Liquid leakage detection device and vacuum coating equipment

Abstract

The utility model discloses a liquid leakage detection device and vacuum coating equipment, and relates to the technical field of vacuum film deposition, the liquid leakage detection device comprises test paper, a sensor and a controller, the test paper is arranged on a mounting plate, the mounting plate is used for mounting a target material, the target material is connected with negative voltage, and the sensor is located on one side of the mounting plate where the test paper is arranged. The sensor can emit detection light rays to the test paper, the detection light rays can be reflected into the sensor from the test paper, the controller is electrically connected with the sensor, when liquid leaks, the test paper makes contact with cooling liquid and then changes in color, and the sensor detects the color changes of the detection light rays reflected from the test paper and feeds back fault signals to the controller. And liquid leakage can be detected in real time, so that the safety of equipment and personnel is ensured. The vacuum coating equipment is provided with a first box body, the sensor is fixed in the first box body, the mounting plate is fixed in the first box body, the sensor emits detection light rays to the mounting plate, and liquid leakage detection is achieved by detecting color changes.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum thin film deposition, and particularly relates to a liquid leakage detection device and a vacuum coating equipment. Background Art

[0002] In the vacuum magnetron sputtering coating process using a planar sputtering target, the temperature of the target will change with the change of the sputtering power. The cooling of the target is crucial for the quality control of magnetron sputtering. In the prior art, for the heat dissipation of a large-area planar target, an internal cooling channel is arranged in the target back plate, and a circulating coolant is injected into the cooling channel. However, since the cooling channel is often sealed by means of a seal or welding, there is a risk of liquid leakage after long-term use. Moreover, high voltage is applied to the target. When there is a liquid leakage in the cooling channel, the liquid will carry the voltage to the places it flows through, posing a risk of electric leakage and causing great safety risks to personnel and equipment. Summary of the Utility Model

[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, the utility model provides a liquid leakage detection device and a vacuum coating equipment, which can detect the occurrence of liquid leakage and improve safety.

[0004] A liquid leakage detection device according to an embodiment of the first aspect of the utility model includes:

[0005] A test paper, which is arranged on a mounting plate for mounting a target, and the target is connected with a negative voltage;

[0006] A sensor, which is located on one side of the mounting plate where the test paper is arranged. The sensor can emit detection light towards the test paper, and the detection light can be reflected from the test paper into the sensor;

[0007] A controller, which is electrically connected to the sensor. When there is a liquid leakage, the test paper will change color after contacting the coolant. The sensor detects the color change of the detection light reflected from the test paper and feeds back a fault signal to the controller.

[0008] A liquid leakage detection device according to an embodiment of the first aspect of the utility model has at least the following beneficial effects: This embodiment is provided with a test paper, a sensor and a controller. The test paper is arranged on the mounting plate for mounting the target, and the target is connected with a negative voltage. The sensor is located on one side of the mounting plate where the test paper is arranged. The sensor can emit detection light towards the test paper, and the detection light can be reflected from the test paper into the sensor. The controller is electrically connected to the sensor. When there is a liquid leakage, the test paper will change color after contacting the coolant. The sensor detects the color change of the detection light reflected from the test paper and feeds back a fault signal to the controller, which can detect liquid leakage in real time and ensure the safety of equipment and personnel.

[0009] According to an embodiment of the first aspect of the present utility model, the area where the test paper covers the mounting plate is the area where the detection light of the sensor is covered.

[0010] According to an embodiment of the second aspect of the present utility model, a vacuum coating device is provided, including the above-mentioned liquid leakage detection device, wherein, it includes:

[0011] A first box body is fixedly installed with a mounting plate. On one side of the mounting plate where the test paper is arranged, there is a magnetron component. There is a gap between the magnetron component and the mounting plate. The test paper is located on the outer periphery of the projection range of the magnetron component on the mounting plate. An installation component is provided on the first box body. The installation component includes a mounting seat. The sensor is fixedly connected to the mounting seat. The mounting seat has a channel, and the detection light emitted by the sensor can reach the test paper through the channel.

