Small galvanometer equipment, galvanometer control system and laser processing equipment

Abstract

The utility model relates to the technical field of laser, and discloses a small galvanometer device, a galvanometer control system and a laser processing device. The small galvanometer equipment is applied to a laser machining head and comprises a galvanometer, a galvanometer motor and a magnetic induction sensor, a rotating shaft and a rotating disc are arranged at the two ends of the galvanometer motor respectively, a magnet is arranged on the rotating shaft, and the magnetic induction sensor is arranged in the rotating disc and used for sensing magnetic field changes of the magnet and converting the magnetic field changes into electric signals to be output. Therefore, the small galvanometer device has the magnetic induction function, the small galvanometer device can send magnetic induction signals outwards and sense magnetic field changes to generate the magnetic induction signals, the induction zero point precision is high, temperature influences are avoided, reliability is high, application is wider, and the laser processing device comprising the small galvanometer device is high in reliability and wider in application.

Description

Technical Field

[0001] The utility model relates to the technical field of lasers, in particular to a small galvanometer device, a galvanometer control system and a laser processing device. Background Art

[0002] Laser processing devices can process any part and angle of a workpiece to achieve precise welding, marking, cutting or engraving, and are widely used in laser processing fields such as welding, cutting, marking or engraving.

[0003] Existing laser processing devices consist of a laser with a control circuit board for the laser processing device and a galvanometer drive circuit board, and a laser output device. A galvanometer motor is provided inside the laser output device. The galvanometer motor is used to drive the galvanometer to swing and reflect the laser beam. By controlling the galvanometer to swing at different amplitudes, the laser beam can be deflected at different angles. However, existing galvanometer motors are based on photoelectric sensors or grating sensors, which require a light-emitting diode to emit a light signal and then a photoelectric sensor to receive the light signal. Such a photoelectric induction type galvanometer motor has problems such as poor zero-point accuracy, temperature drift of the motor zero-point and swing amplitude, and inconvenience in production and manufacturing, resulting in poor reliability of the galvanometer motor. Summary of the Utility Model

[0004] Embodiments of the utility model aim to provide a small galvanometer device, a galvanometer control system and a laser processing device, which can solve the problems of poor zero-point accuracy of existing photoelectric induction type galvanometer motors and temperature drift of the motor zero-point and swing amplitude, resulting in poor reliability of the galvanometer motor.

[0005] To solve the above technical problems, a first aspect embodiment of the utility model provides a small galvanometer device applied to a laser processing head, including a galvanometer, a galvanometer motor and a magnetic induction sensor. A rotating shaft and a turntable are respectively arranged at two ends of the galvanometer motor. A magnet is arranged on the rotating shaft, and the magnetic induction sensor is arranged inside the turntable for sensing the magnetic field change of the magnet and converting it into an electrical signal for output.

[0006] Optionally, the small galvanometer device further includes a sensor circuit board and a sensor interface. The sensor circuit board is arranged inside the turntable. The magnetic induction sensor and the sensor interface are soldered on the sensor circuit board, and the sensor interface is electrically connected to the magnetic induction sensor.

[0007] Optionally, when the rotating shaft of the galvanometer motor rotates, it is in different preset positions, and the preset positions include the zero position, the left position and / or the right position; when the rotating shaft of the galvanometer motor is in the preset position of the zero position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a first magnetic induction signal for output, and the magnetic induction value of the first magnetic induction signal is the zero position reference value;

[0008] When the rotating shaft of the galvanometer motor is in the preset position of the left position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a second magnetic induction signal for output, and the magnetic induction value of the second magnetic induction signal is the left position reference value;

[0009] When the rotating shaft of the galvanometer motor is in the preset position of the right position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a third magnetic induction signal for output, the magnet emits a third magnetic induction signal outward, and the magnetic induction value of the third magnetic induction signal is the right position reference value.

[0010] Optionally, the magnet is sleeved or embedded in the rotating shaft.

[0011] Optionally, the galvanometer is any one of a reflecting mirror, a collimating mirror and a focusing mirror.

[0012] Correspondingly, an embodiment of the second aspect of the present invention provides a galvanometer control system, including a small galvanometer device and a galvanometer motor control board, wherein:

[0013] The magnetic induction sensor senses the magnetic field change of the magnet, converts it into a magnetic induction signal, and performs data communication with the galvanometer motor control board through the sensor interface to transmit the magnetic induction signal to the galvanometer motor control board;

[0014] The galvanometer motor control board is configured to obtain the change of the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change of the magnetic induction value, and perform closed-loop control on the galvanometer motor based on the drive control signal. Ensure that the galvanometer motor swings stably at the required frequency and amplitude.

