Optical fiber converging device and optical testing system

Abstract

The utility model provides an optical fiber converging device and an optical testing system, and relates to the technical field of optics. The optical fiber converging device comprises a base, a driving mechanism connected with the base and a converging mechanism connected with the driving mechanism, wherein the driving mechanism is used for driving the converging mechanism to move; the converging mechanism comprises a winding buffer and a converging probe, the winding buffer and the converging probe are relatively fixed, a plurality of through winding channels are formed in the winding buffer, a plurality of through outgoing channels are formed in the converging probe, and the ends, opposite to the winding buffer, of the outgoing channels are converged; the plurality of winding channels and the plurality of outgoing channels are in one-to-one correspondence; and the plurality of wire winding channels and the plurality of emergent channels are respectively used for a plurality of incident optical fibers to penetrate through in a one-to-one correspondence manner. The optical fiber converging device can converge multiple paths of light to the to-be-tested area of the to-be-tested device, so that optical signals are applied to the small-size to-be-tested device, and the test difficulty of the small-size to-be-tested device is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of optics, and more specifically, to an optical fiber converging device and an optical test system. Background Art

[0002] In the field of optoelectronic technology, the core function of a photodetector lies in the reception of optical signals by its photosensitive area and the effective conversion into electrical signals. In the current market, the performance verification of silicon photonic chips (such as photodetectors of silicon photonic chips) generally relies on two mainstream test strategies, namely, a single optical path test scheme and a multi-path parallel optical path test scheme. Among them, the single optical path test scheme has gradually shown limitations due to its low detection efficiency; on the contrary, the multi-path parallel test scheme has attracted much attention due to its parallel processing ability and the significant advantages demonstrated in improving the detection speed.

[0003] However, the multi-path parallel test scheme requires the layout of multiple photosensitive areas on the photodetector to be precisely aligned with the cores of multiple optical fibers in the optical test system, and the spacing matching between its optical path fibers and multiple photosensitive areas becomes a key factor. However, with the continuous evolution of the integrated circuit manufacturing process, the continuous reduction of feature sizes has promoted the miniaturization process of photodetectors. Although this development trend is beneficial to the dual improvement of integration and performance, it also poses higher challenges to multi-path parallel test technologies. The miniaturized device structure increases the complexity of precisely guiding optical fibers to micro photosensitive areas.

[0004] In view of the above technical bottlenecks, it is particularly urgent to develop an optical fiber converging device that can ensure the smooth incidence of light beams emitted from multiple optical fibers onto the photosensitive area of a photodetector to address the test problems of photodetectors under the trend of integrated circuit miniaturization. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an optical fiber converging device and an optical test system, which can converge multiple light beams to the area to be tested of a device under test, thereby realizing the application of optical signals to small-sized devices under test and reducing the test difficulty of small-sized devices under test.

[0006] The embodiments of the utility model are implemented as follows:

[0007] On one aspect of the present utility model, there is provided an optical fiber converging device, which includes a base, a driving mechanism connected to the base, and a converging mechanism connected to the driving mechanism. The driving mechanism is used to drive the converging mechanism to move; the converging mechanism includes a winding buffer and a converging probe. The winding buffer is relatively fixed with the converging probe. A plurality of through winding channels are provided in the winding buffer, and a plurality of through exit channels are provided in the converging probe. One ends of the plurality of exit channels facing away from the winding buffer are convergently arranged, and the plurality of winding channels and the plurality of exit channels correspond one by one; the plurality of winding channels and the plurality of exit channels are respectively used for allowing a plurality of incident optical fibers to pass through correspondingly. This optical fiber converging device can converge multiple light beams to the area to be measured of the device under test, so as to apply an optical signal to the small-sized device under test and reduce the test difficulty of the small-sized device under test.

[0008] Optionally, the winding channel is arranged in a spiral shape. The winding channel has an intermediate section, a first section, and a second section. The first section and the second section are respectively connected to opposite ends of the intermediate section. The first section communicates with the entrance of the winding channel, and the second section communicates with the exit of the winding channel; when the cross-sectional shape of the intermediate section is circular, the inner diameter of the intermediate section is respectively smaller than the inner diameters of the first section and the second section and larger than the outer diameter of the incident optical fiber.

[0009] Optionally, the radial dimension of the end of the exit channel close to the winding buffer is larger than the radial dimension of the incident optical fiber, and the radial dimension of the end of the exit channel far from the winding buffer is smaller than the radial dimension of the incident optical fiber.

[0010] Optionally, a first reflection channel is further provided in the converging probe, and a second reflection channel is further provided in the winding buffer. The first reflection channel and the second reflection channel are arranged in correspondence; the second reflection channel and the first reflection channel are used for allowing one end of the reflection optical fiber to pass through in sequence; the light emitted by the incident optical fiber can be incident into the reflection optical fiber after being reflected by the reflection area of the device under test.

[0011] Optionally, a limiting protrusion is provided on the inner wall of the first reflection channel. The side of the limiting protrusion facing the winding buffer is used for the end of the reflection optical fiber to abut against it.

[0012] Optionally, a notch is provided on the side of the converging probe facing away from the winding buffer. The notch is located on the side of the limiting protrusion facing away from the winding buffer and communicates with the first reflection channel; along the direction of the converging probe facing the device under test, the radial dimension of the notch gradually increases.

[0013] Optionally, a groove is provided on the side of the converging probe facing away from the winding buffer. The groove is in communication with both the first reflection channel and a plurality of exit channels. A transparent film is provided in the groove. The distance from the transparent film to the entrance of the reflection optical fiber is less than a first distance, and the first distance is half of a preset distance. The preset distance is the distance between the area to be measured of the device under test and the entrance of the reflection optical fiber when the light rays emitted from multiple incident optical fibers converge at a point in the area to be measured of the device under test.

[0014] Optionally, a groove is provided on the side of the converging probe facing away from the winding buffer. The groove is in communication with both the first reflection channel and a plurality of exit channels. A semi-permeable film is provided in the groove. The distance from the semi-permeable film to the entrance of the reflection optical fiber is half of the preset distance, and the preset distance is the distance between the area to be measured of the device under test and the entrance of the reflection optical fiber when the light rays emitted from multiple incident optical fibers converge at a point in the area to be measured of the device under test.

[0015] Optionally, a non-transmissive area is provided on the semi-permeable film, and the non-transmissive area is located between the entrance of the first reflection channel and the device under test.

