Mask clamping device capable of being adjusted at multiple angles

Abstract

The utility model discloses a mask plate clamping device capable of being adjusted at multiple angles, and relates to the field of mask plate clamping devices. A mask clamping device capable of being adjusted at multiple angles comprises a fixing base, a driving motor is fixedly connected to the right side of the bottom of an inner cavity of the fixing base, a driving gear is fixedly connected to the output end of the driving motor, a driven gear is meshed with the surface of the driving gear, and a fixing shaft is connected to an inner cavity of the driven gear in a sleeved mode. The top of the fixing shaft penetrates to the top of the fixing base and is fixedly connected with a supporting table, and electric rods are fixedly connected to the two sides of an inner cavity of the supporting table. According to the mask plate clamping device capable of being adjusted at multiple angles, when a mask plate needs to be clamped, the electric rod drives the moving block to move relatively, the moving block drives the sliding block to slide in the sliding groove, meanwhile, the moving block drives the shell to move relatively through the fixing column, the shell drives the supporting block to move to a designated position, and therefore the mask plate is clamped. And then the mask plate is placed on the supporting block.

Description

Technical Field

[0001] The utility model relates to the field of mask clamping devices, in particular to a mask clamping device that can be adjusted at multiple angles. Background Technique

[0002] The lithography mask is simply called a mask. It is a graphic master used in the common lithography process of micro-nano processing technology. An opaque light-shielding film forms a mask graphic structure on a transparent substrate, and then the graphic information is transferred to the product substrate through the exposure process. The mask is the benchmark and blueprint for lithographic replication of graphics. Any defect on the lithography mask will have a great impact on the final graphic accuracy and directly affect the yield rate of the final product.

[0003] During the processing of the mask, a clamping device needs to be used. The existing clamping device cannot be adjusted in angle. When people use the clamping device, they cannot adjust its use angle according to the processing requirements, which cannot meet the daily use requirements and is not convenient for people to use.

[0004] Therefore, it is necessary to provide a mask clamping device that can be adjusted at multiple angles to solve the above technical problems. The disclosure of this background technical part is only intended to increase the understanding of the overall background of the present invention, and is not necessarily regarded as an admission or an indication in any form that this information constitutes the prior art already known to those of ordinary skill in the art. Summary of the Utility Model

[0005] The utility model provides a mask clamping device that can be adjusted at multiple angles, and solves the technical problems that the existing clamping device cannot be adjusted in angle. When people use the clamping device, they cannot adjust its use angle according to the processing requirements, which cannot meet the daily use requirements and is not convenient for people to use.

[0006] To solve the above technical problems, a mask holder device that can be adjusted at multiple angles provided by the present utility model includes a fixed seat. On the right side of the bottom of the inner cavity of the fixed seat, a driving motor is fixedly connected. The output end of the driving motor is fixedly connected with a driving gear. The surface of the driving gear meshes with a driven gear. A fixed shaft is sleeved inside the inner cavity of the driven gear. The top of the fixed shaft penetrates to the top of the fixed seat and is fixedly connected with a support platform. On both sides of the inner cavity of the support platform, electric rods are fixedly connected. The inner side of the electric rod is fixedly connected with a moving block. The top of the moving block is fixedly connected with a fixed column. The top of the fixed column penetrates to the top of the support platform and is fixedly connected with a housing. On the bottom of the inner side of the housing, a support block is fixedly connected. On the bottom of the inner cavity of the housing, a first bearing seat is fixedly connected. A lead screw is sleeved on the top of the first bearing seat. The top of the lead screw surface is threadedly connected with a threaded block. The inner side of the threaded block is fixedly connected with a connecting block. The inner side of the connecting block penetrates to the inner side of the housing and is fixedly connected with a pressing plate. The top of the lead screw penetrates to the top of the housing and is fixedly connected with a runner.

[0007] Preferably, a chute is opened at the bottom of the inner cavity of the support platform. On both sides of the inner cavity of the chute, sliding blocks are slidably connected.

[0008] Preferably, a second bearing seat is sleeved at the bottom of the fixed shaft. The bottom of the second bearing seat is fixedly connected with the bottom of the inner cavity of the fixed seat.

[0009] Preferably, rubber pads are fixedly connected to the bottom of the pressing plate and the top of the support block.

[0010] Preferably, a guide wheel is fixedly connected to the outer side of the threaded block. The outer side of the guide wheel contacts the outer side of the inner cavity of the housing.

[0011] Preferably, universal ball bearings are fixedly connected to the four sides of the top of the fixed seat. The top of the universal ball bearings contacts the bottom of the support platform.

[0012] Compared with the related technology, a mask holder device that can be adjusted at multiple angles provided by the present utility model has the following beneficial effects:

[0013] The present utility model provides a mask holder device that can be adjusted at multiple angles. When it is necessary to clamp the mask, the electric rod drives the moving block to move relatively. The moving block drives the sliding block to slide in the chute. At the same time, the moving block drives the housing to move relatively through the fixed column, so that the housing drives the support block to move to the specified position, and then the mask is placed on the support block.