[0015] Optionally, the galvanometer motor control board includes an error calculation circuit, a position feedforward circuit, an adjustment circuit, a speed adjustment circuit, a multiplexing circuit, a power drive circuit and a magnetoelectric detection circuit, wherein:

[0016] The galvanometer control system further includes a microcontroller, and the microcontroller is configured to output a target position signal of the galvanometer motor;

[0017] The position feedforward circuit is connected to the multiplexing circuit, and is configured to generate a target position feedback signal based on the target position signal and transmit the target position feedback signal to the multiplexing circuit;

[0018] The magnetoelectric detection circuit is connected to the sensor interface, and is used to obtain the change in the magnetic induction value from the magnetic induction signal, and detect the actual position signal of the galvanometer motor based on the change in the magnetic induction value;

[0019] The error calculation circuit is used to output a position error signal based on the actual position signal and the target position signal;

[0020] The adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is used to generate a position adjustment signal based on the position error signal, and transmit the position adjustment signal to the multiplexing circuit;

[0021] The speed adjustment circuit is connected to the multiplexing circuit, and is used to generate a speed adjustment signal based on the actual position signal, and feedback the speed adjustment signal to the multiplexing circuit;

[0022] The multiplexing circuit is connected to the power drive circuit, and is used to combine and generate a multiplexed signal based on the target position feedback signal, the position adjustment signal, and the speed adjustment signal, and transmit the multiplexed signal to the power drive circuit;

[0023] The power drive circuit is used to amplify the multiplexed signal, output a drive control signal, and achieve closed-loop control of the position and swing frequency amplitude of the galvanometer motor based on the drive control signal.

[0024] Optionally, the adjustment circuit includes an integral adjustment circuit and / or a proportional adjustment circuit, where:

[0025] The integral adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is used to generate an integral adjustment signal based on the position error signal, and transmit the integral adjustment signal to the multiplexing circuit;

[0026] The proportional adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is used to generate a proportional adjustment signal based on the position error signal, and transmit the proportional adjustment signal to the multiplexing circuit.

[0027] Optionally, the galvanometer motor control board further includes a current detection circuit, and the current detection circuit is respectively connected to the galvanometer motor and the power drive circuit, and is used to sample the current of the galvanometer motor, obtain the sampled current, and output the sampled current to the power drive circuit.

[0028] Accordingly, an embodiment of the third aspect of the present utility model provides a laser processing device, and the laser processing device includes the galvanometer control system described in the embodiment of the second aspect of the present utility model.

[0029] Compared with the prior art, the present utility model provides a small galvanometer device, a galvanometer control system and a laser processing device. The small galvanometer device is applied to a laser processing head and includes a galvanometer, a galvanometer motor and a magnetic induction sensor. A rotating shaft and a turntable are respectively arranged at two ends of the galvanometer motor. A magnet is arranged on the rotating shaft, and a magnetic induction sensor is arranged inside the turntable for sensing the magnetic field change of the magnet and converting it into an electrical signal for output. Thus, by arranging the rotating shaft inside the galvanometer motor and the magnet on the rotating shaft, the galvanometer motor becomes a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and being not affected by temperature. The magnetic induction sensor senses the magnetic field change when the rotating shaft of the galvanometer motor is at different preset positions and converts it into a magnetic induction signal, and transmits the magnetic induction signal to the galvanometer motor control system, so that the small galvanometer device has a magnetic induction function. The small galvanometer device itself can send out magnetic induction signals and generate magnetic induction signals according to the known magnetic field change. The induction zero-point accuracy is high and not affected by temperature, and the reliability is high, and it has a wider application. It also makes the laser processing device including the small galvanometer device have high reliability and a wider application. Thus, the problem that the existing photoelectric induction type galvanometer motor has poor zero-point accuracy and the motor zero-point and swing amplitude have temperature drift, resulting in poor reliability, can be solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplary illustrations do not limit the embodiments. Elements with the same reference numerals in the drawings represent similar elements. Unless otherwise stated, the drawings in the drawings do not constitute a proportional limitation.

[0031] Figure 1 is a schematic structural diagram of a small galvanometer device provided by the present utility model;

[0032] Figure 2 is another schematic structural diagram of a small galvanometer device provided by the present utility model;

[0033] Figure 3 is a schematic functional diagram of a small galvanometer device provided by the present utility model;

[0034] Figure 4 is a schematic diagram of the galvanometer motor of a small galvanometer device provided by the present utility model at different preset positions;

[0035] Figure 5 is a schematic structural diagram of a galvanometer control system provided by the present utility model;

[0036] Figure 6It is a detailed structural schematic diagram of a galvanometer control system provided by the present utility model;

[0037] Figure 7 It is a structural schematic diagram of a laser processing device provided by the present utility model.

[0038] The reference numerals are shown in the following table:

[0039] Laser processing equipment 100 Galvo control system 10 Miniature galvo equipment 11 Galvo motor control board 12 Microcontroller 13 Galvo 111 Galvo motor 112 Magnetic induction sensor 113 Sensor interface 114 Sensor circuit board 115 Turntable 116 Rotating shaft 1121 Magnet 1122 Position feedforward circuit 121 Error calculation circuit 122 Regulating circuit 123 Speed regulating circuit 124 Multiplexing circuit 125 Power drive circuit 126 Current detection circuit 127 Magnetoelectric detection circuit 128 Integral regulating circuit 1231 Proportional regulating circuit 1232 Detailed implementation manners

[0040] For the convenience of understanding the present utility model, the present utility model will be described in more detail below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is expressed as "fixed to" another element, it can be directly on the other element, or there can be one or more intermediate elements therebetween. When an element is expressed as "connected to" another element, it can be directly connected to the other element, or there can be one or more intermediate elements therebetween. The terms "upper", "lower", "inner", "outer", "bottom", etc. used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0041] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in this specification in the description of the present utility model are only for the purpose of describing specific embodiments and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0042] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0043] The laser processing device can process any part and at any angle of the workpiece, achieving precise welding, marking, cutting or engraving, and is widely applied to laser processing fields such as welding, cutting, marking or engraving.

