Mask plate carrying device

Abstract

The utility model discloses a mask plate carrying device, and relates to the field of mask plate processing. The mask plate carrying device comprises a base, the left side of an inner cavity of the base is fixedly connected with a motor, the output end of the motor is fixedly connected with a right-hand and left-hand threaded rod, the two sides of the surface of the right-hand and left-hand threaded rod are both in threaded connection with nut seats, the tops of the nut seats are fixedly connected with fixing columns, and the tops of the fixing columns are fixedly connected with baffles. According to the mask plate carrying device, firstly, the base is stably supported, at the moment, the electric rod drives the supporting block to move downwards so that the supporting block can make contact with the ground, the stability performance of the base can be improved, then a mask plate body is placed on the surfaces of the guide wheels through external lifting equipment, and then the mask plate body is placed on the guide wheels. Meanwhile, the motor drives the right-and-left threaded rod to rotate through the second bearing seat, the right-and-left threaded rod rotates to drive the nut seat to move relatively, and the nut seat drives the rolling wheel to slide in the base.

Description

Technical Field

[0001] The utility model relates to the field of reticle processing, in particular to a reticle handling device. Background Technique

[0002] A reticle, also known as a photomask or a lithography mask, is a pattern transfer tool or a mask used in the microelectronics manufacturing process. Through processes such as exposure, development, and etching, the required microscopic patterns are made on a glass chromium plate, and it is mainly applied to microelectronic lithography.

[0003] During the reticle processing, a handling device is needed to facilitate the transfer of the reticle. The existing handling devices have poor clamping and limiting effects. When people use the handling device, they cannot fix reticles of different sizes, which is inconvenient for people to use.

[0004] Therefore, it is necessary to provide a reticle handling device to solve the above technical problems. The disclosure of this background technical part is only intended to increase the understanding of the overall background of the present invention, and is not necessarily regarded as an admission or an indication in any form that this information constitutes the prior art already known to those of ordinary skill in the art. Summary of the Utility Model

[0005] The utility model provides a reticle handling device, which solves the technical problems that the existing handling device has poor clamping and limiting effects, and when people use the handling device, they cannot fix reticles of different sizes, which is inconvenient for people to use.

[0006] To solve the above technical problems, a reticle handling device provided by the utility model includes a base. A motor is fixedly connected to the left side of the inner cavity of the base. The output end of the motor is fixedly connected to a left - right threaded rod. Both sides of the surface of the left - right threaded rod are threadedly connected with nut seats. The top of the nut seat is fixedly connected to a fixed column. The top of the fixed column is fixedly connected to a baffle. A spring is fixedly connected to the outer side of the inner cavity of the baffle. The inner side of the spring is fixedly connected to a fixing plate. The right side of the fixing plate is fixedly connected to a top rod. The inner side of the top rod penetrates to the inner side of the baffle and is fixedly connected to a concave - shaped clamping block. A concave - shaped mounting seat is fixedly connected to the center of the top of the base. The front and back of the inner cavity of the concave - shaped mounting seat are both fixedly connected with first bearing seats. A guide wheel is movably connected to the inner side of the first bearing seat. A reticle main body is arranged on the top of the surface of the guide wheel. Armrest rods are fixedly connected to both sides of the top of the base.

[0007] Preferably, outer shells are fixedly connected to both sides of the base. An electric rod is fixedly connected to the top of the inner cavity of the outer shell. The output end of the electric rod penetrates to the bottom of the outer shell and is fixedly connected to a support block. A rubber pad is fixedly connected to the bottom of the support block.

[0008] Preferably, a roller is fixedly connected to the bottom of the nut seat, the bottom of the roller is in contact with the bottom of the inner cavity of the base, and traveling wheels are fixedly connected to both sides of the bottom of the base.

[0009] Preferably, a limit ring is sleeved on the surface of the ejector rod, and the inner side of the limit ring is fixedly connected to the inner side of the inner cavity of the baffle.

[0010] Preferably, a protective pad is fixedly connected to the inner cavity of the concave clamping block, a second bearing seat is sleeved on the right side of the positive and negative threaded rod, and the right side of the second bearing seat is fixedly connected to the right side of the inner cavity of the base.

[0011] Compared with the related art, a mask plate handling device provided by the present utility model has the following beneficial effects:

[0012] The present utility model provides a mask plate handling device. First, the base is stably supported. At this time, the electric rod drives the support block to move downward so that the support block contacts the ground, thereby increasing the stability of the base. Then, the mask plate main body is placed on the surface of the guide wheel by an external hoisting device. At the same time, the motor drives the positive and negative threaded rod to start rotating through the second bearing seat. The rotation of the positive and negative threaded rod drives the nut seat to move relatively, and the nut seat drives the roller to slide in the base.

