Focusing lens protection structure

Abstract

The embodiment of the utility model discloses a focus lens protection structure which comprises a focus lens and a protection cylinder arranged on the light-emitting side of the focus lens, one end of the protection cylinder is a light inlet, the other end of the protection cylinder is a light outlet, the light inlet is connected to the focus lens, and the diameter of the light outlet is smaller than that of the light inlet. According to the focus lens protection structure, the focus lens is isolated from the machining environment through the arrangement of the protection cylinder, slag and impurities are prevented from making direct contact with the focus lens, the slag and the impurities entering the protection cylinder from the light outlet can slide down along the inner wall of the protection cylinder under the action of gravity, the cleaning and maintenance frequency of the focus lens is reduced, and the service life of the focus lens is prolonged. Therefore, the service life of the focus lens is prolonged, and meanwhile, as the focus lens is prevented from being polluted, the output of laser energy is kept stable, so that the processing quality and efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser equipment, in particular to a focusing lens protection structure. Background Art

[0002] In the field of wafer processing, the vulnerability of the wafer surface layer and its insufficient adhesion to the silicon-based material make the surface layer prone to delamination and cracking. When using traditional diamond blades for mechanical cutting, these problems are particularly prominent, often resulting in delamination and microcracks in the chip, seriously affecting the product quality. To overcome this problem, the industry has adopted a laser process to pre-treat the wafer cutting channels. This process uses laser energy to precisely burn through the surface layer of the cutting channel to form a specific groove structure, thus avoiding the delamination and cracking problems that may occur during mechanical cutting.

[0003] However, as Figures 1 to 4 shown, in the current application of laser grooving equipment, there is a significant problem. During the laser grooving process, the molten slag on the surface layer may rise and contaminate the focusing lens during the discharge process. This not only requires frequent cleaning and maintenance of the focusing lens, but may even require replacement, thus greatly shortening the service life of the focusing lens. More seriously, when the focusing lens is severely contaminated, the output of laser energy will be affected, which may lead to a serious decline in product quality and an increase in the defective rate. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a focusing lens protection structure to solve the problems that during the existing laser grooving process, the molten slag on the surface layer may rise and contaminate the focusing lens during the discharge process. This not only requires frequent cleaning and maintenance of the focusing lens, but may even require replacement, thus greatly shortening the service life of the focusing lens. More seriously, when the focusing lens is severely contaminated, the output of laser energy will be affected, which may lead to a serious decline in product quality and an increase in the defective rate.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An embodiment of the utility model provides a focusing lens protection structure, which includes: a focusing lens, and a protection cylinder arranged on the light-emitting side of the focusing lens. One end of the protection cylinder is a light inlet, and the other end is a light outlet. The light inlet is connected to the focusing lens, and the diameter of the light outlet is smaller than that of the light inlet.

[0007] As a preferred technical solution of the utility model, the focusing lens is coaxial with the light inlet and the light outlet.

[0008] As a preferred technical solution of the present utility model, the light inlet has the same diameter as the focusing lens.

[0009] As a preferred technical solution of the present utility model, the protective cylinder is a conical structure with a gradually decreasing diameter from the light inlet towards the light outlet direction.

[0010] As a preferred technical solution of the present utility model, the light inlet is threadedly connected to the focusing lens or connected to the focusing lens by a snap connection.

[0011] As a preferred technical solution of the present utility model, it further includes a blowing device. An air inlet hole is provided on the protective cylinder, and the blowing device is communicated with the air inlet hole.

[0012] As a preferred technical solution of the present utility model, the air inlet hole inclines towards the light outlet side in the direction towards the inside of the protective cylinder.

[0013] As a preferred technical solution of the present utility model, the blowing device and the air inlet hole are communicated through an air pipe.

[0014] As a preferred technical solution of the present utility model, the number of the air inlet holes is at least two.

[0015] As a preferred technical solution of the present utility model, all the air inlet holes are evenly arranged circumferentially at any point on the central axis of the protective cylinder.

[0016] Compared with the prior art, for the focusing lens protection structure of the present utility model, by arranging the protective cylinder to isolate the focusing lens from the processing environment, it avoids the direct contact of molten slag and impurities with the focusing lens. The molten slag and impurities entering the protective cylinder from the light outlet can slide down along the inner wall of the protective cylinder under the action of gravity, reducing the cleaning and maintenance frequency of the focusing lens, increasing the service life of the focusing lens. At the same time, since the pollution of the focusing lens is avoided, the output of laser energy is kept stable, thereby improving the processing quality and efficiency.

[0017] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given and described in detail as follows. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 It is the front view of the existing focusing lens structure;

[0020] Figure 2 It is the top view of the existing focusing lens structure;

[0021] Figure 3 It is Figure 2 the A-A sectional view of

[0022] Figure 4 It is the schematic diagram of the working process of the existing focusing lens structure;

[0023] Figure 5 It is the front view of a focusing lens protection structure of the present utility model;

[0024] Figure 6 It is the top view of a focusing lens protection structure of the present utility model

[0025] Figure 7 It is Figure 6 the B-B sectional view of

[0026] Figure 8 It is the schematic diagram of the working process of a focusing lens protection structure of the present utility model.

