Photovoltaic silicon wafer transmission sealing device

Abstract

The utility model relates to a photovoltaic silicon wafer transmission sealing device, and belongs to the technical field of semiconductor production equipment. The mechanisms except the conveying table are arranged at the bottom of the workbench and are isolated from the upper portion of the workbench, pollution of the conveying sealing device to the top is avoided, but a conveying groove needs to be formed for a supporting mechanism to penetrate through to support a hanging basket to move, and therefore the lower portion of the conveying groove needs to be blocked by airflow due to shielding of a blocking mechanism. Dry gas flowing out of the conveying groove is reduced, the hot air loss is reduced, and the drying effect is improved.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor production equipment, and in particular relates to a photovoltaic silicon wafer transmission sealing device. Background Art

[0002] During the production process of photovoltaic silicon wafers, they need to be cleaned multiple times according to the process, and also need to be dried after each cleaning. The flower basket is used to load photovoltaic silicon wafers and is often used for large-scale processing of photovoltaic silicon. Therefore, it is necessary to place the photovoltaic silicon wafers in the flower basket for cleaning and drying. For example, in the Chinese utility model patent document CN116259564A, a cleaning system for photovoltaic silicon wafers with a drying device, in this document, a manipulator on a gantry is used to carry the flower basket. Since the manipulator is located at the top, the moving mechanical mechanism is prone to generating debris and contaminating the photovoltaic silicon wafers, and the drying air is easily dissipated from the position where the manipulator is set, resulting in a poor drying effect. At the same time, the photovoltaic silicon wafers cannot be dried by blowing air in a closed manner in this device. Summary of the Utility Model

[0003] The technical problem to be solved by the present utility model is: to solve the deficiencies of easy contamination of photovoltaic silicon wafers and poor drying effect in the prior art, so as to provide a photovoltaic silicon wafer transmission sealing device that improves the cleanliness and drying effect of photovoltaic silicon wafers.

[0004] The technical solution adopted by the present utility model to solve its technical problems is:

[0005] A photovoltaic silicon wafer transmission sealing device includes: a transportation mechanism, a slide rail arranged under the workbench, a driving member for driving the transportation mechanism to move on the slide rail, and a blocking mechanism for blocking the transportation groove on the workbench. The transportation mechanism passes through the transportation groove and is provided with a transportation platform for carrying the hanging basket at the top. The transportation platform is located above the workbench, and the transportation mechanism can also drive the transportation platform to rise and fall to place the hanging basket on the transportation platform onto the hanging basket fixing seat or remove the hanging basket from the hanging basket fixing seat;

[0006] The blocking mechanism includes: a pulley assembly arranged inside the bottom frame of the workbench, a shielding belt that can move on the pulley assembly. The shielding belt is respectively an upper shielding part and a lower shielding part according to whether it is above or below the pulley assembly. The upper shielding part can move together with the transportation mechanism and is always located below the transportation groove.

[0007] Preferably, in the photovoltaic silicon wafer transmission sealing device of the present utility model, a support plate is further arranged at the bottom of the upper shielding part and / or the lower shielding part to support the upper shielding part and / or the lower shielding part.

[0008] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, the transportation mechanism includes a sliding table arranged on a slide rail, a lifting driving member arranged on the sliding table, a horizontal mounting plate arranged on the lifting driving member, a vertical mounting plate arranged on the horizontal mounting plate and passing through a transportation slot, a transportation table arranged on the vertical mounting plate and located above a workbench, a sliding member arranged on the vertical mounting plate and capable of freely sliding and located below the workbench, and the upper shielding portion is connected to both ends of the sliding member, and the upper shielding portion tightens the sliding member so that the sliding member is at a stable height.

[0009] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, a vertical mounting plate is arranged above one side of the horizontal mounting plate, and the lower shielding portion passes through below it, and the other side is slidably connected to the sliding table through a slide bar.

[0010] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, a linear bearing is arranged on the sliding table, and the top end of the slide bar is fixed to the lower part of the vertical mounting plate and extends into the linear bearing.

[0011] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, the belt pulley assembly includes a mounting seat, and a first belt pulley and a second belt pulley arranged on the mounting seat along the height direction.

[0012] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, the lifting driving member is a cylinder.