[0012] The vacuum coating device according to the embodiment of the second aspect of the present utility model has at least the following beneficial effects:

[0013] Compared with the prior art, the vacuum coating device is provided with a first box body, a mounting plate and a sensor. The mounting plate and the sensor are fixedly installed on the first box body. On one side of the mounting plate where the test paper is arranged, there is a magnetron component. There is a gap between the magnetron component and the mounting plate. The test paper is located on the outer periphery of the projection range of the magnetron component on the mounting plate. An installation component is provided on the first box body. The installation component includes a mounting seat. The sensor is fixedly connected to the mounting seat. The mounting seat has a channel, and the detection light emitted by the sensor can reach the test paper through the channel to detect the color change of the test paper, so as to detect whether liquid leakage occurs and ensure the safety of personnel and equipment.

[0014] According to an embodiment of the second aspect of the present utility model, the sensor is installed on the outer wall of the first box body, and the channel is located on the first box body.

[0015] According to an embodiment of the second aspect of the present utility model, a first cavity is defined between the inner wall of the first box body and the side wall of the mounting plate, and the sensor is installed in the first cavity.

[0016] According to an embodiment of the second aspect of the present utility model, when the sensor is installed in the first cavity, one end of the mounting seat is connected to the inner wall of the first box body, the sensor is fixed to the other end of the mounting seat, and the mounting seat extends towards the direction close to the magnetron component.

[0017] According to an embodiment of the second aspect of the present utility model, both ends of the mounting plate are fixedly connected to the inner wall of the first box body, and first insulating blocks are provided at both ends of the mounting plate. The first insulating blocks are clamped between the first box body and the mounting plate.

[0018] According to an embodiment of the second aspect of the present utility model, the minimum distance between the sensor and the magnetron component is less than the minimum distance from the first insulating block.

[0019] According to an embodiment of the second aspect of the present utility model, when the sensor is installed on the outer wall of the first box body, the mounting seat is provided with a light-transmitting plate, the light-transmitting plate corresponds to the channel, and there is a sealing ring between the light-transmitting plate and the outer wall of the first box body.

[0020] According to an embodiment of the second aspect of the present utility model, when the sensor is installed in the first cavity, the first box body is provided with a fixing seat for threading a wire, the wire is connected to the sensor, and there is a sealing ring between the fixing seat and the first box body.

[0021] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become apparent from the following description, or be understood through the practice of the present utility model. Description of the Drawings

[0022] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0023] Figure 1 is a schematic diagram of a liquid leakage detection device in an embodiment of the first aspect of the present utility model;

[0024] Figure 2 is a cross-sectional view of a vacuum coating device in an embodiment of the second aspect of the present utility model;

[0025] Figure 3 is Figure 2 an enlarged view of A in

[0026] Figure 4 is a schematic diagram of the sensor installed in the first box body in an embodiment of the second aspect of the present utility model;

[0027] Figure 5 is Figure 4 an enlarged view of B in

[0028] Figure 6 is a schematic diagram of the installation of the fixing seat in an embodiment of the second aspect of the present utility model;

[0029] Figure 7 is Figure 6 an enlarged view of C in

[0030] Reference Numerals:

[0031] First box body 100; mounting plate 101; magnetron assembly 102; target 103; test paper 104; channel 105; first cavity 106; first insulating block 107; fixing seat 108; wire 109;

[0032] Sensor 110; mounting seat 111; light-transmitting plate 112; fixing bolt 113; sealing ring 114; connecting plate 115; detection light 116; cooling water channel 117; seal 118;

[0033] Second box body 120; Substrate table 121; Second insulating block 122. Specific embodiments

[0034] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0035] In the description of the present utility model, it should be understood that with respect to the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0036] In the description of the present utility model, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood not to include the present number, and above, below, within, etc. are understood to include the present number. If the first and second are described only for the purpose of distinguishing technical features, they should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence of the indicated technical features.

[0037] In the description of the present utility model, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present utility model in combination with the specific content of the technical solution.

[0038] Refer to Figure 1, a liquid leakage detection device according to an embodiment of the first aspect of the present utility model includes a test paper 104, a sensor 110 and a controller. The test paper 104 is disposed on a mounting plate 101, and the mounting plate 101 is used for mounting a target 103. A negative voltage is connected to the target 103. The sensor 110 is located on one side of the mounting plate 101 where the test paper 104 is disposed, and there is a preset detection distance between the sensor 110 and the mounting plate 101. The sensor 110 can emit a detection light 116 towards the test paper 104, and the detection light 116 can be reflected from the test paper 104 into the sensor 110. It can be understood that the controller is electrically connected to the sensor 110. When there is a liquid leakage, the test paper 104 will change color after contacting the coolant. It can be understood that a cooling water channel 117 is provided in the mounting plate 101, and the area of the mounting plate 101 covered by the test paper 104 is the coverage area of the detection light 116 of the sensor 110. Multiple sensors 110 can be provided in the first box body 100, and the test paper 104 is laid within the irradiation range of the detection light 116 of each sensor 110, so that the sensor 110 can detect the color change of the test paper 104 when it contacts the coolant.