[0016] Optionally, the optical fiber converging device further includes an optical fiber binder. The optical fiber binder is located on the side of the winding buffer facing away from the converging probe and is fixed relative to the winding buffer. A through cavity for accommodating the incident optical fibers is provided in the optical fiber binder, and a plurality of winding channels are respectively in communication with the through cavity.

[0017] On the other hand, the present utility model provides an optical testing system. The optical testing system includes an optical signal processing module, a plurality of incident optical fibers, and the above-mentioned optical fiber converging device. One ends of the plurality of incident optical fibers are respectively in communication connection with the optical signal processing module, and the other ends respectively pass through a plurality of winding channels one by one and extend into the corresponding exit channels. After the light rays emitted from the incident optical fibers are converged by the optical fiber converging device, a light spot can be formed in the area to be measured of the device under test.

[0018] The beneficial effects of the present utility model include:

[0019] The optical fiber converging device provided by the present application includes a base, a driving mechanism connected to the base, and a converging mechanism connected to the driving mechanism. The driving mechanism is used to drive the converging mechanism to move. The converging mechanism includes a wire winding buffer and a converging probe. The wire winding buffer is relatively fixed to the converging probe. A plurality of through wire winding channels are provided in the wire winding buffer, and a plurality of through emission channels are provided in the converging probe. One ends of the plurality of emission channels facing away from the wire winding buffer are convergently arranged, and the plurality of wire winding channels and the plurality of emission channels correspond one by one. The plurality of wire winding channels and the plurality of emission channels are respectively used for allowing a plurality of incident optical fibers to pass through correspondingly. By providing a converging mechanism with a wire winding buffer and a converging probe, the optical fiber converging device provided by the present application can play a certain role in fixing and buffering the incident optical fibers, and can also play a converging role in the incident optical fibers passing through the wire winding buffer, so that one ends of the plurality of incident optical fibers away from the wire winding buffer are converged. In this way, the light emitted from the incident optical fibers is also converged. In this way, the light emitted from the converging mechanism can be convergently incident on the area to be measured of the device to be measured. In this way, the optical fiber converging device can converge multiple paths of light to the area to be measured of the device to be measured, so as to apply an optical signal to a small-sized device to be measured and reduce the test difficulty of the small-sized device to be measured.

[0020] The optical test system provided by the present application includes an optical signal processing module, a plurality of incident optical fibers, and the above-mentioned optical fiber converging device. One ends of the plurality of incident optical fibers are respectively communicatively connected to the optical signal processing module, and the other ends respectively pass through a plurality of wire winding channels correspondingly and extend into the corresponding emission channels. After the light emitted from the incident optical fibers is converged by the optical fiber converging device, a light spot can be formed in the area to be measured of the device to be measured. By providing the optical fiber converging device, the optical test system of the present application can converge the light emitted from multiple paths of optical fibers to the area to be measured of the device to be measured with high precision, so as to meet the strict standards of efficient multi-path parallel testing, and can realize multi-path parallel testing on a small-sized device to be measured. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0022] Figure 1 It is one of the structural schematic diagrams of the optical test system provided by the embodiments of the present invention;

[0023] Figure 2 It is one of the structural schematic diagrams of the driving mechanism and the converging mechanism provided by the embodiments of the present invention;

[0024] Figure 3 A schematic diagram of the structure of a convergence mechanism provided by an embodiment of the utility model;

[0025] Figure 4 A schematic top view of the structure of a winding buffer provided in an embodiment of the utility model;

[0026] Figure 5a One of the structural schematic diagrams of the winding channel provided in the embodiment of the utility model;

[0027] Figure 5b One of the schematic side views of the structure of the winding channel provided in the embodiment of the utility model;

[0028] Figure 5c One of the structural schematic diagrams of the incident optical fiber being inserted into the winding channel provided in the embodiment of the utility model;

[0029] Figure 6a The second structural schematic diagram of the winding channel provided by the embodiment of the utility model;

[0030] Figure 6b A second schematic side view of the structure of the winding channel provided in an embodiment of the utility model;

[0031] Figure 6c The second structural schematic diagram of the incident optical fiber being inserted into the winding channel provided by the embodiment of the utility model;

[0032] Figure 7 One of the schematic top views of the structure of the convergence probe provided in the embodiment of the utility model;

[0033] Figure 8 One of the structural schematic diagrams of the convergence probe and the device under test provided by the embodiment of the utility model;

[0034] Figure 9 A second schematic top view of the structure of the convergence probe provided in an embodiment of the utility model;

[0035] Figure 10 A second schematic diagram of the structure of a convergent probe and a device under test provided in an embodiment of the utility model;

[0036] Figure 11a A schematic diagram of the dimension analysis of the preset distance provided by the embodiment of the utility model;

[0037] Figure 11b A schematic diagram of the dimension analysis of the first distance provided by an embodiment of the utility model;

[0038] Figure 12 The third structural schematic diagram of the convergence probe and the device under test provided by the embodiment of the utility model;

[0039] Figure 13 Figure 4 is a schematic structural diagram of the converging probe and the device under test provided by an embodiment of the present invention;

[0040] Figure 14 Figure 2 is a schematic structural diagram of the optical test system provided by an embodiment of the present invention;

[0041] Figure 15 Figure 2 is a schematic structural diagram of the driving mechanism and the converging mechanism provided by an embodiment of the present invention;

[0042] Figure 16 Figure is a schematic structural diagram of the optical fiber binder provided by an embodiment of the present invention.

[0043] Reference numerals: 10 - base; 20 - driving mechanism; 21 - moving member; 22 - probe cantilever; 231 - first arm; 232 - second arm; 233 - third arm; 30 - converging mechanism; 31 - winding buffer; 311 - winding channel; 3111 - middle section; 312 - second reflection channel; 32 - converging probe; 321 - outgoing channel; 322 - first reflection channel; 323 - limiting protrusion; 324 - notch; 325 - groove; 326 - transparent film; 327 - semi-transparent film; 3271 - non-transmission area; 33 - optical fiber binder; 331 - through cavity; D - preset distance; D1 - first distance; D2 - second distance; D3 - third distance; 200 - optical signal processing module; 210 - multi-channel optical fiber light source generator; 220 - optical signal detector; 310 - incident optical fiber; 320 - reflected optical fiber; 400 - device under test; 410 - area under test; 420 - reflection area. Detailed implementation manners

[0044] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0045] Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention claimed, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0046] It should be noted that like reference numerals and letters denote like items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0047] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the figures, or the orientation or positional relationship in which the product of the present utility model is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance.

