Sealing ring airtightness detection device

Abstract

The utility model discloses a sealing ring air tightness detection device, which can simulate the use temperature environment of a sealing ring, and comprises a lower detection plate, an upper detection plate, a lower detection plate, a lower detection plate and an upper detection plate, and is characterized in that a detected sealing ring is accommodated between the top surface of the lower detection plate and the bottom surface of the upper detection plate; the distance adjusting and limiting structure is formed on the periphery of the lower detection plate and is used for adjusting the distance between the lower detection plate and the upper detection plate; one end of the exhaust pipe is in airtight connection with a first through hole in the geometric center of the lower detection plate, and the other end is connected with a vacuumizing device; the first heating device is mounted in a second through hole in the side wall of the upper detection plate and is used for providing different temperature condition environments required by airtightness detection; the second heating device is mounted in a third through hole in the side wall of the lower detection plate and is used for providing different temperature condition environments required by airtightness detection; the driving part is connected to the top surface of the upper detection plate and enables the upper detection plate to press the lower detection plate downwards; the pressure gauge is in airtight connection with a fourth through hole in the top surface of the upper detection plate; the hole center of the fourth through hole and the hole center of the first through hole are coaxial in the vertical direction.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, and particularly to an airtightness detection device for a sealing ring that can simulate the temperature environment of the sealing ring during use. Background Art

[0002] Sealing rings (such as rubber sealing rings) are widely used, and the usage environments in different fields are different, so the performance requirements for sealing rings are also different. However, the most critical requirement for a sealing ring is its sealing performance. In real life, there are many types of sealing rings, and the usage requirements for sealing rings in different environments are also different. In the prior art, the device for detecting sealing rings can only be tested in a normal temperature environment and cannot simulate and detect the sealing performance of sealing rings in different high-temperature environments; moreover, due to the large variety of specifications of sealing rings, the existing airtightness detection devices can often only detect a single or limited number of specifications of sealing rings, greatly reducing the versatility of the detection device.

[0003] Therefore, a solution that can detect the sealing performance of sealing rings of different sizes in different temperature environments is needed. Summary of the Utility Model

[0004] A series of simplified concepts are introduced in the summary of the utility model. These simplified concepts are all simplified from the prior art in this field and will be further described in detail in the specific implementation section. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0005] The technical problem to be solved by the utility model is to provide an airtightness detection device for a sealing ring that can simulate the temperature environment of the sealing ring during use and can be used for sealing rings of various sizes.

[0006] To solve the above technical problem, the airtightness detection device for a sealing ring provided by the utility model includes:

[0007] An upper detection plate 1, which is always arranged parallel to the lower detection plate 2;

[0008] A lower detection plate 2, between the top surface of which and the bottom surface of the upper detection plate 1 is used to accommodate the sealing ring to be detected;

[0009] It should be noted that considering the heat conduction to simulate the temperature environment of the sealing ring during use, the upper detection plate 1 and the lower detection plate 2 are preferably made of metal, such as steel, stainless steel or aluminum alloy, etc.;

[0010] A spacing adjustment and limiting structure 3, which is formed around the lower detection plate 2, is located between the lower detection plate 2 and the upper detection plate 1, and is used to adjust the spacing between the lower detection plate 2 and the upper detection plate 1;

[0011] An extraction pipe 4, one end of which is hermetically connected to the first through hole at the geometric center of the lower detection plate 2, and the other end of which is connected to a vacuum extraction device;

[0012] A first heating device, which is installed in the second through hole on the side wall of the upper detection plate 1 and is used to provide an environment with different temperature conditions required for airtightness detection;

[0013] A second heating device, which is installed in the third through hole on the side wall of the lower detection plate 2 and is used to provide an environment with different temperature conditions required for airtightness detection; The first heating device and the second heating device use heating tubes, and the temperature of the heating tubes can be precisely controlled through a power supply or an external controller;

[0014] A driving member 5, which is connected to the top surface of the upper detection plate 1 and presses the upper detection plate 1 downward against the lower detection plate 2;

[0015] A pressure gauge 6, which is hermetically connected to the fourth through hole on the top surface of the upper detection plate 1;

[0016] The center of the fourth through hole is coaxially arranged with the center of the first through hole in the vertical direction.

