Jig for cleaning quartz piece

Abstract

The jig for cleaning the quartz pieces comprises a basket body, the basket body comprises a bottom plate, side plates and blocking pieces, the side plates are detachably installed on the bottom plate and define a quartz piece cleaning containing cavity, at least two side plates are arranged in parallel, the blocking pieces are installed between the two side plates which are arranged in parallel, and the quartz pieces are arranged between the two adjacent blocking pieces. The bottom plate, the side plates and the blocking pieces are all provided with a plurality of through holes and are all made of corrosion-resistant materials. According to the jig for cleaning the quartz piece, a plurality of components can be contained at the same time, the multiple components can be cleaned at the same time, the cleaning efficiency is improved, and cleaning liquid can be saved conveniently; in addition, through holes are formed in the bottom plate, the side plates, the blocking pieces and the like, free flowing of cleaning liquid is facilitated, and the cleaning quality is guaranteed; the bottom plate, the side plates, the blocking pieces and the like are all made of corrosion-resistant materials such as polyvinylidene fluoride, and the applicable cleaning fluid range is wide. The device is simple in structure and convenient to popularize and use.

Description

Technical Field

[0001] The utility model relates to the field of cleaning components of semiconductor equipment, in particular to a jig for cleaning quartz parts. Background Art

[0002] In semiconductor factories, regular equipment maintenance is required to ensure normal operation, and component cleaning is a key part of equipment maintenance. For etching equipment, such as the Centura ACP EPI300 series produced by Applied Materials, the components within the chamber are mostly made of quartz and are ring-shaped. In the accompanying cleaning equipment, components can only be placed flat in the cleaning tank. Since components cannot be stacked, each cleaning tank can only clean one component at a time. This results in low cleaning efficiency and waste of cleaning agents. Therefore, how to increase the cleaning volume per time has become a technical problem that needs to be solved in this field. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a quartz cleaning jig, which is suitable for cleaning quartz parts of etching equipment, and can realize the simultaneous cleaning of multiple quartz parts, improve the cleaning efficiency, save cleaning fluid,

[0004] In order to solve the above technical problems, the present invention provides a quartz cleaning jig, comprising a basket, wherein the basket comprises:

[0005] A bottom plate having a plurality of through holes;

[0006] Side panels are detachably mounted on the bottom panel, the side panels being perpendicular to the bottom panel, the number of the side panels being at least four, the side panels enclosing a receiving cavity for cleaning the quartz piece, the side panels having a plurality of through holes, and at least two side panels being arranged in parallel;

[0007] a baffle, one side of which is detachably mounted on one of the two parallel side plates, or two opposite sides of which are detachably mounted on the two parallel side plates, the baffle being located in the accommodating cavity, the baffle being provided with a plurality of baffles, the quartz piece being placed between two adjacent baffles, and the baffle being provided with a plurality of through holes;

[0008] The bottom plate, the side plate and the baffle are made of corrosion-resistant material.

[0009] Preferably, the bottom plate is formed in a rectangular shape, and the number of the side plates is four, and the four side plates are detachably mounted on the four sides of the bottom plate.

[0010] Preferably, the bottom plate, the side plates, and the four side plates are connected via fasteners.

[0011] Preferably, two pieces of the side plates arranged in parallel are each provided with a slot at a corresponding position, and the edge of the baffle is installed in the slot.

[0012] Preferably, the slot is formed into a structure with an opening width smaller than the bottom width, and the structure of the edge of the baffle matches that of the slot.

[0013] Preferably, the total area of the through holes in the bottom plate is not less than 30% of the area of the bottom plate;

[0014] the total area of the through holes in the side plates is not less than 30% of the area of the side plates;

[0015] the total area of the through holes in the baffle is not less than 30% of the area of the baffle.

[0016] Preferably, at least two opposite side plates are provided with handles.

[0017] Preferably, the bottom plate, the side plates, and the baffle are made of polyvinylidene fluoride.

