Transportation device, carrier plate assembly and machining equipment

Abstract

The utility model provides a transportation device, a carrier plate assembly and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of poor sealing performance of traditional processing equipment. The transportation device comprises at least one magnetic guide rail assembly, each magnetic guide rail assembly can be connected with the inner wall of the vacuum cavity, and the side, facing the center of the vacuum cavity, of each magnetic guide rail assembly is provided with a suspension channel; the carrier plate magnet assembly is connected with the first end of the carrier plate, the carrier plate magnet assembly and the magnetic guide rail assembly are arranged in a spaced mode, part of the carrier plate magnet assembly is located in the suspension channel, and the carrier plate magnet assembly can suspend in the suspension channel under the action of the magnetic force generated when the magnetic guide rail assembly and the carrier plate magnet assembly repel each other; the power assembly penetrates through the inner wall of the vacuum cavity, is in transmission connection with the second end of the carrier plate and is configured to drive the carrier plate to move in the first direction. Through the structure, the side wall, close to the first end of the carrier plate, of the vacuum cavity does not need to be provided with holes for installing the magnetofluid transmission assembly, and the risk of leakage of machining equipment is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a transport device, a carrier assembly, and processing equipment. Background Art

[0002] Products such as semiconductors or photovoltaic materials usually need to be processed in a vacuum chamber. For example, chemical vapor deposition (CVD) technology, phosphorus diffusion, boron diffusion, etc., all require the introduction of process gases into the vacuum chamber to process semiconductors or photovoltaic materials.

[0003] In the related art, a group of magnetofluidic transmission components are usually set on both sides of the vacuum chamber, each magnetofluidic transmission component passes through the opening in the side wall of the vacuum chamber, and one end of each magnetofluidic transmission component located in the vacuum chamber (i.e., one end of the transmission shaft of the magnetofluidic transmission component) is connected to a support wheel, so that the two groups of support wheels on the two groups of magnetofluidic transmission components in the vacuum chamber respectively support one end of the carrier plate, and then the transmission shafts of the multiple magnetofluidic transmission components are driven to rotate by a motor, thereby driving the support wheels connected to the transmission shaft to rotate, and then driving the carrier plate carrying the product to move. However, with this structure, since the magnetofluidic transmission component needs to pass through the side wall of the vacuum chamber, in order to ensure the sealing of the vacuum chamber, a seal is usually set in the gap between the magnetofluidic transmission component and the side wall of the vacuum chamber, but this gap still has a high risk of leakage. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a transport device, a carrier assembly, and a processing device.

[0005] In a first aspect, an embodiment of the present application provides a transport device for transporting a carrier, which is applied to a vacuum chamber, wherein the carrier is configured to carry a product, and the carrier has a first end and a second end in a second direction, and the transport device includes: at least one magnetic guide rail assembly, which is arranged in sequence along the first direction, each magnetic guide rail assembly extends along the first direction, and each magnetic guide rail assembly can be connected to the inner wall of the vacuum chamber, wherein a suspension channel is provided on the side of the magnetic guide rail assembly facing the center of the vacuum chamber, and the suspension channel extends along the first direction, and the first direction and the second direction have an angle; a carrier magnet assembly, which extends along the first direction, is connected to the first end of the carrier, and is spaced apart from the magnetic guide rail assembly, a portion of the carrier magnet assembly is located in the suspension channel, and under the action of the repulsive magnetic force between the magnetic guide rail assembly and the carrier magnet assembly, the carrier magnet assembly can be suspended in the suspension channel and drive the first end of the carrier to suspend; a power assembly, which passes through the inner wall of the vacuum chamber and is transmission-connected to the second end of the carrier, and is configured to drive the carrier to move along the first direction.

[0006] In some embodiments, the magnetic guide rail assembly includes: a first guide rail magnet extending along a first direction, the first guide rail magnet having magnetism; wherein, the carrier plate magnet assembly includes: a first carrier plate magnet extending along the first direction, connected to the first end of the carrier plate and located above the first guide rail magnet, the first carrier plate magnet having magnetism, and the lower end of the first carrier plate magnet being magnetically repulsive to the upper end of the first guide rail magnet.

[0007] In some embodiments, the magnetic guide rail assembly further includes: a second guide rail magnet extending along the first direction and located above the first carrier plate magnet, the second guide rail magnet having magnetism, and the lower end of the second guide rail magnet being magnetically repulsive to the upper end of the first carrier plate magnet.

[0008] In some embodiments, the carrier plate magnet assembly further includes: a second carrier plate magnet extending along the first direction, connected to the first end of the carrier plate and located on a side of the first guide rail magnet away from the inner wall of the vacuum chamber, the second carrier plate magnet having magnetism, and the end of the second carrier plate magnet close to the first guide rail magnet being magnetically repulsive to the upper end of the first guide rail magnet.

[0009] In some embodiments, the carrier plate magnet assembly further includes: a third carrier plate magnet extending along the first direction, connected to the first end of the carrier plate and located on a side of the second guide rail magnet away from the inner wall of the vacuum chamber, the third carrier plate magnet having magnetism, and the end of the third carrier plate magnet close to the second guide rail magnet being magnetically repulsive to the lower end of the second guide rail magnet.