[0044] The laser processing device can process any part and at any angle of the workpiece, achieving precise welding, marking, cutting or engraving, and is widely applied to laser processing fields such as welding, cutting, marking or engraving.

[0045] The existing laser processing equipment consists of a laser with a control circuit board for the laser processing equipment and a galvanometer driving circuit board, and a laser output device. A galvanometer motor is provided inside the laser output device. The galvanometer motor is used to drive the galvanometer to swing and make the galvanometer reflect the laser beam. By controlling the galvanometer to swing with different amplitudes, the laser beam can be deflected by different angles.

[0046] The galvanometer motor is a special swinging motor. Different from ordinary rotating motors, its rotor cannot rotate but can only deflect, and its deflection angle is proportional to the current. The galvanometer motor is a special motion device specifically used in the field of laser processing. It can be applied to laser scanning, drive the galvanometer to swing, and make the galvanometer reflect the laser beam. Under the control of the galvanometer control system, the galvanometer motor can move the laser beam in different directions and focus it at different positions, achieving precise marking, cutting or engraving. It can locate the laser beam on the surface of the workpiece and guide it along a predetermined path, enabling the laser beam to move on the surface of the workpiece at a very high speed. It can also precisely control the path and speed of the laser beam to achieve complex pattern, text or graphic marking; it can also be used to adjust the focal length of the laser beam to ensure clear marking on the workpiece surface at different heights. Moreover, by using multiple galvanometers, marking of different shapes and curved surfaces on three-dimensional objects can be achieved.

[0047] However, the existing galvanometer motors are based on photoelectric sensors or grating sensors, which require a light-emitting diode to emit a light signal and then a photoelectric sensor to receive the light signal. This type of photoelectric induction galvanometer motor has problems such as poor zero-point accuracy, temperature drift of the motor zero-point and swing amplitude, and inconvenient production and manufacturing. As a result, the reliability of the galvanometer motor is poor, and the reliability of the laser processing equipment containing the galvanometer motor is also poor.

[0048] To this end, the utility model provides a small galvanometer device for use in a laser processing head, comprising a galvanometer, a galvanometer motor, and a magnetic induction sensor. The galvanometer motor is provided with a rotating shaft and a turntable at each end, a magnet is provided on the rotating shaft, and the magnetic induction sensor is provided inside the turntable for sensing changes in the magnetic field of the magnet and converting them into electrical signals for output. This allows the galvanometer motor to become a magnetic induction type galvanometer motor, which has the characteristics of high zero point accuracy and is not affected by temperature. The galvanometer motor has a built-in rotating shaft and a magnet provided on the rotating shaft, which allows the galvanometer motor to become a magnetic induction type galvanometer motor, which has the characteristics of high zero point accuracy and is not affected by temperature. The magnetic induction sensor senses changes in the magnetic field when the galvanometer motor's rotating shaft is at different preset positions and converts them into magnetic induction signals, which are then transmitted to the galvanometer motor control system. This allows the small galvanometer device to have a magnetic induction function. The small galvanometer device itself can send magnetic induction signals and sense changes in the magnetic field to generate magnetic induction signals. This allows the galvanometer device to have high zero point accuracy and is not affected by temperature, is highly reliable, and has a wider range of applications. This also allows the laser processing equipment containing the small galvanometer device to have high reliability and a wider range of applications. This can solve the problem that the existing photoelectric induction galvanometer motor has poor zero point accuracy and poor reliability due to temperature drift of the motor zero point and swing amplitude.

[0049] In order to facilitate understanding of the above utility model concepts of the present invention, the above utility model concepts of the present invention are described in more detail below with reference to the accompanying drawings and specific embodiments.

[0050] In one embodiment, Figure 1 and Figure 2 As shown, the present invention provides a small galvanometer device 11, which is applied to a laser processing head and includes a galvanometer 111, a galvanometer motor 112 and a magnetic induction sensor 113;

[0051] The galvanometer motor 112 includes a rotating shaft 1121 and a rotating disk 116 . The rotating shaft 1121 and the rotating disk 116 are arranged at both ends of the galvanometer motor 112 . A magnet 1122 is arranged on the rotating shaft 1121 .

[0052] The magnetic induction sensor 113 is disposed inside the turntable 116 and is used to sense changes in the magnetic field of the magnet and convert them into electrical signals for output.