[0017] Preferably, further improving the airtightness detection device for the sealing ring, the adjacent surfaces of the upper detection plate 1 and the lower detection plate 2 are working surfaces;

[0018] The working surfaces of the upper detection plate 1 and the lower detection plate 2 are formed into mirror surfaces with a roughness less than or equal to Ra0.8um.

[0019] Preferably, further improving the airtightness detection device for the sealing ring, the spacing adjustment and limiting structure 3 is at least arranged on the symmetric two side edges of the lower detection plate 2.

[0020] Preferably, further improving the airtightness detection device for the sealing ring, the spacing adjustment and limiting structure 3 includes:

[0021] A groove 3.1, which is formed on the edge of the lower detection plate 2;

[0022] A support block 3.2, which is arranged in the groove 3.1 and whose top surface is flush with the top surface of the lower detection plate 2 when it descends to the lowest height;

[0023] A height adjustment member 3.3, which is arranged in the fifth through hole at the bottom of the groove 3.1, whose top is connected to the support block 3.2, and can adjust the height of the support block 3.2 protruding from the groove 3.1.

[0024] Preferably, further improving the airtightness detection device for the sealing ring, the fifth through hole is formed with internal threads, the height adjustment member 3.3 is a bolt, and scale marks are formed on the bolt

[0025] Preferably, further improve the airtightness detection device for the sealing ring. The length range of the groove 3.1 is 100 mm to 200 mm, the width range is 15 mm to 30 mm, and the depth range is 10 mm to 20 mm.

[0026] Preferably, further improve the airtightness detection device for the sealing ring, and it further includes:

[0027] Four guide posts 7, respectively arranged at the four corners of the lower detection plate 2, and they can respectively pass through four sixth through holes at the four corners of the upper detection plate 1;

[0028] A support platform 8, which is fixed at the top of the four guide posts 7 and is used to support and fix the driving part 5;

[0029] The output end of the driving part 5 passes through the support platform 8 and is connected to the top surface of the upper detection plate 1.

[0030] Preferably, further improve the airtightness detection device for the sealing ring. The diameter range of the guide post 7 is 25 to 50 mm, and the height range is 200 mm to 500 mm.

[0031] Preferably, further improve the airtightness detection device for the sealing ring. The upper detection plate 1 and the lower detection plate 2 are formed into a cuboid with a thickness range of 30 mm to 40 mm, a length range of 500 mm to 1000 mm, and a width range of 500 mm to 1000 mm.

[0032] Preferably, further improve the airtightness detection device for the sealing ring. The vacuum pumping device is a vacuum pump or a helium mass spectrometry leak detection device, and the driving part 5 is a cylinder.

[0033] The using process of the present utility model is as follows;

[0034] Place the sealing ring to be detected on the lower detection plate, and the first through hole must be located inside the sealing ring. There is no requirement for whether the sealing ring is circular, that is, there is no requirement for the shape of the sealing ring when testing the seal. The sizes of the upper and lower detection plates of the present utility model can be designed according to needs, and can detect the airtightness of any inner diameter above 16 mm, wire diameter specification size, and any compression ratio sealing ring. Correspondingly, since the inner diameter of the detected product is at least 4 mm larger than the diameter of the air extraction hole of the detection plate, the minimum detection inner diameter of the present utility model is 20 mm; if the diameter of the sealing ring exceeds the size of the detection plate surface, the sealing ring can be placed between the upper and lower detection plates during detection.

[0035] Adjust the height adjusting part according to the wire diameter of the sealing ring, and then adjust the height of the support block protruding from the groove, that is, protruding from the top surface of the lower detection plate. The protruding height cannot be greater than the wire diameter of the sealing ring, and it is optimal to be slightly less than the wire diameter of the sealing ring. This height is determined by the wire diameter of the sealing ring and the compression ratio.

