upper through hole is formed on the upper clamping member. A first lower through hole is formed on the lower fixing plate. A second lower through hole is formed on the lower clamping member. Wherein, during leak detection, the adjusting link sequentially passes through the first upper through hole, the second upper through hole, the first lower through hole and the second lower through hole and is fixed to the fastening member. During clamping, the adjusting link sequentially passes through the first upper through hole, the second upper through hole, the second lower through hole and the first lower through hole and is fixed to the fastening member.

9. The bellows leak detection device according to claim 7, wherein The adjusting link is a long bolt, and the fastening member is a nut. The long bolt is threadedly fastened to the nut.

10. A thin film deposition device, characterized in that, Comprising a corrugated pipe and a corrugated pipe leak detection device. The corrugated pipe leak detection device is the corrugated pipe leak detection device according to any one of claims 1-9. The corrugated pipe is leak-detected by the corrugated pipe leak detection device.

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