Flow equalizing pipeline and testing system

Abstract

The utility model relates to the field of microelectronic packaging and testing, in particular to a flow equalizing pipeline and a testing system. The flow equalizing pipeline comprises a pipeline main body and a plurality of flow equalizing plates; a plurality of pipe orifices are formed in the pipeline main body, the plurality of pipe orifices are sequentially arranged at intervals in the extending direction of the pipeline main body, and each pipe orifice is used for being communicated with an external test incubator; the flow equalizing plates are sequentially arranged in the pipeline body at intervals in the extending direction of the pipeline body, and the flow intercepting areas of the flow equalizing plates are gradually reduced in the flowing direction of fluid in the pipeline body. The flow equalizing pipeline and the test system applied to the flow equalizing pipeline aim at improving the temperature equalizing performance of each test bin in a test incubator, so that the consistency of test conditions can be improved, and the test error is reduced.

Description

Technical Field

[0001] The utility model relates to the field of microelectronic packaging and testing, and more particularly to a flow equalizing pipeline and a testing system. Background Art

[0002] With the rapid growth of consumers' demand for electronic products, the upgrading and iteration speed of chips has further accelerated, the global semiconductor market scale has continued to expand, and different types of chips are applied in different fields. Since consumers have higher and higher requirements for the performance and volume of electronic products, the integration degree of chips themselves has become higher and higher according to Moore's law. Therefore, in the packaging design, a smaller packaging area ratio is also pursued to achieve the purpose of placing more chips per unit area.

[0003] However, under high-density packaging, chips will be accompanied by greater heat dissipation, which will ultimately lead to a sharp rise in the temperature of electronic products. Excessive temperature rise will reduce the reliability and service life of products. Therefore, before chips and circuit boards and other electronic products are put on the market, high-temperature aging tests must be carried out. When carrying out high-temperature aging tests, an incubator is required. However, when using an incubator for aging tests, the temperature uniformity of each test product in the incubator must be ensured to ensure that the test conditions of each product are the same to ensure the test accuracy. Existing incubators are usually divided into several layers, and it is difficult for existing incubator products to ensure the temperature uniformity of each layer. Therefore, when existing incubator products are used for aging tests, it is difficult to ensure that each test product is tested under uniform temperature conditions, resulting in test errors. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a flow equalizing pipeline and a testing system, which can improve the temperature uniformity of each test chamber in a test incubator when applied to the testing system, thereby improving the consistency of test conditions and reducing test errors.

[0005] The embodiments of the utility model are implemented as follows:

[0006] In a first aspect, the utility model provides a flow equalizing pipeline, which includes a pipeline main body and a plurality of flow equalizing plates;

[0007] The pipeline main body is provided with a plurality of pipe orifices, and the plurality of pipe orifices are sequentially arranged at intervals along the extending direction of the pipeline main body. Each pipe orifice is used for communicating with an external test incubator;

[0008] The plurality of flow equalizing plates are sequentially arranged at intervals along the extending direction of the pipeline main body inside the pipeline main body, and along the flowing direction of the fluid in the pipeline main body, the cross-sectional areas of the plurality of flow equalizing plates gradually decrease.

[0009] In an alternative embodiment, a plurality of flow equalizing plates are all connected to one side of the pipe body where the pipe orifices are opened, and each flow equalizing plate corresponds to one pipe orifice to guide the fluid in the pipe body to flow towards the corresponding pipe orifice.

[0010] In an alternative embodiment, at least one flow equalizing plate is provided in the region between any two adjacent pipe orifices along the flow direction of the fluid in the pipe body.

[0011] In an alternative embodiment, a plurality of mounting grooves are provided on the inner wall of the pipe body, and each flow equalizing plate is detachably connected to one mounting groove correspondingly.

[0012] In an alternative embodiment, a plurality of pipe orifices are all circular openings with the same inner diameter.

[0013] In an alternative embodiment, the flow equalizing pipe further includes a plurality of flow sensors, and one flow sensor is correspondingly provided at each pipe orifice, and the flow sensor is used to detect the fluid flow rate at the corresponding pipe orifice.

[0014] In an alternative embodiment, the flow equalizing pipe further includes a plurality of retaining rings, and one or more retaining rings are detachably connected to one or more pipe orifices;

[0015] Wherein, the inner diameter of the retaining ring is smaller than the inner diameter of the pipe orifice.

[0016] In an alternative embodiment, the flow equalizing pipe further includes a plurality of flow limiting units; each flow limiting unit at least includes a first flow limiting ring and a second flow limiting ring, and the inner diameters of the first flow limiting ring and the second flow limiting ring gradually decrease;

[0017] Each flow limiting unit corresponds to one pipe orifice, and one or more of the first flow limiting ring and the second flow limiting ring are detachably connected to the pipe orifice.

