Multi-channel ultra-pure gas on-off control module

Abstract

The utility model belongs to the technical field of gas conveying equipment, and relates to a multi-channel ultra-pure gas on-off control module which comprises a module body, a first port, a second port and a third port, a first flow channel communicated with the first port, a second flow channel communicated with the second port and a third flow channel communicated with the third port are arranged in the module body, a valve hole is formed in the bottom face of the module body, and the first flow channel, the second flow channel and the third flow channel are all communicated with the valve hole. One end of a first diaphragm valve is connected into the valve hole, the other end of the first diaphragm valve is connected with gas equipment, and a heating assembly is arranged in the module body. Three paths of gas are concentrated on one module, and the first diaphragm valve is used for controlling the on-off of mixing of the three paths of gas, so that the use amount of pipelines and valves is reduced, and the equipment cost and the occupied space are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas conveying equipment, in particular to a multi-channel ultra-pure gas on-off control module. Background Art

[0002] The semiconductor manufacturing process may include thin film deposition processes, such as atomic layer deposition (ALD) and plasma enhanced chemical vapor deposition (PECVD), etc., to form various thin films on wafers or substrates to fabricate semiconductor devices. Some deposition processes require three gases to be mixed in proportion. In the prior art, the on-off of the three-way gases is mostly controlled by three pipelines and three valves respectively, and then centrally transported to the gas mixing terminal. This method involves the connection and transportation of multiple gases, increasing the usage of valves, pipelines and various joints, and increasing the workload of equipment assembly. Therefore, the utility model proposes a multi-channel ultra-pure gas on-off control module. Content of the Utility Model

[0003] The main purpose of the utility model is to provide a multi-channel ultra-pure gas on-off control module, which can reduce the usage of pipelines and valves, reduce the assembly difficulty, concentrate the three-way gases on one module, and control the on-off of the three-way gases and gas mixing through the first diaphragm valve and the second diaphragm valve, making the operation more convenient.

[0004] The utility model realizes the above purpose through the following technical solutions: a multi-channel ultra-pure gas on-off control module, including a module body, a first port, a second port and a third port arranged on three side surfaces of the module body, a first flow channel communicated with the first port, a second flow channel communicated with the second port and a third flow channel communicated with the third port arranged in the module body, a valve hole arranged on the bottom surface of the module body, the first flow channel, the second flow channel and the third flow channel are all communicated with the valve hole, one end of a first diaphragm valve is connected in the valve hole, the other end of the first diaphragm valve is connected with a gas-using device, and a heating component is arranged in the module body.

[0005] Preferably, the first flow channel and the second flow channel are both L-shaped with the vertical part facing upwards, a fourth flow channel is vertically arranged in the module body, the bottom end of the fourth flow channel is communicated with the valve hole, the first flow channel and the second flow channel are both communicated with the fourth flow channel, and a second diaphragm valve for controlling the on-off of the fourth flow channel is arranged on the module body.

[0006] Preferably, the heating component includes a heating rod and a thermocouple, a heating rod mounting hole and a thermocouple mounting hole are arranged on the module body, and the heating rod and the thermocouple are fixed to the module body through fastening bolts.

[0007] Preferably, VCR connectors are welded at the first port, the second port, and the third port.

[0008] The beneficial effects of the technical solution of the present utility model are as follows:

[0009] The first flow channel, the second flow channel, and the third flow channel are all connected to the valve hole. A first diaphragm valve is connected inside the valve hole, which concentrates the three-way gas onto one module and controls the on-off of the mixing of the three-way gas through the first diaphragm valve, thereby reducing the usage amount of pipelines and valves, saving equipment costs and floor space;

[0010] VCR connectors are welded at the first port, the second port, and the third port, ensuring port sealing performance and facilitating the connection of various instruments or devices;

[0011] The second diaphragm valve is used to control the on-off of the fourth flow channel. The first flow channel and the second flow channel are connected to the fourth flow channel, thereby controlling the on-off of the first flow channel and the second flow channel. The second diaphragm valve controls the on-off of the valve hole, and the third flow channel is connected to the valve hole, thereby controlling the on-off of the third flow channel. Both the first diaphragm valve and the second diaphragm valve are connected to the valve block body, eliminating the need to control the on-off of multiple pipelines through multiple valves, and making the operation more convenient. Description of the Drawings

[0012] Figure 1 It is the layout diagram of the multi-channel ultra-pure gas on-off control module during operation in the embodiment.

[0013] Figure 2 It is the schematic structural diagram of the module body.

[0014] Figure 3 It is the schematic structural diagram of the third flow channel.

[0015] The numbers in the figure represent:

[0016] 1. Module body; 2. First port; 3. Second port; 4. Third port; 5. First flow channel; 6. Second flow channel; 7. Third flow channel; 8. Valve hole; 9. First diaphragm valve; 10. Fourth flow channel; 11. Valve body; 12. Screw; 13. Handwheel; 14. Piston; 15. Valve flap; 16. Diaphragm; 17. Protrusion; 18. Through hole; 19. Heating rod mounting hole; 20. Thermocouple mounting hole. Detailed Embodiments

[0017] The present utility model will be further described in detail below in conjunction with specific embodiments.

