Single crystal furnace thermal field heater assembly

Abstract

A single crystal furnace thermal field heater assembly comprises a heater end which belongs to a local structure of a single crystal furnace heater and is characterized in that the heater is horizontally erected on the inner side of an annular frame through a bracket, and a stand column is fixedly connected to the outer ring of the annular frame; a bracket is fixedly mounted between every two groups of ring frames; a plurality of sets of fastening joints are evenly distributed on the inner rings of every two sets of ring frames, and the fastening joints are connected with the ends of the heater in a limiting mode through fastening wire sets. The utility model provides a single crystal furnace thermal field heater assembly. The annular frame and the stand columns are used as a supporting framework for mounting the heater, meanwhile, the fastening line sets are used for fastening the ends of the heater, and the heater can be effectively fixed in cooperation with the layered lifting procedure of the bracket. Compared with a common heater fixing structure, the structure of the heater is not directly damaged by a bolt head and a plate, the fixing mode is flexible and changeable, and the distance between the wire sets and the distance between the shaft sleeves can be adjusted according to the structural size of the heater.

Description

Technical Field

[0001] The utility model belongs to the technical field, and particularly relates to a thermal field heater assembly for a single crystal furnace. Background Art

[0002] The heating assembly of a single crystal furnace is a key component in the single crystal furnace, and its performance and efficiency directly affect the quality and output of single crystal materials. By continuously optimizing the materials, structure, control system, and energy utilization mode of the heating assembly, the production efficiency and product quality of the single crystal furnace can be further improved.

[0003] A single crystal furnace is one of the important devices for producing semiconductor materials. Its core function is to melt, crystallize, and stretch polycrystalline materials through a heating process to prepare high-quality single crystal materials. As the core component of the single crystal furnace, the quality and performance of the single crystal furnace heater have a decisive impact on the overall operation effect of the single crystal furnace.

[0004] Therefore, this application provides a thermal field heater assembly for a single crystal furnace. This application uses a ring frame and columns as the support framework for installing the heater. At the same time, a fastening wire group is used to fasten the end of the heater. With the layered lifting process of the bracket, the heater can be effectively fixed. Compared with the ordinary heater fixing structure, this application does not use bolt heads and plates to directly damage the structure of the heater itself. Its fixing form is flexible and variable, and the spacing of the wire group and the spacing of the bushings can be adjusted according to the structural dimensions of the heater. Summary of the Invention

[0005] To achieve the above object, the technical solution of the utility model is as follows:

[0006] A thermal field heater assembly for a single crystal furnace, including a heater end, and the heater end belongs to a partial structure of the single crystal furnace heater. The characteristics are: the heater is horizontally installed inside the ring frame through a bracket, and columns are fixedly connected to the outer ring of the ring frame;

[0007] A bracket is fixedly installed between every two groups of ring frames;

[0008] A number of fastening joints are evenly distributed in the inner ring of every two groups of ring frames, and the fastening joints are connected to the heater end in a limiting manner through a fastening wire group.

[0009] Further, the fastening joint includes a bushing and a mounting shaft;

[0010] The mounting shaft is horizontally fixed inside the inner ring of the ring frame, a bushing is sleeved on the shaft body of the mounting shaft, and the bushing is in limiting contact with the clamping part at the protruding end of the mounting shaft.

[0011] Furthermore, the bushing is provided with a groove, and a fastening wire group is wound in the groove.

[0012] Furthermore, reinforcement grooves are provided on both sides of the heater end, and a fastening wire group is wound and in contact with the reinforcement grooves.

[0013] Furthermore, the fastening wire group is wound in an up-and-down corrugated structure along the shaft sleeve between each group of ring frames.

[0014] Furthermore, the shaft sleeves installed on the inner side of each set of ring frames are in an open installation structure.

[0015] The beneficial effects of the utility model are:

[0016] Compared to the prior art, this application provides a single crystal furnace thermal field heater assembly. This application utilizes a ring frame and columns as a support structure for installing the heater. Fastening wire assemblies are used to secure the heater ends, and combined with the bracket's layered support process, the heater can be effectively secured. Compared to conventional heater fixing structures, this application does not use bolts or plates to directly damage the heater structure. Its fixing method is flexible and versatile, allowing the spacing between the wire assemblies and the spacing between the shaft sleeves to be adjusted according to the heater's structural dimensions. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural schematic diagram of a single crystal furnace thermal field heater assembly of the utility model.

[0018] Figure 2 This is a top view of a single crystal furnace thermal field heater assembly according to the present invention.

[0019] Figure 3 This is a structural schematic diagram of a fastening joint of a single crystal furnace thermal field heater assembly according to the present invention.

[0020] Figure 4 The utility model discloses a heater end head of a single crystal furnace thermal field heater assembly.