[0014] The present utility model provides a mask plate clamping device that can be adjusted at multiple angles. Then, by rotating the wheel to rotate the lead screw, the rotation of the lead screw drives the threaded block to move downward. The threaded block drives the guide wheel to slide on the inner wall of the housing. The threaded block drives the pressing plate to move downward through the connecting block, so that the pressing plate presses the mask plate on the support block. When the angle needs to be adjusted, the driving motor drives the driving gear to start rotating. The driving gear drives the driven gear to start rotating. The driven gear drives the fixed shaft to start rotating. The fixed shaft drives the support platform to rotate on the universal ball, thereby adjusting the angle of the overall device above. Description of the Drawings

[0015] Figure 1 It is a schematic structural diagram of a preferred embodiment of a mask plate clamping device that can be adjusted at multiple angles provided by the present utility model;

[0016] Figure 2 It is a sectional view of the support platform structure of the present utility model;

[0017] Figure 3 It is a sectional view of the housing structure of the present utility model.

[0018] Reference numerals in the figures: 1, fixed seat; 2, driving motor; 3, driving gear; 4, driven gear; 5, fixed shaft; 6, support platform; 7, electric rod; 8, moving block; 9, fixed column; 10, housing; 11, support block; 12, first bearing seat; 13, lead screw; 14, threaded block; 15, connecting block; 16, pressing plate; 17, chute; 18, slider; 19, second bearing seat; 20, guide wheel; 21, universal ball; 22, wheel. Detailed Embodiment

[0019] In order to enable those skilled in the art to better understand the technical solution of the present utility model, the present utility model will be described in detail below with reference to the accompanying drawings. The description of this part is only exemplary and explanatory, and should not have any restrictive effect on the protection scope of the present utility model.

[0020] It should be noted that: similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0021] It should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present utility model. In addition, terms such as "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0022] In addition, terms such as "horizontal", "vertical", "hanging", etc. do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0023] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations. Embodiment

[0024] Please refer to Figures 1-3 , the present utility model provides a technical solution: a mask clamping device that can be adjusted at multiple angles, including a fixed seat 1. On the right side of the bottom of the inner cavity of the fixed seat 1, a driving motor 2 is fixedly connected. The output end of the driving motor 2 is fixedly connected with a driving gear 3. The surface of the driving gear 3 is engaged with a driven gear 4. The inner cavity of the driven gear 4 is sleeved with a fixed shaft 5. The top of the fixed shaft 5 penetrates to the top of the fixed seat 1 and is fixedly connected with a support platform 6. On both sides of the inner cavity of the support platform 6, electric rods 7 are fixedly connected. The inner sides of the electric rods 7 are fixedly connected with moving blocks 8. The top of the moving block 8 is fixedly connected with a fixed column 9. The top of the fixed column 9 penetrates to the top of the support platform 6 and is fixedly connected with a housing 10. At the bottom of the inner side of the housing 10, a support block 11 is fixedly connected. At the bottom of the inner cavity of the housing 10, a first bearing seat 12 is fixedly connected. A lead screw 13 is sleeved on the top of the first bearing seat 12. The top of the lead screw 13 is threadedly connected with a threaded block 14. The inner side of the threaded block 14 is fixedly connected with a connecting block 15. The inner side of the connecting block 15 penetrates to the inner side of the housing 10 and is fixedly connected with a pressing plate 16. The top of the lead screw 13 penetrates to the top of the housing 10 and is fixedly connected with a runner 22.

[0025] In this implementation solution, the guide wheel 20 plays a role in stabilizing the movement of the threaded block 14 during use, and the universal ball 21 plays a role in stabilizing the rotation of the support table 6 during use. Embodiment

[0026] Please refer to Figures 1-3 As shown, on the basis of the first embodiment, the present utility model provides a technical solution: a chute 17 is opened at the bottom of the inner cavity of the support table 6, both sides of the inner cavity of the chute 17 are slidably connected with sliders 18, the bottom of the fixed shaft 5 is sleeved with a second bearing seat 19, and the bottom of the second bearing seat 19 is fixedly connected with the bottom of the inner cavity of the fixed seat 1. Rubber pads are fixedly connected to the bottom of the pressing plate 16 and the top of the support block 11. A guide wheel 20 is fixedly connected to the outside of the threaded block 14, and the outside of the guide wheel 20 is in contact with the outside of the inner cavity of the housing 10. Universal balls 21 are fixedly connected to the four circumferences of the top of the fixed seat 1, and the tops of the universal balls 21 are in contact with the bottom of the support table 6.

[0027] In this embodiment: the chute 17 and the slider 18 play a role in preventing jitter of the moving block 8 during use, and the first bearing seat 12 and the second bearing seat 19 play a role in preventing wobbling of the lead screw 13 and the fixed shaft 5 during use.