[0048] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging vertically, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0049] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0050] On the one hand of this embodiment, please refer to Figure 1 and Figure 14 , and a kind of optical test system is provided. The optical test system includes an optical signal processing module 200, a plurality of incident optical fibers 310, and an optical fiber converging device. One ends of the plurality of incident optical fibers 310 are respectively communicatively connected to the optical signal processing module 200, and the other ends respectively pass through a plurality of winding channels 311 one by one and extend into corresponding output channels 321; after the light rays emitted by the incident optical fibers 310 are converged by the optical fiber converging device, a light spot can be formed in a to-be-tested area 410 of a to-be-tested device 400.

[0051] It should be noted that the optical test system of the present application includes an optical signal processing module 200, multiple incident optical fibers 310, and an optical fiber converging device. The optical signal processing module 200 can transmit light rays through the multiple incident optical fibers 310 respectively. The optical fiber converging device can converge the multiple incident optical fibers 310 together, so that the outgoing light beams of the multiple incident optical fibers 310 are converged and emitted. After the light rays exit from the incident optical fibers 310, they can enter the test area 410 of the device under test 400, thereby realizing the test of the device under test 400.

[0052] By providing the optical fiber converging device in the optical test system of the present application, in this way, the light rays emitted from multiple optical fibers can be accurately converged to the test area 410 of the device under test 400, so as to meet the strict standards of efficient multi-channel parallel testing, and multi-channel parallel testing of small-sized devices under test 400 can be realized. It should be understood that the device under test 400 refers to the object on which the incident optical fiber 310 applies an optical signal. The specific type of the device under test 400 in the present application is not limited. For example, the device under test 400 can be an optoelectronic device based on a silicon-based semiconductor (such as a photodetector), or it can also be other semiconductor devices with the ability to receive light. The light receiving area of the optoelectronic device and the outgoing channel 321 of the converging probe 32 of the optical fiber converging device can be in a one-to-one correspondence, or a one-to-many or many-to-one relationship.

[0053] In this embodiment, after the light rays emitted from the incident optical fiber 310 are converged by the optical fiber converging device, a light spot can be formed in the test area 410 of the device under test 400. Among them, the light spot can be a single light spot or a dispersed light spot. When it is a dispersed light spot, it can be applicable to the application scenario where the device under test 400 has multiple light receiving areas; when it is a single light spot, it can be applicable to the application scenario where the device under test 400 has a single light receiving area.

[0054] In addition, it should be noted that whether a single light spot or a dispersed light spot is formed can be determined according to the distance between the optical fiber converging device and the device under test 400. For example, when a single light spot needs to be formed, the distance between the outgoing port of the incident optical fiber 310 in the optical fiber converging device and the test area 410 of the device under test 400 can be a preset distance D. At this preset distance D, the light rays emitted from the multiple incident optical fibers 310 can be converged at a point. For example, as Figure 8 shown; for another example, when a dispersed light spot needs to be formed, the distance between the outgoing port of the incident optical fiber 310 in the optical fiber converging device and the test area 410 of the device under test 400 is less than or greater than the preset distance D. Among them, the specific distance size can be determined according to the distribution of multiple light receiving areas, which will not be elaborated in the present application.

[0055] In addition, in this embodiment, the optical signal processing module 200 includes a multi-channel optical fiber light source generator 210. Among them, the multi-channel optical fiber light source generator 210 is communicatively connected to multiple incident optical fibers 310 and is used to emit optical signals to the multiple incident optical fibers 310.

[0056] In addition, the optical test system further includes a reflection optical fiber 320, and the above-mentioned optical signal processing module 200 may further include an optical signal detector 220. One end of the reflection optical fiber 320 is communicatively connected to the optical signal processing module 200, and the other end correspondingly penetrates into the optical fiber converging device (specifically, passes through the second reflection channel 312 and extends into the first reflection channel 322, which will be described in detail below). The reflection optical fiber 320 is used to receive the light reflected by the reflection area 420 of the device under test 400, so as to verify, detect, and check the installation position of the incident optical fiber 310 to ensure that the incident optical fiber 310 is installed in place or without defects.

[0057] The specific structure of the above-mentioned optical fiber converging device will be described in detail below.

[0058] Please refer to Figure 2 and Figure 3 , the optical fiber converging device includes a base 10, a driving mechanism 20 connected to the base 10, and a converging mechanism 30 connected to the driving mechanism 20. The driving mechanism 20 is used to drive the converging mechanism 30 to move; the converging mechanism 30 includes a winding buffer 31 and a converging probe 32. The winding buffer 31 and the converging probe 32 are relatively fixed. A plurality of through winding channels 311 are provided in the winding buffer 31, and a plurality of through exit channels 321 are provided in the converging probe 32. One ends of the plurality of exit channels 321 facing away from the winding buffer 31 are convergently arranged, and the plurality of winding channels 311 and the plurality of exit channels 321 correspond one by one; the plurality of winding channels 311 and the plurality of exit channels 321 are respectively used for the corresponding penetration of multiple incident optical fibers 310. By respectively providing a plurality of through winding channels 311 and convergently arranged exit channels 321 in the winding buffer 31 and the converging probe 32, in this way, the multi-channel light of the multiple incident optical fibers 310 can be converged to the area under test 410 of the device under test 400 through the exit channels 321. Therefore, through this optical fiber converging device, the multiple incident optical fibers 310 can apply multiple optical signals to the small-sized device under test 400 at a smaller pitch, reducing the test difficulty of the small-sized device under test 400.

[0059] Among them, the above-mentioned base 10 can support the driving mechanism 20 and the converging mechanism 30. The specific structure of the base 10 is not specifically limited in this application, and those skilled in the art can set it by themselves as long as it can play a supporting role.

