Pressure sensor sealing structure

Abstract

The utility model relates to the technical field of pressure sensors, and discloses a pressure sensor sealing structure, which comprises a shell, a pressure sensor assembly is arranged in the shell, a measuring through hole is formed in the top of the shell, and the measuring through hole extends into the shell; the PFA cap is arranged at the top of the shell; the waterproof joint is arranged at the bottom of the shell; the cable penetrates through the waterproof joint and is communicated to the pressure sensor assembly in the shell; and the PFA film is arranged in the shell and located between the measuring through hole and the pressure sensor assembly. During measurement, a to-be-measured contact object penetrates through the measurement through hole, the pressure sensor assembly and the to-be-measured contact object are separated by the PFA film, the PFA film has good strong acid resistance and strong alkali resistance, the sensor assembly can be well protected, the service life of the sensor is prolonged, meanwhile, due to the fact that the film is thin, the measurement accuracy is not affected, and the measurement accuracy is improved. And the measurement accuracy is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure sensors, in particular to a sealing structure of a pressure sensor. Background Art

[0002] Conventional pressure sensors can achieve measurements in most application scenarios. However, for the semiconductor field, the environments it faces are often strong acids and strong alkalis. Existing pressure sensors are prone to corrosion when facing strong acids and strong alkalis, resulting in low lifespan or inaccurate measurement accuracy. Summary of the Utility Model

[0003] Based on the above, the purpose of the utility model is to provide a sealing mechanism for a pressure sensor, which can prevent pressure components from being corroded, extend the lifespan of the pressure sensor, and ensure measurement accuracy.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] The utility model provides a sealing structure of a pressure sensor, including:

[0006] A housing, inside which a pressure sensor assembly is arranged, and a measurement through-hole is opened at the top of the housing, and the measurement through-hole extends into the housing;

[0007] A PFA cap, arranged on the top of the housing;

[0008] A waterproof connector, arranged at the bottom of the housing;

[0009] A cable, passing through the waterproof connector and connecting to the pressure sensor assembly inside the housing;

[0010] A PFA film, arranged inside the housing and located between the measurement through-hole and the pressure sensor assembly.

[0011] Preferably, the housing includes a PTFE main housing and a PTFE outer housing. The PTFE main housing is located above the PTFE outer housing, and the PTFE main housing is threadedly connected to the PTFE outer housing;

[0012] The measurement through-hole is located inside the PTFE main housing.

[0013] Preferably, the PFA cap is threadedly connected to the PTFE main housing.

[0014] Preferably, the waterproof connector is threadedly connected to the PTFE outer housing.

[0015] Preferably, a sealing ring is further arranged between the PFA film and the measurement through-hole.

[0016] Preferably, the pressure sensor assembly includes a pressure component, a copper ring, a first circuit board, and a second circuit board;

[0017] The pressure component is disposed above the copper ring, the first circuit board is disposed below the copper ring, and the second circuit board is located below the first circuit board.

[0018] Preferably, sealant is filled inside the housing below the first circuit board.

[0019] Preferably, an external thread is provided on the outer periphery of the copper ring.

[0020] The beneficial effects of the present utility model are as follows:

[0021] The present utility model provides a pressure sensor sealing structure. During measurement, the object to be measured penetrates through the measurement through-hole, and a PFA film is used to separate between the pressure sensor assembly and the object to be measured. The PFA film has good resistance to strong acids and strong alkalis, can perfectly protect the sensor assembly, extend the service life of the sensor. At the same time, due to the thin film, it does not affect the measurement accuracy and ensures the accuracy of the measurement. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for description in the embodiments of the present utility model. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the content of the embodiments of the present utility model and these drawings.

[0023] Figure 1 FIG. is a schematic structural diagram of a pressure sensor sealing mechanism provided by an embodiment of the present utility model;

[0024] Figure 2 FIG. is a schematic cross-sectional structural diagram of a pressure sensor sealing mechanism provided by an embodiment of the present utility model;

[0025] Figure 3 FIG. is an exploded structural diagram of a pressure sensor sealing mechanism provided by an embodiment of the present utility model.

[0026] In the figure:

[0027] 1. Housing; 11. PTFE main housing; 111. Measurement through-hole; 12. PTFE outer housing; 2. PFA cap; 3. Waterproof connector; 4. Cable; 5. Pressure sensor assembly; 51. Pressure component; 52. Copper ring; 53. First circuit board; 54. Second circuit board; 6. PFA film; 7. Sealing ring. Detailed Embodiments

[0028] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present utility model clearer, the technical solutions of the embodiments of the present utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present utility model.

[0029] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0030] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath", and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0031] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meanings.

[0032] Such as Figures 1 to 3As shown in the figure, an embodiment of the present utility model provides a pressure sensor sealing structure, including: a housing 1, inside which a pressure sensor assembly 5 is arranged, and a measurement through-hole 111 is opened at the top thereof, and the measurement through-hole 111 extends to the inside of the housing 1; a PFA cap 2, arranged at the top of the housing 1. The PFA cap 2 refers to a cap made of PFA material and has good chemical corrosion resistance; a waterproof connector 3, arranged at the bottom of the housing 1; a cable 4, passing through the waterproof connector 3 and communicating with the pressure sensor assembly 5 inside the housing 1; a PFA film 6, arranged inside the housing 1 and located between the measurement through-hole 111 and the pressure sensor assembly 5. The PFA film 6 refers to a film made of PFA material, and its thickness is about between 0.1 mm and 1 mm.