[0018] In an alternative embodiment, the second flow limiting ring is detachably connected to the first flow limiting ring.

[0019] In a second aspect, the present utility model provides a test system, and the test system includes a test temperature chamber and the above-mentioned flow equalizing pipe;

[0020] The test temperature chamber is provided with a plurality of test chambers; each test chamber is communicated with one pipe orifice.

[0021] The beneficial effects of the embodiments of the present utility model include:

[0022] The flow balancing pipe includes a pipe body and a plurality of flow balancing plates; the pipe body is provided with a plurality of pipe openings, which are sequentially arranged at intervals along the extension direction of the pipe body, and each pipe opening is used to communicate with an external test incubator; that is, the pipe can be connected with the external test incubator through the plurality of pipe openings, so that fluid can be introduced into each test chamber in the test incubator, so that the test incubator can perform corresponding aging tests;

[0023] On the basis of the above structure, multiple flow equalizing plates are arranged in the pipeline body at intervals along the extension direction of the pipeline body, and the cross-sectional areas of the multiple flow equalizing plates are gradually reduced along the flow direction of the fluid in the pipeline body. That is, by configuring multiple flow equalizing plates in the pipeline body, the flow rates of the outlet fluids from multiple pipe openings can be made consistent, thereby improving the uniformity of the flow rates of each pipe opening. In this way, after the fluid is introduced into the test incubator, the temperatures of the various test chambers of the test incubator can be made consistent, that is, the temperature uniformity of the test incubator is improved. As a result, the consistency of the test conditions can be improved, thereby reducing the test error. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 This is a schematic diagram of the structure of the flow-sharing pipeline in the embodiment of the utility model;

[0026] Figure 2 It is a cross-sectional view of the flow-sharing pipeline in the embodiment of the utility model;

[0027] Figure 3 This is a schematic diagram of the structure of the flow-sharing pipeline when a limited flow unit is provided in an embodiment of the utility model;

[0028] Figure 4 This is an exploded schematic diagram of a flow-sharing pipeline when a limited flow unit is provided in an embodiment of the utility model;

[0029] Figure 5 It is a structural schematic diagram of the current limiting unit in the embodiment of the utility model.

[0030] Icon: 100 - flow equalizing pipe; 110 - pipe body; 120 - flow equalizing plate; 111 - pipe mouth; 130 - flow limiting unit; 131 - first flow limiting ring; 132 - second flow limiting ring. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. The components of the embodiments of the present utility model usually described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0032] Therefore, the detailed description of the embodiments of the present utility model provided in the drawings below is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0033] It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0035] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0036] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0037] Please refer toFigure 1 and Figure 2 , this embodiment provides a flow equalizing pipeline 100, and the flow equalizing pipeline 100 includes a pipeline main body 110 and a plurality of flow equalizing plates 120;

[0038] The pipeline main body 110 is provided with a plurality of pipe orifices 111, and the plurality of pipe orifices 111 are arranged at intervals in sequence along the extending direction of the pipeline main body 110, and each pipe orifice 111 is used for communicating with an external test incubator;

[0039] The plurality of flow equalizing plates 120 are arranged at intervals in sequence along the extending direction of the pipeline main body 110 in the pipeline main body 110, and along the flowing direction of the fluid in the pipeline main body 110, the cross-sectional areas of the plurality of flow equalizing plates 120 gradually decrease.

[0040] It should be noted that the fluid flowing in the pipeline main body 110 can be a gas or a liquid; moreover, when configuring the plurality of flow equalizing plates 120, the setting principle is as follows: when there is no baffle in the pipeline main body 110, the fluid will flow along the direction with smaller flow resistance, and the flow direction will only change when it encounters the baffle. Therefore, taking the vertical setting of the pipeline main body 110 as an example, and its inlet is at the upper end, and on the basis that there is no baffle in the pipeline main body 110, the pipe orifice 111 at the lowermost end is the pipe orifice 111 with the largest flow rate. Based on this, when configuring the flow equalizing plates 120, in order to ensure the flow equalization of each pipe orifice 111, a plurality of flow equalizing plates 120 are provided, and the sizes of the respective flow equalizing plates 120, that is, the cross-sectional areas thereof increasing the flow resistance, are negatively correlated, that is, from top to bottom, along the flowing direction of the fluid in the pipeline main body 110, the cross-sectional areas of the flow equalizing plates 120 gradually decrease, so that the flow resistance at the pipe orifice 111 with the largest original flow rate is the smallest, while the flow resistance at the pipe orifice 111 with the smallest flow rate is the largest. Furthermore, a flow equalizing plate 120 with a large flow resistance is added at the pipe orifice 111 with a small flow rate to play a role in guiding the flow, while the flow equalizing plate 120 at the pipe orifice 111 with a large flow rate is reduced or not provided to reduce its guiding effect. Furthermore, through the setting of the flow equalizing plates 120, the flow rate difference of the original structure can be offset, so that the flow rates at each pipe orifice 111 are the same under the action of the flow equalizing plates 120.