[0053] In this embodiment, by providing a small galvanometer device applied to a laser processing head, which includes a galvanometer, a galvanometer motor, and a magnetic induction sensor. The two ends of the galvanometer motor are respectively provided with a rotating shaft and a turntable. The magnetic induction sensor is arranged inside the turntable and is used to sense the magnetic field change of the magnet and convert it into an electrical signal for output. This makes the galvanometer motor a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and being unaffected by temperature. The magnetic induction sensor senses the magnetic field change when the rotating shaft of the galvanometer motor is at different preset positions and converts it into a magnetic induction signal, and transmits the magnetic induction signal to the galvanometer motor control system, enabling the small galvanometer device to have a magnetic induction function. The small galvanometer device itself can send out magnetic induction signals, obtain magnetic field changes and convert them into electrical signals. It has high induction zero-point accuracy, is unaffected by temperature, has high reliability, and is more widely applicable. It also makes the laser processing equipment including the small galvanometer device have high reliability and be more widely applicable. Thus, it can solve the problems that the existing photoelectric induction type galvanometer motor has poor zero-point accuracy, and there are temperature drifts in the motor zero-point and swing amplitude, resulting in poor reliability.

[0054] In one embodiment, as Figure 1 and Figure 3 shown, the small galvanometer device 11 further includes a sensor circuit board 115 and a sensor interface 114. The sensor circuit board 115 is arranged inside the turntable 116. The magnetic induction sensor 113 and the sensor interface 114 are soldered on the sensor circuit board 115, and the sensor interface 114 is electrically connected to the magnetic induction sensor 113.

[0055] In this embodiment, by providing a small galvanometer device, including a galvanometer, a galvanometer motor, a magnetic induction sensor, a sensor interface, and a sensor circuit board. The two ends of the galvanometer motor are respectively provided with a rotating shaft and a turntable. The sensor circuit board is arranged inside the turntable. The magnetic induction sensor and the sensor interface are soldered on the sensor circuit board, and the sensor interface is electrically connected to the magnetic induction sensor. This makes the galvanometer motor a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and being unaffected by temperature. The magnetic induction sensor senses the magnetic field change when the rotating shaft of the galvanometer motor is at different preset positions and converts it into a magnetic induction signal, and transmits the magnetic induction signal to the galvanometer motor control system through the sensor interface, enabling the small galvanometer device to have a magnetic induction function. The small galvanometer device itself can send out magnetic induction signals, obtain magnetic field changes and convert them into electrical signals. It has high induction zero-point accuracy, is unaffected by temperature, has high reliability, and is more widely applicable. It also makes the laser processing equipment including the small galvanometer device have high reliability and be more widely applicable. Thus, it can solve the problems that the existing photoelectric induction type galvanometer motor has poor zero-point accuracy, and there are temperature drifts in the motor zero-point and swing amplitude, resulting in poor reliability.

[0056] In one embodiment, as Figure 1As shown in the figure, the small galvanometer device 11 includes a galvanometer 111, a galvanometer motor 112, and a magnetic induction sensor 113. Among them, a rotating shaft 1121 and a turntable 116 are provided at both ends of the galvanometer motor 112. A magnet 1122 is provided on the rotating shaft 1121. A sensor circuit board 115 is arranged inside the turntable 116 for sensing the magnetic field change of the magnet and converting it into an electrical signal for output.

[0057] Specifically, the galvanometer 111 is used to reflect the laser beam emitted by the laser under the drive of the galvanometer motor 112 and change the direction of the laser beam. Thus, by controlling the galvanometer 111 to swing with different amplitudes by the galvanometer motor 112, the laser beam can be deflected by different angles.

[0058] The galvanometer motor 112 is used to drive the galvanometer 111 to swing according to the control signal output by the galvanometer motor control board 12, and make the galvanometer 111 reflect the laser beam, so as to position the laser beam on the surface of the workpiece and guide it along a predetermined path to achieve precise marking, cutting or engraving. Specifically, under the control of the control signal output by the galvanometer motor control board 12, the galvanometer motor 112 drives the galvanometer 111 to swing, so that the laser beam emitted by the laser moves along different directions on the surface of the workpiece and is focused at different positions, and precisely controls the path and speed of the laser beam to achieve complex pattern, text or graphic marking, and adjusts the focal length of the laser beam to ensure clear marking on the surface of workpieces at different heights.

[0059] As Figure 1 shown in the figure, the galvanometer motor 112 includes a rotating shaft 1121 and a magnet 1122 provided on the rotating shaft 1121. The magnet 1122 is used to emit a magnetic induction signal outward. By sleeving the magnet 1122 on the rotating shaft 1121, the galvanometer motor 112 becomes a magnetic induction type galvanometer motor, with magnetic induction function, so that the galvanometer motor 112 has high zero-point accuracy, is not affected by temperature, is convenient for production and manufacturing, and is more widely and reliably applied.