[0013] The present utility model provides a mask plate handling device. At this time, the nut seat drives the baffle to move relatively through the fixed column, and the baffle drives the concave clamping block to move relatively, so that the concave clamping block clamps both sides of the mask plate main body. When the concave clamping block contacts the mask plate main body, the concave clamping block buffers on the fixing plate through the limit ring, and the fixing plate buffers on the spring, preventing the concave clamping block from applying too much force and causing damage to the mask plate main body. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural diagram of a preferred embodiment of a mask plate handling device provided by the present utility model;

[0015] Figure 2 is a sectional view of the structure of the base and the baffle of the present utility model;

[0016] Figure 3 is a top sectional view of the structure of the concave clamping block of the present utility model;

[0017] Figure 4 is a top view of the structure of the concave mounting seat of the present utility model.

[0018] Reference numerals in the figure: 1, base; 2, motor; 3, left - right threaded rod; 4, nut seat; 5, fixed column; 6, baffle; 7, spring; 8, fixed plate; 9, ejector rod; 10, concave clamping block; 11, concave mounting seat; 12, first bearing seat; 13, guide wheel; 14, reticle body; 15, handrail; 16, electric rod; 17, support block; 18, roller; 19, walking wheel; 20, limit ring; 21, second bearing seat; 22, housing. Detailed implementation mode

[0019] In order to enable those skilled in the art to better understand the technical solution of the present utility model, the present utility model will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not have any restrictive effect on the protection scope of the present utility model.

[0020] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0021] It should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation to the present utility model. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0022] In addition, the terms "horizontal", "vertical", "hanging", etc. do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0023] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations. Embodiment

[0024] Please refer toFigures 1-4 , the present utility model provides a technical solution: a reticle handling device, including a base 1, a motor 2 is fixedly connected to the left side of the inner cavity of the base 1, the output end of the motor 2 is fixedly connected to a left - right threaded rod 3, both sides of the surface of the left - right threaded rod 3 are threadedly connected with nut seats 4, the top of the nut seat 4 is fixedly connected to a fixed column 5, the top of the fixed column 5 is fixedly connected to a baffle 6, a spring 7 is fixedly connected to the outer side of the inner cavity of the baffle 6, the inner side of the spring 7 is fixedly connected to a fixing plate 8, the right side of the fixing plate 8 is fixedly connected to a push rod 9, the inner side of the push rod 9 penetrates to the inner side of the baffle 6 and is fixedly connected to a concave - shaped clamping block 10, a concave - shaped mounting seat 11 is fixedly connected to the center of the top of the base 1, a first bearing seat 12 is fixedly connected to the front and back of the inner cavity of the concave - shaped mounting seat 11, a guide wheel 13 is movably connected to the inner side of the first bearing seat 12, a reticle main body 14 is arranged on the top of the surface of the guide wheel 13, and handrail rods 15 are fixedly connected to both sides of the top of the base 1.

[0025] In this implementation scheme, through the rubber pad, the support block 17 has a good anti - slip effect during use, and through the roller 18, the nut seat 4 and the left - right threaded rod 3 have an effect of increasing the support strength during use. Embodiment

[0026] Please refer to Figures 1-4 As shown, on the basis of Embodiment 1, the present utility model provides a technical solution: outer shells 22 are fixedly connected to both sides of the base 1, an electric rod 16 is fixedly connected to the top of the inner cavity of the outer shell 22, the output end of the electric rod 16 penetrates to the bottom of the outer shell 22 and is fixedly connected to a support block 17, a rubber pad is fixedly connected to the bottom of the support block 17, a roller 18 is fixedly connected to the bottom of the nut seat 4, the bottom of the roller 18 is in contact with the bottom of the inner cavity of the base 1, traveling wheels 19 are fixedly connected to both sides of the bottom of the base 1, a limiting ring 20 is sleeved on the surface of the push rod 9, the inner side of the limiting ring 20 is fixedly connected to the inner side of the inner cavity of the baffle 6, a protection pad is fixedly connected to the inner cavity of the concave - shaped clamping block 10, a second bearing seat 21 is sleeved on the right side of the left - right threaded rod 3, and the right side of the second bearing seat 21 is fixedly connected to the right side of the inner cavity of the base 1.

[0027] In this embodiment: through the limiting ring 20, the push rod 9 has an anti - swaying effect during use, and through the traveling wheels 19 and the handrail rods 15, the base 1 has an effect of being convenient to move during use.

[0028] The working principle of the reticle handling device provided by the present utility model is as follows:

[0029] Implementation steps of the first innovation point:

[0030] Step 1: First, stably support the base 1. At this time, the electric rod 16 drives the support block 17 to move downward, making the support block 17 contact the ground to enhance the stability of the base 1. Then, place the reticle main body 14 on the surface of the guide wheel 13 through an external hoisting device.