[0039] Specifically, in some embodiments, the coolant is pure water. Before the liquid leakage, the detection light 116 of the sensor 110 is emitted onto the test paper 104 and reflected, and the reflected detection light 116 shows the color of the test paper 104. The RGB value of the color of the test paper 104 is a preset RGB value, and the sensor 110 sends a first signal to the controller; when there is a liquid leakage, the pure water spreads to the detection area of the sensor 110, and the color of the test paper 104 changes after contacting the pure water. The RGB value in the detection light 116 reflected from the test paper 104 changes. At this time, the sensor 110 transmits the generated second signal, that is, a fault signal, to the controller, and the controller performs a protection operation or an alarm, thereby detecting the liquid leakage in real time and ensuring the safety of the equipment and personnel.

[0040] In other embodiments, the coolant is a liquid with a preset color. Before the liquid leakage, the detection light 116 of the sensor 110 is emitted onto the test paper 104 and reflected, and the reflected detection light 116 shows the color of the test paper 104. The RGB value of the color of the test paper 104 is a preset RGB value, and the sensor 110 sends a first signal to the controller; when there is a liquid leakage, the coolant spreads to the detection area of the sensor 110, and the color of the test paper 104 changes after contacting the coolant. The RGB value in the detection light 116 reflected from the test paper 104 is the preset value of the color of the coolant. At this time, the sensor 110 transmits the generated second signal, that is, a fault signal, to the controller.

[0041] In some other embodiments, the coolant is a liquid with a preset color, and the test paper 104 is not provided on the mounting plate 101. Before liquid leakage, the detection light 116 of the sensor 110 is emitted onto the mounting plate 101 and reflected, and the reflected detection light 116 shows the color of the surface of the mounting plate 101. The RGB value of the color of the surface of the mounting plate 101 is the preset RGB value, and the sensor 110 sends a first signal to the controller; during liquid leakage, the coolant spreads to the detection area of the sensor 110, and the detection light 116 emitted by the sensor 110 can irradiate onto the coolant and be reflected back to the sensor 110. The RGB value in the detection light 116 reflected from the mounting plate 101 is the preset value of the color of the coolant. At this time, the sensor 110 transmits the generated second signal, that is, a fault signal, to the controller.

[0042] It can be understood that in this embodiment, the sensor 110 uses a color recognition sensor to measure the measured values of the target object in the RGB channels 105. After measuring the measured values of the target object in the RGB channels 105, the color recognition sensor can directly send the measured values to the controller so that the controller can directly obtain the measured values. Among them, the color recognition sensor is a sensor that can compare the color of an object with a preset color that has been taught before to detect the color. When the two colors match within a certain error range, the detection result is output. The color recognition sensor emits light with RGB components to irradiate the test paper 104, the coolant or the mounting plate 101, and the color components of the reflected light will change according to the color of the specific target object. For example, when the target object is red, the reflected light component is red; when the reflected light is yellow, red, and green, and the target object is white, the reflected light components become red, green, and blue. Among them, the measured values of the RGB channels 105 can include the measured values of the R channel 105, the measured values of the G channel 105, and the measured values of the B channel 105. It can be understood that the measured value of the R channel 105 can be the color of the reflected light after the target object is irradiated by red light, the measured value of the G channel 105 can be the color of the reflected light after the target object is irradiated by green light, and the measured value of the B channel 105 can be the color of the reflected light after the target object is irradiated by blue light.

