Discharge cavity structure and chemical vapor deposition equipment

Abstract

The utility model provides a discharge cavity structure and chemical vapor deposition equipment, and belongs to the field of chemical vapor deposition equipment. The discharge cavity structure comprises a cavity body, a sample table and a cooling container, wherein the cavity body comprises a bottom plate; the sample table is arranged in the cavity and is used for placing a substrate to be coated; the cooling container is arranged below the sample table and is hermetically connected with the bottom plate or the bottom of the sample table; the cooling container is used for containing a cooling medium, and the cooling medium in the cooling container can directly cool the bottom of the sample table. A water spraying assembly is further arranged in the cooling container and can spray water to the bottom of the sample table. When the temperature of the sample table is higher than a preset temperature threshold value, cooling in a flowing water soaking manner; when the temperature of the sample table is lower than the preset temperature threshold value, spraying type cooling or air flow cooling or mixed cooling of the spraying type cooling and the air flow cooling is adopted, and at the moment, water resources are saved while the temperature of the sample table is controlled.

Description

Technical Field

[0001] The utility model relates to the field of chemical vapor deposition equipment, and more specifically, to a discharge chamber structure and a chemical vapor deposition equipment. Background Art

[0002] In a microwave plasma equipment, the microwave generated by a microwave generator enters a discharge chamber through a waveguide and an isolator, and a mixed gas of methane and hydrogen is introduced. Under the excitation of the microwave, discharge occurs in the discharge chamber structure. A sample stage is arranged in the discharge chamber, and a substrate is placed on the sample stage; the discharge ionizes the molecules of the reaction gas to generate plasma, and a diamond film is deposited on the substrate. Since a large amount of heat is generated by the discharge, the temperature of the sample stage is relatively high. Therefore, it is necessary to provide a discharge chamber structure capable of reducing the temperature of the sample stage. Summary of the Utility Model

[0003] An object of the utility model is to provide a discharge chamber structure which is provided with a cooling component and can effectively cool a sample stage.

[0004] Another object of the utility model is to provide a chemical vapor deposition equipment which includes the above-mentioned discharge chamber structure.

[0005] The utility model is implemented as follows:

[0006] A discharge chamber structure includes:

[0007] A cavity, the cavity including a bottom plate;

[0008] A sample stage, the sample stage being arranged in the cavity and used for placing a substrate to be coated;

[0009] A cooling container, the cooling container being arranged below the sample stage and hermetically connected to the bottom plate or the bottom of the sample stage; the cooling container is used for containing a cooling medium, and the cooling medium in the cooling container can directly cool the bottom of the sample stage;

[0010] A water spraying component is further arranged in the cooling container, the water spraying component including a water spraying head, the water spraying head being located below the sample stage and capable of spraying the bottom of the sample stage;

[0011] The cooling container is provided with a water inlet pipe, a drain pipe, an air inlet pipe and an exhaust pipe.

[0012] Furthermore, the bottom of the sample stage is a concave spherical shape, multiple groups of water spraying holes are arranged on the water spraying head, each group of water spraying holes is distributed along a circular track, and the circular track radii of different groups of water spraying holes are different.

[0013] Further, the water spraying assembly includes a plurality of water inlet channels which are respectively communicated with the plurality of groups of water spraying holes.

[0014] Further, it further includes a controller, and control valves are respectively arranged on the plurality of water inlet channels, the water inlet pipe, the drain pipe, the air inlet pipe and the exhaust pipe; the tabletop of the sample stage includes a plurality of circular loop tracks, and the centers of the plurality of loop tracks coincide with the center of the sample stage; a plurality of temperature sensors are arranged on each loop track, and the plurality of temperature sensors are used for detecting the temperature of the sample stage;

[0015] The controller can control the opening degree of the corresponding control valve according to the data of the plurality of temperature sensors.

[0016] Further, among the plurality of loop tracks, the distance between adjacent loop tracks is equal; the plurality of temperature sensors on each loop track are evenly distributed.

[0017] Further, the air inlet pipe is arranged on the side of the cooling container and is inclined so that the gas coming out of the air inlet pipe can directly reach the bottom of the sample stage.

[0018] A chemical vapor deposition device includes a power source, a microwave transmission component and the discharge cavity structure as described above, and the power source is connected to the discharge cavity structure through the microwave transmission component.