[0013] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, the driving member is a motor.

[0014] Preferably, for the photovoltaic silicon wafer transmission sealing device of the present utility model, fixing strips are respectively arranged on both sides of the transportation table, and positioning grooves are arranged on the fixing strips.

[0015] The beneficial effects of the present utility model are:

[0016] For the photovoltaic silicon wafer transmission sealing device of the present utility model, the mechanisms except the transportation table are arranged at the bottom of the workbench and are isolated from the upper part of the workbench, avoiding the pollution of the transmission sealing device to the top (some debris will inevitably be generated when the transportation device moves). At the same time, this requires setting a transportation slot for the support mechanism to pass through to support the movement of the hanging basket. Therefore, it is necessary to set a shielding belt of the blocking mechanism to block the air flow below the transportation slot, reduce the outflow of the drying gas from the transportation slot, reduce the loss of hot air, and improve the drying effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The technical solutions of the present application will be further described below with reference to the drawings and embodiments.

[0018] Figure 1Is a perspective view of a photovoltaic silicon wafer drying device including the photovoltaic silicon wafer transfer sealing device of the embodiment of the present application;

[0019] Figure 2 Is a perspective view of the workbench of the embodiment of the present application;

[0020] Figure 3 Is a schematic structural view of the shielding component of the embodiment of the present application;

[0021] Figure 4 Is a perspective view of the transport mechanism of the embodiment of the present application;

[0022] Figure 5 Is a perspective view of the pulley assembly of the embodiment of the present application;

[0023] Figure 6 Is an enlarged perspective view of the workbench at the drying station of the embodiment of the present application.

[0024] The reference numerals in the figure are:

[0025] 1 Loading station;

[0026] 2 Drying station;

[0027] 3 Unloading station;

[0028] 4 Blowing device;

[0029] 5 Transport device;

[0030] 6 Hanging basket fixing seat;

[0031] 9 Hanging basket;

[0032] 10 Workbench;

[0033] 11 Transport trough;

[0034] 12 Air passing opening;

[0035] 40 Outer cover;

[0036] 41 Lifting door;

[0037] 42 Through hole;

[0038] 51 Transport mechanism;

[0039] 52 Slide rail;

[0040] 53 Driving part;

[0041] 54 Pulley assembly;

[0042] 55 Shielding belt;

[0043] 56 Support plate;

[0044] 61 Through hole;

[0045] 510 Slide table;

[0046] 511 Transport table;

[0047] 512 Lifting drive member;

[0048] 513 Horizontal mounting plate;

[0049] 514 Vertical mounting plate;

[0050] 516 Slide bar;

[0051] 541 Mounting seat;

[0052] 542 First pulley;

[0053] 543 Second pulley;

[0054] 551 Upper shielding portion;

[0055] 552 Lower shielding portion;

[0056] 553 Sliding member;

[0057] 5111 Fixed bar;

[0058] 5112 Positioning groove. Detailed implementation manners

[0059] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other.

[0060] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present application. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0061] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0062] The technical solution of the present application will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0063] This embodiment provides a photovoltaic silicon wafer transfer sealing device, including:

[0064] As Figure 3 shown, it includes a transport mechanism 51, a slide rail 52 arranged below the workbench 10, a driving member 53 for driving the transport mechanism 51 to move on the slide rail 52, and a blocking mechanism for blocking the transport groove 11 on the workbench 10. The transport mechanism 51 passes through the transport groove 11 and is provided with a transport table 511 for carrying the hanging basket 9 at the top. The transport table 511 is located above the workbench 10. The transport mechanism 51 can also drive the transport table 511 to lift and lower to place the hanging basket 9 on the transport table 511 onto the hanging basket fixing seat 6 or remove the hanging basket 9 from the hanging basket fixing seat 6;

[0065] The blocking mechanism includes a pulley assembly 54 arranged inside the bottom frame of the workbench 10, and a shielding belt 55 that can move on the pulley assembly 54. The shielding belt 55 is respectively an upper shielding portion 551 and a lower shielding portion 552 according to whether it is above or below the pulley assembly 54. The upper shielding portion 551 can move together with the transport mechanism 51 and is always located below the transport groove 11. The blocking mechanism blocks the bottom of the transport groove 11, which can reduce the amount of dry air passing through the transport groove 11, improve the utilization rate of dry air, reduce energy consumption. Note that the blocking mechanism cannot strictly seal the transport groove 11.