[0043] Refer to Figure 2, according to an embodiment of the second aspect of the present utility model, a vacuum coating device is provided, including the above-mentioned liquid leakage detection device. Among them, the vacuum coating device includes a first box body 100 and a second box body 120. When the first box body 100 and the second box body 120 are closed, an inner cavity for accommodating a substrate table 121 and a wafer is formed. The wafer is placed on the substrate table 121, and the substrate table 121 is connected inside the second box body 120. Among them, a mounting plate 101 is fixedly installed on the first box body 100. On one side of the mounting plate 101 where the test paper 104 is arranged, there is a magnetron component 102. On the side of the mounting plate 101 facing away from the magnetron component 102, a target 103 is installed. There is a gap between the magnetron component 102 and the mounting plate 101. The test paper 104 is located on the outer periphery of the projection range of the magnetron component 102 on the mounting plate 101. An installation component is provided on the first box body 100. The installation component includes a mounting seat 111. The sensor 110 is fixedly connected to the mounting seat 111. The mounting seat 111 has a channel 105. The detection light 116 emitted by the sensor 110 can reach the test paper 104 through the channel 105, so as to realize detecting the color of the detection light 116 reflected from the test paper 104.

[0044] Specifically, referring to Figure 2 , the sensor 110 is installed on the outer wall of the first box body 100, and the mounting seat 111 is also fixedly installed on the outer wall of the first box body 100. The mounting seat 111 has fixing bolts 113 screwed onto the outer wall of the first box body 100 to achieve fixed connection. The channel 105 is located on the first box body 100, and the detection light 116 can reach the mounting plate 101 through the channel 105. It can be understood that the sensor 110 is located on the side of the mounting plate 101 facing the magnetron component 102. Since the gap between the magnetron component 102 and the mounting plate 101 is small, and both the magnetron component 102 and the first box body 100 are grounded, a voltage of -500V to -1000V is connected between the mounting plate 101 and the target 103. When liquid leakage occurs, it is easy for the coolant to enter the gap between the magnetron component 102 and the mounting plate 101, causing a short circuit or breakdown between the two, thus triggering a safety accident. Therefore, the test paper 104 and the sensor 110 are located on the outer periphery of the projection range of the magnetron component 102 on the mounting plate 101. Moreover, the minimum distance between the sensor 110 and the magnetron component 102 is less than the minimum distance from the first insulating block 107, that is, the sensor 110 is installed at a position close to the outer periphery of the magnetron component 102, so that the sensor 110 can timely detect the liquid leakage situation in the surrounding area of the magnetron component 102 and report a fault in time.

[0045] Furthermore, referring to Figure 3, the mounting base 111 is provided with a light-transmitting plate 112, the light-transmitting plate 112 corresponds to the channel 105, the detection light 116 passes through the light-transmitting plate 112 and enters the first box body 100, and there is a sealing ring 114 between the light-transmitting plate 112 and the outer wall of the first box body 100. Since the inner cavity formed by the first box body 100 and the second box body 120 is in a vacuum state during the operation of the device, the sealing ring 114 between the light-transmitting plate 112 and the first box body 100 can maintain the airtightness inside the first box body 100. It can be understood that the sealing ring 114 is an O-ring, and the sealing ring 114 surrounds the outer periphery of the channel 105.

[0046] Refer to Figure 4 , in some other embodiments, a first cavity 106 is defined between the inner wall of the first box body 100 and the side wall of the mounting plate 101. The sensor 110 is installed in the first cavity 106. At this time, the mounting base 111 is a connecting plate 115. One end of the connecting plate 115 is connected to the inner wall of the first box body 100, the sensor 110 is fixed to the other end of the connecting plate 115, and the connecting plate 115 extends in the direction close to the magnetron assembly 102, so that the sensor 110 is close to the magnetron assembly 102.

[0047] Further, refer to Figure 6 and Figure 7 , when the sensor 110 is installed in the first cavity 106, the first box body 100 has a fixing seat 108 for passing the wire 109. The wire 109 is connected to the sensor 110. The fixing seat 108 has a fixing bolt 113 screwed onto the outer wall of the first box body 100 to achieve a fixed connection. At the same time, there is a sealing ring 114 between the fixing seat 108 and the first box body 100. The sealing ring 114 surrounds the outer periphery of the channel 105 to achieve vacuum sealing. It can be understood that there are two wires 109, which are used to connect the sensor 110 to the power supply and transmit the signal generated by the sensor 110 to the controller.

[0048] It can be understood that the sensor 110 can also be arranged on the side facing the target 103 provided on the mounting plate 101, that is, the sensor 110 can emit the detection light 116 to the side of the mounting plate 101 where the target 103 is provided, so as to detect the liquid leakage situation on this side of the mounting plate 101.