[0041] Please refer to Figure 1 and Figure 2 , the working principle of the flow equalizing pipeline 100 is as follows:

[0042] First, the flow balancing pipe 100 is used in the test system, and its function is to introduce fluid into the test incubator to form a test environment for aging test in the test incubator. On this basis, in order to improve the temperature uniformity of each test chamber in the test incubator, so that each test chamber can maintain the consistency of test conditions, so as to improve the test accuracy, the flow balancing pipe 100 is used to transport the same flow of fluid to each test chamber, that is, the flow balancing pipe 100 improves the consistency of the output flow of each nozzle 111, thereby improving the temperature uniformity of each test chamber in the test incubator, so that each test chamber can maintain the consistency of test conditions, so as to improve the test accuracy;

[0043] Specifically, based on the above purpose, the flow balancing pipe 100 includes a pipe body 110 and a plurality of flow balancing plates 120; the pipe body 110 is provided with a plurality of pipe openings 111, and the plurality of pipe openings 111 are sequentially arranged at intervals along the extension direction of the pipe body 110, and each pipe opening 111 is used to communicate with an external test incubator; that is, the plurality of pipe openings 111 can be connected with the external test incubator, so that fluid can be introduced into each test chamber in the test incubator, so that the test incubator can perform corresponding aging tests;

[0044] On the basis of the above structure, a plurality of flow equalizing plates 120 are arranged in the pipeline body 110 at intervals in sequence along the extension direction of the pipeline body 110, and along the flow direction of the fluid in the pipeline body 110, the cross-sectional area of the plurality of flow equalizing plates 120 gradually decreases. That is, by configuring a plurality of flow equalizing plates 120 in the pipeline body 110, the flow rates of the outlet fluids from the plurality of pipe openings 111 can be made consistent, thereby improving the uniformity of the flow rates of the various pipe openings 111. In this way, after the fluid is introduced into the test incubator, the temperatures of the various test chambers of the test incubator can be made consistent, that is, the temperature uniformity of the test incubator is improved, thereby improving the consistency of the test conditions and reducing the test error.

[0045] On the basis of the above content, when configuring multiple pipe openings 111, the present embodiment adopts setting the multiple pipe openings 111 as circular openings with the same inner diameter. Such a setting method can facilitate the connection of the pipe openings 111 with the test temperature chamber. At the same time, such a setting method can make the parameters of the pipe openings 111 consistent, reduce the adjustable variables in the process of adjusting the flow of the pipe openings 111, and then make the export flow of the pipe openings 111 consistent by adjusting the position or size of the internal flow equalizing plate 120, that is, the difficulty of adjusting the flow can be simplified.

[0046] Furthermore, in the present embodiment, when configuring a plurality of flow equalizing plates 120, on the basis of the above-mentioned structure, the plurality of flow equalizing plates 120 can be connected to a side of the pipe main body 110 where the pipe opening 111 is opened, and each flow equalizing plate 120 corresponds to a pipe opening 111 to guide the fluid in the pipe main body 110 to flow toward the pipe opening 111 corresponding thereto. In this way, each flow equalizing plate 120 can correspond to a pipe opening 111, and thus when adjusting the flow at each gate, the size of the cut-off surface of the flow equalizing plate 120 corresponding to the pipe opening 111 can be adjusted.

[0047] Moreover, when configuring the flow equalizing plate 120, at least one flow equalizing plate 120 can be provided in the area between any two adjacent pipe openings 111 along the flow direction of the fluid in the pipe body 110. This arrangement enables the flow equalizing plates 120 of each pair of pipe openings 111 to be located at the rear side thereof along the flow direction of the fluid, so that each flow equalizing plate 120 can be adjusted to align with the fluid in the pipe opening 111 area, thereby reducing the difficulty of adjustment. In addition, during use, in order to facilitate adjustment of the connection state of the flow equalizing plate 120 or adjustment of flow equalizing plates 120 of different sizes according to use requirements, a plurality of installation grooves are provided on the inner wall of the pipe body 110, and each flow equalizing plate 120 is detachably connected to a corresponding installation groove, so that the detachable connection of the flow equalizing plate 120 is achieved through this arrangement, thereby facilitating flow adjustment and reducing the difficulty of maintenance and adjustment of the flow equalizing plate 120.