[0060] The above-mentioned driving mechanism 20 is used to drive the converging mechanism 30 to move. Among them, the forms of driving the converging mechanism 30 by the driving mechanism 20 include but are not limited to driving the converging mechanism 30 to move horizontally, move up and down, and rotate. The driving mechanism 20 may include a moving member 21 connected to the base 10, a probe cantilever 22 connected to the moving member 21, and a first arm 231 and a second arm 232 respectively connected to the probe cantilever 22, as Figure 2 shown. Among them, one end of the above-mentioned first arm 231 away from the probe cantilever 22 is connected to the wire winding buffer 31 of the converging mechanism 30, and one end of the second arm 232 away from the probe cantilever 22 is connected to the converging probe 32 of the converging mechanism 30. In this way, the converging probe 32 and the wire winding buffer 31 are relatively fixed through the probe cantilever 22, and at the same time, by driving the moving member 21 to move relative to the base 10, the wire winding buffer 31 and the probe cantilever 22 of the converging mechanism 30 can be driven to move.

[0061] The above-mentioned converging mechanism 30 includes a wire winding buffer 31 and a converging probe 32, as Figures 2 to 7 shown. Among them, the wire winding buffer 31 can be used to fix and buffer the incident optical fiber 310, avoiding the incident optical fiber 310 directly abutting against the lower converging probe 32, thereby causing certain damage to the incident optical fiber 310. In addition, the wire winding buffer 31 can also play a role in initially arranging multiple incident optical fibers 310, which is beneficial to the arrangement and induction of multiple incident optical fibers 310 and facilitates the combing of cables.

[0062] Among them, a plurality of wire winding channels 311 are provided in the wire winding buffer 31, and the wire winding channels 311 penetrate through the wire winding buffer 31. In this way, multiple incident optical fibers 310 can enter the converging probe 32 after passing through the wire winding channels 311.

[0063] It should be noted that the wire winding channels 311 should be able to wind the incident optical fibers 310, so as to realize a certain degree of fixing effect of the incident optical fibers 310 in the wire winding buffer 31.

[0064] The converging probe 32 is arranged on the outgoing line side of the wire winding buffer 31. In this embodiment, the converging probe 32 is relatively fixed to the wire winding buffer 31 to improve the structural reliability of the optical fiber converging device.

[0065] In this embodiment, a plurality of outgoing channels 321 are provided in the converging probe 32, as Figure 7 and Figure 8As shown, one ends of the multiple output channels 321 are converged toward the side opposite to the winding buffer 31. In this way, one ends of the multiple incident optical fibers 310 away from the winding buffer 31 can be arranged in a converging manner, so that the light rays emitted from the multiple incident optical fibers 310 are also in a converging state. Thus, the light rays emitted from the multiple incident optical fibers 310 can be incident on the device under test 400 in a converging manner. In Figure 7 and Figure 8 the illustrated embodiment, the shape of the converging probe 32 in a top view is circular, and the multiple output channels 321 are circularly distributed around the center of the circle. In other embodiments, the converging probe 32 can be of any other suitable shape.

[0066] It should be noted that inserting the incident optical fiber 310 into the converging probe 32 can converge the extension lines of the incident optical fiber 310. Here, the convergence can mean converging at a point on the device under test 400; it can also mean that the extension lines of the incident optical fiber 310 approach each other as they extend, so as to converge in a relatively small area. Thus, the light rays emitted from the multiple incident optical fibers 310 can converge on the entire area to be tested 410 of the device under test 400, or can converge at a point on the area to be tested 410 of the device under test 400. Those skilled in the art can adjust the distance between the optical fiber converging device and the device under test 400 according to actual test requirements, so as to achieve that the light rays emitted from the multiple incident optical fibers 310 can converge on the entire area to be tested 410 or at a point.

[0067] In addition, the winding channels 311 of the winding buffer 31 and the inlets (or outlets) of the output channels 321 of the converging probe 32 can be circularly distributed, linearly arranged, or polygonally distributed (such as rectangular arrangement, hexagonal arrangement, octagonal arrangement, etc.). The present application does not limit their arrangement forms, and can be set according to the distribution form of the area to be tested 410.

[0068] In summary, the optical fiber converging device provided by the present application includes a base 10, a driving mechanism 20 connected to the base 10, and a converging mechanism 30 connected to the driving mechanism 20. The driving mechanism 20 is used to drive the converging mechanism 30 to move; the converging mechanism 30 includes a winding buffer 31 and a converging probe 32. The winding buffer 31 is relatively fixed to the converging probe 32. A plurality of through winding channels 311 are provided in the winding buffer 31, and a plurality of through exit channels 321 are provided in the converging probe 32. One ends of the plurality of exit channels 321 facing away from the winding buffer 31 are convergently arranged, and the plurality of winding channels 311 and the plurality of exit channels 321 correspond one by one; the plurality of winding channels 311 and the plurality of exit channels 321 are respectively used for allowing a plurality of incident optical fibers 310 to pass through in one-to-one correspondence. By providing the converging mechanism 30 having the winding buffer 31 and the converging probe 32, the optical fiber converging device provided by the present application can play a certain fixing and buffering role for the incident optical fibers 310, and can also play a converging role for the incident optical fibers 310 passing out of the winding buffer 31, so that one ends of the plurality of incident optical fibers 310 away from the winding buffer 31 are converged. In this way, the light rays emitted from the incident optical fibers 310 are also converged. In this way, the light rays emitted from the converging mechanism 30 can be convergently incident on the measurement area 410 of the device under test 400. In this way, the optical fiber converging device can accurately converge multiple light rays to the measurement area 410 of the device under test 400, so as to realize applying multiple optical signals to the small-sized device under test 400, and reduce the difficulty of testing the small-sized device under test 400.

[0069] Please refer to Figures 2 to 4 , optionally, the winding channel 311 is arranged in a spiral shape. In this way, the incident optical fiber 310 can be spirally wound in the winding channel 311. It should be noted that the incident optical fiber 310 being spirally wound in the winding channel 311 can be realized not only by directly setting the winding channel 311 as a spiral shape, but also in other embodiments, by providing a winding post in the winding channel 311 and winding the incident optical fiber 310 around the outer periphery of the winding post. The present application does not limit the specific implementation manner of the incident optical fiber 310 being spirally wound in the winding channel 311.

[0070] When the incident optical fiber 310 being spirally wound in the winding channel 311 is realized by directly setting the winding channel 311 as a spiral shape, for easy understanding, the structure of the winding channel 311 can be referred to Figure 4 and FIG. 5. Among them, Figure 5a is one of the structural schematic diagrams of the winding channel 311, Figure 5b is one of the schematic side views of the structure of the winding channel 311, Figure 5cThis is one of the structural schematic diagrams when the incident optical fiber 310 is inserted into the winding channel 311. That is, at this time, the incident optical fiber 310 entering from the channel entrance at one end of the winding channel 311 is bent and spirally extended from the channel exit at the other end of the winding channel 311.

