Test device and spot test equipment
By introducing the first sliding assembly, the second sliding assembly and the third sliding assembly into the test device, the position adjustment of the probe unit in multiple directions is realized, the limitations of the existing testing device are solved, and semiconductor chips of different positions and thicknesses are adapted to, and the scope of application of the test is improved.
Patent Information
- Application Number
- CN202422266647.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-14
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-09-14
AI Technical Summary
Existing test devices can only test a certain semiconductor chip, which has great limitations and cannot adapt to semiconductor chips of different positions and thicknesses.
The plurality of probe units of the probe assembly driven by the first sliding assembly, the second sliding assembly and the third sliding assembly perform position adjustment in the first direction, the second direction and the third direction, including adjustments in the horizontal and vertical directions, adapting to a variety of different semiconductor chips.
It realizes that the test device can adapt to semiconductor chips of various positions and thicknesses, which improves the scope of application of the test device and narrows the limitations.
Smart Images
Figure CN223155159U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor chip testing, in particular to a testing device and a sampling testing device. Background Art
[0002] Semiconductor refers to a material whose electrical conductivity at room temperature is between that of a conductor and an insulator. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. During the production process of semiconductor chips, it is necessary to test the performance of semiconductor chips. However, existing testing devices can usually only test a certain type of semiconductor chip, and there is a problem of great limitation.
[0003] Therefore, it is necessary to provide a new testing device and a sampling testing device to solve the above technical problems. Summary of the Utility Model
[0004] The main purpose of the utility model is to provide a testing device and a sampling testing device, aiming to solve the technical problem of great limitation existing in existing testing devices.
[0005] To achieve the above purpose, a testing device proposed by the utility model includes:
[0006] A base;
[0007] A first sliding component, the first sliding component includes a first driving member and a first sliding table slidably arranged on the base, and the first driving member can drive the first sliding table to slide along a first direction of the base;
[0008] A second sliding component, the second sliding component includes a second driving member and a second sliding table slidably arranged on the first sliding table, and the second driving member can drive the second sliding table to slide along a second direction of the base;
[0009] A third sliding component, the third sliding component includes a third driving member and a probe seat slidably arranged on the second sliding table, and the third driving member can drive the probe seat to slide along a third direction of the base;
[0010] A probe component, the probe component includes a plurality of probe units, and each of the probe units is arranged on the probe seat.
[0011] In an embodiment, sliders are arranged on the first sliding table, the second sliding table and the probe seat, and slide rails are arranged on the base, the first sliding table and the second sliding table, and the sliders are slidably connected to the slide rails.
[0012] In one embodiment, the number of the slide rails and the sliders is plural, and at least one slider is correspondingly arranged on each slide rail.
[0013] In one embodiment, the first driving member drives the first sliding table to slide along a first direction of the base through a lead screw, and the second driving member drives the second sliding table to slide along a second direction of the base through a lead screw.
[0014] In one embodiment, a cam is arranged at an output end of the third driving member, and an abutting member is arranged on the probe base. An outer circumferential surface of the cam abuts against a bottom surface of the abutting member; the third driving member can drive the cam to rotate so as to drive the probe base to slide along a third direction of the base.
[0015] In one embodiment, the abutting member includes a mounting block arranged on the probe base and a roller rotatably arranged on the mounting block. The outer circumferential surface of the cam abuts against the outer circumferential surface of the roller.
[0016] In one embodiment, the third sliding assembly further includes a pressing member which abuts against the probe base, and the pressing member can drive the probe base to slide along the third direction of the base so that the cam abuts against the abutting member.
[0017] In one embodiment, the pressing member includes a base, a pressing block rotatably arranged on the base, and an elastic member connecting the base and the pressing block; the elastic member can drive the pressing block to rotate so as to drive the probe base to slide along the third direction of the base.
[0018] In one embodiment, the probe assembly further includes adjusting seats correspondingly arranged for each probe unit, and each probe unit is movably arranged on the probe base through a corresponding adjusting seat.
[0019] In addition, the present utility model further provides a sampling and testing device, including the testing device as described above.
