Bottle opening sealing assembly, liquid taking device and semiconductor liquid changing equipment

Abstract

The utility model discloses a bottle opening sealing assembly, a liquid taking device and semiconductor liquid changing equipment, and relates to the technical field of semiconductor production, and the bottle opening sealing assembly comprises a sealing piece and a locking mechanism; a side wall for the bottle opening to movably extend into is annularly arranged on the sealing piece; the side wall has elastic deformation; the locking mechanism is connected with the side wall and used for applying at least two acting forces in opposite directions to the peripheral surface of the side wall, so that the side wall is tightly pressed on the peripheral surface of the bottle opening. Through the design, when the type of the reagent bottle is replaced and the size of the bottle opening is changed, a corresponding matched bottle cap does not need to be replaced as before, so that the use flexibility is greatly improved. And special bottle caps do not need to be customized for each bottle opening size, so that the types and the number of customized bottle caps are reduced, and the cost is effectively reduced. And the operation of the equipment does not need to be stopped due to bottle cap replacement as before. And the interruption of equipment operation is avoided, so that the production process is smoother, and the efficiency of the production process is further improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor production technology, and particularly to a bottle mouth sealing assembly, a liquid extractor, and a semiconductor liquid changing device. Background Art

[0002] In the process of semiconductor manufacturing, the wet process is a crucial link, which involves the use of various chemical reagents, such as cleaning agents, etching agents, and deionized water. During the use of these chemical reagents, their effective components will be consumed due to chemical reactions, resulting in a decrease in the reagent concentration, which in turn affects the cleaning and etching effects, and ultimately affects the manufacturing quality of the wafers. Therefore, in order to ensure the stability of the manufacturing process and the quality of the products, it is necessary to regularly replace the consumed reagents.

[0003] Traditionally, the liquid changing process requires manual intervention, which is not only time-consuming and laborious, but also increases the production cost. With the development of automation technology, automatic liquid changing systems have gradually been introduced to improve efficiency and reduce labor costs. For example, the patent publication number CN222883508U discloses a reagent placement assembly, a wet bench, and an automatic liquid changing system. This system operates through a manipulator to disconnect the connection between the bottle cap with a liquid extraction tube and the reagent bottle to be replaced, and transfer it to a new reagent bottle for reconnection, thereby realizing automatic liquid changing. However, the bottle cap design in this system is only applicable to bottle mouths of specific sizes. When the type of reagent bottle is changed (i.e., the bottle mouth size changes), the corresponding matching bottle cap must be replaced, which limits the flexibility of use. At the same time, a dedicated bottle cap needs to be customized for each bottle mouth size, resulting in an increase in cost. In addition, the process of replacing the bottle cap also requires the equipment to stop running, which further affects the efficiency of the production process.

[0004] Therefore, there is an urgent need to provide a new design solution to solve the above problems. Summary of the Utility Model

[0005] In view of this, the purpose of this application is to provide a bottle mouth sealing assembly, a liquid extractor, and a semiconductor liquid changing device, which can adapt to the sealing requirements of bottle mouths of various sizes, have high flexibility in use, low cost, and ensure the efficiency of the production process.

[0006] To achieve the above technical purpose, this application provides a bottle mouth sealing assembly, including a sealing member and a locking mechanism;

[0007] The sealing member is provided with a side surround for the bottle mouth to extend into movably;

[0008] The side surround has elastic deformation;

[0009] The locking mechanism is connected to the side surround and is used to apply at least two opposite forces to the outer peripheral surface of the side surround to press the side surround against the outer peripheral surface of the bottle mouth.

[0010] Further, a plunger portion capable of extending into the bottle mouth is provided at the bottom of the seal;

[0011] The plunger portion is in an inverted frustum shape;

[0012] The side surround is arranged around the plunger portion, and its height is not less than the height of the plunger portion.

[0013] Further, the locking assembly includes a fixed frame and a pressing member;

[0014] The fixed frame is sleeved outside the side surround;

[0015] The first side of the fixed frame abuts against the side surround;

[0016] A threaded through hole is provided on the second side of the fixed frame opposite to the first side;

[0017] The pressing member passes through the threaded through hole and is threadedly connected to the threaded through hole;

[0018] One end of the pressing member extending into the fixed frame abuts against the side surround.

[0019] Further, a contact head is rotatably connected to one end of the pressing member extending into the fixed frame;

[0020] The contact head abuts against the side surround.

[0021] Further, a first anti-slip pad is provided at one end of the contact head contacting the side surround.

[0022] Further, an operating head is connected to the other end of the pressing member.

[0023] Further, the operating head is a ring head.