[0027] Explanation of the markings in the figure:

[0028] 1. Focusing lens; 2. Protection cylinder; 21. Light inlet; 22. Light outlet; 3. Air pipe; 4. Air inlet; 5. Exhaust duct; 6. Wafer; 61. Sawing lane. Detailed implementation manners

[0029] In order to make the purpose, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with the drawings and specific implementation manners.

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present utility model.

[0031] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is the orientation or positional relationship based on the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0033] In the present utility model, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "connected to", "fixed" and the like should be understood in a broad sense. For example, it may be a connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0035] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0036] In the field of wafer 6 processing, the vulnerability of the surface layer of the wafer 6 and its insufficient adhesion to the silicon-based material make the surface layer of the wafer 6 extremely prone to delamination and cracking. When traditional diamond blades are used for mechanical cutting, these problems are particularly prominent, often resulting in delamination and microcracks in the chip, seriously affecting the product quality. To overcome this problem, the industry has adopted a laser process to pre-treat the cutting channel 61 of the wafer 6. This process uses laser energy to accurately burn through the surface layer of the cutting channel 61 to form a specific groove structure, thereby avoiding the delamination and cracking problems that may occur during mechanical cutting.

[0037] Please refer to Figures 1 to 4 , in the current application of laser grooving equipment, in order to avoid the slag on the surface layer of the wafer 6 affecting the laser cutting of the cutting channel 61, an exhaust device and an exhaust duct 5 are often provided beside. The air blown by the exhaust device acts on the slag on the surface layer of the wafer 6 to carry it to the exhaust duct 5 for discharge. Under ideal conditions, the slag on the surface layer of the wafer 6 can be smoothly blown to the exhaust duct 5 and discharged. However, during the actual working process, the slag on the surface layer of the wafer 6 may rise through the air inlet 4 formed between the focusing lens 1 and the wafer 6 and contaminate the focusing lens 1. This not only requires frequent cleaning and maintenance of the focusing lens 1, but may even require replacement, thus greatly shortening the service life of the focusing lens 1. More seriously, when the focusing lens 1 is severely contaminated, the output of laser energy will be affected, which may further lead to a serious decline in product quality and an increase in the defective rate.

[0038] Please refer to Figures 5 to 8 , an embodiment of the present utility model discloses a focusing lens protection structure, which includes: a focusing lens 1, and a protection cylinder 2 provided on the light-emitting side of the focusing lens 1. One end of the protection cylinder 2 is a light inlet 21, and the other end is a light outlet 22. The light inlet 21 is connected to the focusing lens 1, and the diameter of the light outlet 22 is smaller than that of the light inlet 21.

[0039] In this embodiment, the laser beam enters the light inlet 21 of the protection cylinder 2 through the focusing lens 1, and then is transmitted along the inside of the protection cylinder 2 to the light outlet 22. The presence of the protection cylinder 2 isolates the focusing lens 1 from the processing environment, avoiding direct contact between the molten slag and impurities and the focusing lens 1. At the same time, the molten slag and impurities entering the protection cylinder 2 slide down along the conical inner wall of the protection cylinder 2 under the action of air flow or gravity, avoiding contamination of the focusing lens 1.

[0040] Furthermore, the focusing lens 1 is coaxial with the light inlet 21 and the light outlet 22. The coaxial design reduces the energy loss of the laser beam during transmission, enabling the laser energy to be more fully utilized in the processing, ensuring that the laser beam can accurately and efficiently reach the target processing area, and improving the processing efficiency.

[0041] Furthermore, the diameter of the light inlet 21 is the same as that of the focusing lens 1. Since the diameter of the light inlet 21 is the same as that of the focusing lens 1, when the laser beam enters the protection cylinder 2 through the light inlet 21, there will be no refraction or scattering due to the difference in aperture, thus ensuring the integrity and energy concentration of the laser beam.

[0042] Furthermore, the protection cylinder 2 is a conical structure with a gradually decreasing diameter from the light inlet 21 to the light outlet 22. The conical structure forms an inclined downward guiding surface inside the protection cylinder 2. When the molten slag and impurities generated during the laser processing rise and enter the protection cylinder 2 from the light outlet 22, they will slide down along the conical inner wall to the light outlet 22 and then be discharged, effectively preventing the molten slag and impurities from contaminating the focusing lens 1.

