Vacuum magnetic control coating device

Abstract

The utility model relates to a vacuum magnetic control coating device which comprises a connecting shaft sleeve, a connecting shaft, an end head and a target material, sealing elements are arranged between one end, far away from the target material, of the end head and the connecting shaft sleeve, sealing elements are arranged between the other end, close to the target material, of the end head and the connecting shaft sleeve, and the sealing elements are adjacent to corresponding framework oil seals; the sealing piece comprises a body and a convex part, the body and the convex part are both annular, the convex part is arranged at one end of the body and is coaxial with the body, the inner circumference of the convex part and the inner circumference of the body are the same in diameter, and the width of the convex part is smaller than that of the body; the convex part of one sealing element is closer to one end of the end than the body, and the convex part of the other sealing element is closer to the other end of the end than the body. According to the vacuum magnetic control coating device provided by the utility model, the sealing element is arranged, so that not only is a sealing effect achieved, but also the sealing gasket is stable and is not inclined and blocked even when the connecting shaft sleeve rotates, a good using environment of the framework oil seal is ensured, and the stability of an end head is improved; the end sealing performance is improved, and the service life of the end is prolonged.

Description

Technical Field

[0001] The utility model relates to a vacuum magnetron sputtering coating device. Background Art

[0002] Solex coating technology is an advanced coating technology developed by the French Solex Group. This technology is mainly applied to fields such as high-end spectacle lenses, mobile phone exteriors, electronic products, automotive lamps, and architectural decorations. Specifically, it is applied to fields such as low-emissivity LowE glass, liquid crystal displays, and touch screens. The products are widely used in markets in regions such as Europe, North America, and Asia and are adopted by internationally well-known brands.

[0003] The existing driving end of magnetron sputtering has poor sealing performance. When producing single-silver and double-silver coated glass products, it can still meet the process requirements. However, as the performance requirements for architectural coated glass are getting higher and higher, when producing coated products with higher requirements, such as preparing triple-silver coated glass, due to the air leakage rate of the end being unable to meet the production needs, it frequently causes difficulties in sample adjustment and instability of the silver color, resulting in a large number of defective products.

[0004] Due to the fact that the driving end cannot achieve complete sealing, it is extremely easy to have a jamming phenomenon. As a layer of sputtered material will cover the outside of the sputtering end of the target, the insulation performance of the end to the ground will decrease. When it is lower than 5 megohms, it will affect the sputtering effect. It is necessary to regularly polish and clean the periphery of the end to ensure the insulation performance. However, during the cleaning process, it is extremely easy to blow dust and foreign matters to the periphery of the skeleton oil seal. The skeleton oil seal will bring dust into the sealing surface during rotation, affecting the sealing performance and causing air leakage at the end.

[0005] Therefore, in order to meet the requirements of high-quality architectural coated glass, it is urgent to improve the stability of the driving end. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a vacuum magnetron sputtering coating device to solve the problems of poor sealing performance and low service life of the existing driving end.

[0007] To achieve the above purpose, the technical scheme adopted by the utility model is:

[0008] A vacuum magnetron sputtering coating device includes a connecting shaft sleeve, a connecting shaft, an end, and a target. The connecting shaft sleeve is arranged outside one end of the connecting shaft. A through hole is opened in the middle of the end. The connecting shaft sleeve is arranged in the through hole of the end. The other end of the connecting shaft is used to connect with the target. Skeleton oil seals are respectively arranged between the opposite ends of the connecting shaft sleeve and the end.

[0009] A seal is provided between one end of the end head away from the target and the connecting shaft bushing, and also between the other end of the end head close to the target and the connecting shaft bushing. The seal is arranged adjacent to the corresponding skeleton oil seal.

[0010] The seal includes a body and a convex part. Both the body and the convex part are annular. The convex part is provided at one end of the body. The convex part is coaxial with the body. The inner diameter of the inner circumference of the convex part is the same as that of the body. The width of the convex part is smaller than the width of the body. The convex part of one seal is closer to one end of the end head than its body, and the convex part of the other seal is closer to the other end of the end head than its body.

[0011] According to some implementation aspects of the present invention, a first sealing ring is provided on one side of the body where the convex part is arranged.

[0012] According to some implementation aspects of the present invention, a second sealing ring is provided on the outer circumference of the convex part.

[0013] According to some implementation aspects of the present invention, a third sealing ring is provided on the inner circumference of the body and / or the convex part.

[0014] According to some implementation aspects of the present invention, the material of the seal is fluororubber.

[0015] According to some implementation aspects of the present invention, the clearance between the outer circumference of the body and the end head is less than or equal to 1 mm; the clearance between the outer circumference of the convex part and the end head is less than or equal to 1 mm.

[0016] According to some implementation aspects of the present invention, the clearances between the inner circumferences of the body and the convex part and the connecting shaft bushing are less than or equal to 1 mm.

[0017] According to some implementation aspects of the present invention, the side surface of the convex part of the seal away from the body is a plane, the side surface of the body of the seal away from the convex part is a plane, and the side surface of the body where the convex part is arranged is a plane.

[0018] According to some implementation aspects of the present invention, the material of the skeleton oil seal is nitrile rubber, and the hardness of the skeleton oil seal is 80 HA.