[0019] The beneficial effects of the present utility model are:

[0020] The discharge cavity structure and the chemical vapor deposition device obtained by the above design of the present utility model, when in use, adjust different cooling methods according to the temperature values of each loop track of the sample stage. When the average temperature on any loop track of the sample stage is higher than the preset temperature, the flowing water immersion cooling is adopted, and at this time, the temperature of the sample stage can be quickly reduced; when the average temperature of any loop track of the sample stage is lower than the preset temperature, the spraying cooling or the air flow cooling, or the mixed cooling of the two is adopted. At this time, while controlling the temperature of the sample stage, water resources are also saved. Description of the Drawings

[0021] Figure 1 is a schematic diagram of the discharge cavity structure provided by the embodiment of the present utility model;

[0022] Figure 2 is the bottom view of the sample stage provided by the embodiment of the present utility model in Figure 1 ;

[0023] Figure 3 is the top view of the water spray head provided by the embodiment of the present utility model in Figure 1 ;

[0024] Icon: 1- cavity; 12- bottom plate; 2- sample table; 3- cooling container; 31- water inlet pipe; 32- drain pipe; 33- air inlet pipe; 34- exhaust pipe; 41- sprinkler head; 42- mounting pipe; 43- water inlet channel, 5- water temperature sensor. DETAILED DESCRIPTION

[0025] Example 1:

[0026] This embodiment provides a discharge chamber structure comprising a chamber 1 and a sample stage 2. The chamber 1 is a generally cylindrical cavity, and the sample stage 2 is a circular plate for placing a substrate. The chamber 1 includes a base plate 12 with a mounting hole defined in the center. The sample stage 2 is located in the center of the chamber 1 and is sealed and secured in the mounting hole.

[0027] A cooling container 3 is located beneath the sample stage 2. This cylindrical structure is sealed to the bottom plate 12 at its upper end. This container is used to hold a cooling medium. Furthermore, the lower surface of the sample stage 2 is located outside the cavity 1, allowing the cooling medium within the container to directly cool the bottom of the sample stage 2.

[0028] An inlet pipe 31 and a drain pipe 32 are provided on the side wall of the cooling container 3. The inlet pipe 31 is provided in the middle or upper part of the cooling container, and the drain pipe 32 is provided in the lower part of the cooling container; and electromagnetic control valves are provided on the inlet pipe 32 and the drain pipe 32 respectively.

[0029] When immersion cooling of the sample stage 2 is required, the control valves on the water inlet pipe 31 and the drain pipe 32 are opened, and the liquid level in the cooling container 3 is allowed to rise to a level sufficient to immerse the bottom of the sample stage 2. At this point, since the cooling container 3 contains a large amount of cooling water and the water in the cooling container 3 remains flowing, the cooling water can quickly remove a large amount of heat from the sample stage 2, thereby effectively controlling the temperature of the sample stage 2.

[0030] However, since the above cooling method requires a large amount of cooling water, when the temperature of the sample stage 2 is low, if the above cooling method is used, it will inevitably cause a waste of water resources. In view of this, the discharge chamber structure provided in this embodiment has two other cooling methods, namely spray cooling and gas cooling.

[0031] Specifically, an air inlet pipe 33 and an exhaust pipe 34 are provided at the upper part of the cooling container 3. The air inlet pipe 33 is inclined such that the air outlet of the air inlet pipe 33 faces the bottom of the sample stage 2, so that the cooling gas can directly cool the sample stage 2. Electromagnetic control valves are provided on both the air inlet pipe 33 and the exhaust pipe 34, facilitating the control of the opening degrees of the air inlet pipe 33 and the exhaust pipe 34. Moreover, an exhaust fan is provided on the exhaust pipe 34, enabling the rapid flow of the cooling gas, thereby quickly taking away the heat of the sample stage 2. When gas cooling is required, the control valves on the air inlet pipe 33 and the exhaust pipe 34 are opened, and the exhaust fan is started. Additionally, instead of providing an exhaust fan on the exhaust pipe 34, a blower can be provided on the air inlet pipe 33.

[0032] To achieve spray cooling, a water spraying assembly is provided inside the cooling container 3; the water spraying assembly can spray the bottom of the sample stage 2.