[0010] In some embodiments, the vacuum chamber has a vacuum chamber and a through hole, and the power assembly includes: a driving assembly disposed outside the vacuum chamber and configured to provide a driving force; at least one magnetohydrodynamic transmission assembly arranged in sequence along the first direction, with the first end of each magnetohydrodynamic transmission assembly located outside the vacuum chamber and the second end of each magnetohydrodynamic transmission assembly passing through the through hole and extending into the vacuum chamber, at least one magnetohydrodynamic transmission assembly being in transmission connection with the driving assembly; at least one carrier plate support wheel, each carrier plate support wheel being connected to the second end of a magnetohydrodynamic transmission assembly and configured to support the second end of the carrier plate, wherein the driving assembly drives each carrier plate support wheel to rotate through at least one magnetohydrodynamic transmission assembly to drive the carrier plate to move along the first direction.

[0011] In some embodiments, the power assembly further includes: at least one guide wheel, each guide wheel being rotatably connected to a magnetohydrodynamic transmission assembly, each guide wheel being configured to abut against the second end of the carrier plate to guide the carrier plate; and / or, at least one support wheel seal ring, with at least one support wheel seal ring sleeved on each carrier plate support wheel.

[0012] In a second aspect, an embodiment of the present application provides a transport device for use in a vacuum chamber, the transport device comprising: at least one magnetic guide rail assembly, arranged sequentially along a first direction, each magnetic guide rail assembly extending along the first direction, each magnetic guide rail assembly capable of connecting to the inner wall of the vacuum chamber, wherein a suspension channel is provided on a side of the magnetic guide rail assembly facing the center of the vacuum chamber, the suspension channel extending along the first direction, and the first direction and the second direction having an angle; a carrier assembly, the carrier assembly comprising a carrier and a carrier magnet assembly, wherein the carrier is configured to carry a product, the carrier having a first end and a second end in the second direction, the carrier magnet assembly extending along the first direction, the carrier magnet assembly connected to the first end of the carrier and spaced apart from the magnetic guide rail assembly, a portion of the carrier magnet assembly being located in the suspension channel, and under the action of the repulsive magnetic force between the magnetic guide rail assembly and the carrier magnet assembly, the carrier magnet assembly can be suspended in the suspension channel and drive the first end of the carrier to suspend; a power assembly, passing through the inner wall of the vacuum chamber, being transmission-connected to the second end of the carrier, and configured to drive the carrier to move in the first direction.

[0013] In the third aspect, an embodiment of the present application provides a carrier assembly, which is applied to a transportation device of a vacuum chamber. The transportation device includes at least one magnetic guide rail assembly, which is arranged in sequence along a first direction, and each magnetic guide rail assembly extends along the first direction. A suspension channel is provided on the side of the magnetic guide rail assembly facing the center of the vacuum chamber, and the suspension channel extends along the first direction. The carrier assembly includes: a carrier, which is configured to carry products, and the carrier has a first end and a second end in a second direction. The second end of the carrier is transmission-connected to a power assembly, and the carrier can move along the first direction under the drive of the power assembly, and the first direction and the second direction have an angle; a carrier magnet assembly, which extends along the first direction, is connected to the first end of the carrier, and is spaced apart from at least one magnetic guide rail assembly. Part of the carrier magnet assembly is located in the suspension channel, and under the action of the repulsive magnetic force between the magnetic guide rail assembly and the carrier magnet assembly, the carrier magnet assembly can be suspended in the suspension channel and drive the first end of the carrier to suspend.

[0014] In a fourth aspect, an embodiment of the present application provides a processing device, comprising: a vacuum chamber, configured to process a product, the vacuum chamber having a vacuum chamber; and a transportation device according to any one of the first aspects above, at least partially disposed in the vacuum chamber, configured to transport the product.

[0015] The transport device, carrier assembly, and processing equipment proposed in the embodiments of the present application achieve suspension of the first end of the carrier through the carrier magnet assembly and the magnetic guide rail assembly, without the need to set up a magnetofluid transmission assembly, a motor, a synchronous belt, a synchronous wheel, a support wheel, a guide wheel, and other structures on one side of the vacuum chamber to drive the first end of the carrier, and have the following technical effects.

[0016] First, the side wall of the vacuum chamber near the first end of the carrier plate does not need to be opened for installing the magnetohydrodynamic drive assembly, reducing the risk of leakage of the processing equipment, improving the flatness of the vacuum chamber, making the vacuum chamber more aesthetically pleasing, reducing the use of seals, and lowering the production cost.

[0017] Second, one side of the vacuum chamber does not need to use support wheels, thus reducing the number of seals used on the support wheels, lowering the risk of seal carbonization in the processing equipment, and improving the stability of transporting the carrier plate.

[0018] Third, the number of magnetohydrodynamic drive assemblies connected with guide wheels is reduced, reducing the production difficulty.

[0019] Fourth, the first end of the carrier plate does not need to adopt a C-shaped steel structure, reducing the production difficulty of the carrier plate.

[0020] Fifth, magnetic levitation is more stable than using support wheels to support the carrier plate, improving the stability of carrier plate transportation.