[0020] The technical solution of the present utility model drives multiple probe units of the probe assembly to adjust their positions in the first direction, the second direction, and the third direction through the first sliding assembly, the second sliding assembly, and the third sliding assembly. It can enable the testing device to adapt to a variety of different semiconductor chips, thereby reducing the limitations of the testing device. In this embodiment, the first driving member can drive the first slide table to slide in the first direction of the base, so as to drive the probe unit to slide in the first direction of the base; the second driving member can drive the second slide table to slide in the second direction of the base, so as to drive the probe unit to slide in the second direction of the base; by driving the first slide table to slide with the first driving member and driving the second slide table to slide with the second driving member, it can adjust the position of the probe unit in the first direction and the second direction to adapt to a variety of semiconductor chips with different testing positions. The third driving member can drive the probe base to slide in the third direction of the base, that is, the third driving member can drive the probe base to move up and down, thereby driving the probe unit to move up and down. It can adjust the position of the probe unit in the third direction (i.e., the vertical direction) to adapt to a variety of semiconductor chips with different thicknesses. Each probe unit is used to test the performance of the semiconductor chip. By setting multiple probe units, the performance of a variety of different semiconductor chips can be tested, improving the applicable range of the testing device. The testing device drives multiple probe units of the probe assembly through the first sliding assembly, the second sliding assembly, and the third sliding assembly to slide in the first direction, the second direction, and the third direction of the base, enabling the probe unit to adjust its position in the first direction, the second direction, and the third direction to adapt to semiconductor chips with different testing positions and different thicknesses, and it can reduce the limitations of the testing device. The testing device is applied to the technical field of semiconductor chip testing technology. Description of the Drawings
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.
[0022] Figure 1 It is a schematic structural diagram of the testing device in the embodiment provided by the present utility model;
[0023] Figure 2 It is a schematic connection diagram of the probe base and the probe assembly in the embodiment provided by the present utility model;
[0024] Figure 3 It is a schematic connection diagram of the probe base, the third driving member, and the pressing member in the embodiment provided by the present utility model;
[0025] Figure 4Structural schematic diagram of the sampling device in the embodiments provided by the present utility model;
[0026] Figure 5 is Figure 4 schematic diagram of another perspective.
[0027] Explanation of the reference numerals in the drawings:
[0028] 100, base; 110, slide rail; 200, first sliding assembly; 210, first driving member; 220, first sliding table; 221, slider; 300, second sliding assembly; 310, second driving member; 320, second sliding table; 400, third sliding assembly; 410, third driving member; 411, cam; 420, probe holder; 421, abutting member; 4211, mounting block; 4212, roller; 430, pressing member; 431, base; 432, pressing block; 433, elastic member; 500, probe assembly; 510, probe unit; 520, adjusting base; 600, base; 610, turntable; 700, wafer stage; 800, loading mechanism; 900, recycling mechanism.
[0029] The realization, functional features and advantages of the purpose of the present utility model will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners
[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0031] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.
[0032] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution that satisfies both A and B simultaneously.
[0033] In addition, the technical solutions between the various embodiments of the present utility model can be combined with each other, but it must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions results in contradictions or is impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.
[0034] During the production process of semiconductor chips, it is necessary to test the performance of semiconductor chips. The specific operation is to place the semiconductor chip on the positioning component, and then the probe component of the testing device tests the semiconductor chip. However, in existing testing devices, the probe component is usually fixedly installed and cannot adjust the position of the probe in the horizontal and vertical directions. Since the test positions of different semiconductor chips vary greatly, this leads to the limitation that the testing device can only be applicable to one type of semiconductor chip, with relatively large limitations.
[0035] The present utility model provides a testing device and a sampling and testing device, aiming to solve the technical problem of the large limitations existing in existing testing devices.
[0036] Please refer to Figure 1 , in an embodiment of the present utility model, the testing device includes a base 100, a first sliding component 200, a second sliding component 300, a third sliding component 400, and a probe component 500. The first sliding component 200 includes a first driving member 210 and a first sliding table 220 slidably disposed on the base 100. The first driving member 210 can drive the first sliding table 220 to slide along the first direction of the base 100. The second sliding component 300 includes a second driving member 310 and a second sliding table 320 slidably disposed on the first sliding table 220. The second driving member 310 can drive the second sliding table 320 to slide along the second direction of the base 100. The third sliding component 400 includes a third driving member 410 and a probe base 420 slidably disposed on the second sliding table 320. The third driving member 410 can drive the probe base 420 to slide along the third direction of the base 100. The probe component 500 includes a plurality of probe units 510, and each probe unit 510 is disposed on the probe base 420. Among them, the first direction refers to the direction indicated by X in Figure 1 , the second direction refers to the direction indicated by Y in Figure 1 , and the third direction refers to the direction indicated by Z in Figure 1 . In a specific embodiment, the first direction and the second direction are two mutually perpendicular horizontal directions, and the third direction is the vertical direction.