[0018] By providing a jig for cleaning quartz parts, the present utility model can accommodate multiple components simultaneously, realize simultaneous cleaning of multiple components, improve the cleaning efficiency, and also facilitate saving cleaning liquid; in addition, through holes are provided in the bottom plate, side plates, baffle, etc., facilitating the free flow of the cleaning liquid and ensuring the cleaning quality; the bottom plate, side plates, baffle, etc. are all made of corrosion-resistant materials such as polyvinylidene fluoride, and the applicable range of cleaning liquids is wide. The structure of the present utility model is simple and convenient for popularization and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the present utility model, the following briefly introduces the drawings required for the present utility model. Obviously, the drawings in the following description are only some embodiments of the present utility model, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0020] Figure 1 is a schematic diagram of an embodiment of the jig for cleaning quartz parts of the present utility model;

[0021] Figure 2 is a top view of an embodiment of the jig for cleaning quartz parts of the present utility model;

[0022] In the figure, 1-bottom plate; 2-side plate; 3-accommodation cavity; 4-baffle; 5-slot; 6-handle; 7-through hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The technical solutions in the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts belong to the scope of protection of the present utility model.

[0024] Reference Figure 1 and Figure 2 , which shows a fixture for cleaning quartz parts of the present utility model, including a basket body, and the basket body includes:

[0025] A bottom plate, which is provided with a plurality of through holes;

[0026] Side plates, which are detachably installed on the bottom plate, the side plates are perpendicular to the bottom plate, the number of the side plates is at least four, the side plates enclose a receiving cavity for cleaning quartz parts, the side plates are provided with a plurality of through holes, and at least two of the side plates are arranged in parallel;

[0027] A baffle, one side of which is detachably installed on one of the two side plates arranged in parallel, or two opposite sides of which are respectively detachably installed on the two side plates arranged in parallel, the baffle is located in the receiving cavity, there are a plurality of baffles, quartz parts are placed between two adjacent baffles, and the baffle is provided with a plurality of through holes;

[0028] The materials of the bottom plate, the side plates and the baffle are corrosion-resistant materials.

[0029] In the embodiment of the present utility model, the basket is used to accommodate the quartz parts to be cleaned. Since through holes are provided in the bottom plate, side plates and baffles of the basket, when the basket is placed in the cleaning tank, the cleaning liquid inside and outside the basket can flow freely, ensuring the cleaning effect. The pollutants washed off from the quartz parts can flow from inside the basket to outside the basket and be discharged through the drain pipe. The overall size and shape of the basket can be determined according to the size of the cleaning tank. For example, the cleaning tank is generally rectangular, and the basket can be set as a rectangular parallelepiped similar to the cleaning tank, and its length, width and height are slightly smaller than the cleaning tank, as long as it can be successfully placed in the cleaning tank. At least two side plates are arranged in parallel to facilitate the formation of a regular space after installing the baffles, so as to facilitate the placement of the quartz parts. The quartz parts are placed vertically between two adjacent baffles, and the distance between the two baffles can be set according to the width of the quartz parts to be cleaned. In the embodiment of the present utility model, since the quartz parts can be placed vertically between adjacent baffles, multiple quartz parts can be cleaned at a time. For the Centura ACP EPI 300 series models currently used in factories, 3 parts can be cleaned at a time, and all parts can be cleaned in 2 times, greatly improving the cleaning efficiency, shortening the cleaning time, saving a large amount of cleaning liquid, and also significantly reducing the cleaning cost. Since the cleaning time is shortened, the maintenance (PM) time of the entire equipment is also shortened.

[0030] In a specific embodiment, the bottom plate is formed as a rectangle, and the number of the side plates is four. The four side plates are respectively detachably installed on the four sides of the bottom plate. It can be understood that the accommodation cavity enclosed by the rectangular bottom plate and the four side plates is in the shape of a rectangular parallelepiped, which matches the cleaning tank in the current factory. Without wishing to be bound by this, if the cleaning tank is of other shapes, the basket is not limited to the shape of a rectangular parallelepiped.

[0031] In a specific embodiment, the bottom plate is connected to the side plates and the four side plates through fasteners. It can be understood that in order to ensure the detachable and firm connection between the bottom plate and the side plates and between the side plates, it is preferably connected through fasteners. However, without wishing to be bound by this, other common connection methods in the prior art such as mortise and tenon connection and snap connection can also be used.