[0043] Specifically, the light inlet 21 is threadedly connected to the focusing lens 1 or connected to the focusing lens 1 by a snap connection. It can be understood that when the light inlet 21 is threadedly connected to the focusing lens 1, matching threads are provided on the light inlet 21 and the focusing lens 1, and by rotating the protection cylinder 2, the thread of its light inlet 21 is tightly connected to the thread of the focusing lens 1. When the light inlet 21 is connected to the focusing lens 1 by a snap connection, a matching snap structure is provided at the light inlet 21 of the protection cylinder 2 and on the focusing lens 1, and the focusing lens 1 is fixed at the light inlet 21 by the snap. Both the threaded connection and the snap connection are detachable connections. When it is necessary to maintain the focusing lens 1, the protection cylinder 2 can be removed to maintain the focusing lens 1.

[0044] In one embodiment, the focusing lens protection structure further includes a blowing device. An air inlet hole is formed on the protection cylinder 2, and the blowing device is communicated with the air inlet hole. Generally, the air inlet hole is located on the side of the protection cylinder 2 close to the light inlet 21 so that air can enter the inside of the protection cylinder 2 evenly. When external slag and impurities enter the protection cylinder 2 through the light outlet 22, air is blown into the inside of the protection cylinder 2 through the blowing device, which can effectively blow the slag and impurities away from the focusing lens 1 and keep the inside of the protection cylinder 2 clean. At the same time, during the laser processing, the focusing lens 1 may heat up due to long-term operation. Excessive temperature may affect the performance and service life of the focusing lens 1. The air flow brought by the blowing device can play a certain cooling role and extend the service life of the focusing lens 1.

[0045] Furthermore, the air inlet hole is inclined toward the light outlet 22 in the direction into the protection cylinder 2. The inclined air inlet hole design enables the blown air flow to have a certain directivity. Under the action of the air flow, the slag and impurities generated during the laser processing are guided to the light outlet 22 and finally discharged outside the protection cylinder 2. Moreover, since the air flow flows downward along the inner wall, it can take away the heat around the focusing lens 1, play a certain cooling role, help reduce the temperature of the focusing lens 1, and extend its service life.

[0046] Furthermore, the blowing device and the air inlet hole are communicated through a trachea 3. By connecting the blowing device and the air inlet hole through the trachea 3, it is ensured that the air flow is stably and effectively transmitted into the protection cylinder 2, effectively discharging the slag and impurities outside the protection cylinder 2, keeping the focusing lens 1 clean, and thus improving the processing accuracy and quality.

[0047] Furthermore, at least two air inlet holes are provided. Specifically, all the air inlet holes are evenly arranged in the circumferential direction at any point on the central axis of the protection cylinder 2.

[0048] It can be understood that by setting multiple air inlet holes and arranging them evenly in the circumferential direction, it can be ensured that the air flow is more evenly distributed inside the protection cylinder 2, which helps to more effectively blow the slag and impurities away from around the focusing lens 1 and keep it clean. It should be noted that multiple air inlet holes can receive the air flow generated by the blowing device at the same time, introduce clean air into the protection cylinder 2, form an air curtain protection in front of the focusing lens 1, and effectively block the pollution of the focusing lens 1 by the slag.

[0049] Compared with the prior art, the focusing lens protection structure of the present utility model isolates the focusing lens from the processing environment by setting a protection cylinder, avoiding direct contact between the slag and impurities and the focusing lens. The slag and impurities entering the protection cylinder from the light outlet can slide along the inner wall of the protection cylinder under the action of gravity, reducing the cleaning and maintenance frequency of the focusing lens, increasing the service life of the focusing lens. At the same time, since the pollution of the focusing lens is avoided, the output of the laser energy is kept stable, thereby improving the processing quality and efficiency.

[0050] As described above, it is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A focusing lens protection structure, characterized in that, Comprising: A focusing lens, and a protective cylinder disposed on the light-emitting side of the focusing lens. One end of the protective cylinder is a light inlet, and the other end is a light outlet. The light inlet is connected to the focusing lens, and the diameter of the light outlet is smaller than that of the light inlet.

2. The focusing lens protection structure according to claim 1, characterized in that, The focusing lens is coaxial with the light inlet and the light outlet.

3. The focusing lens protection structure according to claim 1, wherein The diameter of the light inlet is the same as that of the focusing lens.

4. A focusing lens protection structure according to claim 1, wherein, The protective cylinder is a conical structure with a gradually decreasing diameter from the light inlet to the light outlet.

5. The focusing lens protection structure according to claim 1, characterized in that, The light inlet is threadedly connected to the focusing lens or connected to the focusing lens by a buckle.

6. The focusing lens protection structure according to claim 1, characterized in that, It further includes a blowing device. An air inlet hole is formed on the protective cylinder, and the blowing device is communicated with the air inlet hole.

7. The focusing lens protection structure according to claim 6, wherein The air inlet hole is inclined toward the light outlet side in the direction toward the inside of the protective cylinder.

8. The focusing lens protection structure according to claim 6, characterized in that, The blowing device and the air inlet hole are communicated through a trachea.

9. The focusing lens protection structure according to claim 6, wherein, The number of the air inlet holes is at least two.

10. The focusing mirror protection structure according to claim 9, wherein All the air inlet holes are evenly arranged circumferentially at any point on the central axis of the protective cylinder.

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