[0037] The technical solution of the present utility model drives multiple probe units 510 of the probe assembly 500 to adjust their positions in the first direction, the second direction, and the third direction through the first sliding assembly 200, the second sliding assembly 300, and the third sliding assembly 400, which can enable the testing device to adapt to a variety of different semiconductor chips, thereby reducing the limitations of the testing device. In this embodiment, the first driving member 210 can drive the first sliding table 220 to slide along the first direction of the base 100 to drive the probe unit 510 to slide along the first direction of the base 100; the second driving member 310 can drive the second sliding table 320 to slide along the second direction of the base 100 to drive the probe unit 510 to slide along the second direction of the base 100; by driving the first sliding table 220 to slide through the first driving member 210 and driving the second sliding table 320 to slide through the second driving member 310, the position of the probe unit 510 can be adjusted in the first direction and the second direction to adapt to a variety of semiconductor chips with different test positions. The third driving member 410 can drive the probe base 420 to slide along the third direction of the base 100, that is, the third driving member 410 can drive the probe base 420 to move up and down, thereby driving the probe unit 510 to move up and down, and its position can be adjusted in the third direction (i.e., the vertical direction) to adapt to a variety of semiconductor chips with different thicknesses. Each probe unit 510 is used to test the performance of the semiconductor chip. By providing multiple probe units 510, the performance of a variety of different semiconductor chips can be tested, improving the applicable range of the testing device. The testing device drives multiple probe units 510 of the probe assembly 500 through the first sliding assembly 200, the second sliding assembly 300, and the third sliding assembly 400 to slide along the first direction, the second direction, and the third direction of the base 100, enabling the probe unit 510 to adjust its position in the first direction, the second direction, and the third direction to adapt to semiconductor chips with different test positions and different thicknesses, which can reduce the limitations of the testing device. The testing device is applied to the technical field of semiconductor chip testing.
[0038] Please refer to Figure 1 , in an embodiment of the present utility model, sliders 221 are provided on the first sliding table 220, the second sliding table 320, and the probe base 420, and slide rails 110 are provided on the base 100, the first sliding table 220, and the second sliding table 320. The sliders 221 are slidably connected to the slide rails 110. The sliding connection between the slide rails 110 and the sliders 221 provides guidance for the sliding of each sliding table, which can ensure the stability of each sliding table during sliding. In addition, each sliding table can also be guided by means of cooperation between a guide rod and a guide hole.
[0039] In an embodiment of the present utility model, the number of slide rails 110 and sliders 221 is multiple, and at least one slider 221 is correspondingly arranged for each slide rail 110. In this embodiment, the multiple slide rails 110 and the multiple sliders 221 cooperate to provide guidance for each slide table, which can ensure the stability of each slide table during sliding. In a specific embodiment, the number of slide rails 110 is two, and the two slide rails 110 are arranged at intervals. Two sliders 221 are correspondingly arranged for the slide rails 110 installed on the base 100 and the slide rails 110 installed on the first slide table 220, and one slider 221 is correspondingly arranged for the slide rails 110 installed on the second slide table 320.
[0040] In an embodiment of the present utility model, the first driving member 210 drives the first slide table 220 to slide along the first direction of the base 100 through a lead screw, and the second driving member 310 drives the second slide table 320 to slide along the second direction of the base 100 through a lead screw. Both the first driving member 210 and the second driving member 310 drive the corresponding slide table to slide through a lead screw, and then drive the probe unit 510 to slide. The lead screw transmission has the advantage of high precision, which can ensure the accurate position of the probe unit 510, that is, ensure that the first driving member 210 and the second driving member 310 can drive the probe unit 510 to slide to the test position of the semiconductor chip.
[0041] Please refer to Figure 1 and Figure 3, in an embodiment of the present utility model, a cam 411 is provided at the output end of the third driving member 410, and an abutting member 421 is provided on the probe holder 420. The outer circumferential surface of the cam 411 abuts against the bottom surface of the abutting member 421; the third driving member 410 can drive the cam 411 to rotate, so as to drive the probe holder 420 to slide along the third direction of the base 100. In this embodiment, the third driving member 410 drives the probe holder 420 to slide along the third direction of the base 100 through the cam 411, that is, the third driving member 410 drives the probe holder 420 to lift and lower through the cam 411, and further drives the probe unit 510 to lift and lower. The cam 411 drive has the advantages of high precision and low cost, which can ensure the accurate position of the probe unit 510. At the same time, it can also reduce the manufacturing cost of the testing device. Specifically, the third driving member 410 drives the cam 411 to rotate to drive the probe holder 420 to lift and lower. Among them, under the action of its own gravity, the probe holder 420 makes the abutting member 421 always abut against the outer circumferential surface of the cam 411. Since the outer circumferential surface of the cam 411 is an irregular arc surface, when the third driving member 410 drives the cam 411 to rotate, it can push the abutting member 421 to make the probe holder 420 move upward, and can also separate from the abutting member 421 to make the probe holder 420 move downward under the action of its own gravity. It should be noted that both the cam 411 transmission structure and the lead screw transmission structure have the characteristics of high precision. The reason why the first driving member 210 and the second driving member 310 drive the corresponding slide tables to slide through the lead screw, and the third driving member 410 drives the probe holder 420 to slide through the cam 411 is that: compared with the lead screw transmission, the structure of the cam 411 transmission is simpler and occupies less space. That is, the third driving member 410 drives the probe holder 420 to slide through the cam 411, which can simplify the structure of the testing device and make the structure of the testing device more compact.