[0021] Sixth, one side of the vacuum chamber does not need to use magnetohydrodynamic drive assemblies, motors, synchronous belts, synchronous wheels, support wheels, and guide wheels, reducing the production cost.

[0022] Seventh, the magnetic levitation method of supporting the carrier plate is a surface contact, while the support wheel supporting the carrier plate is a point contact. Therefore, using the magnetic levitation method to support the carrier plate can make the movement of the carrier plate more stable. Description of the Drawings

[0023] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present application will become more apparent. The drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0024] Figure 1 Shown is a top view of a processing equipment provided by an exemplary embodiment of the present application.

[0025] Figure 2 Shown is provided by an exemplary embodiment of the present application Figure 1 Shown is a cross-sectional view of the processing equipment shown in the MM direction.

[0026] Figure 3 Shown is provided by an exemplary embodiment of the present application Figure 2 Shown is a partial enlarged view of the processing equipment shown in the A area.

[0027] Figure 4 Shown is a schematic diagram of one side of a processing equipment provided by an exemplary embodiment of the present application.

[0028] Figure 5 Shown is a cross-sectional view of the processing equipment provided by an exemplary embodiment of the present application Figure 4 in the NN direction as shown.

[0029] Figure 6 Shown is a partial enlarged view of the processing equipment provided by an exemplary embodiment of the present application Figure 5 in region B as shown.

[0030] Figure 7 Shown is a schematic diagram of another side of the processing equipment provided by an exemplary embodiment of the present application.

[0031] Figure 8 Shown is a schematic structural diagram of a carrier board assembly provided by an exemplary embodiment of the present application.

[0032] Reference numerals:

[0033] 100, transportation device; 110, magnetic rail assembly; 111, first rail magnet; 112, second rail magnet; 113, suspension channel; 120, carrier board; 121, through slot; 130, carrier board magnet assembly; 131, first carrier board magnet; 132, second carrier board magnet; 133, third carrier board magnet; 140, power assembly; 141, drive assembly; 1411, motor; 1412, second synchronous pulley; 1413, second synchronous belt; 142, magnetohydrodynamic drive assembly; 1421, magnetohydrodynamic component; 1422, first synchronous belt; 1423, first synchronous pulley; 143, carrier board support wheel; 144, guide wheel; 145, support wheel sealing ring; 150, connection assembly; 151, connection block; 152, connection plate; 200, vacuum chamber; 300, processing equipment; 400, carrier board assembly. Detailed implementation manners

[0034] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0035] Overview of the Application

[0036] In the related art, usually a set of magnetohydrodynamic drive assemblies are respectively arranged on both sides of a vacuum chamber. Each magnetohydrodynamic drive assembly passes through an opening in the side wall of the vacuum chamber. One end of each magnetohydrodynamic drive assembly located inside the vacuum chamber (i.e., one end of the transmission shaft of the magnetohydrodynamic drive assembly) is connected with a support wheel, so that the two support wheels on the two magnetohydrodynamic drive assemblies inside the vacuum chamber respectively bear one end of a carrier plate. Then, the transmission shafts of multiple magnetohydrodynamic drive assemblies are driven to rotate by a motor, thereby driving the support wheels connected to the transmission shafts to rotate, and further driving the carrier plate carrying the product to move.

[0037] However, adopting this structure has the following several disadvantages.

[0038] First, the magnetohydrodynamic drive assembly needs to pass through the side wall of the vacuum chamber. In order to ensure the sealing performance of the vacuum chamber, usually a seal is arranged at the gap between the magnetohydrodynamic drive assembly and the side wall of the vacuum chamber, but there is still a relatively high leakage risk at this gap.

[0039] Second, in order to increase the friction between the support wheel and the carrier plate, usually a sealing ring is arranged on the support wheel, but the sealing ring is prone to carbonization in the high-temperature environment inside the vacuum chamber, thereby losing its function.

[0040] Third, in order to make the movement direction of the carrier plate more accurate, usually a guide wheel is arranged on the magnetohydrodynamic drive assembly, with a complex structure and inconvenient for production.

[0041] Fourth, one end of the carrier plate in contact with the support wheel is usually a C-shaped steel, which has high requirements for precision, thus resulting in a relatively high production and manufacturing cost.

[0042] In view of this, the present application proposes a transportation device, a carrier plate assembly and a processing device. The first end of the carrier plate is suspended through a carrier plate magnet assembly and a magnetic rail assembly, without the need to arrange structures such as a magnetohydrodynamic drive assembly, a motor, a synchronous belt, a synchronous pulley, a support wheel and a guide wheel on one side of the vacuum chamber to drive the first end of the carrier plate, and has the following technical effects.

[0043] First, it can make the side wall of the vacuum chamber near the first end of the carrier plate not need to be opened for installing the magnetohydrodynamic drive assembly, reducing the leakage risk of the processing device, improving the flatness of the vacuum chamber, making the vacuum chamber more beautiful, and reducing the use of seals, thereby reducing the production cost.

[0044] Second, the support wheel is not needed on one side of the vacuum chamber, thus reducing the number of sealing rings used on the support wheel, reducing the risk of carbonization of the sealing rings in the processing device, and improving the stability of transporting the carrier plate.