[0071] With the above arrangement, when the incident optical fiber 310 passes through the winding channel 311 from top to bottom, it will rotate one circle under the guidance of the winding channel 311 and then pass through the winding channel 311. In this way, the pressure from the external incident optical fiber 310 above the winding channel 311 will not directly act on the external incident optical fiber 310 below the winding channel 311, and the upper pressure will not directly act on the convergence probe 32 below. In some embodiments, the size of the winding channel 311 is equal at each cross section.

[0072] Optionally, see Figure 6a , Figure 6b and Figure 6c The winding channel 311 has a middle section 3111, a first section and a second section, the first section and the second section are respectively connected to the opposite ends of the middle section 3111, the first section is connected to the entrance of the winding channel 311, and the second section is connected to the exit of the winding channel 311. When the cross-sectional shape of the middle section 3111 is circular, the inner diameter of the middle section 3111 is respectively smaller than the inner diameters of the first section and the second section and larger than the outer diameter of the incident optical fiber 310. It should be noted that the inner diameter of the middle section 3111 is larger than the outer diameter of the incident optical fiber 310, so that the incident optical fiber 310 can be easily inserted, and the incident optical fiber 310 can be prevented from being blocked during the insertion, thereby affecting its normal winding. The inner diameter of the middle section 3111 is smaller than the inner diameters of the first section and the second section, respectively. Thus, the winding channel 311 can achieve the effect of tightening the middle part at the middle section 3111. Thus, the middle section 3111 can provide friction for the incident optical fiber 310, thereby better providing a pressure buffering effect and isolating the mutual action of the incident optical fiber 310 at the upper and lower parts of the winding buffer 31. It is not difficult to understand that the inner diameter of the middle section 3111 is slightly larger than the outer diameter of the incident optical fiber 310, for example, the inner diameter of the middle section 3111 is less than 10% larger than the outer diameter of the incident optical fiber 310. Thus, when the incident optical fiber 310 passes through the middle section 3111, the contact area between the middle section 3111 and the incident optical fiber 310 is larger, and accordingly, the friction between them is also larger, thereby better isolating the mutual action of the incident optical fiber 310 at the upper and lower parts of the winding buffer 31.

[0073] It should be noted that although the cross-sectional shape of the winding channel 311 is taken as a circle as an example for discussion above, it can be understood that the present application is not limited thereto. The cross-sectional shape of the winding channel 311 can be any suitable shape as long as the incident optical fiber 310 can pass through it, and at the same time, the middle section 3111 can clamp the incident optical fiber 310. The cross-sectional shape of the winding channel 311 can be, for example, a square, an ellipse, a rectangle, etc.

[0074] Please refer to Figure 8 , optionally, the radial dimension (such as the diameter) of the end of the outgoing channel 321 close to the winding buffer 31 is larger than the radial dimension (such as the diameter) of the incident optical fiber 310, and the radial dimension of the end of the outgoing channel 321 far from the winding buffer 31 is smaller than the radial dimension (such as the diameter) of the incident optical fiber 310.

[0075] It should be noted that the radial direction refers to the straight-line direction along the diameter or radius, or the straight-line direction perpendicular to the axis of the object. The radial dimensions (including the inner diameter and outer diameter dimensions) mentioned in the present application refer to the dimensions in the radial plane in the direction passing through the axis. The radial dimension is not only applicable to cylindrical objects but also can be used for objects of other shapes, such as prismatic objects.

[0076] The radial dimensions of the outgoing channel 321 are not equal at each cross-section. In this embodiment, in the embodiment where the cross-sectional shape of the outgoing channel 321 is a circle, the radial dimension (such as the diameter or radius) of the outgoing channel 321 at the entrance is larger than the radial dimension of the outgoing channel 321 at the exit, and the radial dimension of the outgoing channel 321 at the entrance is larger than the radial dimension of the incident optical fiber 310, and the radial dimension of the outgoing channel 321 at the exit is smaller than the radial dimension of the incident optical fiber 310. In this way, when the incident optical fiber 310 is inserted into the outgoing channel 321, the outgoing end of the incident optical fiber 310 cannot protrude from the exit of the outgoing channel 321, which can play a limiting role on the incident optical fiber 310 to prevent the incident optical fiber 310 from directly contacting the device under test 400.

[0077] In addition, for the convenience of verifying the installation position of the incident optical fiber 310 and whether the incident optical fiber 310 is defective, in this embodiment, optionally, please refer to Figure 3 and Figure 8, a first reflection channel 322 may also be provided in the converging probe 32, and a second reflection channel 312 is also provided in the winding buffer 31. The first reflection channel 322 and the second reflection channel 312 are arranged in correspondence; the second reflection channel 312 and the first reflection channel 322 are used for allowing one end of the reflection optical fiber 320 to pass through in sequence; the light emitted from the incident optical fiber 310 can be incident into the reflection optical fiber 320 after being reflected by the reflection area 420 of the device under test 400. Through the above arrangement, the multi-channel optical fiber light source generator 210 of the optical signal processing module 200 is used to emit optical signals into the multi-channel incident optical fibers 310, and at the same time, the optical signal detector 220 of the optical signal processing module 200 is used to detect the optical signals of the reflection optical fiber 320. It is possible to judge whether the incident optical fiber 310 is correctly installed or defective according to the detection result of the optical signal detector 220, so as to check the incident optical fiber 310 with defective optical signals when the installation is incorrect or defective.

[0078] It should be noted that the above-mentioned corresponding arrangement of the first reflection channel 322 and the second reflection channel 312 means that the first reflection channel 322 and the second reflection channel 312 have a corresponding relationship, and this corresponding relationship refers to the positional relationship in this application. In this way, the second reflection channel 312 and the first reflection channel 322 that correspond to each other in position can be used for allowing one end of the reflection optical fiber 320 to pass through in sequence.

[0079] It should be noted that the optical signals of different optical paths can be distinguished from each other through the reading of the optical signal detector 220, including but not limited to being distinguished by wavelength, optical pulse frequency, optical pulse phase, optical pulse intensity, and the combination of the above multiple factors.