[0032] In a specific embodiment, two parallel side plates are each provided with a slot at a corresponding position, and the edge of the baffle is mounted in the slot. Preferably, the slot is formed with a structure in which the opening width is smaller than the bottom width, and the structure of the edge of the baffle matches that of the slot. In this specific embodiment, the two parallel side plates being each provided with a slot at a corresponding position means that at positions opposite to each other, the plane formed by the two slots is perpendicular to the two parallel side plates; the distance between the slots can be, for example, an evenly spaced distribution at distances such as 1 cm, 1.5 cm, 2 cm or 3 cm, etc., or can be determined according to the thickness of the quartz piece to be cleaned; an evenly spaced distribution is preferably used because an evenly spaced distribution can be applied to a wider range of models. When cleaning is required, the baffle can be installed in the corresponding slot according to the thickness of the quartz piece. It should be noted that in order to install the baffle more firmly in the slot, for example, special settings can be made for the slot and the edge part of the baffle inserted into the slot. For example, the slot is set to have a structure in which the opening width is smaller than the bottom width, that is, the cross-section is trapezoidal, the short side of the trapezoid is the opening of the slot, the bottom side of the trapezoid is the bottom surface of the slot, and the edge of the baffle inserted into the slot is set to a shape matching the slot, which can improve the firmness of the connection between the baffle and the slot; one baffle with a width equal to the distance between the two parallel side plates can be installed in two opposite slots, or two baffles with a width smaller than half of the distance between the two parallel side plates can be installed (that is, there is a gap between the two baffles, which is more convenient for the flow of the cleaning liquid and improves the cleaning effect).

[0033] In a specific embodiment, the total area of the through holes of the bottom plate is not less than 30% of the area of the bottom plate; the total area of the through holes of the side plates is not less than 30% of the area of the side plates; the total area of the through holes of the baffle is not less than 30% of the area of the baffle. It can be understood that the area of the through holes accounting for the areas of the bottom plate, side plates and baffle determines the exchange efficiency of the cleaning liquid inside and outside the basket. The larger the area occupied by the through holes, the more beneficial it is for the flow of the cleaning liquid and the exchange inside and outside the basket. Therefore, within the range of the strength requirements of the basket, the larger the area occupied by the through holes, the better.

[0034] In a specific embodiment, at least two opposite side plates are provided with handles. It can be understood that when there are handles, it is convenient for personnel to move and operate.

[0035] In a specific embodiment, the materials of the bottom plate, the side plates and the baffle are polyvinylidene fluoride. It can be understood that since the cleaning liquid is generally a strong acid or a strong base, the bottom plate, side plates and baffle are required to have stable chemical properties and be resistant to the corrosion of strong acids and strong bases. For example, polyvinylidene fluoride material is selected, but it is not limited to this material, and materials resistant to the corrosion of strong acids and strong bases in the prior art can all be applicable to the present invention.

[0036] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the scope of protection of the present utility model.

Claims

1. A fixture for cleaning quartz parts, including a basket, characterized in that, The housing includes: a bottom plate, which is provided with a plurality of through holes; side plates, which are detachably mounted on the bottom plate, the side plates are perpendicular to the bottom plate, the number of the side plates is at least four, the side plates enclose a receiving cavity for cleaning quartz parts, the side plates are provided with a plurality of through holes, and at least two of the side plates are arranged in parallel; baffles, one side edge of which is detachably mounted on one of the two side plates arranged in parallel, or two opposite side edges of which are respectively detachably mounted on the two side plates arranged in parallel, the baffles are located in the receiving cavity, there are a plurality of the baffles, quartz parts are placed between two adjacent baffles, and the baffles are provided with a plurality of through holes; The materials of the bottom plate, the side plates and the baffles are corrosion-resistant materials.

2. The jig according to claim 1, characterized in that, The bottom plate is formed as a rectangle, the number of the side plates is four, and the four side plates are respectively detachably mounted on the four sides of the bottom plate.

3. The fixture according to claim 2, characterized in that, The bottom plate is connected to the side plates and the four side plates through fasteners.

4. The fixture according to claim 1, wherein Two side plates arranged in parallel are respectively provided with slots at corresponding positions, and the edges of the baffles are mounted in the slots.

5. The jig according to claim 4, characterized in that, The slot is formed as a structure with an opening width smaller than the bottom width, and the structure of the edge of the baffle matches that of the slot.

6. The fixture according to claim 1, wherein, The total area of the through holes of the bottom plate is not less than 30% of the area of the bottom plate; The total area of the through holes of the side plates is not less than 30% of the area of the side plates; The total area of the through holes of the baffles is not less than 30% of the area of the baffles.

7. The jig according to claim 1, characterized in that, At least two opposite side plates are provided with handles.

8. The jig according to claim 1, wherein The materials of the bottom plate, the side plates and the baffles are polyvinylidene fluoride.

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