[0045] Third, the number of magnetohydrodynamic drive assemblies connected with guide wheels is reduced, reducing the production difficulty.

[0046] Fourth, the first end of the carrier plate does not need to adopt a C-shaped steel structure, which reduces the production difficulty of the carrier plate.

[0047] Fifth, the magnetic levitation is more stable than the support wheels in supporting the carrier plate, which improves the stability of the carrier plate transportation.

[0048] Sixth, one side of the vacuum chamber does not need to use a magnetohydrodynamic drive component, a motor, a synchronous belt, a synchronous pulley, a support wheel, and a guide wheel, which reduces the production cost.

[0049] Seventh, the magnetic levitation method supports the carrier plate in a surface contact manner, while the support wheel supports the carrier plate in a point contact manner. Therefore, using the magnetic levitation method to support the carrier plate can make the movement of the carrier plate smoother.

[0050] Exemplary Device

[0051] Figure 1 The figure shows a top view of a processing device provided by an exemplary embodiment of the present application. Figure 2 The figure shows an exemplary embodiment of the present application. Figure 1 The figure shows a cross-sectional view of the processing device shown in the MM direction. Figure 3 The figure shows an exemplary embodiment of the present application. Figure 2 The figure shows a partial enlarged view of the processing device shown in the A area. Figure 4 The figure shows a schematic diagram of one side of a processing device provided by an exemplary embodiment of the present application. Figure 5 The figure shows an exemplary embodiment of the present application. Figure 4 The figure shows a cross-sectional view of the processing device shown in the NN direction.

[0052] As Figures 1 - 5 shown, an embodiment of the present application provides a transport device 100 for transporting a carrier plate 120, which is applied to a vacuum chamber 200. Among them, the carrier plate 120 is configured to carry a product, and the carrier plate 120 has a first end and a second end in a second direction (i.e., Figure 1 、 Figure 2 、 Figure 4 and Figure 5 the Y direction in). The transport device 100 includes: at least one magnetic rail assembly 110, a carrier plate magnet assembly 130, and a power assembly 140. At least one magnetic rail assembly 110 is along a first direction (i.e., Figure 1 and Figure 5The magnetic rail assemblies 110 are arranged sequentially along the X direction in the vacuum chamber 200. Each magnetic rail assembly 110 extends along a first direction and is capable of connecting to the inner wall of the vacuum chamber 200. A suspension channel 113 is provided on one side of the magnetic rail assembly 110 facing the center of the vacuum chamber 200. The suspension channel 113 extends along the first direction, with the first direction and the second direction forming an angle. The carrier plate magnet assembly 130 extends along the first direction and is connected to the first end of the carrier plate 120. The carrier plate magnet assembly 130 is spaced apart from the magnetic rail assembly 110. A portion of the carrier plate magnet assembly 130 is located in the suspension channel 113. Under the repulsive magnetic force between the magnetic rail assembly 110 and the carrier plate magnet assembly 130, the carrier plate magnet assembly 130 can be suspended in the suspension channel 113, thereby causing the first end of the carrier plate 120 to levitate. The power assembly 140 passes through the inner wall of the vacuum chamber 200 and is in transmission connection with the second end of the carrier plate 120. It is configured to drive the carrier plate 120 to move along the first direction.

[0053] In the above embodiment, the first end of the carrier 120 is suspended by the carrier magnet assembly 130 and the magnetic guide rail assembly 110, without the need to set up a magnetic fluid transmission assembly, a motor, a synchronous belt, a synchronous wheel, a support wheel and a guide wheel on one side of the vacuum chamber 200 to drive the first end of the carrier 120, which has the following advantages.

[0054] First, the side wall of the vacuum chamber 200 near the first end of the carrier 120 does not need to be opened to install the magnetofluid transmission component, which reduces the risk of leakage of the processing equipment 300, improves the flatness of the vacuum chamber 200, makes the vacuum chamber 200 more beautiful, and reduces the use of seals, thereby reducing production costs.

[0055] Second, no support wheels are required on one side of the vacuum chamber 200 , thereby reducing the number of sealing rings used on the support wheels, reducing the risk of carbonization of the sealing rings in the processing equipment 300 , and improving the stability of the transport carrier 120 .

[0056] Third, the number of magnetohydrodynamic transmission components connected to the guide wheels is reduced, thereby lowering the production difficulty.

[0057] Fourthly, the first end of the carrier plate 120 does not need to adopt a C-shaped steel structure, which reduces the difficulty of producing the carrier plate 120 .

[0058] Fifth, magnetic levitation is more stable than supporting wheels to support the carrier 120, thereby improving the stability of the carrier 120 during transportation.

[0059] Sixth, one side of the vacuum chamber 200 does not need to use a magnetic fluid transmission component, a motor, a synchronous belt, a synchronous wheel, a supporting wheel and a guide wheel, thereby reducing production costs.

[0060] Seventh, the carrier plate 120 is supported in a surface contact manner by the magnetic levitation method, while the carrier plate 120 is supported in a point contact manner by the support wheels. Therefore, using the magnetic levitation method to support the carrier plate 120 can make the movement of the carrier plate 120 more stable.