[0080] In addition, in order to prevent the incident end of the reflection optical fiber 320 from passing out of the first reflection channel 322, optionally, a limiting protrusion 323 is provided on the inner wall of the first reflection channel 322, and the side of the limiting protrusion 323 facing the winding buffer 31 is used for allowing one end of the reflection optical fiber 320 to abut against it. Please refer to Figure 8 and Figure 9 shown.

[0081] The setting of the limiting protrusion 323 can play a role in supporting and limiting the incident end of the reflection optical fiber 320, and can prevent one end of the reflection optical fiber 320 facing the device under test 400 from protruding out of the first reflection channel 322, so as to prevent the reflection optical fiber 320 from contacting the device under test 400. It should be understood that the incident end of the reflection optical fiber 320 is the end of the reflection optical fiber 320 close to the device under test 400.

[0082] Among them, the specific structure of the limiting protrusion 323 is not limited in this application. For example, it can be a bump provided in the first reflection channel 322, or a ring structure provided in the first reflection channel 322, as long as it can play a limiting role. It should be noted that the setting of the limiting bump should not block the entrance of the first reflection channel 322.

[0083] To prevent the light reflected by the reflection area 420 of the device under test 400 from being blocked by the outer peripheral wall of the first reflection channel 322, optionally, a notch 324 is provided on the side of the converging probe 32 away from the winding buffer 31. The notch 324 is located on the side of the limiting protrusion 323 away from the winding buffer 31, and the notch 324 communicates with the first reflection channel 322; along the direction of the converging probe 32 towards the device under test 400, the radial dimension of the notch 324 gradually increases.

[0084] It should be noted that the notch 324 is located on the side of the converging probe 32 away from the winding buffer 31, and the notch 324 is coaxially arranged with the first reflection channel 322. The radial dimension of the notch 324 gradually increases in the direction of the converging probe 32 towards the device under test 400. The diameter of the opening of the notch 324 close to the device under test 400 is larger than the diameter of the first reflection channel 322. For easy understanding, please refer to Figure 8 and Figure 9 as shown in Figure 9 The filled part of the grid lines in is the projection of the edge of the notch 324 on the converging probe 32.

[0085] Generally speaking, the notch 324 can also be considered as chamfering the end of the first reflection channel 322 close to the device under test 400. In this way, the light reflected by the reflection area 420 of the device under test 400 can reach the reflection optical fiber 320 without being blocked by the right-angle edge of the incident end of the first reflection channel 322.

[0086] In addition, it should be noted that in this embodiment, in addition to the area to be tested 410, the device under test 400 also has a reflection area 420. The setting of the reflection area 420 is used to verify whether the incident optical fiber 310 is correctly installed. The reflection area 420 of the device under test 400 can be a metal wiring layer on the device under test 400 or an area of other layers capable of reflecting light. This application does not limit this.

[0087] When the cross-sectional shape of the converging probe 32 is a regular shape (such as a circle, a square, etc.), a plurality of outgoing channels 321 are symmetrically distributed around the center, and the first reflection channel 322 can be arranged at the center position of the converging probe 32. In this embodiment, when verifying whether the incident optical fiber 310 is correctly installed, it is necessary to control the distance between the device under test 400 and the converging probe 32 so that the distance from the outgoing ends of the plurality of incident optical fibers 310 to the reflection area 420 of the device under test 400 is half of the preset distance D, where the preset distance D is the distance between the point where the light rays emitted by the plurality of incident optical fibers 310 converge at a point in the area under test 410 of the device under test 400 and the incident port of the reflection optical fiber 320. It should be noted that half of the preset distance D is the first distance D1.

[0088] When verifying whether the incident optical fiber 310 is correctly installed, the principle based on which the distance from the outgoing ends of the plurality of incident optical fibers 310 to the reflection area 420 of the device under test 400 is half of the preset distance D can be referred to as follows:

[0089] Please refer to Figure 8 、 Figure 10 and Figure 11, Figure 11a The preset distance D is the distance between the area under test 410 and the incident port of the reflection optical fiber 320 (which is also the distance between the area under test 410 and the outgoing port of the incident optical fiber 310). As Figure 11a shown, the angles between the outgoing light rays of the left and right incident optical fibers 310 and the horizontal direction are the same, forming an isosceles triangle A; as Figure 11b shown, the angles between the outgoing light rays of the left and right incident optical fibers 310 and the horizontal direction are the same, forming two isosceles triangles B1 and B2 with exactly the same shape and size. Since w1 = w2 and w1 + w2 = w, it can be calculated that D1 = 0.5 × D. That is, the first distance D1 is half of the preset distance D. Therefore, when the distance from the outgoing ends of the plurality of incident optical fibers 310 to the reflection area 420 of the device under test 400 is half of the preset distance D, the light rays emitted by the incident optical fiber 310 can be incident on the reflection optical fiber 320 after being reflected by the reflection area 420. Therefore, it is possible to determine whether the incident optical fiber 310 is correctly installed according to the reflected light rays received by the reflection optical fiber 320.

[0090] It should be noted that the incident light converges to form a light spot on the area to be measured 410, that is, the incident optical fiber 310 converges on the surface of a light receiving area (or photosensitive area) of the device under test 400. In other application scenarios, especially for the device under test 400 with multiple uniformly distributed light receiving areas, or when there are multiple devices under test 400 arranged in an array on a wafer, the distance between the converging probe 32 and the device under test 400 can be controlled. The distance from the exit of the incident optical fiber 310 to the area to be measured 410 can be greater than the preset distance D or less than the preset distance D. At this time, the outgoing light of the incident optical fiber 310 will form a dispersed light spot on the surface of the device under test 400, and then reach multiple corresponding light receiving areas on the device under test 400, achieving the purpose of parallel testing of multiple paths of light.

[0091] It should be noted that the specific verification steps for whether the incident optical fiber 310 is correctly installed are as follows:

[0092] S1. Adjust the horizontal position of the moving member 21 so that the converging probe 32 moves above the reflection area 420 of the device under test 400;

[0093] S2. Adjust the height of the moving member 21 to adjust the height of the converging probe 32 so that the distance between the converging probe 32 and the reflection area 420 of the device under test 400 is adjusted to the first distance D1. At this time, the light of the incident optical fiber 310 is reflected by the reflection area 420 of the device under test 400 and just reaches the entrance of the reflection optical fiber 320, and then reaches the optical signal processing module 200 through the reflection optical fiber 320;

[0094] S3. Use the multi-channel optical fiber light source generator 210 of the optical signal processing module 200 to emit optical signals into the multi-channel incident optical fibers 310, and at the same time use the optical signal detector 220 of the optical signal processing module 200 to detect the optical signals of the reflection optical fiber 320.