[0031] Step 2: Meanwhile, the motor 2 drives the left - right threaded rod 3 to rotate through the second bearing block 21. The rotation of the left - right threaded rod 3 drives the nut block 4 to move relatively, and the nut block 4 drives the roller 18 to slide within the base 1.

[0032] Implementation steps of the second innovation point:

[0033] Step 1: At this time, the nut block 4 drives the baffle 6 to move relatively through the fixed column 5, and the baffle 6 drives the concave clamp block 10 to move relatively, so that the concave clamp block 10 clamps both sides of the reticle main body 14.

[0034] Step 2: When the concave clamp block 10 contacts the reticle main body 14, the concave clamp block 10 buffers on the fixed plate 8 through the limit ring 20, and the fixed plate 8 buffers on the spring 7 to prevent the concave clamp block 10 from exerting too much force and damaging the reticle main body 14.

[0035] The standard parts used in this application document can all be purchased from the market, and can also be customized according to the records of the specification and the drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machines, parts, and equipment all adopt conventional models in the prior art. The control method is automatically controlled by a controller. The control circuit of the controller can be realized by simple programming by those skilled in the art, which belongs to the common general knowledge in this field. And this utility model is mainly used to protect mechanical devices, so the control method and circuit connection of this utility model will not be explained in detail. Moreover, the external controller mentioned in the specification can play a control role for the electrical components mentioned in this article, and this external controller is a conventional known device.

[0036] It should be noted that in this article, the term "including", "comprising" or any other variant thereof is intended to cover non - exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0037] In this article, specific examples are used to elaborate on the principle and implementation mode of the present utility model. The description of the above examples is only used to help understand the method and its core idea of the present utility model. The above is only the preferred implementation mode of the present utility model. It should be noted that due to the limited nature of literal expression and objectively infinite specific structures, for those of ordinary skill in the art, without departing from the principle of the present utility model, several improvements, refinements or changes can be made, or the above technical features can be combined in an appropriate manner; these improvements, refinements, changes or combinations, or directly applying the concept and technical solution of the utility model to other occasions without improvement, shall all be regarded as the protection scope of the present utility model.

Claims

1. A mask carrier device, comprising a base (1), characterized in that: On the left side of the inner cavity of the base (1), a motor (2) is fixedly connected. The output end of the motor (2) is fixedly connected with a left - right threaded rod (3). On both sides of the surface of the left - right threaded rod (3), nut seats (4) are threadedly connected. The top of the nut seat (4) is fixedly connected with a fixed column (5). The top of the fixed column (5) is fixedly connected with a baffle (6). On the outer side of the inner cavity of the baffle (6), a spring (7) is fixedly connected. The inner side of the spring (7) is fixedly connected with a fixing plate (8). The right side of the fixing plate (8) is fixedly connected with a push rod (9). The inner side of the push rod (9) penetrates to the inner side of the baffle (6) and is fixedly connected with a concave clamping block (10). At the center of the top of the base (1), a concave mounting seat (11) is fixedly connected. On the front and back of the inner cavity of the concave mounting seat (11), first bearing seats (12) are fixedly connected. The inner side of the first bearing seat (12) is movably connected with a guide wheel (13). On the top surface of the guide wheel (13), a mask plate main body (14) is arranged. On both sides of the top of the base (1), handrail rods (15) are fixedly connected.

2. The reticle transfer device according to claim 1, wherein On both sides of the base (1), a housing (22) is fixedly connected. At the top of the inner cavity of the housing (22), an electric rod (16) is fixedly connected. The output end of the electric rod (16) penetrates to the bottom of the housing (22) and is fixedly connected with a support block (17). The bottom of the support block (17) is fixedly connected with a rubber pad.

3. A mask transporting device according to claim 1, wherein The bottom of the nut seat (4) is fixedly connected with a roller (18). The bottom of the roller (18) is in contact with the bottom of the inner cavity of the base (1). On both sides of the bottom of the base (1), traveling wheels (19) are fixedly connected.

4. A mask transfer device according to claim 1, characterized in that A limit ring (20) is sleeved on the surface of the push rod (9). The inner side of the limit ring (20) is fixedly connected with the inner side of the inner cavity of the baffle (6).

5. A mask transporting device according to claim 1, wherein A protection pad is fixedly connected to the inner cavity of the concave clamping block (10). A second bearing seat (21) is sleeved on the right side of the left - right threaded rod (3). The right side of the second bearing seat (21) is fixedly connected with the right side of the inner cavity of the base (1).

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