[0061] In some embodiments, as Figure 3 shown, the magnetic rail assembly 110 includes a first rail magnet 111. The first rail magnet 111 extends along a first direction and has magnetism. The carrier plate magnet assembly 130 includes a first carrier plate magnet 131. The first carrier plate magnet 131 extends along the first direction, is connected to the first end of the carrier plate 120, and is located above the first rail magnet 111. The first carrier plate magnet 131 has magnetism, and the lower end of the first carrier plate magnet 131 is magnetically repulsive from the upper end of the first rail magnet 111. Exemplarily, the upper end of the first rail magnet 111 is the S pole, and the lower end of the first rail magnet 111 is the N pole; the upper end of the first carrier plate magnet 131 is the N pole, and the lower end of the first carrier plate magnet 131 is the S pole. Through this structure, the magnetic force generated between the first carrier plate magnet 131 and the first rail magnet 111 can levitate the first carrier plate magnet 131, thereby driving the first end of the carrier plate 120 to levitate.

[0062] In some embodiments, as Figure 3 shown, the magnetic rail assembly 110 further includes a second rail magnet 112. The second rail magnet 112 extends along the first direction and is located above the first carrier plate magnet 131. The second rail magnet 112 has magnetism, and the lower end of the second rail magnet 112 is magnetically repulsive from the upper end of the first carrier plate magnet 131. Exemplarily, the upper end of the second rail magnet 112 is the S pole, and the lower end of the second rail magnet 112 is the N pole; the upper end of the first carrier plate magnet 131 is the N pole, and the lower end of the first carrier plate magnet 131 is the S pole. Through this structure, the magnetic force generated between the second rail magnet 112 and the first carrier plate magnet 131 can limit the levitation height of the first carrier plate magnet 131, thereby making the first end of the carrier plate 120 levitate at a stable height.

[0063] In some embodiments, as Figure 5 shown, the transport device 100 further includes a connection assembly 150. The magnetic rail assembly 110 is connected to the inner wall of the vacuum chamber 200 through the connection assembly 150. Exemplarily, the connection assembly 150 includes: a plurality of connection blocks 151 and a plurality of connection plates 152. The plurality of connection blocks 151 are connected to the inner wall of the vacuum chamber 200. Each connection plate 152 is connected to at least one connection block 151, and each magnetic rail assembly 110 is connected to at least one connection plate 152. Among them, the magnetic rail assembly 110 and the connection plate 152 can be connected by screws or bolts in an exemplary manner.

[0064] In some embodiments, as Figure 3As shown, the carrier magnet assembly 130 further includes a second carrier magnet 132. The second carrier magnet 132 extends along the first direction, is connected to the first end of the carrier 120, and is located on the side of the first guide magnet 111 away from the inner wall of the vacuum chamber 200. The second carrier magnet 132 has magnetism. The end of the second carrier magnet 132 close to the first guide magnet 111 is magnetically repulsive from the upper end of the first guide magnet 111.

[0065] Exemplarily, the second carrier magnet 132 is close to the upper end of the first guide magnet 111 and away from the lower end of the first guide magnet 111. Alternatively, the size of the second carrier magnet 132 in the vertical direction can be greater than or equal to the size of the upper end of the first guide magnet 111. In the vertical direction, the second carrier magnet 132 is divided into a first part close to the upper end of the first guide magnet 111 and a second part close to the lower end of the first guide magnet 111 except for the first part (or the second carrier magnet 132 has no second part), and the size of the first part is greater than the size of the second part.

[0066] Exemplarily, the upper end of the first guide magnet 111 is an S pole, and the lower end of the first guide magnet 111 is an N pole; the end of the second carrier magnet 132 close to the first guide magnet 111 is an S pole, and the end of the second carrier magnet 132 away from the first guide magnet 111 is an N pole. With this structure, the magnetic force generated between the second carrier magnet 132 and the first guide magnet 111 can make the second carrier magnet 132 away from the first guide magnet 1, so as to guide the carrier 120 and make the carrier 120 move precisely along the first direction.

[0067] In some embodiments, as Figure 3 shown, the carrier magnet assembly 130 further includes a third carrier magnet 133. The third carrier magnet 133 extends along the first direction, is connected to the first end of the carrier 120, and is located on the side of the second guide magnet 112 away from the inner wall of the vacuum chamber 200. The third carrier magnet 133 has magnetism. The end of the third carrier magnet 133 close to the second guide magnet 112 is magnetically repulsive from the lower end of the second guide magnet 112.

[0068] Exemplarily, the third carrier magnet 133 is close to the lower end of the second guide magnet 112 and away from the upper end of the second guide magnet 112. Alternatively, the size of the third carrier magnet 133 in the vertical direction can be greater than or equal to the size of the lower end of the second guide magnet 112. In the vertical direction, the third carrier magnet 133 is divided into a third part close to the lower end of the second guide magnet 112 and a fourth part close to the upper end of the second guide magnet 112 except for the third part (or the third carrier magnet 133 has no fourth part), and the size of the third part is greater than the size of the fourth part.