[0024] Further, an arc-shaped recess fitting the side surround is provided on the inner side surface of the first side.

[0025] Further, a second anti-slip pad is provided on the arc-shaped recess.

[0026] The present application also discloses a liquid extractor, including a liquid extraction tube, an exhaust pipe, and the bottle mouth sealing assembly as described above;

[0027] A liquid extraction channel and an exhaust channel penetrating through itself are provided on the seal of the bottle mouth sealing assembly;

[0028] The liquid extraction tube communicates with the liquid extraction channel or penetrates through the liquid extraction channel;

[0029] The exhaust pipe communicates with the exhaust channel or penetrates through the exhaust channel.

[0030] The present application also discloses a semiconductor liquid changing device, including a manipulator and the liquid extractor described above;

[0031] The manipulator is used to transfer the liquid extractor among different liquid medicine bottles.

[0032] As can be seen from the above technical solutions, the bottle mouth sealing assembly of the present application has the following beneficial effects:

[0033] The designed locking mechanism cooperates with the side wall with elastic deformation. After bottle mouths of different sizes are inserted, by applying two opposite acting forces through the locking mechanism, the side wall can be pressed against the outer peripheral surface of the bottle mouth, so that the seal can be fixed on bottle mouths of different sizes, ensuring the sealing effect. Through the above design, when the types of reagent bottles are replaced and the sizes of bottle mouths are changed, there is no need to replace the corresponding matching bottle caps as before, greatly improving the flexibility of use. There is no longer a need to customize exclusive bottle caps for each bottle mouth size, reducing the types and quantities of bottle cap customization, thereby effectively reducing costs. Moreover, there is no need to stop the operation of the device due to replacing the bottle cap as before. Avoiding the interruption of device operation makes the production process smoother and further improves the efficiency of the production process. Description of the Drawings

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0035] Figure 1 It is a three-dimensional view of a bottle mouth sealing assembly provided in the present application;

[0036] Figure 2 It is a cross-sectional view of a bottle mouth sealing assembly provided in the present application;

[0037] Figure 3 It is a three-dimensional view of a bottle mouth sealing assembly assembled on a reagent bottle provided in the present application;

[0038] In the figure: 1. Seal; 11. Side wall; 12. Plunger part; 2. Locking mechanism; 21. Fixed frame; 211. First side; 212. Second side; 213. Arc-shaped depression; 214. Threaded through hole; 22. Tightening member; 23. Contact head; 24. Operating head; 3. Reagent bottle; 31. Bottle mouth. Detailed Embodiments

[0039] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the embodiments of the present application.

[0040] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0041] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0042] The embodiments of the present application disclose a bottle mouth sealing assembly, a liquid extractor, and a semiconductor liquid changing device.

[0043] Please refer to Figure 1 and Figure 3 , an embodiment of a bottle mouth sealing assembly provided in the specific implementation manner of the present application includes:

[0044] A seal 1 and a locking mechanism 2.

[0045] A side surround 11 is provided on the seal 1 for the bottle mouth 31 to extend into movably, and can form a sealing cover structure with the side surround 11.

[0046] The side surround 11 has elastic deformation. The side surround 11 can be integrally formed with the seal 1 or fixed by other connection methods without limitation.

[0047] The locking mechanism 2 is connected to the side surround 11 and is used to apply at least two opposite forces to the outer peripheral surface of the side surround 11 to press the side surround 11 against the outer peripheral surface of the bottle mouth 31.

[0048] The bottle mouth sealing assembly of the present application has the following beneficial effects:

[0049] The designed locking mechanism 2 cooperates with the side wall 11 with elastic deformation. After bottle mouths 31 of different sizes are inserted, by applying two opposite acting forces through the locking mechanism 2, the side wall 11 can be pressed against the outer peripheral surface of the bottle mouth 31, so that the seal 1 can be fixed on bottle mouths 31 of different sizes, ensuring the sealing effect. Through the above design, when the type of reagent bottle 3 is changed and the size of the bottle mouth 31 is changed, there is no need to replace the corresponding matching bottle cap as before, which greatly improves the flexibility of use. There is no longer a need to customize exclusive bottle caps for each size of the bottle mouth 31, reducing the types and quantities of bottle cap customization, thereby effectively reducing costs. Moreover, there is no need to stop the equipment operation due to replacing the bottle cap as before. The interruption of equipment operation is avoided, making the production process smoother and further improving the efficiency of the production process.

[0050] The above is Embodiment 1 of a bottle mouth sealing assembly provided by an embodiment of the present application. The following is Embodiment 2 of a bottle mouth sealing assembly provided by an embodiment of the present application. For details, please refer to Figures 1 to 3 .