[0021] List of Figure Symbols:

[0022] 1 is a fastening joint, 2 is a column, 3 is a fastening wire group, 4 is a bracket, 5 is a ring frame, 6 is a groove, 7 is a mounting shaft, 8 is a shaft sleeve, 9 is a heater end, and 10 is a reinforcement groove. DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention.

[0024] like Figure 1 、 Figure 2 、 Figure 3 and Figure 4As shown in the figure, a thermal field heater assembly for a single crystal furnace includes a heater end, and the heater end belongs to a partial structure of the heater of the single crystal furnace: the heater is horizontally mounted inside the ring frame 5 through a bracket 4, and the outer ring of the ring frame 5 is fixedly connected with a column 2; a bracket 4 is fixedly installed between every two groups of ring frames 5; several groups of fastening joints 1 are evenly distributed inside the inner rings of every two groups of ring frames 5, and the fastening joints 1 are connected with the heater end 9 in a limiting manner through a fastening wire group 3. Among them, the bracket 4, as a basic lifting structure, can lift the heater inside the ring frame 5, and at the same time cooperate with the fastening wire group 3 to complete the winding type of fixed installation, greatly alleviating the installation difficulty. At the same time, compared with the installation structure of ordinary studs cooperating with fixed carriers, the positioning installation process can be completed without damaging the heater.

[0025] As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, the fastening joint 1 includes a bushing 8 and a mounting shaft 7;

[0026] The mounting shaft 7 is horizontally fixed inside the inner ring of the ring frame 5, a bushing 8 is sleeved on the shaft body of the mounting shaft 7, and the bushing 8 is in limiting contact with the clamping part at the protruding end of the mounting shaft 7. The bushing 8 is provided with a groove 6 on its own, and the fastening wire group 3 is wound inside the groove 6. Among them, the mounting shaft 7 is used to complete the positioning installation process through the hole in the inner ring of the ring frame 5, and cooperate with the bushing 8 to use its own groove to limit the installation structure of the fastening wire group 3. During the installation process, the number and spacing of the mounting shafts 7 can be adjusted according to the size of the heater structure, so as to adapt to the heater.

[0027] As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, reinforcing grooves 10 are provided on both sides of the heater end 9, and the fastening wire group 3 is wound and contacted inside the reinforcing grooves 10. Among them, the design of the reinforcing grooves 10 is to cooperate with the fastening wire group 3 to complete the limiting contact process.

[0028] As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, the fastening wire group 3 is wound in an up-and-down corrugated structure along the bushing 8 between every two groups of ring frames 5. Among them, the up-and-down corrugated winding structure can cooperate with one fastening wire group 3 to complete the winding process, and the operation is more convenient.

[0029] As Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the bushing 8 installed inside each ring frame 5 has an unclosed installation structure. Among them, it can be used as a positive reference standard to cooperate with subsequent installations to introduce other structures.

[0030] It should be noted that the above content only illustrates the technical idea of the present utility model and cannot be used to limit the protection scope of the present utility model. For those of ordinary skill in the art, without departing from the principle of the present utility model, several improvements and refinements can still be made, and these improvements and refinements all fall within the protection scope of the claims of the present utility model.

Claims

1. A thermal field heater assembly for a single crystal furnace, comprising a heater end, and the heater end belongs to a partial structure of the heater of the single crystal furnace: It is characterized in that: The heater is horizontally mounted inside the ring frame (5) through a bracket (4), and columns (2) are fixedly connected to the outer ring of the ring frame (5); A bracket (4) is fixedly installed between every two groups of ring frames (5); A number of groups of fastening joints (1) are evenly distributed in the inner ring of every two groups of ring frames (5), and the fastening joints (1) are connected to the ends of the heater (9) in a limiting manner through a fastening wire group (3).

2. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: The fastening joint (1) includes a bushing (8) and a mounting shaft (7); The mounting shaft (7) is horizontally fixed inside the inner ring of the ring frame (5). A bushing (8) is sleeved on the body of the mounting shaft (7), and the bushing (8) is in limiting contact with the clamping member at the protruding end of the mounting shaft (7).

3. The single crystal furnace thermal field heater assembly according to claim 2, characterized in that: The bushing (8) is provided with a groove (6) on itself, and the fastening wire group (3) is wound in the groove (6).

4. The single crystal furnace thermal field heater assembly according to claim 1, wherein: Reinforcing grooves (10) are provided on both sides of the end of the heater (9), and the fastening wire group (3) is wound and contacted in the reinforcing grooves (10).

5. The single crystal furnace thermal field heater assembly according to claim 3, wherein: The fastening wire group (3) is wound in an up-and-down corrugated structure along the bushing (8) between every two groups of ring frames (5).

6. The single crystal furnace thermal field heater assembly according to claim 5, wherein: The bushing (8) installed inside each group of ring frames (5) has an unclosed installation structure.

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