[0095] S4. Judge the detected optical signals. If the number of optical signals detected by the optical signal processing module 200 is consistent with the number of emitted optical signals of the incident optical fiber 310, and the intensity of the reflected light exceeds the threshold, it is considered that all the incident optical fibers 310 are correctly installed. Otherwise, check the incident optical fiber 310 corresponding to the missing optical signal until all the incident optical fibers 310 are correctly installed.

[0096] After the incident optical fiber 310 is correctly installed, the following steps can be used for testing:

[0097] S5. Adjust the height of the moving member 21 to increase the distance between the converging probe 32 and the reflection area 420 of the device under test 400 to the preset distance D, and the preset distance D is twice the first distance D1.

[0098] S6. Adjust the horizontal position of the moving member 21 to horizontally move the converging probe 32 directly above the area to be measured 410 of the device under test 400, so as to facilitate the actual required optical signal test.

[0099] See Figure 12 , to avoid contaminants blocking the exit of the incident optical fiber 310 and the entrance of the reflected optical fiber 320, optionally, a groove 325 is provided on the side of the converging probe 32 facing away from the winding buffer 31. The groove 325 communicates with both the first reflection channel 322 and a plurality of exit channels 321. A transparent film 326 is provided in the groove 325; the distance from the transparent film 326 to the entrance of the reflected optical fiber 320 is less than the first distance D1, and the first distance D1 is half of the preset distance D; the preset distance D is the distance between the area to be measured 410 and the entrance of the reflected optical fiber 320 when the light rays emitted from multiple incident optical fibers 310 converge at a point in the area to be measured 410 of the device under test 400.

[0100] It should be noted that the setting of the transparent film 326 will not affect the normal emission of light rays from the incident optical fiber 310 and the normal incidence of reflected light rays to the reflected optical fiber 320 on the one hand, and can block contaminants on the other hand, avoiding the contamination of the incident optical fiber 310 and / or the reflected optical fiber 320.

[0101] In addition, the requirement here that the distance from the transparent film 326 to the entrance of the reflected optical fiber 320 is less than the first distance D1 is to prevent the transparent film 326 from touching the device under test 400 when verifying whether the incident optical fiber 310 is correctly installed. Among them, the distance from the transparent film 326 to the entrance of the reflected optical fiber 320 is Figure 12 the second distance D2 in

[0102] Furthermore, the above transparent film 326 should allow light to pass through normally. To improve the light transmittance, the above transparent film 326 can be an antireflection film to increase the transmitted light and reduce the reflected light. Of course, other ordinary transparent films 326 are also acceptable. Optionally, different from the above scheme of setting the transparent film 326, in other embodiments, please refer to Figure 13 , a groove 325 is provided on the side of the converging probe 32 facing away from the winding buffer 31. The groove 325 communicates with both the first reflection channel 322 and a plurality of exit channels 321. A semi-permeable film 327 can be provided in the groove 325; the distance from the semi-permeable film 327 to the entrance of the reflected optical fiber 320 is half of the preset distance D, and the preset distance D is the distance between the area to be measured 410 and the entrance of the reflected optical fiber 320 when the light rays emitted from multiple incident optical fibers 310 converge at a point in the area to be measured 410 of the device under test 400.

[0103] That is to say, in addition to the transparent film 326 being arranged in the groove 325, in other feasible solutions, the transparent film 326 can be replaced with a semi-permeable film 327, and the distance from the semi-permeable film 327 to the incident port of the reflection optical fiber 320 is half of the preset distance D. At this time, as Figure 13 shown, part of the light can pass through and part is specularly reflected.

[0104] It should be noted that the semi-permeable film 327 has the following two functions. First, it can prevent pollutant particles from blocking the exit port of the incident optical fiber 310 and / or the incident port of the reflection optical fiber 320. Second, the light emitted from the incident optical fiber 310 can be directly incident on the reflection optical fiber 320 after being reflected by the semi-permeable film 327, so as to be used for the calibration work during the installation of the incident optical fiber 310. In this way, the position adjustment step of the converging probe 32 during the installation and calibration of the incident optical fiber 310 can be omitted.

[0105] Among them, the distance from the semi-permeable film 327 to the incident port of the reflection optical fiber 320 is half of the preset distance D. The distance from the semi-permeable film 327 to the incident port of the reflection optical fiber 320 is Figure 13 the third distance D3 in

[0106] The distance from the semi-permeable film 327 to the measurement area 410 of the device under test 400 is equal to the third distance D3, both being half of the preset distance D.

[0107] In addition, in order to prevent other stray light generated by the incident optical fiber 310 from being incident on other areas outside the measurement area 410, thereby affecting the performance of the device under test 400, optionally, a non-transmission area 3271 is provided on the semi-permeable film 327. The non-transmission area 3271 is located between the exit port of the first reflection channel 322 and the device under test 400, that is, the non-transmission area 3271 is located at the position directly below the first reflection channel 322. Figure 13 The non-transmission area 3271 can be located at the connection line of the reflection optical fiber 320 and the measurement area 410 of the device under test 400 as shown in

[0108] It should be noted that when the fiber converging device sets a semi-permeable film 327 in the groove 325 of the converging probe 32, the specific calibration steps and optical test steps for whether the incident optical fiber 310 is correctly installed are as follows:

[0109] S1. Control the moving member 21 to move the converging probe 32 above the measurement area 410 of the device under test 400;

[0110] S2, adjusting the height of the moving member 21 to adjust the height of the converging probe 32, so that the converging probe 32 moves to a preset distance D from the test area 410 of the device under test 400;

[0111] S3, using the multi-channel optical fiber light source generator 210 of the optical signal processing module 200 to transmit optical signals to the multi-channel incident optical fibers 310, and using the optical signal detector 220 of the optical signal processing module 200 to detect the optical signal of the reflected optical fiber 320;

[0112] S4. Determine the detected optical signal. If the number of detected optical signals is consistent with the number and quality of transmitted optical signals, it is considered that all incident optical fibers 310 have been correctly installed. Otherwise, check the incident optical fibers 310 corresponding to the defective optical signals until all incident optical fibers 310 are correctly installed. After the incident optical signals are correctly installed, perform the actual required optical signal test.