[0066] In the photovoltaic silicon wafer transfer sealing device of this embodiment, the mechanisms except the transport table are arranged at the bottom of the workbench 10 and are isolated from the upper part of the workbench 10, avoiding the pollution of the top by the transfer sealing device (some debris will inevitably be generated when the transfer sealing device moves). At the same time, it is necessary to set the transport groove 11 for the support mechanism to pass through to support the movement of the hanging basket 9. Therefore, it is necessary to set the shielding belt 55 of the blocking mechanism to block the air flow below the transport groove 11, reduce the outflow of dry gas from the transport groove 11, reduce the loss of hot air, and improve the drying effect.

[0067] Further, a support plate 56 is also provided at the bottom of the upper shielding portion 551 and / or the lower shielding portion 552 to support the upper shielding portion 551 and / or the lower shielding portion 552, preventing the upper shielding portion 551 and the lower shielding portion 552 from sagging under the action of gravity. Especially in the middle area between the upper shielding portion 551 and the lower shielding portion 552, the sagging effect is obvious, and the support plate 56 can effectively improve the sagging effect.

[0068] Further, the transport mechanism 51, such as Figure 4 shown, includes a slide table 510 arranged on a slide rail 52, a lifting drive member 512 arranged on the slide table 510, a horizontal mounting plate 513 arranged on the lifting drive member 512, a vertical mounting plate 514 arranged on the horizontal mounting plate 513 and passing through a transport groove 11, a transport table 511 arranged on the vertical mounting plate 514 and located above a workbench 10. A slidable sliding member 553 is arranged on the vertical mounting plate 514 and located below the workbench 10. The upper shielding portion 551 is connected to both ends of the sliding member 553, and the upper shielding portion 551 tightens the sliding member 553 to make the sliding member 553 at a stable height.

[0069] Further, a vertical mounting plate 514 is arranged above one side of the horizontal mounting plate 513, and the lower shielding portion 552 passes through below. The other side is slidably connected to the slide table 510 through a slide rod 516. A linear bearing is arranged on the slide table 510, and the top end of the slide rod 516 is fixed to the lower part of the vertical mounting plate 514 and extends into the linear bearing. Since an installation space needs to be left for the lower shielding portion 552, the horizontal mounting plate 513 needs to extend to one side, which results in unbalanced force. Therefore, a slide rod 516 needs to be arranged on the other side to balance the force.

[0070] Further, as Figure 5 shown, the pulley assembly 54 includes a mounting seat 541, a first pulley 542 and a second pulley 543 arranged on the mounting seat 541 along the height direction. Arranging the first pulley 542 and the second pulley 543 can form a certain distance between the upper shielding portion 551 and the lower shielding portion 552, so that necessary mechanical components can be placed between the upper shielding portion 551 and the lower shielding portion 552.

[0071] Fixing strips 5111 are respectively arranged on both sides of the transport table 511, and positioning grooves 5112 are arranged on the fixing strips 5111. The longitudinal sections of the first three positioning grooves 5112 are circular, and the longitudinal section of the fourth positioning groove 5112 is oval.

[0072] In this embodiment, the lifting drive member 512 uses a cylinder, and the drive member 53 uses a motor, but other types of drive members can also be used.

[0073] AsFigure 1 and Figure 2 As shown in Figure 1 and Figure 2 , the workbench 10 is of a long strip structure. The workbench 10 is successively provided with a loading station 1, a drying station 2 and an unloading station 3. A transport groove 11 penetrating through the positions of the loading station 1, the drying station 2 and the unloading station 3 is formed on the workbench 10. Hanging basket fixing seats 6 are also arranged on the workbench 10 at the loading station 1, the drying station 2 and the unloading station 3, and the hanging basket fixing seats 6 are used for placing the hanging basket 9.