[0048] Based on the above, in this embodiment, in order to facilitate the adjustment of the flow at the nozzle 111, it is necessary to monitor the flow at each nozzle 111. Therefore, the flow equalizing pipe 100 also includes a plurality of flow sensors, and each nozzle 111 is provided with a flow sensor, and the flow sensor is used to detect the fluid flow at the corresponding nozzle 111. Therefore, the flow data at each nozzle 111 can be obtained through the flow sensor to facilitate the adjustment of its flow. It should be noted that when the adjustment is made based on the flow data at the nozzle 111, the adjustment is made before the assembly of the flow equalizing pipe 100, that is, before assembly, it is necessary to perform corresponding debugging work on it, so that it can be assembled and used after it can make the flow of each nozzle 111 consistent.

[0049] Furthermore, in this embodiment, on the basis of the above structure, by arranging the flow equalizing plate 120 in the pipeline body, the cross-sectional size of the pipe opening 111 can also be adjusted, that is, by adjusting the pipe diameter of the fluid discharged from the pipe opening 111, the flow rate can be adjusted;

[0050] As can be seen from the above, the nozzle 111 in this embodiment adopts a circular nozzle 111 structure with a consistent inner diameter. Based on this, please refer to Figures 1-5 , the flow equalizing pipe 100 in this embodiment further includes a plurality of flow limiting units 130; each flow limiting unit 130 at least includes a first flow limiting ring 131 and a second flow limiting ring 132, and the inner diameters of the first flow limiting ring 131 and the second flow limiting ring 132 gradually decrease;

[0051] When configuring the flow limiting unit 130, one flow limiting unit 130 corresponds to one nozzle 111, and one or more of the first flow limiting ring 131 and the second flow limiting ring 132 are detachably connected to the nozzle 111.

[0052] Therefore, through such a setting method, one or more of the first flow limiting ring 131 and the second flow limiting ring 132 can be selected and installed at each nozzle 111 according to the usage requirements, so as to improve the consistency of the outlet flow at each nozzle 111; it should also be noted that, as can be seen from the above, both the first flow limiting ring 131 and the second flow limiting ring 132 of the flow limiting unit 130 are detachably connected to the nozzle 111. Therefore, different flow limiting rings can be selected and installed, or no flow limiting ring can be installed at the nozzle 111, that is, the flow limiting unit 130 can be removed from the corresponding nozzle 111.

[0053] It should be noted that in this embodiment, the first flow limiting ring 131 and the second flow limiting ring 132 are taken as examples for illustration. In other embodiments of the present invention, a third flow limiting ring or more flow limiting rings can be added according to requirements on this basis.

[0054] On the basis of the above structure, since the inner diameters of the first flow limiting ring 131 and the second flow limiting ring 132 gradually decrease, in order to facilitate reducing the installation difficulty of the first flow limiting ring 131 and the second flow limiting ring 132, the second flow limiting ring 132 can be detachably connected to the first flow limiting ring 131, that is, such a setting method enables the first flow limiting ring 131 to be independently installed at the corresponding nozzle 111; when the second flow limiting ring 132 needs to be installed, the first flow limiting ring 131 can be installed at the nozzle 111, and then the second flow limiting ring 132 can be connected to the first flow limiting ring 131.

[0055] Different from the above current-limiting unit 130, in other embodiments of the present invention, the flow equalizing pipe 100 may further include a plurality of retaining rings, and one or more of the pipe orifices 111 are detachably connected with a retaining ring; wherein, the inner diameter of the retaining ring is smaller than the inner diameter of the pipe orifice 111. That is, in this embodiment, by providing a retaining ring with an inner diameter different from that of the pipe orifice 111 at the pipe orifice 111, the size of the surface for the fluid to flow out of the pipe orifice 111 is changed through the setting of the retaining ring, so as to adjust the flow rate. It should be noted that in such a setting method, the retaining ring can be installed at the pipe orifice 111 according to requirements, and the pipe orifices 111 where the retaining rings are installed can be adjusted according to requirements.