[0033] Specifically, the water spraying assembly includes a water spraying head 41 and an installation pipe 42. The installation pipe 42 penetrates the bottom of the cooling container 3 and is hermetically connected to the bottom of the cooling container 3. The water spraying head 41 is fixed to the upper end of the installation pipe 42 and is generally in the shape of a lotus head, that is, the top of the water spraying head 41 is a convex spherical shape, making the middle part of the water spraying head 41 higher than the edge. When spray cooling is adopted, it avoids the accumulation of water flow in the middle of the water spraying head 41 and affects the spray effect. Multiple groups of water spraying holes are provided in the upper part of the water spraying head 41, and each group of water spraying holes is distributed along a circular track; the radii of the circular tracks of different groups of water spraying holes are different. In addition, the outer diameter of the water spraying head 41 is greater than or equal to the outer diameter of the sample stage 2, so that the water spraying head 41 can spray the entire bottom of the sample stage 2.

[0034] In this embodiment, the bottom of the sample stage 2 is a concave spherical shape. Since the bottom of the sample stage 2 is a concave spherical shape, the middle part of the sample stage 2 is thinner and the edge is thicker. Since the middle part of the sample stage 2 generates more heat, making the middle part of the sample stage 2 thinner is beneficial to the uniformity of the overall temperature of the sample stage 2 and also increases the heat dissipation area, thus being beneficial to improving the coating quality.

[0035] Furthermore, a plurality of water inlet channels 43 are provided inside the installation pipe 42. One ends of the plurality of water inlet channels 43 are respectively communicated with the corresponding groups of water spraying holes, and the other ends are respectively connected to the corresponding water pumps; control valves are provided on each water inlet channel 43, enabling the water volume on each water inlet channel 43 to be individually controlled.

[0036] In addition, for the convenience of automatic control, a controller is also provided. The sample stage 2 includes a plurality of circular tracks, which are concentric circles with different radii, and the centers of the plurality of circular tracks coincide with the center of the sample stage. A plurality of temperature sensors are provided on each circular track, and the plurality of temperature sensors are evenly distributed to detect the temperatures at different positions of the circular track. Moreover, the plurality of circular tracks correspond one-to-one to the spraying positions of the plurality of groups of water spraying holes. A water temperature sensor 5 is also provided in the cooling container 3, and both the water temperature sensor 5 and the temperature sensors on the sample stage 2 are electrically connected to the controller.

[0037] In this embodiment, the bottom spherical surface of the sample stage 2 and the upper spherical surface of the water spraying head 41 are concentrically arranged, which can enable the water coming out of the water spraying head 41 to directly spray vertically on the corresponding circular track at the bottom of the sample stage 2, and thus can also improve the cooling effect to a certain extent.

[0038] It should be noted that, in other embodiments, the bottom of the sample stage 2 can also be a circular plate; or, different groups of water spraying holes can also share one water inlet channel.

[0039] Embodiment 2:

[0040] This embodiment provides a chemical vapor deposition device, which includes a power source, a microwave transmission component, and the discharge chamber structure provided in Embodiment 1. The power source is connected to the discharge chamber structure through the microwave transmission component. Since the power source and the microwave transmission component can be directly purchased, they will not be described in detail herein.

[0041] Embodiment 3:

[0042] This embodiment provides a method for using the discharge chamber structure, which is based on the chemical vapor deposition device provided in Embodiment 2, and is specifically as follows:

[0043] Start the chemical vapor deposition device. At this time, the temperature sensors detect the temperature of the corresponding circular track of the sample stage 2 in real time and transmit the data to the controller; the controller calculates the average value of the detection values of the temperature sensors on each circular track.

[0044] When the average value of the detection data of the plurality of temperature sensors on any circular track is less than or equal to the preset temperature, open the control valves on the air inlet pipe 33 and the exhaust pipe 34, close the control valve on the water inlet pipe 31, open the control valve on the drain pipe 32, and start the water spraying component to spray the bottom of the sample stage 2. At this time, a mixed cooling mode of spray cooling and gas cooling is adopted. After the water sprayed by the water spraying component sprays onto the sample stage 2, due to the high temperature of the sample stage 2, it instantly vaporizes, and part of the heat is carried away during the vaporization; and since the air inlet pipe 33 and the exhaust pipe 34 are also opened at the same time, the airflow quickly takes away the water vapor generated by the vaporization and also takes away the heat. The mixed cooling mode basically does not require the recovery of the cooling medium and has a small water consumption.