[0036] The driving member presses the upper detection plate downward until it is limited by the spacing adjustment limiting structure. At this time, the sealing ring is compressed, and then the upper detection plate, the lower detection plate and the sealing ring jointly enclose a sealed space.

[0037] Turn on the vacuum pumping device to pump air, and at the same time, the pressure gauge reads the value.

[0038] Correspondingly, if it is necessary to simulate the temperature environment of the sealing ring, first turn on the first heating device and the second heating device. After reaching the specified temperature, turn on the vacuum pumping device to pump air, and at the same time, the pressure gauge reads the value, so as to realize the simulation of the temperature of the sealing ring use environment and the airtightness detection of the sealing ring, making up for the deficiency of the airtightness detection at normal temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The drawings of the present utility model are intended to show the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the present utility model, supplementing the description in the specification. However, the drawings of the present utility model are schematic diagrams not drawn to scale, and thus may not accurately reflect the precise structure or performance characteristics of any given embodiment. The drawings of the present utility model should not be construed as limiting or restricting the scope of the numerical values or properties covered by the exemplary embodiments according to the present utility model. The present utility model will be further described in detail below in conjunction with the drawings and specific embodiments:

[0040] Figure 1 It is a schematic structural diagram of the first embodiment of the present utility model.

[0041] Figure 2 It is a schematic structural diagram of the second embodiment of the present utility model.

[0042] Figure 3 It is a schematic structural diagram of a preferred embodiment of the spacing adjustment limiting structure of the present utility model.

[0043] DESCRIPTION OF THE REFERENCE NUMERALS

[0044] Upper detection plate 1;

[0045] Lower detection plate 2;

[0046] Spacing adjustment limiting structure 3;

[0047] Groove 3.1;

[0048] Support block 3.2;

[0049] Height adjustment member 3.3;

[0050] Suction pipe 4;

[0051] Driving member 5;

[0052] Pressure gauge 6;

[0053] Guide post 7;

[0054] Support platform 8. Specific implementation mode

[0055] The following illustrates the implementation mode of the present utility model through specific specific embodiments. Those skilled in the art can fully understand other advantages and technical effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through different specific implementation modes. The details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without departing from the overall design concept of the utility model. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present utility model can be implemented in many different forms and should not be construed as being limited only to the specific embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present utility model thorough and complete, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0056] The first embodiment, refer to Figure 1 As shown, the present utility model provides a sealing ring airtightness detection device, which can simulate the temperature environment of the sealing ring during use, and includes:

[0057] The upper detection plate 1, which is always arranged parallel to the lower detection plate 2;

[0058] The lower detection plate 2, between the top surface of which and the bottom surface of the upper detection plate 1 is used to accommodate the sealing ring to be detected;

[0059] The spacing adjustment and limiting structure 3, which is formed around the lower detection plate 2, is located between the lower detection plate 2 and the upper detection plate 1, and is used to adjust the spacing between the lower detection plate 2 and the upper detection plate 1; in this embodiment, the spacing adjustment and limiting structure 3 is arranged at the four edges of the lower detection plate 2;

[0060] The air extraction pipe 4, one end of which is airtightly connected to the first through hole at the geometric center of the lower detection plate 2, and the other end of which is connected to a vacuum extraction device; in this embodiment, the vacuum extraction device is a vacuum pump or a helium mass spectrometry leak detection device;

[0061] The first heating device, which is installed in the second through hole on the side wall of the upper detection plate 1 and is used to provide different temperature condition environments required for airtightness detection;

[0062] The second heating device is installed in the third through hole on the side wall of the lower detection plate 2 and is used to provide an environment of different temperature conditions required for airtightness detection;

[0063] The driving member 5 is connected to the top surface of the upper detection plate 1 and presses the upper detection plate 1 downward against the lower detection plate 2; the driving member 5 can be hoisted and fixed on an external structure;

[0064] The pressure gauge 6 is airtightly connected to the fourth through hole on the top surface of the upper detection plate 1;

[0065] The center of the fourth through hole is coaxially aligned with the center of the first through hole in the vertical direction.