[0069] Exemplarily, one end of the third carrier magnet 133 close to the second guide rail magnet 112 is an N pole, and the end of the third carrier magnet 133 far from the second guide rail magnet 112 is an S pole; the upper end of the second guide rail magnet 112 is an S pole, and the lower end of the second guide rail magnet 112 is an N pole. Through this structure, the magnetic force generated between the third carrier magnet 133 and the second guide rail magnet 112 can make the third carrier magnet 133 move away from the second guide rail magnet 112, thereby guiding the carrier 120 and enabling the carrier 120 to move precisely along the first direction.

[0070] In addition, if the second carrier magnet 132 and the first guide rail magnet 111, as well as the third carrier magnet 133 and the second guide rail magnet 112, guide the carrier 120 simultaneously, the carrier 120 can be guided more smoothly.

[0071] Figure 6 Shown is an Figure 5 enlarged partial view of the processing equipment provided by an exemplary embodiment of the present application in area B. Figure 7 Shown is a schematic diagram of another side of the processing equipment provided by an exemplary embodiment of the present application.

[0072] In some embodiments, as Figure 2 , Figure 4 , Figure 6 and Figure 7 shown, the vacuum chamber 200 has a vacuum cavity and through holes. The power assembly 140 includes: a driving assembly 141, at least one magnetohydrodynamic transmission assembly 142, and at least one carrier support wheel 143. The driving assembly 141 is disposed outside the vacuum chamber and is configured to provide a driving force. At least one magnetohydrodynamic transmission assembly 142 is arranged in sequence along the first direction. The first end of each magnetohydrodynamic transmission assembly 142 is located outside the vacuum chamber, and the second end of each magnetohydrodynamic transmission assembly 142 passes through the through hole and extends into the vacuum chamber. At least one magnetohydrodynamic transmission assembly 142 is in transmission connection with the driving assembly 141. Each carrier support wheel 143 is connected to the second end of a magnetohydrodynamic transmission assembly 142 and is configured to support the second end of the carrier 120. Wherein, the driving assembly 141 drives each carrier support wheel 143 to rotate through at least one magnetohydrodynamic transmission assembly 142 to drive the carrier 120 to move along the first direction.

[0073] Exemplarily, the magnetohydrodynamic drive assembly 142 may include a magnetohydrodynamic assembly 1421, a first synchronous belt 1422, and a first synchronous pulley 1423. The magnetohydrodynamic assembly 1421 is a transmission structure with good sealing performance. The magnetohydrodynamic assembly 1421 has a transmission shaft. One end of the transmission shaft located inside the vacuum chamber is connected to the carrier plate support pulley 143, and two first synchronous pulleys 1423 are sleeved on the end of the transmission shaft located outside the vacuum chamber. For each magnetohydrodynamic drive assembly 142, the first synchronous belt 1422 is sleeved on a first synchronous pulley 1423 of this magnetohydrodynamic drive assembly 142 and a first synchronous pulley 1423 of the next magnetohydrodynamic drive assembly 142, so that the rotational force of the first synchronous pulley 1423 of the first magnetohydrodynamic drive assembly 142 can be transmitted to the first synchronous pulleys 1423 of other magnetohydrodynamic drive assemblies 142. The last magnetohydrodynamic drive assembly 142 does not include the first synchronous belt 1422. The drive assembly 141 at least includes a motor 1411, a second synchronous pulley 1412, and a second synchronous belt 1413. The drive assembly 141 may further include a speed reducer. A second synchronous pulley 1412 is sleeved on the output end of the drive assembly 141 (which may be the output end of the motor or the speed reducer), and the second synchronous belt 1413 can be wound around the second synchronous pulley 1412 and the first synchronous pulley 1423 of the first magnetohydrodynamic drive assembly 142. The second end of the carrier plate 120 may have a through groove 121 (such as a C-shaped steel). The through groove 121 has opposite openings and a groove bottom in the second direction, and the carrier plate support pulley 143 can abut against the groove bottom of the through groove 121.

[0074] In some embodiments, as Figure 6 shown, the power assembly 140 further includes at least one guide pulley 144. Each guide pulley 144 is rotatably connected to a magnetohydrodynamic drive assembly 142. Each guide pulley 144 is configured to abut against the second end of the carrier plate 120 to guide the carrier plate 120 so that the carrier plate 120 can accurately move along the first direction. Exemplarily, the guide pulley 144 may abut against the groove bottom of the above-mentioned through groove 121.

[0075] In addition, if the guide pulley 144 guides the carrier plate 120 from one side, the second carrier plate magnet 132 and the first guide rail magnet 111, as well as the third carrier plate magnet 133 and the second guide rail magnet 112, can guide the carrier plate 120 from the other side, so that the carrier plate 120 can move more accurately along the first direction.

[0076] In some embodiments, as Figure 6As shown, the power assembly 140 further includes at least one support wheel seal 145, and each carrier support wheel 143 is provided with at least one support wheel seal 145. The provision of the support wheel seal 145 can increase the friction between the carrier support wheel 143 and the carrier 120, so that the carrier support wheel 143 can better drive the carrier 120 to move.

[0077] Figure 8 Shown is a schematic structural diagram of a carrier assembly provided by an exemplary embodiment of the present application.