[0060] As Figure 4As shown in the figure, when the rotating shaft 1121 of the galvanometer motor 112 rotates, it can be in different preset positions. The preset positions can be the zero position, the left position, or the right position. The left or right position of the preset position is referenced to the preset position of the zero position. The position to the left of the preset position of the zero position is the preset position of the left position, and the position to the right of the zero position is the preset position of the right position. When the rotating shaft 1121 of the galvanometer motor 112 is in the preset position of the zero position, the magnetic induction sensor 113 senses the change in the magnetic field of the magnet and converts it into a first magnetic induction signal for output. At this time, the magnetic induction value of the first magnetic induction signal is the zero position reference value (for example, the zero position reference value is 0V); when the rotating shaft 1121 of the galvanometer motor 112 is in the preset position of the left position, the magnetic induction sensor 113 senses the change in the magnetic field of the magnet and converts it into a second magnetic induction signal for output. At this time, the magnetic induction value of the second magnetic induction signal is the left position reference value (for example, the left position reference value is 0.5V); when the rotating shaft 1121 of the galvanometer motor 112 is in the preset position of the right position, the magnetic induction sensor 113 senses the change in the magnetic field of the magnet and converts it into a third magnetic induction signal for output. At this time, the magnetic induction value of the third magnetic induction signal is the right position reference value (for example, the right position reference value is 0.5V). The magnetic induction value of the magnetic induction signal is related to the material of the magnet 1122. Different materials of the magnet 1122 result in different magnetic induction values of the magnetic induction signal emitted by the magnet 1122. It can be understood that Figure 4 The angles of the left and right positions shown in the figure relative to the zero position are only for illustration. The angles of the left and right positions relative to the zero position can be set according to actual needs and will not be elaborated here.

[0061] In this embodiment, the magnetic induction sensor 113 senses the change in the magnetic field of the magnet 1122 when the rotating shaft 1121 is in different preset positions and converts it into a magnetic induction signal for output. Thus, in addition to being able to send out magnetic induction signals externally, the small galvanometer device 11 itself can also detect the change in the magnetic field to generate a magnetic induction signal and transmit the magnetic induction signal to the galvanometer motor control board 12 through the sensor interface 114, so that the galvanometer motor control board 12 can obtain the change in the magnetic induction value from the magnetic induction signal, generate a control signal based on the change in the magnetic induction value, and perform closed-loop control on the galvanometer motor based on the control signal, enabling more precise control of the galvanometer motor and ensuring that the galvanometer motor swings stably at the required frequency and amplitude.

[0062] In one embodiment, as Figure 1 shown, the galvanometer motor 112 includes a rotating shaft 1121 and a magnet 1122 disposed on the rotating shaft 1121. The magnet 1122 is sleeved on the rotating shaft 1121. As Figure 2 shown, the magnet 1122 can also be embedded in the rotating shaft 1121.

[0063] In one embodiment, the galvanometer 111 is any one of a reflecting mirror, a collimating mirror, and a focusing mirror.

[0064] Based on the same concept, in one embodiment, as Figure 1 and Figure 6 shown, the present utility model provides a galvanometer control system 10, which is applied to a laser processing device. The galvanometer control system includes the small galvanometer device 11 and the galvanometer motor control board 12 described in any of the above embodiments. The small galvanometer device 11 is communicatively connected to the galvanometer motor control board 12. Among them:

[0065] The small galvanometer device 11 is configured to send out and generate a magnetic induction signal, and transmit the magnetic induction signal to the galvanometer motor control board 12. The small galvanometer device 11 includes a galvanometer 111, a galvanometer motor 112, and a magnetic induction sensor 113. Among them, a rotating shaft 1121 and a turntable 116 are provided at both ends of the galvanometer motor 112. A magnet 1122 is provided on the rotating shaft 1121. The sensor circuit board 115 is disposed inside the turntable 116 for sensing the magnetic field change of the magnet and converting it into an electrical signal for output.

[0066] The galvanometer motor control board 12 is configured to obtain the change in the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change in the magnetic induction value, and perform a closed-loop control on the galvanometer motor 112 based on the drive control signal to ensure that the galvanometer motor 112 swings stably at a required frequency and amplitude.

[0067] In this embodiment, a galvanometer control system is provided and applied to a laser processing device. The galvanometer control system includes a small galvanometer device and a galvanometer motor control board. The small galvanometer device is communicatively connected to the galvanometer motor control board, where: The small galvanometer device is configured to send out a magnetic induction signal and generate a magnetic induction signal by sensing a magnetic field change, and transmit the magnetic induction signal to the galvanometer motor control board; Specifically, the small galvanometer device includes a galvanometer, a galvanometer motor, and a magnetic induction sensor. A rotating shaft and a turntable are arranged at both ends of the galvanometer motor. A magnet is provided on the rotating shaft. The sensor circuit board is arranged inside the turntable and is configured to sense the magnetic field change of the magnet and convert it into an electrical signal for output. And the electrical signal is transmitted to the galvanometer motor control board. Thus, by arranging a rotating shaft inside the galvanometer motor and a magnet sleeved on the rotating shaft, the galvanometer motor becomes a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and being unaffected by temperature; The magnetic induction sensor senses the magnetic field change when the rotating shaft of the galvanometer motor is at different preset positions and converts it into a magnetic induction signal, and transmits the magnetic induction signal to the galvanometer motor control board through the sensor interface; It is configured to obtain the change of the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change of the magnetic induction value, and perform a closed-loop control on the galvanometer motor based on the drive control signal to ensure that the galvanometer motor swings stably at the required frequency and swing amplitude. Thus, by arranging a rotating shaft inside the galvanometer motor and a magnet arranged on the rotating shaft, the galvanometer motor becomes a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and being unaffected by temperature; The galvanometer motor can be controlled more precisely to ensure that the galvanometer motor swings stably at the required frequency and swing amplitude. Thus, the problems that the existing photoelectric induction type galvanometer motor has poor zero-point accuracy, and there are temperature drifts in the motor zero point and swing amplitude, resulting in poor reliability of the galvanometer motor can be solved.