[0028] The working principle of a mask clamping device that can be adjusted at multiple angles provided by the present utility model is as follows:

[0029] Implementation steps of the first innovation point:

[0030] First step: When it is necessary to clamp the mask, the electric rod 7 drives the moving block 8 to move relatively, and the moving block 8 drives the slider 18 to slide in the chute 17;

[0031] Second step: At the same time, the moving block 8 drives the housing 10 to move relatively through the fixed column 9, so that the housing 10 drives the support block 11 to move to a specified position, and then the mask is placed on the support block 11. [[ID=?]] [[ID=?]]

[0032] Implementation steps of the second innovation point:

[0033] First step: Then rotate the lead screw 13 through the runner 22, the rotation of the lead screw 13 drives the threaded block 14 to move downward, the threaded block 14 drives the guide wheel 20 to slide on the inner wall of the housing 10, and the threaded block 14 drives the pressing plate 16 to move downward through the connecting block 15, so that the pressing plate 16 presses the mask on the support block 11;

[0034] Step 2: When the angle needs to be adjusted, the driving motor 2 drives the driving gear 3 to start rotating. The driving gear 3 drives the driven gear 4 to start rotating. The driven gear 4 drives the fixed shaft 5 to start rotating. The fixed shaft 5 drives the support platform 6 to rotate on the universal ball 21, thereby adjusting the angle of the overall device above.

[0035] The standard parts used in this application document can all be purchased from the market, and can also be customized according to the descriptions in the specification and drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts, and equipment all adopt conventional models in the prior art. The control method is automatically controlled by a controller. The control circuit of the controller can be realized by simple programming by those skilled in the art, which belongs to the common general knowledge in this field. Moreover, this utility model is mainly used to protect mechanical devices. Therefore, this utility model will not explain the control method and circuit connection in detail. The peripheral controller mentioned in the specification can play a control role for the electrical components mentioned in this article, and this peripheral controller is a conventional known device.

[0036] It should be noted that in this article, the term "including", "comprising", or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article, or device.

[0037] In this article, specific examples are used to elaborate on the principle and implementation mode of this utility model. The description of the above examples is only used to help understand the method and its core idea of this utility model. The above is only the preferred implementation mode of this utility model. It should be pointed out that due to the limitation of literal expression, and objectively there are infinite specific structures. For those of ordinary skill in the art in this technical field, without departing from the principle of this utility model, several improvements, modifications, or variations can be made, or the above technical features can be combined in an appropriate manner; these improvements, modifications, variations, or combinations, or directly applying the concept and technical solution of the utility model to other occasions without improvement, should all be regarded as the protection scope of this utility model.

Claims

1. A mask holding device that can be adjusted at multiple angles, including a fixed base (1), characterized in that: On the right side of the bottom inside the fixed seat (1), a driving motor (2) is fixedly connected. The output end of the driving motor (2) is fixedly connected with a driving gear (3). The surface of the driving gear (3) meshes with a driven gear (4). The inner cavity of the driven gear (4) is sleeved with a fixed shaft (5). The top of the fixed shaft (5) penetrates to the top of the fixed seat (1) and is fixedly connected with a support platform (6). On both sides of the inner cavity of the support platform (6), electric rods (7) are fixedly connected. The inner sides of the electric rods (7) are fixedly connected with moving blocks (8). The top of the moving block (8) is fixedly connected with a fixed column (9). The top of the fixed column (9) penetrates to the top of the support platform (6) and is fixedly connected with a housing (10). The bottom of the inner side of the housing (10) is fixedly connected with a support block (11). At the bottom of the inner cavity of the housing (10), a first bearing seat (12) is fixedly connected. The top of the first bearing seat (12) is sleeved with a lead screw (13). The top surface of the lead screw (13) is threadedly connected with a threaded block (14). The inner side of the threaded block (14) is fixedly connected with a connecting block (15). The inner side of the connecting block (15) penetrates to the inner side of the housing (10) and is fixedly connected with a pressing plate (16). The top of the lead screw (13) penetrates to the top of the housing (10) and is fixedly connected with a runner (22).

2. The mask holding device capable of multi-angle adjustment according to claim 1, wherein At the bottom of the inner cavity of the support platform (6), a chute (17) is opened. On both sides of the inner cavity of the chute (17), sliders (18) are slidably connected.

3. A mask clamping device capable of multi-angle adjustment according to claim 1, characterized in that, At the bottom of the fixed shaft (5), a second bearing seat (19) is sleeved. The bottom of the second bearing seat (19) is fixedly connected with the bottom of the inner cavity of the fixed seat (1).

4. A mask clamping device capable of multi-angle adjustment according to claim 1, characterized in that, Both the bottom of the pressing plate (16) and the top of the support block (11) are fixedly connected with rubber pads.

5. A mask holding device capable of multi-angle adjustment according to claim 1, characterized in that, On the outer side of the threaded block (14), a guide wheel (20) is fixedly connected. The outer side of the guide wheel (20) contacts with the outer side of the inner cavity of the housing (10).

6. A mask clamping device capable of multi-angle adjustment according to claim 1, characterized in that Around the top of the fixed seat (1), universal ball bearings (21) are fixedly connected. The top of the universal ball bearings (21) contacts with the bottom of the support platform (6).

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