[0078] Based on the same concept, Figures 1 - 5 and Figure 8 As shown, an embodiment of the present application further provides a transport device 100, which is applied to a vacuum chamber 200. The transport device 100 includes: at least one magnetic guide rail assembly 110, a carrier assembly 400, and a power assembly 140. The at least one magnetic guide rail assembly 110 is arranged sequentially along a first direction, each magnetic guide rail assembly 110 extends along the first direction, and each magnetic guide rail assembly 110 is capable of connecting to the inner wall of the vacuum chamber 200. A suspension channel 113 is provided on one side of the magnetic guide rail assembly 110 facing the center of the vacuum chamber 200. The suspension channel 113 extends along the first direction, and the first direction and the second direction form an angle. The carrier assembly 400 includes a carrier 120 and a carrier magnet assembly 130. The carrier 120 is configured to carry a product. The carrier 120 has a first end and a second end in the second direction. The carrier magnet assembly 130 extends in the first direction and is connected to the first end of the carrier 120. The carrier magnet assembly 130 is spaced apart from the magnetic rail assembly 110. A portion of the carrier magnet assembly 130 is located in the suspension channel 113. Under the repulsive magnetic force between the magnetic rail assembly 110 and the carrier magnet assembly 130, the carrier magnet assembly 130 can be suspended in the suspension channel 113, thereby causing the first end of the carrier 120 to levitate. The power assembly 140 passes through the inner wall of the vacuum chamber 200 and is in transmission connection with the second end of the carrier 120. The power assembly 140 is configured to drive the carrier 120 to move in the first direction.

[0079] Based on the same concept, Figure 8As shown in the figure, an embodiment of the present application further provides a carrier assembly 400, which is applied to a transportation device 100 of a vacuum chamber 200. The transportation device 100 includes at least one magnetic guide rail assembly 110. The magnetic guide rail assemblies 110 are arranged in sequence along a first direction. Each magnetic guide rail assembly 110 extends along the first direction. A suspension channel 113 is provided on the side of the magnetic guide rail assembly 110 facing the center of the vacuum chamber 200. The suspension channel 113 extends along the first direction. The carrier assembly 400 includes: a carrier 120 and a carrier magnet assembly 130. The carrier 120 is configured to carry a product. The carrier 120 has a first end and a second end in a second direction. The second end of the carrier 120 is in transmission connection with a power assembly 140. The carrier 120 can move along the first direction under the drive of the power assembly 140. The first direction and the second direction form an angle. The carrier magnet assembly 130 extends along the first direction, is connected to the first end of the carrier 120, and is spaced apart from at least one magnetic guide rail assembly 110. A part of the carrier magnet assembly 130 is located in the suspension channel 113. Under the repulsive magnetic force between the magnetic guide rail assembly 110 and the carrier magnet assembly 130, the carrier magnet assembly 130 can be suspended in the suspension channel 113 and drive the first end of the carrier 120 to be suspended.

[0080] Based on the same concept, as Figure 1 and Figure 4 shown in the figure, an embodiment of the present application further provides a processing device 300. The processing device 300 includes: a vacuum chamber 200 and the transportation device 100 of any one of the above embodiments. The vacuum chamber 200 is configured to process a product. The vacuum chamber 200 has a vacuum chamber. The transportation device 100 is at least partially disposed in the vacuum chamber and is configured to transport the product.

[0081] Among them, the product is exemplarily a silicon wafer, a battery chip or a glass substrate. The vacuum chamber 200 can extend along the first direction. The horizontal cross-section of the vacuum chamber 200 can exemplarily be a rectangle. The processing device 300 is exemplarily a chemical vapor deposition device.

[0082] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0083] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including," "comprising," "having," etc. are open-ended terms that mean "including but not limited to" and can be used interchangeably with each other. The word "or" and "and" used herein refer to the phrase "and / or" and can be used interchangeably with it, unless the context clearly indicates otherwise. The phrase "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.

[0084] It should also be noted that in the devices, equipment, and methods of this application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of this application.

[0085] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0086] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A transport device, characterized in that, For a transport carrier plate, which is applied to a vacuum chamber. Wherein, the carrier plate is configured to carry a product, and the carrier plate has a first end and a second end in a second direction. The transport device includes: At least one magnetic guide rail assembly, which is arranged in sequence along a first direction. Each of the magnetic guide rail assemblies extends along the first direction, and each of the magnetic guide rail assemblies can be connected to the inner wall of the vacuum chamber. Wherein, a suspension channel is provided on a side of the magnetic guide rail assembly facing the center of the vacuum chamber, and the suspension channel extends along the first direction. The first direction has an included angle with the second direction; A carrier plate magnet assembly, which extends along the first direction, is connected to the first end of the carrier plate, and is arranged at an interval from the magnetic guide rail assembly. A part of the carrier plate magnet assembly is located in the suspension channel, and under the repulsive magnetic force between the magnetic guide rail assembly and the carrier plate magnet assembly, the carrier plate magnet assembly can be suspended in the suspension channel and drive the first end of the carrier plate to be suspended; A power assembly, which passes through the inner wall of the vacuum chamber and is in transmission connection with the second end of the carrier plate, and is configured to drive the carrier plate to move along the first direction.