[0051] Based on the solution of the above Embodiment 1:

[0052] Furthermore, as Figure 3 shown, the sealing method of the seal 1 can be that the bottom of the seal 1 covers the bottle mouth 31. By designing the diameter of the seal 1 to be relatively larger, it can be adapted to the sealing of bottle mouths 31 with some sizes smaller than its own diameter. However, this direct capping sealing method may have problems with poor sealing effect. Therefore, in order to further solve the possible problems, as Figure 2 shown, the present application adds a plunger portion 12 that can extend into the bottle mouth 31 at the bottom of the seal 1. The plunger portion 12 is in the shape of an inverted frustum of a cone, so that it can be inserted into bottle mouths 31 of various size specifications. This plugging sealing method has a larger contact area with the bottle mouth 31 compared to the capping sealing method, and thus can achieve a better sealing effect.

[0053] The side wall 11 is arranged around the plunger portion 12, and the height is not less than the height of the plunger portion 12.

[0054] With such a design, even if the bottle mouth 31 has a certain depth, it can ensure the effective pressing of the side wall 11 against the bottle mouth 31, further improving the sealing effect.

[0055] Furthermore, as Figure 1 and Figure 2 shown, for the design of the locking assembly, it includes a fixed frame 21 and a top pressing member 22.

[0056] The fixing frame 21 is sleeved outside the side wall 11; the first side 211 of the fixing frame 21 abuts against the side wall 11; a threaded through hole 214 is provided on the second side 212 of the fixing frame 21 which is oppositely arranged to the first side 211; the tightening member 22 passes through the threaded through hole 214 and is threadedly connected to the threaded through hole 214; one end of the tightening member 22 extending into the fixing frame 21 abuts against the side wall 11.

[0057] When the tightening member 22 is rotated, the tightening member 22 will perform a linear motion along the threaded through hole 214, and then push the side wall 11 to be pressed towards the bottle mouth 31, or pull the side wall 11 to move away from the bottle mouth 31, so as to realize the pressing or loosening of the side wall 11. Through such a design, the user can conveniently adjust the locking degree according to actual needs, ensuring that the sealing assembly can achieve an ideal sealing effect on bottle mouths 31 of different sizes.

[0058] The fixing frame 21 can be in shapes such as square, circular, etc., without specific limitation. In order to realize the fixed connection between the fixing frame 21 and the seal 1 and prevent the fixing frame 21 from falling off, a fixing cross bar can be additionally designed at the top of the fixing frame 21, and the fixing cross bar is fixedly connected to the top of the seal 1. Of course, it is also possible not to additionally set a fixed structure, and through the abutting cooperation of the first side surface and the tightening member 22 with the side wall 11, the fixed cooperation between the fixing frame 21 and the seal 1 can be realized.

[0059] Further, as Figure 1 and Figure 2 shown, a contact head 23 (not shown in the figure) is rotatably connected to one end of the tightening member 22 extending into the fixing frame 21; the contact head 23 abuts against the side wall 11.

[0060] The design of the contact head 23 will not rotate due to the rotation of the tightening member 22, and still remains relatively stationary with respect to the side wall 11, reducing rotational wear. But it can move axially along with the tightening member 22, so as to press the side wall 11 against the outer peripheral surface of the bottle mouth 31.

[0061] Further, a first anti-slip pad (not shown in the figure) is provided at one end of the contact head 23 in contact with the side wall 11. The setting of the first anti-slip pad can increase the friction force between the contact head 23 and the side wall 11, prevent the contact head 23 from sliding during the process of pressing the side wall 11, ensure that the locking mechanism 2 can stably apply a force to the side wall 11, and improve the sealing effect.

[0062] Further, in order to facilitate the user to operate the tightening member 22, an operation head 24 is connected to the other end of the tightening member 22. The shape of the operation head 24 can be hexagonal, polygonal or other shape structures convenient for a mechanical hand to hold and rotate, so that the mechanical hand or the operator can easily rotate the tightening member 22 to realize the pressing or loosening of the side wall 11.

[0063] Preferably, the operating head 24 is a lifting ring head. The design of the lifting ring head not only facilitates the operator to hold and rotate but also facilitates the manipulator to grasp and rotate the fastening member 22.

[0064] Furthermore, as Figure 1 shown, in order to further improve the matching degree between the fixing frame 21 and the side wall 11, an arc-shaped recess 213 that fits the side wall 11 is provided on the inner side surface of the first side edge 211. The design of the arc-shaped recess 213 can increase the contact area between the first side edge 211 and the side wall 11, improve the matching degree, so as to better press the side wall 11 against the outer peripheral surface of the bottle mouth 31 and enhance the connection stability of the seal 1.