[0113] Please refer to Figures 14 to 16 Optionally, the optical fiber convergence device further includes an optical fiber binder 33, which is located on the side of the winding buffer 31 away from the convergence probe 32 and is fixed relative to the winding buffer 31; a through cavity 331 for accommodating the incident optical fiber 310 is provided in the optical fiber binder 33, and a plurality of winding channels 311 are respectively connected to the through cavity 331. In some embodiments, the winding buffer 31, the convergence probe 32 and the optical fiber binder 33 can be formed of metal, alloy, plastic, etc.

[0114] It should be noted that the fiber binder 33 is used to bind multiple incident optical fibers 310 (including the reflection optical fiber 320 if there is one) in the fiber binder 33 to protect the incident optical fibers 310, avoid damage to the incident optical fibers 310, and play a certain binding and fixing role. Figure 3 , Figure 15 and Figure 16 As shown, the fiber binder 33 is barrel-shaped as a whole, and a plurality of incident optical fibers 310 (including the reflection optical fibers 320 if there are any) pass through a through cavity 331 of the fiber binder 33 .

[0115] Of course, in other embodiments, the optical fiber binder 33 may not be provided. Figure 1 and Figure 2 As shown, this application does not limit this.

[0116] In addition, when the fiber convergence device also includes a fiber binder 33, the driving mechanism 20 may include a third arm 233, one end of the third arm 233 is connected to the fiber binder 33, and the other end is connected to the probe cantilever 22, and the third arm 233 is used to support and fix the fiber binder 33.

[0117] The above are only alternative embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, various modifications and variations can be made to the present utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

[0118] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the present utility model will not separately describe various possible combination methods.

Claims

1. An optical fiber converging device, characterized in that, It includes a base, a driving mechanism connected to the base, and a converging mechanism connected to the driving mechanism. The driving mechanism is used to drive the converging mechanism to move; the converging mechanism includes a wire winding buffer and a converging probe. The wire winding buffer is relatively fixed to the converging probe. A plurality of through wire winding channels are provided in the wire winding buffer, and a plurality of through emission channels are provided in the converging probe. One ends of the plurality of emission channels facing away from the wire winding buffer are convergently arranged, and the plurality of wire winding channels and the plurality of emission channels correspond one by one; the plurality of wire winding channels and the plurality of emission channels are respectively used for allowing a plurality of incident optical fibers to pass through correspondingly.

2. The optical fiber convergence device according to claim 1, characterized in that, The wire winding channels are arranged in a spiral shape. The wire winding channels have an intermediate section, a first section, and a second section. The first section and the second section are respectively connected to opposite ends of the intermediate section. The first section communicates with the entrance of the wire winding channel, and the second section communicates with the exit of the wire winding channel; when the cross-sectional shape of the intermediate section is circular, the inner diameter of the intermediate section is respectively smaller than the inner diameters of the first section and the second section and larger than the outer diameter of the incident optical fiber.

3. The optical fiber convergence device according to claim 1, characterized in that The radial dimension of one end of the emission channel close to the wire winding buffer is larger than the radial dimension of the incident optical fiber, and the radial dimension of one end of the emission channel far from the wire winding buffer is smaller than the radial dimension of the incident optical fiber.

4. The optical fiber convergence device according to claim 1, characterized in that A first reflection channel is further provided in the converging probe, and a second reflection channel is further provided in the wire winding buffer. The first reflection channel and the second reflection channel are arranged correspondingly; the second reflection channel and the first reflection channel are used for allowing one end of a reflection optical fiber to pass through in sequence; the light emitted from the incident optical fiber can be incident into the reflection optical fiber after being reflected by the reflection area of the device under test.

5. The optical fiber convergence device according to claim 4, wherein, A limiting protrusion is provided on the inner wall of the first reflection channel. One side of the limiting protrusion facing the wire winding buffer is used for allowing one end of the reflection optical fiber to abut against it.

6. The optical fiber convergence device according to claim 5, characterized in that A notch is provided on one side of the converging probe facing away from the wire winding buffer. The notch is located on one side of the limiting protrusion facing away from the wire winding buffer, and the notch communicates with the first reflection channel; along the direction of the converging probe facing the device under test, the radial dimension of the notch gradually increases.

7. The optical fiber convergence device according to any one of claims 4 to 6, characterized in that A groove is provided on one side of the converging probe facing away from the wire winding buffer. The groove communicates with the first reflection channel and the plurality of emission channels. A transparent film is provided in the groove; the distance from the transparent film to the incident port of the reflection optical fiber is less than a first distance, and the first distance is half of a preset distance; the preset distance is the distance between the device under test area and the incident port of the reflection optical fiber when the light emitted from the plurality of incident optical fibers converges at a point in the device under test area.

8. The optical fiber convergence device according to any one of claims 4 to 6, characterized in that, On one side of the converging probe facing away from the winding buffer, there is a groove which is in communication with both the first reflection channel and the plurality of emission channels. A semi-permeable membrane is provided in the groove; the distance from the semi-permeable membrane to the incident port of the reflection optical fiber is half of a preset distance, and the preset distance is the distance between the point where the light rays emitted from the plurality of incident optical fibers converge at a point in the region to be measured of the device to be measured and the incident port of the reflection optical fiber.

9. The optical fiber converging device according to claim 1, wherein, The optical fiber converging device further includes an optical fiber binder which is located on the side of the winding buffer facing away from the converging probe, and the optical fiber binder is fixed relative to the winding buffer; a through cavity for accommodating the incident optical fiber is provided in the optical fiber binder, and the plurality of winding channels are respectively in communication with the through cavity.

10. An optical testing system, characterized in that, It includes an optical signal processing module, a plurality of incident optical fibers, and the optical fiber converging device according to any one of claims 1 to 9. One ends of the plurality of incident optical fibers are respectively communicatively connected to the optical signal processing module, and the other ends respectively pass through the plurality of winding channels one by one and extend into the corresponding emission channels. After the light rays emitted from the incident optical fiber are converged by the optical fiber converging device, a light spot can be formed in the region to be measured of the device to be measured.

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