[0066] Wherein, the adjacent surfaces of the upper detection plate 1 and the lower detection plate 2 are working surfaces; the working surfaces of the upper detection plate 1 and the lower detection plate 2 are formed into a mirror surface with a roughness less than or equal to Ra0.8um.

[0067] Wherein, the upper detection plate 1 and the lower detection plate 2 are formed into a cuboid with a thickness range of 30 mm to 40 mm, preferably 30 mm, 35 mm or 40 mm, a length range of 500 mm to 1000 mm, preferably 500 mm, 600 mm, 700 mm, 800 mm, 900 mm or 1000 mm, and a width range of 500 mm to 1000 mm, preferably 500 mm, 600 mm, 700 mm, 800 mm, 900 mm or 1000 mm.

[0068] In addition, it should also be understood that although terms such as "first" and "second" can be used here to describe different elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the exemplary embodiments of the present invention, the first element, component, region, layer or part discussed below can also be referred to as the second element, component, region, layer or part.

[0069] Second embodiment, refer to Figure 2 As shown, the present invention provides a sealing ring airtightness detection device, which is a further improvement based on the above first embodiment, and further includes:

[0070] Four guiding columns 7 are respectively arranged at the four corners of the lower detection plate 2 and can respectively pass through four sixth through holes at the four corners of the upper detection plate 1;

[0071] The support platform 8 is fixed on the tops of the four guiding columns 7 and is used to support and fix the driving member 5;

[0072] The output end of the driving member 5 passes through the support platform 8 and is connected to the top surface of the upper detection plate 1.

[0073] Among them, the diameter range of the guide post 7 is 25 mm to 50 mm, and the diameter is preferably 25 mm, 30 mm, 35 mm, 40 mm, 45 mm or 50 mm. The height range is 200 mm to 500 mm, and the height is preferably 200 mm, 300 mm, 400 mm or 500 mm. Embodiment

[0074] Reference Figure 3 As shown, the present utility model provides a spacing adjustment and limiting structure that can be used in the above first embodiment or second embodiment, which includes:

[0075] A groove 3.1, which is formed at the edge of the lower detection plate 2;

[0076] A support block 3.2, which is arranged in the groove 3.1, and when it descends to the lowest height, its top surface is flush with the top surface of the lower detection plate 2;

[0077] A height adjustment member 3.3, which is arranged in the fifth through hole at the bottom of the groove 3.1, its top is connected to the support block 3.2, and it can adjust the height of the support block 3.2 protruding from the groove 3.1.

[0078] Preferably, the fifth through hole is formed with internal threads, and the height adjustment member 3.3 is a bolt, and scale marks are formed on the bolt

[0079] Preferably, the length range of the groove 3.1 is 100 mm to 200 mm, and the length is preferably 110 mm, 120 mm, 130 mm, 140 mm, 150 mm, 160 mm, 170 mm, 180 mm, 190 mm or 200 mm. The width range is 15 mm to 30 mm, and the width is preferably 15 mm, 16 mm, 17 mm, 18 mm, 19 mm or 20 mm. The depth range is 10 mm to 20 mm, and the depth is preferably 10 mm, 11 mm, 12 mm, 13 mm, 14 mm, 15 mm, 16 mm, 17 mm, 18 mm, 19 mm or 20 mm.

[0080] Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present utility model belongs. It will also be understood that terms such as those defined in a general dictionary shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and shall not be interpreted in an ideal or overly formal sense unless explicitly defined herein.

[0081] The above has described the present utility model in detail through specific embodiments and examples, but these do not constitute a limitation to the present utility model. Without departing from the principle of the present utility model, those skilled in the art can also make many modifications and improvements, which should also be regarded as the protection scope of the present utility model.