[0068] In one embodiment, the galvanometer motor control board 12 is communicatively connected to the small galvanometer device 11, and is configured to obtain the change of the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change of the magnetic induction value, and perform a closed-loop control on the galvanometer motor 112 based on the drive control signal to ensure that the galvanometer motor 112 swings stably at the required frequency and swing amplitude.

[0069] Specifically, as Figure 6 shown, the galvanometer motor control board 12 includes: a position feedforward circuit 121, an error calculation circuit 122, an adjustment circuit 123, a speed adjustment circuit 124, a multiplexing circuit 125, a power drive circuit 126, a current detection circuit 127, and a magnetoelectric detection circuit 128.

[0070] As Figure 5 shown, the galvanometer control system 10 further includes a microcontroller (Micro Controller Unit, MCU) 13. The microcontroller 13 is arranged on the galvanometer motor control board 12, and the microcontroller 13 is configured to output a target position signal of the galvanometer motor.

[0071] The position feedforward circuit 121 is connected to the multiplexing circuit 125, and is configured to generate a target position feedback signal based on the target position signal of the galvanometer motor output by the microcontroller 13 of the galvanometer control system 10, and transmit the target position feedback signal to the multiplexing circuit 125.

[0072] The magnetoelectric detection circuit 128 is connected to the sensor interface 114 of the small galvanometer device 11, and is configured to obtain the change of the magnetic induction value from the magnetic induction signal, and detect the actual position signal of the galvanometer motor 112 based on the change of the magnetic induction value.

[0073] The error calculation circuit 122 is configured to output a position error signal based on the actual position signal of the galvanometer motor 112 output by the magnetoelectric detection circuit 128 and the target position signal of the galvanometer motor 112 output by the microcontroller 13 of the galvanometer control system 10. The position error signal is the difference between the actual position signal of the galvanometer motor 112 and the target position signal of the galvanometer motor 112. For example, the error calculation circuit 122 can be implemented by a differential amplifier or a subtractor.

[0074] The adjustment circuit 123 is respectively connected to the error calculation circuit 122 and the multiplexing circuit 125, and is configured to generate a position adjustment signal based on the position error signal output by the error calculation circuit 122, and transmit the position adjustment signal to the multiplexing circuit 125.

[0075] Specifically, as Figure 5 shown, the adjustment circuit 123 includes an integral adjustment circuit 1231 and / or a proportional adjustment circuit 1232, where:

[0076] The integral adjustment circuit 1231 is respectively connected to the error calculation circuit 122 and the multiplexing circuit 125, and is configured to generate an integral adjustment signal based on the position error signal output by the error calculation circuit 122, and transmit the integral adjustment signal to the multiplexing circuit 125. For example, the integral adjustment circuit 1231 can be implemented by an integral arithmetic unit.

[0077] The proportional adjustment circuit 1232 is respectively connected to the error calculation circuit 122 and the multiplexing circuit 125, and is configured to generate a proportional adjustment signal based on the position error signal output by the error calculation circuit 122, and transmit the proportional adjustment signal to the multiplexing circuit 125. For example, the proportional adjustment circuit 1232 can be implemented by a proportional arithmetic unit.

[0078] The speed adjustment circuit 124 is connected to the multiplexing circuit 125, and is configured to generate a speed adjustment signal based on the actual position signal of the galvanometer motor 112 output by the magnetoelectric detection circuit 128, and feedback the speed adjustment signal to the multiplexing circuit 125.

[0079] The multiplexing circuit 125 is connected to the power driving circuit 126, and is used for generating a multiplexed signal by combining the target position feedback signal of the position feedforward circuit 121, the position adjustment signal of the adjustment circuit 123, and the speed adjustment signal of the speed adjustment circuit 124, and transmitting the multiplexed signal to the power driving circuit 126. Specifically, it is used for generating a multiplexed signal by combining the target position feedback signal of the position feedforward circuit 121, the integral adjustment signal of the integral adjustment circuit 1231, the proportional adjustment signal of the proportional adjustment circuit 1232, and the speed adjustment signal of the speed adjustment circuit 124, and transmitting the multiplexed signal to the power driving circuit 126. For example, the multiplexing circuit 125 can be implemented by a signal combiner or a multiplexer.

[0080] The current detection circuit 127 is respectively connected to the galvanometer motor 112 and the power driving circuit 126, and is used for sampling the current of the galvanometer motor 112 to obtain a sampled current, and outputting the sampled current to the power driving circuit 126.