[0049] Refer to Figure 4 and Figure 5, both ends of the mounting plate 101 are fixedly connected to the inner wall of the first box body 100, and first insulating blocks 107 are provided at both ends of the mounting plate 101. The first insulating blocks 107 are clamped between the first box body 100 and the mounting plate 101. It can be understood that during the working process of the vacuum coating equipment, the first box body 100 and the second box body 120 are closed, the mounting plate 101 and the target 103 are connected with a negative voltage, and the first box body 100 and the second box body 120 are grounded. Therefore, the first insulating blocks 107 are provided at both ends of the mounting plate 101, which can prevent the first box body 100 from being charged and ensure the safety of personnel. Further, second insulating blocks 122 are provided at both ends of the mounting plate 101 on the second box body 120. When the first box body 100 and the second box body 120 are closed, the second insulating blocks 122 abut against the side of the mounting plate 101 where the target 103 is installed, realizing the insulation between the second box body 120 and the mounting plate 101. Further, sealing members 118 are provided between the first box body 100 and the first insulating blocks 107, between the first insulating blocks 107 and the mounting plate 101, between the mounting plate 101 and the second insulating blocks 122, and between the second insulating blocks 122 and the second box body 120 to achieve the vacuum degree of the inner cavity. In this embodiment, the sealing member 118 adopts a sealing member 118 with an O-shaped cross-section.

[0050] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made without departing from the spirit of the present invention within the knowledge scope of those of ordinary skill in the art.

Claims

1. A liquid leakage detection device, characterized in that, Comprising: A test strip, arranged on a mounting plate, the mounting plate is installed with a target, and the target is connected with a negative voltage; A sensor, located on one side of the mounting plate where the test strip is arranged, the sensor can emit detection light towards the test strip, and the detection light can be reflected from the test strip into the sensor; A controller, electrically connected to the sensor. When there is liquid leakage, the test strip will change color after contacting the coolant. The sensor detects the color change of the detection light reflected from the test strip and feeds back a fault signal to the controller.

2. The liquid leakage detection device according to claim 1, characterized in that The area where the test strip covers on the mounting plate is the covering area of the detection light of the sensor.

3. Vacuum coating equipment, characterized in that, Comprising a liquid leakage detection device according to any one of claims 1 to 2, the liquid leakage detection device includes a test strip and a sensor, the test strip is located on a mounting plate, and wherein, comprising: A first box body, fixedly installed with the mounting plate, there is a magnetron component on one side of the mounting plate where the test strip is arranged, there is a gap between the magnetron component and the mounting plate, the test strip is located on the outer periphery of the projection range of the magnetron component on the mounting plate, there is a mounting component on the first box body, the mounting component includes a mounting seat, the sensor is fixedly connected to the mounting seat, the mounting seat has a channel, and the detection light emitted by the sensor can reach the test strip through the channel.

4. The vacuum coating equipment according to claim 3, wherein The sensor is installed on the outer wall of the first box body, and the channel is located on the first box body.

5. The vacuum coating equipment according to claim 3, characterized in that, A first cavity is defined between the inner wall of the first box body and the side wall of the mounting plate, and the sensor is installed in the first cavity.

6. The vacuum coating equipment according to claim 5, characterized in that, When the sensor is installed in the first cavity, one end of the mounting seat is connected to the inner wall of the first box body, the sensor is fixed at the other end of the mounting seat, and the mounting seat extends towards the direction close to the magnetron component.

7. The vacuum coating equipment according to claim 3, characterized in that, Both ends of the mounting plate are fixedly connected to the inner wall of the first box body, and first insulating blocks are arranged at both ends of the mounting plate, and the first insulating blocks are clamped between the first box body and the mounting plate.

8. The vacuum coating equipment according to claim 7, characterized in that, The minimum distance between the sensor and the magnetron component is less than the minimum distance from the first insulating block.

9. The vacuum coating equipment according to claim 4, wherein When the sensor is installed on the outer wall of the first box body, the mounting seat is provided with a light-transmitting plate, the light-transmitting plate corresponds to the channel, and there is a sealing ring between the light-transmitting plate and the outer wall of the first box body.

10. The vacuum coating equipment according to claim 5, characterized in that, When the sensor is installed in the first cavity, the first box body has a fixing seat for threading a wire, the wire is connected to the sensor, and there is a sealing ring between the fixing seat and the first box body.

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