[0045] In the hybrid cooling mode, when the difference between the average value of the detection data of the temperature sensors on the smallest radius loop and the average value of the detection data of the temperature sensors on the largest radius loop is greater than the first preset difference, the water volume of the water inlet channel of the smallest radius loop is increased. Generally speaking, the temperature at the center of the sample stage is the highest and the temperature at the edge is the lowest. Therefore, by reducing the difference between the average temperatures of the smallest radius loop and the largest radius loop, the temperature uniformity of the entire sample stage 2 can be effectively improved, thereby improving the coating quality.

[0046] When the difference between the average values of the detection data of the temperature sensors on adjacent loops is greater than the second preset difference, the water volume of the water inlet channel of the loop corresponding to the higher average value is increased. The above design is mainly to effectively improve the temperature uniformity of the local area of the sample stage 2, thereby further improving the coating quality.

[0047] When the average value A of the detection data of multiple temperature sensors on any one loop is greater than the preset temperature, the opening degrees of the control valves of the multiple water inlet channels 43 are adjusted to the maximum; after a preset time (such as 30 seconds), if the highest value is still greater than the preset temperature, then the control valves on the intake pipe 33 and the exhaust pipe 34 are closed, the control valve of the water inlet pipe 31 is opened, and the bottom of the sample stage 2 is completely immersed in the cooling water.

[0048] In the immersion cooling mode, when the temperature detected by the water temperature sensor 5 is higher than the preset water temperature, the controller controls the opening degree of the valve on the water inlet pipe 31 to increase.

[0049] When the temperature of the sample stage 2 is too high and it is difficult to effectively cool down in the hybrid cooling mode, immersion cooling is adopted. Since the bottom of the sample stage 2 is the cooling container 3, which contains a large amount of cooling water and the cooling water keeps flowing; therefore, compared with the traditional cooling method of setting a cooling water channel on the sample stage 2, the immersion cooling method provided in this embodiment can quickly take away a large amount of heat and effectively cool down the sample stage 2.

[0050] The above is only the preferred embodiment of the present invention and is not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A discharge chamber structure, characterized in that, Comprising: A cavity, the cavity including a bottom plate; A sample stage, the sample stage being disposed in the cavity for placing a substrate to be coated; A cooling container, the cooling container being disposed below the sample stage and sealingly connected to the bottom plate or the bottom of the sample stage; the cooling container is used for containing a cooling medium, and the cooling medium in the cooling container can directly cool the bottom of the sample stage; A water spraying assembly is further disposed in the cooling container, the water spraying assembly including a water spraying head, the water spraying head being located below the sample stage and capable of spraying the bottom of the sample stage; The cooling container is provided with a water inlet pipe, a drain pipe, an air inlet pipe and an exhaust pipe.

2. The discharge cavity structure according to claim 1, wherein: The bottom of the sample stage is a concave spherical shape, and multiple groups of water spraying holes are provided on the water spraying head, each group of water spraying holes being distributed along a circular track, and the circular track radii of different groups of water spraying holes are different.

3. The discharge cavity structure according to claim 2, wherein: The water spraying assembly includes a plurality of water inlet channels, and the plurality of water inlet channels are respectively communicated with the plurality of groups of water spraying holes.

4. The discharge cavity structure according to claim 3, wherein: It further includes a controller, and control valves are respectively provided on the plurality of water inlet channels, the water inlet pipe, the drain pipe, the air inlet pipe and the exhaust pipe; the table top of the sample stage includes a plurality of circular tracks, and the centers of the plurality of tracks coincide with the center of the sample stage; a plurality of temperature sensors are provided on each track, and the plurality of temperature sensors are used for detecting the temperature of the sample stage; The controller can control the opening degree of the corresponding control valve according to the data of the plurality of temperature sensors.

5. The discharge cavity structure according to claim 4, wherein: Among the plurality of tracks, the distance between adjacent tracks is equal; and the plurality of temperature sensors on each track are evenly distributed.

6. The discharge cavity structure according to claim 1, wherein: The air inlet pipe is disposed on the side of the cooling container and is inclined so that the gas coming out of the air inlet pipe can directly reach the bottom of the sample stage.

7. A chemical vapor deposition device, characterized in that, Including a power source, a microwave transmission component and the discharge cavity structure according to any one of claims 1-6, and the power source is connected to the discharge cavity structure through the microwave transmission component.

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