[0081] The power driving circuit 126, which is connected to the multiplexing circuit 125, is used for amplifying the multiplexed signal output by the multiplexing circuit 125 and the sampled current output by the current detection circuit 127, outputting a drive control signal, and realizing closed-loop control of the position and swing frequency amplitude of the galvanometer motor 112 based on the drive control signal, so as to ensure that the galvanometer motor 112 swings stably at the required frequency and swing amplitude.

[0082] In this embodiment, by providing a galvanometer motor control board, the change of the magnetic induction value is obtained from the magnetic induction signal, and the actual position signal of the galvanometer motor is detected based on the change of the magnetic induction value, and compared with the target position signal of the galvanometer motor output by the microcontroller of the galvanometer control system, a position error signal is output, and the position error signal is adjusted in terms of integration, proportion, etc., to obtain a more accurate position adjustment signal of the galvanometer motor; at the same time, a speed adjustment circuit is used to generate a speed adjustment signal based on the actual position signal of the galvanometer motor output by the magnetoelectric detection circuit. The position adjustment signal and the speed adjustment signal form a multiplexed signal after passing through the multiplexing circuit, and then are amplified by the power driving circuit, and a drive control signal is output to realize closed-loop control of the position and swing frequency amplitude of the galvanometer motor, so as to ensure that the galvanometer motor swings stably at the required frequency and swing amplitude.

[0083] It should be noted that the above embodiments of the galvanometer control system and the embodiments of the small galvanometer device belong to the same concept. The specific implementation process can be seen in the embodiments of the small galvanometer device, and the technical features in the embodiments of the small galvanometer device are correspondingly applicable in the above embodiments of the galvanometer control system, and will not be elaborated here.

[0084] Based on the same concept, in one embodiment, such asFigure 7 As shown in Figure 7 , the present utility model provides a laser processing device 100, and the laser processing device 100 includes the galvanometer control system 10 described in any one of the above embodiments.

[0085] In this embodiment, the galvanometer control system 10 is the same as the galvanometer control system 10 described in any one of the above embodiments. For the specific structure and functions, reference can be made to the galvanometer control system 10 described in any one of the above embodiments, and details will not be elaborated here.

[0086] In this embodiment, by providing a laser processing device including a galvanometer control system, the galvanometer control system includes a small galvanometer device and a galvanometer motor control board. The small galvanometer device is communicatively connected to the galvanometer motor control board. Specifically: The small galvanometer device includes a galvanometer, a galvanometer motor, and a magnetic induction sensor. The two ends of the galvanometer motor are respectively provided with a rotating shaft and a turntable. The magnetic induction sensor is arranged inside the turntable and is used to sense the magnetic field change of the magnet and convert it into an electrical signal for output. The electrical signal is transmitted to the galvanometer motor control board through the sensor interface. Thus, through the rotating shaft built in the galvanometer motor and the magnet arranged on the rotating shaft, the galvanometer motor becomes a magnetic induction type galvanometer motor, which has the characteristics of high zero-point accuracy and is not affected by temperature; the magnetic induction sensor senses the magnetic field change when the rotating shaft of the galvanometer motor is in different preset positions and converts it into a magnetic induction signal, and transmits the magnetic induction signal to the galvanometer motor control board through the sensor interface; the magnetic induction sensor is used to sense the magnetic field change of the magnet and convert it into an electrical signal for transmission to the galvanometer motor control board; the galvanometer motor control board is used to obtain the change of the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change of the magnetic induction value, and perform closed-loop control on the galvanometer motor based on the drive control signal to ensure that the galvanometer motor swings stably at the required frequency and amplitude. Thus, through the small galvanometer device in the galvanometer control system, it can send out magnetic induction signals and generate detected magnetic induction signals by itself, enabling the galvanometer motor control board to obtain the change of the magnetic induction value from the magnetic induction signals, generate a control signal based on the change of the magnetic induction value, and perform closed-loop control on the galvanometer motor based on the control signal, which can more precisely control the galvanometer motor to ensure that the galvanometer motor swings stably at the required frequency and amplitude. Therefore, due to the magnetic induction type galvanometer motor in the laser processing device having high zero-point accuracy, not being affected by temperature, being convenient for production and manufacture, and being more widely and reliably applied, the laser processing device has high reliability and is more widely applied; and because the galvanometer control system has a magnetoelectric induction function, based on the magnetoelectric induction function of the galvanometer control system, closed-loop control can be performed on the galvanometer motor, which can more precisely control the galvanometer motor to ensure that the galvanometer motor swings stably at the required frequency and amplitude. Thus, it can solve the problem that the existing laser processing device has poor reliability due to the poor zero-point accuracy of the photoelectric induction type galvanometer motor and the temperature drift of the motor zero point and amplitude.

[0087] It should be noted that the above embodiments of the laser processing equipment, the small galvanometer equipment and / or the galvanometer control system belong to the same concept. For the specific implementation process, please refer to the embodiments of the small galvanometer equipment and / or the galvanometer control system. Moreover, the technical features in the embodiments of the small galvanometer equipment and / or the galvanometer control system are correspondingly applicable to the above embodiments of the laser processing equipment, and will not be elaborated here.