[0056] In summary, please refer to Figures 1-5 , the flow equalizing pipe 100 is applied to a test device. By arranging a plurality of flow equalizing plates 120 in the pipe main body 110, the fluid in the pipe main body 110 can flow uniformly to each pipe orifice 111, thereby improving the flow rate uniformity of the pipe orifices 111; and each pipe orifice 111 is set to be the same circle, and the parameters of the pipe orifice 111 can be consistent with the parameters of the inlet of the pipe main body 110. In this way, the pressure drop when the fluid in the pipe main body 110 is led out by each pipe orifice 111 can be reduced, so that the fluid in the pipe main body 110 can flow uniformly to each pipe orifice 111, thereby ensuring the flow rate consistency at the pipe orifices 111;

[0057] In addition, during the debugging stage of the flow equalizing pipe 100, based on the flow rate data monitored by the flow sensor, by adjusting the installation state of the current-limiting unit 130, that is, selecting current-limiting rings with different inner diameters, the flow guiding area size of each pipe orifice 111 can be changed according to the feedback of each layer of flow sensors;

[0058] After the debugging is completed, the flow equalizing pipe 100 is installed in the test incubator. The operation is simple, the cost is low, and the flow equalizing property is strong. The comprehensive improvement of the two structures can ensure that the flow rate difference between each layer is small, that is, the structure is debugged outside the test incubator, so that it can be assembled after the debugging is completed, improving the operation convenience.

[0059] Furthermore, based on the above content, please refer to Figures 1-5 , this embodiment further provides a test system, which includes a test incubator and the above-mentioned flow equalizing pipe 100; the test incubator is provided with a plurality of test chambers; each test chamber is communicated with a pipe orifice 111.

[0060] Among them, after the external fluid is introduced into the flow equalizing pipeline 100, under the action of the flow equalizing pipeline 100, the fluid can be evenly transported into each test chamber. Furthermore, in this way, after the fluid is introduced into the test incubator, the temperatures of all test chambers in the test incubator can be made consistent, that is, the temperature uniformity of the test incubator can be improved. Thus, the consistency of the test conditions can be improved, and further the test error can be reduced.

[0061] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A flow equalizing pipeline, characterized in that: The flow equalizing pipeline includes a pipeline main body and a plurality of flow equalizing plates; The pipeline main body is provided with a plurality of pipe orifices, and the plurality of pipe orifices are arranged at intervals in sequence along the extending direction of the pipeline main body, and each pipe orifice is used for communicating with an external test incubator; The plurality of flow equalizing plates are arranged at intervals in sequence along the extending direction of the pipeline main body in the pipeline main body, and along the flowing direction of the fluid in the pipeline main body, the intercepting areas of the plurality of flow equalizing plates gradually decrease.

2. The flow equalizing pipeline according to claim 1, characterized in that: The plurality of flow equalizing plates are all connected to one side of the pipeline main body where the pipe orifices are opened, and each flow equalizing plate corresponds to one pipe orifice to guide the fluid in the pipeline main body to flow towards the corresponding pipe orifice.

3. The flow equalizing pipeline according to claim 2, characterized in that: Along the flowing direction of the fluid in the pipeline main body, at least one flow equalizing plate is arranged in the area between any two adjacent pipe orifices.

4. The flow equalizing pipeline according to claim 2, characterized in that: The inner wall of the pipeline main body is provided with a plurality of installation grooves, and each flow equalizing plate is detachably connected to one of the installation grooves correspondingly.

5. The flow equalizing pipeline according to claim 1, characterized in that: The plurality of pipe orifices are all circular openings with the same inner diameter.

6. The flow equalizing pipeline according to claim 1, characterized in that: The flow equalizing pipeline further includes a plurality of flow sensors, and one flow sensor is correspondingly arranged at each pipe orifice, and the flow sensor is used for detecting the fluid flow rate at the corresponding pipe orifice.

7. The flow equalizing pipeline according to any one of claims 1-6, characterized in that: The flow equalizing pipeline further includes a plurality of retaining rings, and one or more of the pipe orifices are detachably connected with the retaining rings; Wherein, the inner diameter of the retaining ring is smaller than the inner diameter of the pipe orifice.

8. The flow equalizing pipeline according to any one of claims 1-6, characterized in that: The flow equalizing pipeline further includes a plurality of current limiting units; each current limiting unit at least includes a first current limiting ring and a second current limiting ring, and the inner diameters of the first current limiting ring and the second current limiting ring gradually decrease; Each current limiting unit corresponds to one pipe orifice, and one or more of the first current limiting ring and the second current limiting ring are detachably connected to the pipe orifice.

9. The flow equalizing pipeline according to claim 8, characterized in that: The second current limiting ring is detachably connected to the first current limiting ring.

10. A test system, characterized in that: The test system includes a test incubator and the flow equalizing pipeline according to any one of claims 1-9; The test incubator is provided with a plurality of test chambers; each test chamber is communicated with one pipe orifice.

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