2. The transport device according to claim 1, characterized in that, The magnetic guide rail assembly includes: A first guide rail magnet, which extends along the first direction, and the first guide rail magnet has magnetism; Wherein, the carrier plate magnet assembly includes: A first carrier plate magnet, which extends along the first direction, is connected to the first end of the carrier plate, and is located above the first guide rail magnet. The first carrier plate magnet has magnetism, and the lower end of the first carrier plate magnet is magnetically repulsive from the upper end of the first guide rail magnet.

3. The transport device according to claim 2, wherein The magnetic guide rail assembly further includes: A second guide rail magnet, which extends along the first direction and is located above the first carrier plate magnet. The second guide rail magnet has magnetism, and the lower end of the second guide rail magnet is magnetically repulsive from the upper end of the first carrier plate magnet.

4. The transport device according to claim 2 or 3, characterized in that, The carrier plate magnet assembly further includes: A second carrier plate magnet, which extends along the first direction, is connected to the first end of the carrier plate, and is located on a side of the first guide rail magnet away from the inner wall of the vacuum chamber. The second carrier plate magnet has magnetism, and one end of the second carrier plate magnet close to the first guide rail magnet is magnetically repulsive from the upper end of the first guide rail magnet.

5. The transport device according to claim 3, wherein The carrier plate magnet assembly further includes: A third carrier plate magnet, which extends along the first direction, is connected to the first end of the carrier plate, and is located on a side of the second guide rail magnet away from the inner wall of the vacuum chamber. The third carrier plate magnet has magnetism, and one end of the third carrier plate magnet close to the second guide rail magnet is magnetically repulsive from the lower end of the second guide rail magnet.

6. The transport device according to claim 1 or 2, characterized in that, The vacuum chamber has a vacuum chamber and a through hole. The power assembly includes: A driving assembly, which is arranged outside the vacuum chamber and is configured to provide a driving force; At least one magnetohydrodynamic transmission assembly, which is arranged in sequence along the first direction. The first end of each magnetohydrodynamic transmission assembly is located outside the vacuum chamber, and the second end of each magnetohydrodynamic transmission assembly passes through the through hole and extends into the vacuum chamber. At least one of the magnetohydrodynamic transmission assemblies is in transmission connection with the driving assembly; At least one carrier support wheel, each of the carrier support wheels being connected to the second end of one of the magneto-fluid drive assemblies and configured to carry the second end of the carrier, wherein the drive assembly drives each of the carrier support wheels to rotate through at least one of the magneto-fluid drive assemblies to drive the carrier to move in the first direction.

7. The transport device according to claim 6, wherein, The power assembly further includes: At least one guide wheel, each of the guide wheels being rotatably connected to one of the magneto-fluid drive assemblies, each of the guide wheels being configured to abut against the second end of the carrier to guide the carrier; And / or, at least one support wheel seal ring, at least one of the support wheel seal rings being sleeved on each of the carrier support wheels.

8. A transport device, characterized in that, Applied to a vacuum chamber, the transport device includes: At least one magnetic guide rail assembly, arranged in sequence in the first direction, each of the magnetic guide rail assemblies extending in the first direction, each of the magnetic guide rail assemblies being capable of being connected to the inner wall of the vacuum chamber, wherein a suspension channel is provided on a side of the magnetic guide rail assembly facing the center of the vacuum chamber, and the suspension channel extends in the first direction; A carrier assembly, the carrier assembly including a carrier and a carrier magnet assembly, wherein the carrier is configured to carry a product, the carrier has a first end and a second end in a second direction, the carrier magnet assembly extends in the first direction, the carrier magnet assembly is connected to the first end of the carrier and is spaced apart from the magnetic guide rail assembly, a part of the carrier magnet assembly is located in the suspension channel, and under the repulsive magnetic force between the magnetic guide rail assembly and the carrier magnet assembly, the carrier magnet assembly can be suspended in the suspension channel and drive the first end of the carrier to be suspended, and the first direction and the second direction form an angle; A power assembly, passing through the inner wall of the vacuum chamber and being in transmission connection with the second end of the carrier, and being configured to drive the carrier to move in the first direction.

9. A carrier board assembly, characterized in that, A transport device applied to a vacuum chamber, the transport device including at least one magnetic guide rail assembly, the magnetic guide rail assemblies being arranged in sequence in the first direction, each of the magnetic guide rail assemblies extending in the first direction, a suspension channel being provided on a side of the magnetic guide rail assembly facing the center of the vacuum chamber, the suspension channel extending in the first direction, and the carrier assembly including: A carrier, configured to carry a product, the carrier having a first end and a second end in a second direction, the second end of the carrier being in transmission connection with the power assembly, and the carrier being capable of moving in the first direction under the drive of the power assembly, and the first direction and the second direction form an angle; A carrier magnet assembly, extending in the first direction, connected to the first end of the carrier and spaced apart from at least one magnetic guide rail assembly, a part of the carrier magnet assembly being located in the suspension channel, and under the repulsive magnetic force between the magnetic guide rail assembly and the carrier magnet assembly, the carrier magnet assembly can be suspended in the suspension channel and drive the first end of the carrier to be suspended.

10. A processing device, characterized in that, Including: A vacuum chamber, configured to process a product, the vacuum chamber having a vacuum chamber; The transport device according to any one of claims 1 to 8 above is at least partially disposed in the vacuum chamber and is configured to transport the product.

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