[0033] An embodiment of the present utility model provides a pressure sensor sealing structure. During measurement, the object to be measured penetrates through the measurement through-hole 111, and a PFA film 6 is used to separate between the pressure sensor assembly 5 and the object to be measured. The PFA film 6 has good strong acid and strong base resistance, can perfectly protect the sensor assembly, extend the service life of the sensor, and at the same time, because the film is thin, it does not affect the measurement accuracy and ensures the accuracy of the measurement.

[0034] As a preferred embodiment of the present utility model, as Figures 1 to 3 shown, the housing 1 includes a PTFE main housing 11 and a PTFE outer housing 12. The PTFE main housing 11 is located above the PTFE outer housing 12, and the PTFE main housing 11 is threadedly connected to the PTFE outer housing 12; the measurement through-hole 111 is located inside the PTFE main housing 11. Specifically, PTFE has good chemical corrosion resistance. The inner wall of the top of the PTFE main housing 11 is provided with external threads, and the outer wall of the bottom of the PTFE outer housing 12 is provided with internal threads. The threaded connection between the PTFE main housing 11 and the PTFE outer housing 12 can achieve quick disassembly and assembly, facilitating the installation, maintenance, replacement, etc. of internal components.

[0035] As a preferred embodiment of the present utility model, as Figure 2 and 3 shown, the PFA cap 2 is threadedly connected to the PTFE main housing 11. Specifically, the inner wall of the bottom of the PFA cap 2 is provided with internal threads, and the outer wall of the top of the PTFE main housing 11 is provided with external threads. The threaded connection between the PFA cap 2 and the PTFE main housing 11 is mainly used to fix the object to be measured.

[0036] As a preferred embodiment of the present utility model, as Figure 2 and 3As shown, the waterproof connector 3 is threadedly connected to the PTFE housing 12. Specifically, an external thread is provided on the outer wall of the top of the waterproof connector 3, and an internal thread is provided on the inner wall of the bottom of the PTFE housing 12. The threaded connection between the waterproof connector 3 and the PTFE housing 12 enables quick fixation of the cable 4.

[0037] As a preferred embodiment of the present utility model, as Figure 2 and 3 shown, in order to further seal and prevent chemical liquid from penetrating into the housing 1, a sealing ring 7 is further provided between the PFA film 6 and the measurement through-hole 111. Preferably, the sealing ring 7 is made of an anti-corrosion material.

[0038] As a preferred embodiment of the present utility model, as Figure 2 and 3 shown, the pressure sensor assembly 5 includes a pressure component 51, a copper ring 52, a first circuit board 53, and a second circuit board 54; the pressure component 51 is disposed above the copper ring 52, the first circuit board 53 is disposed below the copper ring 52, and the second circuit board 54 is located below the first circuit board 53. Preferably, an external thread is provided on the outer circumference of the copper ring 52. Specifically, an internal thread is provided on the inner wall of the bottom of the PTFE main housing 11, and the PTFE main housing 11 is threadedly connected to the copper ring 52 to fix the pressure sensor assembly 5.

[0039] As a preferred embodiment of the present utility model, as Figure 2 and 3 shown, sealant is filled inside the housing 1 below the first circuit board 53. Specifically, by filling the sealant, the cable 4 and one side of the waterproof connector 3 can be sealed, further preventing damage to the sensor caused by the penetration of chemical liquid.

[0040] Note that the above is only a preferred embodiment of the present utility model and the applied technical principles. Those skilled in the art will understand that the present utility model is not limited to the specific embodiments described herein, and various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present utility model. Therefore, although the present utility model has been described in detail through the above embodiments, the present utility model is not limited to the above embodiments only. Without departing from the concept of the present utility model, more other equivalent embodiments can be included, and the scope of the present utility model is determined by the scope of the appended claims.

Claims

1. A pressure sensor sealing structure, characterized in that Comprising: A housing (1) with a pressure sensor assembly (5) disposed inside, having a measurement through-hole (111) opened at its top, and the measurement through-hole (111) extends into the interior of the housing (1); A PFA cap (2) disposed on the top of the housing (1); A waterproof connector (3) disposed on the bottom of the housing (1); A cable (4) passing through the waterproof connector (3) and connected to the pressure sensor assembly (5) inside the housing (1); A PFA film (6) disposed inside the housing (1), between the measurement through-hole (111) and the pressure sensor assembly (5).

2. The pressure sensor sealing structure according to claim 1, wherein, The housing (1) includes a PTFE main housing (11) and a PTFE outer housing (12), the PTFE main housing (11) is located above the PTFE outer housing (12), and the PTFE main housing (11) is threadedly connected to the PTFE outer housing (12); The measurement through-hole (111) is located within the PTFE main housing (11).

3. The pressure sensor sealing structure according to claim 2, wherein, The PFA cap (2) is threadedly connected to the PTFE main housing (11).

4. A pressure sensor sealing structure according to claim 2, characterized in that, The waterproof connector (3) is threadedly connected to the PTFE outer housing (12).

5. A pressure sensor sealing structure according to claim 1, characterized in that A sealing ring (7) is further disposed between the PFA film (6) and the measurement through-hole (111).

6. A pressure sensor sealing structure according to any one of claims 1 to 5, characterized in that, The pressure sensor assembly (5) includes a pressure component (51), a copper ring (52), a first circuit board (53), and a second circuit board (54); The pressure component (51) is disposed above the copper ring (52), the first circuit board (53) is disposed below the copper ring (52), and the second circuit board (54) is located below the first circuit board (53).

7. A pressure sensor sealing structure according to claim 6, characterized in that, Sealing glue is filled inside the housing (1) below the first circuit board (53).

8. A pressure sensor sealing structure according to claim 6, characterized in that, External threads are provided on the outer periphery of the copper ring (52).

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