[0042] Please refer to Figure 2 and Figure 3 , in an embodiment of the present utility model, the abutting member 421 includes a mounting block 4211 provided on the probe holder 420 and a roller 4212 rotatably provided on the mounting block 4211. The outer circumferential surface of the cam 411 abuts against the outer circumferential surface of the roller 4212. By making the outer circumferential surface of the roller 4212 abut against the outer circumferential surface of the cam 411, that is, using rolling friction instead of sliding friction, it can reduce the friction force when the cam 411 drives the probe holder 420 to lift and lower, and extend the service life of the testing device.
[0043] Please refer to Figure 1 and Figure 3, in an embodiment of the present utility model, the third sliding assembly 400 further includes a pressing member 430. The pressing member 430 abuts against the probe holder 420, and the pressing member 430 can drive the probe holder 420 to slide along the third direction of the base 100, so that the cam 411 abuts against the abutting member 421. Specifically, the pressing member 430 is used to drive the probe holder 420 to descend, so that the cam 411 abuts against the abutting member 421, that is, the pressing member 430 can provide a thrust to drive the probe holder 420 to descend, so that the abutting member 421 always abuts against the cam 411, which can avoid the sudden dropping of the probe holder 420 and further avoid the damage of the testing device.
[0044] Please refer to Figure 3 , in an embodiment of the present utility model, the pressing member 430 includes a base 600431, a pressing block 432 rotatably arranged on the base 600431, and an elastic member 433 connecting the base 600431 and the pressing block 432; the elastic member 433 can drive the pressing block 432 to rotate to drive the probe holder 420 to slide along the third direction of the base 100. In this embodiment, the base 600431 is arranged on the third driving member 410, and the elastic member 433 is always in a stretched state. When the third driving member 410 drives the cam 411 to rotate and separates the cam 411 from the abutting member 421, the elastic member 433 can provide a pulling force to drive the pressing block 432 to rotate, and further push the probe holder 420 to move downward. That is to say, when the probe holder 420 moves downward under its own gravity, it will also move downward under the push of the pressing member 430, which can make the abutting member 421 always abut against the cam 411, thereby avoiding the sudden dropping of the probe holder 420 and avoiding the damage of the testing device. In a specific embodiment, the elastic member 433 can be a spiral spring. To reduce the friction between the pressing block 432 and the probe holder 420, a rotatable wheel body is arranged at one end of the pressing block 432 away from the base 600431.
[0045] Please refer to Figure 2, in an embodiment of the present utility model, the probe assembly 500 further includes an adjustment base 520 provided corresponding to each probe unit 510, and each probe unit 510 is movably disposed on the probe base 420 through the corresponding adjustment base 520. Specifically, each probe unit 510 is used to test the performance of a semiconductor chip. By providing a plurality of probe units 510, the performance of various different semiconductor chips can be tested, improving the applicable range of the testing device. The adjustment base 520 is used to adjust the position of the corresponding probe unit 510 in the first direction, the second direction, and the third direction to ensure that the probe unit 510 is aligned with the test position of the semiconductor chip. It should be noted that the adjustment base 520 is used to finely adjust the position of the probe unit 510 to ensure that the probe unit 510 is aligned with the test position of the semiconductor chip, and its function is different from that of the first sliding assembly 200, the second sliding assembly 300, and the third sliding assembly 400 in the present application, which adjust the position of the probe assembly 500 in the first direction, the second direction, and the third direction, enabling the testing device to adapt to semiconductor chips with different test positions and different thicknesses.
[0046] The present utility model also proposes a sampling and testing device, which includes the above-mentioned testing device. The specific structure of the testing device refers to the above-mentioned embodiment. Since this sampling and testing device adopts all the technical solutions of the above-mentioned all embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, and will not be elaborated here one by one.