[0065] Preferably, a second anti-slip pad (not shown in the figure) is provided on the arc-shaped recess 213. The setting of the second anti-slip pad can increase the friction between the arc-shaped recess 213 and the side wall 11, prevent the fixing frame 21 from sliding during the process of pressing the side wall 11, and enhance the pressing effect.

[0066] The present application also discloses a liquid transfer device, including a liquid transfer tube (not shown in the figure), an exhaust pipe (not shown in the figure), and a bottle mouth sealing assembly.

[0067] On the seal 1 of the bottle mouth sealing assembly, there is a liquid transfer channel and an exhaust channel passing through itself; the liquid transfer tube is communicated with the liquid transfer channel or passes through the liquid transfer channel; the exhaust pipe is communicated with the exhaust channel or passes through the exhaust channel.

[0068] The present application also discloses a semiconductor liquid changing device, including a manipulator and a liquid transfer device; the manipulator is used to transfer the liquid transfer device among different liquid medicine bottles. The specific liquid changing process is as follows: The manipulator grabs the operating head 24 of the fastening member 22, then rotates the fastening member 22 to release the pressing of the side wall 11 on the bottle mouth 31, then pulls out the seal 1 from the position of the bottle mouth 31, and then moves to the bottle mouth 31 of a new liquid medicine bottle, and then installs and rotates the fastening member 22 to make the side wall 11 press the bottle mouth 31, so as to realize the sealing and fixing of the seal 1.

[0069] The above has introduced in detail a bottle mouth sealing assembly, a liquid transfer device, and a semiconductor liquid changing device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A bottle mouth sealing assembly, characterized in that, It comprises a sealing member (1) and a locking mechanism (2); The upper ring of the sealing member (1) is provided with a side rim (11) for the bottle mouth (31) to movably extend into; The side panels (11) have elastic deformation; The locking mechanism (2) is connected to the side wall (11) and is used to apply at least two forces in opposite directions to the outer peripheral surface of the side wall (11) so as to press the side wall (11) against the outer peripheral surface of the bottle mouth (31).

2. The bottle mouth sealing assembly according to claim 1, characterized in that, The bottom of the sealing member (1) is provided with a plunger portion (12) capable of extending into the bottle mouth (31); The plunger portion (12) is in the shape of an inverted frustum; The side circumference (11) is arranged around the plunger portion (12), and its height is not less than the height of the plunger portion (12).

3. The bottle mouth sealing assembly according to claim 1, characterized in that, The locking assembly comprises a fixing frame (21) and a tightening member (22); The fixing frame (21) is sleeved outside the side wall (11); The first side edge (211) of the fixing frame (21) abuts against the side perimeter (11); A threaded through hole (214) is provided on a second side (212) of the fixing frame (21) that is arranged opposite to the first side (211); The tightening member (22) passes through the threaded through hole (214) and is threadedly connected to the threaded through hole (214); One end of the pressing member (22) extends into the fixing frame (21) and abuts against the side panel (11).

4. The bottle mouth sealing assembly according to claim 3, characterized in that: One end of the tightening member (22) extending into the fixing frame (21) is rotatably connected to an abutment joint (23); The abutment head (23) abuts against the side panel (11).

5. The bottle mouth sealing assembly according to claim 4, characterized in that: One end of the abutment head (23) contacting the side panel (11) is provided with a first anti-slip pad.

6. The bottle mouth sealing assembly according to claim 3, characterized in that: The other end of the tightening member (22) is connected to an operating head (24).

7. The bottle mouth sealing assembly according to claim 6, characterized in that: The operating head (24) is a lifting ring head.

8. The bottle mouth sealing assembly according to claim 3, characterized in that: The inner side surface of the first side edge (211) is provided with an arc-shaped recess (213) that fits the side rim (11).

9. The bottle mouth sealing assembly according to claim 8, wherein, A second anti-slip pad is provided on the arc-shaped recess (213).

10. A liquid dispenser, characterized in that: It comprises a liquid extraction pipe, an exhaust pipe and a bottle mouth sealing assembly according to any one of claims 1 to 9; The sealing member (1) of the bottle mouth sealing assembly is provided with a liquid taking channel and an exhaust channel running through the sealing member; The liquid collection tube is connected to the liquid collection channel, or passes through the liquid collection channel; The exhaust pipe is connected to the exhaust passage or passes through the exhaust passage.

11. Semiconductor liquid changing equipment, characterized in that, comprising a manipulator and a liquid dispenser as claimed in claim 10; The manipulator is used to transfer the liquid extractor between different medicine liquid bottles.

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