[0074] An air passing opening 12 is further formed on the workbench 10, and the air passing opening 12 is located between two hanging basket fixing seats 6 for fixing the same hanging basket 9. The blowing device 4 includes an upper outer cover 40 arranged on the workbench 10, a lower outer cover 43 arranged on the workbench 10 and a circulation fan. The drying air generated by the circulation fan enters above the workbench 10 through the upper outer cover 40, then passes through the air passing opening 12 on the workbench and enters the lower outer cover 43 and flows back to the circulation fan to form a circulating air flow. Lifting doors 41 are arranged at both ends of the upper outer cover 40 along the transport direction of the transport device 5. When the hanging basket 9 passes through the upper outer cover 40 during the transport by the transport device 5, the lifting doors 41 are opened. During the drying process, the lifting doors 41 are closed to prevent the loss of drying air. A through hole 42 for the transport table 511 to pass through is further formed on the lifting door 41, and a blocking curtain is arranged at the through hole 42. The blocking curtain is flexible. When the transport table 511 does not transport the hanging basket 9, it can directly pass through the through hole 42 without opening the lifting door 41, improving the transmission efficiency.

[0075] Enlightened by the above ideal embodiments according to the present application, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this application. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A photovoltaic silicon wafer transmission sealing device, characterized in that, Comprising: A transport mechanism (51), a slide rail (52) disposed below the workbench (10), a driving member (53) for driving the transport mechanism (51) to move on the slide rail (52), and a blocking mechanism for blocking the transport groove (11) on the workbench (10). The transport mechanism (51) passes through the transport groove (11) and is provided with a transport platform (511) for carrying the hanging basket (9) at the top. The transport platform (511) is located above the workbench (10). The transport mechanism (51) can also drive the transport platform (511) to lift so as to place the hanging basket (9) on the transport platform (511) onto the hanging basket fixing seat (6) or take the hanging basket (9) off the hanging basket fixing seat (6); The blocking mechanism includes: a pulley assembly (54) disposed inside the bottom frame of the workbench (10), and a shielding belt (55) capable of moving on the pulley assembly (54). The shielding belt (55) is respectively an upper shielding portion (551) and a lower shielding portion (552) according to being located above and below the pulley assembly (54). The upper shielding portion (551) can move together with the transport mechanism (51) and is always located below the transport groove (11).

2. The photovoltaic silicon wafer transfer sealing device according to claim 1, wherein, A support plate (56) is further disposed at the bottom of the upper shielding portion (551) and / or the lower shielding portion (552) to support the upper shielding portion (551) and / or the lower shielding portion (552).

3. The photovoltaic silicon wafer transfer sealing device according to claim 1, wherein The transport mechanism (51) includes a slide table (510) disposed on the slide rail (52), a lifting driving member (512) disposed on the slide table (510), a horizontal mounting plate (513) disposed on the lifting driving member (512), a vertical mounting plate (514) disposed on the horizontal mounting plate (513) and passing through the transport groove (11), a transport platform (511) disposed on the vertical mounting plate (514) and located above the workbench (10). A sliding member (553) capable of freely sliding and located below the workbench (10) is disposed on the vertical mounting plate (514). The upper shielding portion (551) is connected to both ends of the sliding member (553), and the upper shielding portion (551) tensions the sliding member (553) so that the sliding member (553) is at a stable height.

4. The photovoltaic silicon wafer transmission sealing device according to claim 3, wherein, A vertical mounting plate (514) is disposed above one side of the horizontal mounting plate (513), and the lower shielding portion (552) passes through below. The other side is slidably connected to the slide table (510) through a slide bar (516).

5. The photovoltaic silicon wafer transmission sealing device according to claim 4, wherein, A linear bearing is disposed on the slide table (510), and the top end of the slide bar (516) is fixed to the lower part of the vertical mounting plate (514) and extends into the linear bearing.

6. The photovoltaic silicon wafer transmission sealing device according to claim 1, wherein, The pulley assembly (54) includes a mounting seat (541), a first pulley (542) and a second pulley (543) disposed on the mounting seat (541) and arranged in the height direction.

7. The photovoltaic silicon wafer transfer sealing device according to claim 3, wherein, The lifting driving member (512) is a cylinder.

8. The photovoltaic silicon wafer transfer sealing device according to claim 1, wherein, The driving member (53) is a motor.

9. The photovoltaic silicon wafer transfer sealing device according to claim 3, characterized in that, Fixing strips (5111) are respectively disposed on both sides of the transport platform (511), and positioning grooves (5112) are disposed on the fixing strips (5111).

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