[0047] Please refer to Figure 4 and Figure 5, in this embodiment, the sampling and testing device further includes a base 600431, a wafer stage 700, a feeding mechanism 800, and a recycling mechanism 900. A turntable 610 is provided on the base 600431. The turntable 610 is circumferentially provided with a feeding station, a testing station, and a discharging station. Each wafer stage 700 is correspondingly arranged at the feeding station, the testing station, and the discharging station, and each wafer stage 700 can be switched from the feeding station to the discharging station via the testing station; the feeding mechanism 800 is arranged on one side of the feeding station and is used to convey the workpiece to be tested onto the wafer stage 700 located at the feeding station; the testing mechanism is arranged on one side of the testing station and is used to test the workpiece to be tested; the recycling mechanism 900 is arranged on one side of the discharging station and is used to recycle the workpiece after being tested by the testing mechanism. Specifically, the turntable 610 is used to carry the wafer stage 700 and is used to drive each wafer stage 700 to be switched from the feeding station to the discharging station via the testing station. Each wafer stage 700 is correspondingly arranged at the feeding station, the testing station, and the discharging station. That is to say, wafer stages 700 are provided at the feeding station, the testing station, and the discharging station. When the feeding mechanism 800 conveys the semiconductor chip to the wafer stage 700 at the feeding station, the testing mechanism can test the semiconductor chip on the wafer stage 700 at the testing station, and the recycling mechanism 900 can recycle the semiconductor chip on the wafer stage 700 at the discharging station. That is, the sampling and testing device can perform the feeding process, the testing process, and the recycling process of the semiconductor chip simultaneously, which can improve the working efficiency of the sampling and testing device. Moreover, the sampling and testing device uses the turntable 610 to drive the wafer stage 700 to switch between the feeding station, the testing station, and the discharging station, which can reduce the distance between the mechanisms and thus reduce the occupied space of the sampling and testing device.
[0048] The above description is only an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformation made under the technical concept of the present invention by using the content of the specification and drawings of the present invention, or any direct / indirect application in other related technical fields, is included in the patent protection scope of the present invention.
Claims
1. A test device, characterized in that, Comprising: Base; The first sliding component, which includes a first driving member and a first sliding table slidably disposed on the base, and the first driving member can drive the first sliding table to slide along a first direction of the base; The second sliding component, which includes a second driving member and a second sliding table slidably disposed on the first sliding table, and the second driving member can drive the second sliding table to slide along a second direction of the base; The third sliding component, which includes a third driving member and a probe base slidably disposed on the second sliding table, and the third driving member can drive the probe base to slide along a third direction of the base; The probe component, which includes a plurality of probe units, and each of the probe units is disposed on the probe base.
2. The testing device according to claim 1, wherein Sliders are provided on the first sliding table, the second sliding table and the probe base, and slide rails are provided on the base, the first sliding table and the second sliding table, and the sliders are slidably connected to the slide rails.
3. The test device according to claim 2, characterized in that The number of the slide rails and the sliders is multiple, and at least one slider is correspondingly provided for each of the slide rails.
4. The testing device according to claim 1, characterized in that, The first driving member drives the first sliding table to slide along the first direction of the base through a lead screw, and the second driving member drives the second sliding table to slide along the second direction of the base through a lead screw.
5. The testing device according to claim 1, characterized in that, A cam is provided at the output end of the third driving member, and an abutting member is provided on the probe base, and the outer circumferential surface of the cam abuts against the bottom surface of the abutting member; the third driving member can drive the cam to rotate to drive the probe base to slide along the third direction of the base.
6. The testing device according to claim 5, characterized in that, The abutting member includes a mounting block provided on the probe base and a roller rotatably provided on the mounting block, and the outer circumferential surface of the cam abuts against the outer circumferential surface of the roller.
7. The testing device according to claim 5, wherein The third sliding component further includes a pressing member, which abuts against the probe base, and the pressing member can drive the probe base to slide along the third direction of the base so that the cam abuts against the abutting member.
8. The test device according to claim 7, characterized in that, The pressing member includes a base, a pressing block rotatably provided on the base, and an elastic member connecting the base and the pressing block; the elastic member can drive the pressing block to rotate to drive the probe base to slide along the third direction of the base.
9. The testing device according to any one of claims 1 to 8, characterized in that, The probe component further includes adjustment seats provided in one-to-one correspondence with the probe units, and each of the probe units is movably disposed on the probe base through the corresponding adjustment seat.
10. A sampling inspection device, characterized in that, Including the testing device according to any one of claims 1 to 9.