[0088] It should be noted that in this text, the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including such element.

[0089] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; under the idea of the present invention, the technical features in the above embodiments or different embodiments can also be combined, and the steps can be implemented in any order, and there are many other variations in different aspects of the present invention as described above. For the sake of brevity, they are not provided in detail; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A small galvanometer device, characterized in that, Applied to a laser processing head, including a galvanometer, a galvanometer motor, and a magnetic induction sensor. Both ends of the galvanometer motor are respectively provided with a rotating shaft and a turntable. A magnet is provided on the rotating shaft, and the magnetic induction sensor is arranged inside the turntable to sense the magnetic field change of the magnet and convert it into an electrical signal for output.

2. The small galvanometer device according to claim 1, wherein, The small galvanometer device further includes a sensor circuit board and a sensor interface. The sensor circuit board is arranged inside the turntable. The magnetic induction sensor and the sensor interface are soldered on the sensor circuit board, and the sensor interface is electrically connected to the magnetic induction sensor.

3. The small galvanometer device according to claim 1, characterized in that When the rotating shaft of the galvanometer motor rotates, it is in different preset positions, and the preset positions include a zero position, a left position, and / or a right position; When the rotating shaft of the galvanometer motor is in the preset position of the zero position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a first magnetic induction signal for output. The magnetic induction value of the first magnetic induction signal is the zero position reference value; When the rotating shaft of the galvanometer motor is in the preset position of the left position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a second magnetic induction signal for output. The magnetic induction value of the second magnetic induction signal is the left position reference value; When the rotating shaft of the galvanometer motor is in the preset position of the right position, the magnetic induction sensor senses the magnetic field change of the magnet and converts it into a third magnetic induction signal for output. The magnetic induction value of the third magnetic induction signal is the right position reference value.

4. The small galvanometer device according to claim 1, wherein, The magnet is sleeved or embedded in the rotating shaft.

5. The small galvanometer device according to claim 1, characterized in that The galvanometer is any one of a reflecting mirror, a collimating mirror, and a focusing mirror.

6. A galvanometer control system, characterized in that, Including the small galvanometer device and the galvanometer motor control board according to any one of claims 1 to 5, wherein: The magnetic induction sensor senses the magnetic field change of the magnet, converts it into a magnetic induction signal, and performs data communication with the galvanometer motor control board through the sensor interface to transmit the magnetic induction signal to the galvanometer motor control board; The galvanometer motor control board is used to obtain the change of the magnetic induction value from the magnetic induction signal, generate a drive control signal based on the change of the magnetic induction value, and perform closed-loop control on the galvanometer motor based on the drive control signal to ensure that the galvanometer motor swings stably at the required frequency and swing amplitude.

7. The galvanometer control system according to claim 6, characterized in that, The galvanometer motor control board includes an error calculation circuit, a position feedforward circuit, an adjustment circuit, a speed adjustment circuit, a multiplexing circuit, a power drive circuit, and a magnetoelectric detection circuit, wherein: The galvanometer control system further includes a microcontroller, and the microcontroller is used to output a target position signal of the galvanometer motor; The position feedforward circuit is connected to the multiplexing circuit and is used to generate a target position feedback signal based on the target position signal and transmit the target position feedback signal to the multiplexing circuit; The magnetoelectric detection circuit is connected to the sensor interface and is used to obtain the change of the magnetic induction value from the magnetic induction signal and detect the actual position signal of the galvanometer motor based on the change of the magnetic induction value; The error calculation circuit is used to output a position error signal based on the actual position signal and the target position signal; The adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is configured to generate a position adjustment signal based on the position error signal and transmit the position adjustment signal to the multiplexing circuit; The speed adjustment circuit is connected to the multiplexing circuit, and is configured to generate a speed adjustment signal based on the actual position signal and feedback the speed adjustment signal to the multiplexing circuit; The multiplexing circuit is connected to the power drive circuit, and is configured to generate a multiplexed signal by combining the target position feedback signal, the position adjustment signal, and the speed adjustment signal, and transmit the multiplexed signal to the power drive circuit; The power drive circuit is configured to amplify the multiplexed signal, output a drive control signal, and implement closed-loop control of the position and swing frequency amplitude of the galvanometer motor based on the drive control signal.

8. The galvanometer control system according to claim 7, wherein The adjustment circuit includes an integral adjustment circuit and / or a proportional adjustment circuit, wherein: The integral adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is configured to generate an integral adjustment signal based on the position error signal and transmit the integral adjustment signal to the multiplexing circuit; The proportional adjustment circuit is respectively connected to the error calculation circuit and the multiplexing circuit, and is configured to generate a proportional adjustment signal based on the position error signal and transmit the proportional adjustment signal to the multiplexing circuit.

9. The galvanometer control system according to claim 7, wherein, The galvanometer motor control board further includes a current detection circuit, which is respectively connected to the galvanometer motor and the power drive circuit, and is configured to sample the current of the galvanometer motor, obtain a sampled current, and output the sampled current to the power drive circuit.

10. A laser processing device, characterized in that, It includes the galvanometer control system according to any one of claims 6 to 9.

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