Claims

1. An airtightness detection device for a sealing ring, which can simulate the temperature environment of the sealing ring during use, is characterized in that Including: An upper detection plate (1) which is always arranged parallel to the lower detection plate (2); A lower detection plate (2), between the top surface of which and the bottom surface of the upper detection plate (1) is for accommodating the sealing ring to be detected; A spacing adjustment and limiting structure (3) which is formed around the lower detection plate (2), located between the lower detection plate (2) and the upper detection plate (1), and is used for adjusting the spacing between the lower detection plate (2) and the upper detection plate (1); An air extraction pipe (4), one end of which is hermetically connected to the first through hole at the geometric center of the lower detection plate (2), and the other end of which is connected to a vacuum pumping device; A first heating device which is installed in the second through hole on the side wall of the upper detection plate (1) and is used for providing an environment with different temperature conditions required for airtightness detection; A second heating device which is installed in the third through hole on the side wall of the lower detection plate (2) and is used for providing an environment with different temperature conditions required for airtightness detection; A driving member (5) which is connected to the top surface of the upper detection plate (1) and presses the upper detection plate (1) downward against the lower detection plate (2); A pressure gauge (6) which is hermetically connected to the fourth through hole on the top surface of the upper detection plate (1); The center of the fourth through hole is coaxial with the center of the first through hole in the vertical direction.

2. The airtightness detection device for the sealing ring according to claim 1, characterized in that: The adjacent surfaces of the upper detection plate (1) and the lower detection plate (2) are working surfaces; The working surfaces of the upper detection plate (1) and the lower detection plate (2) are formed into mirror surfaces with a roughness less than or equal to Ra0.8um.

3. The airtightness detection device for the sealing ring according to claim 1, characterized in that: The spacing adjustment and limiting structure (3) is at least arranged on the symmetric two-side edges of the lower detection plate (2).

4. The airtightness detection device for the sealing ring according to claim 1, characterized in that, The spacing adjustment and limiting structure (3) includes: A groove (3.1) which is formed on the edge of the lower detection plate (2); A support block (3.2) which is arranged in the groove (3.1), and when it descends to the lowest height, its top surface is flush with the top surface of the lower detection plate (2); A height adjustment member (3.3) which is arranged in the fifth through hole at the bottom of the groove (3.1), the top of which is connected to the support block (3.2), and can adjust the height of the support block (3.2) protruding from the groove (3.1).

5. The airtightness detection device for the sealing ring according to claim 4, characterized in that: The fifth through hole is formed with internal threads, and the height adjustment member (3.3) is a bolt, and scale marks are formed on the bolt.

6. The airtightness detection device for the sealing ring according to claim 4, characterized in that: The length range of the groove (3.1) is 100mm - 200mm, the width range is 15mm - 30mm, and the depth range is 10mm - 20mm.

7. The airtightness detection device for the sealing ring according to claim 1, characterized in that, Also including: Four guide posts (7) which are respectively arranged at the four corners of the lower detection plate (2) and can respectively pass through the four sixth through holes at the four corners of the upper detection plate (1); A support platform (8) which is fixed at the top of the four guide posts (7) and is used for supporting and fixing the driving member (5); The output end of the driving member (5) passes through the support platform (8) and is connected to the top surface of the upper detection plate (1).

8. The airtightness detection device for the sealing ring according to claim 7, wherein: The diameter range of the guide posts (7) is 25 - 50mm, and the height range is 200mm - 500mm.

9. The airtightness detection device for the sealing ring according to any one of claims 1-8, characterized in that: The upper detection plate (1) and the lower detection plate (2) are formed into a cuboid with a thickness range of 30mm - 40mm, a length range of 500mm - 1000mm, and a width range of 500mm - 1000mm.

10. The sealing ring airtightness detection device according to any one of claims 1 - 8, characterized in that: The vacuum pumping device is a vacuum pump or a helium mass spectrometry leak detection device, and the driving member (5) is a cylinder.

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