[0018] Embodiment:

[0019] As Figures 1 to 3As shown in the figure, a multi-channel ultra-pure gas on-off control module of the present utility model includes a module body 1, a first port 2, a second port 3, and a third port 4 provided on three side surfaces of the module body 1. A first flow channel 5 communicating with the first port 2, a second flow channel 6 communicating with the second port 3, and a third flow channel 7 communicating with the third port 4 are provided inside the module body 1. A valve hole 8 is provided on the bottom surface of the module body 1. The first flow channel 5, the second flow channel 6, and the third flow channel 7 all communicate with the valve hole 8. One end of a first diaphragm valve 9 is connected inside the valve hole 8, and the other end of the first diaphragm valve 9 is connected to a gas-using device through a VCR joint. A heating component is provided inside the module body 1.

[0020] Both the first flow channel 5 and the second flow channel 6 are L-shaped with the vertical part facing upward. A fourth flow channel 10 is vertically provided inside the module body 1. The bottom end of the fourth flow channel 10 communicates with the valve hole 8. The first flow channel 5 and the second flow channel 6 both communicate with the fourth flow channel 10. A second diaphragm valve for controlling the on-off of the fourth flow channel 10 is provided on the module body 1. The second diaphragm valve includes a valve body 11. A screw rod 12 is vertically provided at the top of the valve body 11. The screw rod 12 is threadedly connected to the valve body 11. The top end of the screw rod 12 is connected with a handwheel 13. A piston 14 is vertically provided inside the valve body 11. The bottom end of the screw rod 12 is rotatably connected to the upper end surface of the piston 14. A valve flap 15 is connected to the lower end surface of the piston 14. An elastic diaphragm 16 is provided below the valve flap 15. The valve body 11 is provided with a protrusion 17 below the diaphragm 16. A through hole 18 communicating with the fourth flow channel 10 is provided on the protrusion 17. The first flow channel 5 and the second flow channel 6 both communicate with the valve cavity of the valve body 11. Rotating the handwheel 13 drives the piston 14 to drive the valve flap 15 downward. The valve flap 15 presses the diaphragm 16 against the protrusion 17, thereby blocking the through hole 18. At the same time, the diaphragm 16 cooperates with both sides of the protrusion 17 to disconnect both the first flow channel 5 and the second flow channel 6. Compared with the traditional three-way valve, the second diaphragm valve can control the on-off of the first flow channel 5, the second flow channel 6, and the fourth flow channel 10 at the same time, and can separate the three flow channels respectively.

[0021] The heating component includes a heating rod and a thermocouple. A heating rod mounting hole 19 and a thermocouple mounting hole 20 are provided on the module body 1. The heating rod and the thermocouple are fixed to the module body 1 through fastening bolts, which facilitates the installation and disassembly of the heating rod and the thermocouple. The heating rod generates heat and conducts the heat to the gas inside through the module body 1. The thermocouple is used to monitor the temperature.

[0022] VCR connectors are automatically welded by orbital welding at the first port 2, the second port 3, and the third port 4.

[0023] The working process of this application is as follows: The first port 2, the second port 3, and the third port 4 are respectively connected to three gas pipelines through VCR connectors, which are used to transport gas a, gas b, and gas c respectively. A mass flowmeter is provided at the connection between the gas pipeline and the port to monitor the input flow ratio of each gas. When the first diaphragm valve 9 is opened, gas a flowing through the first flow channel 5 and gas b flowing through the second flow channel 6 converge inside the valve body 11 of the first diaphragm valve 9, and enter the fourth flow channel 10 through the through hole 18, and finally enter the first diaphragm valve 9. Gas c enters the first diaphragm valve 9 through the third flow channel 7. When the first diaphragm valve 9 is opened, the three gases are mixed in the valve cavity of the first diaphragm valve 9 and then enter the gas-using terminal.

[0024] The above are only some embodiments of the present utility model. For those of ordinary skill in the art, without departing from the inventive concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model.

Claims

1. A multi-channel ultra-pure gas on-off control module, characterized in that: It includes a module body, a first port, a second port and a third port provided on three side surfaces of the module body. A first flow channel communicating with the first port, a second flow channel communicating with the second port and a third flow channel communicating with the third port are provided in the module body. A valve hole is provided on the bottom surface of the module body. The first flow channel, the second flow channel and the third flow channel all communicate with the valve hole. One end of a first diaphragm valve is connected in the valve hole, and the other end of the first diaphragm valve is connected to a gas-using device. A heating component is provided in the module body.

2. The multi-channel ultra-pure gas on-off control module according to claim 1, characterized in that: Both the first flow channel and the second flow channel are L-shaped with the vertical part facing upward. A fourth flow channel is vertically provided in the module body. The bottom end of the fourth flow channel communicates with the valve hole. Both the first flow channel and the second flow channel communicate with the fourth flow channel. A second diaphragm valve for controlling the on / off of the fourth flow channel is provided on the module body.

3. The multi-channel ultra-pure gas on-off control module according to claim 1, characterized in that: The heating component includes a heating rod and a thermocouple. A heating rod mounting hole and a thermocouple mounting hole are provided on the module body. The heating rod and the thermocouple are fixed to the module body through fastening bolts.

4. A multi-channel ultra-pure gas on-off control module according to claim 1, characterized in that: VCR connectors are welded at the first port, the second port and the third port.

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