[0019] According to some implementation aspects of the present utility model, the device further includes a gland sleeve which is arranged on one side of the end head. The gland sleeve includes a sleeve body and a boss. The boss is arranged at one end of the sleeve body. The boss is coaxial with the sleeve body. The inner diameter of the boss is the same as that of the inner circumference of the sleeve body. The width of the boss is smaller than that of the sleeve body. The boss is closer to the middle of the end head than the sleeve body. A sealing ring is arranged on one side of the sleeve body where the boss is located. There are multiple sealing rings, and the multiple sealing rings are arranged in sequence from the side close to the boss to the side far from the boss.

[0020] Due to the application of the above technical solution, the present utility model has the following advantages compared with the prior art:

[0021] The vacuum magnetron sputtering coating device provided by the present utility model, by setting the sealing member, not only plays a sealing role, but also makes the gasket stable even when the connecting bushing rotates, and will not tilt and jam. Adding a seal in front of the skeleton oil seal not only plays a sealing function, but also completely cuts off the entry of dust and foreign matters outside the end head into the surrounding of the skeleton oil seal, ensuring a good use environment for the skeleton oil seal, and improving the stability of the end head; ensuring that the driving end head has a service life of at least 1 year without air leakage, greatly improving the sealing performance of the end head, prolonging the service life of the end head, reducing the frequency of replacing the end head, improving the target changing efficiency, and reducing the equipment maintenance time. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Attached Figure 1 is a cross-sectional view of the vacuum magnetron sputtering coating device provided by the present utility model;

[0023] Attached Figure 2 is Figure 1 an enlarged view of the connecting shaft, end head, and sealing member in

[0024] Attached Figure 3 is a structural diagram of the sealing member of the vacuum magnetron sputtering coating device provided by the present utility model from the first perspective;

[0025] Attached Figure 4 is a structural diagram of the sealing member of the vacuum magnetron sputtering coating device provided by the present utility model from the second perspective;

[0026] Attached Figure 5 is a structural diagram of the sealing member of the vacuum magnetron sputtering coating device provided by the present utility model from the third perspective;

[0027] Attached Figure 6 is a structural diagram of the gland sleeve of the vacuum magnetron sputtering coating device provided by the present utility model from the first perspective;

[0028] Attached Figure 7Structural diagram of the gland sleeve of the vacuum magnetron sputtering coating device provided by the present utility model from the second perspective;

[0029] Appendix Figure 8 For Figure 1 Enlarged view of the connecting shaft and the end head in the middle;

[0030] Appendix Figure 9 Structural diagram of the connecting shaft sleeve and the end head of the vacuum magnetron sputtering coating device provided by the present utility model from the first perspective;

[0031] Appendix Figure 10 Structural diagram of the connecting shaft sleeve and the end head of the vacuum magnetron sputtering coating device provided by the present utility model from the second perspective.

[0032] In the above drawings:

[0033] 1 - connecting shaft sleeve; 2 - connecting shaft; 3 - end head; 4 - target; 5 - skeleton oil seal;

[0034] 6 - seal, 61 - body, 62 - convex part, 63 - first sealing ring, 64 - second sealing ring, 65 - third sealing ring;

[0035] 7 - gland sleeve, 71 - sleeve body, 72 - boss, 73 - sealing ring;

[0036] 8 - locking nut; 9 - large helical gear; 10 - small helical gear; 11 - air extraction hole. Specific embodiments

[0037] Next, the technical solutions of the present utility model will be clearly and completely described in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.

[0038] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] See Figures 1 to 10 the vacuum magnetron sputtering coating device shown in the figure. The device includes a connecting shaft sleeve 1, a connecting shaft 2, an end head 3, and a target 4. The connecting shaft sleeve 1 surrounds the circumference of the connecting shaft 2 and is arranged outside one end of the connecting shaft 2. A through hole is provided in the middle of the end head 3. The connecting shaft sleeve 1 and one end of the connecting shaft 2 (see Figure 9 the m shown in the figure) are both arranged in the through hole of the end head 3; the other end of the connecting shaft 2 (see Figure 10 the n shown in the figure) is used to connect with the target 4.

[0041] Skeleton oil seals 5 are respectively arranged between the opposite ends of the connecting shaft sleeve 1 and the end head 3. The function of the skeleton oil seals 5 is to isolate the components that need to be lubricated in the transmission components from the external environment and prevent lubricating oil from leaking.

[0042] There are accommodation spaces between one end of the end head 3 far from the target 4 and the connecting shaft sleeve 1 and between the other end of the end head 3 close to the target 4 and the connecting shaft sleeve 1. Sealing members 6 are arranged in the accommodation spaces. The sealing members 6 are arranged adjacent to the corresponding skeleton oil seals 5. The sealing members 6 include a body 61 and a convex portion 62. Both the body 61 and the convex portion 62 are annular. The convex portion 62 is arranged at one end of the body 61. The convex portion 62 is coaxial with the body 61. The inner circumference diameter of the convex portion 62 is the same as that of the inner circumference of the body 61, that is, the inner circumference of the convex portion 62 and the inner circumference of the body 61 form the same circle. The width of the convex portion 62 (see Figure 4 the a shown in the figure) is smaller than the width of the body 61 (see Figure 5 the b shown in the figure); the convex portion 62 of the sealing member 6 between one end of the end head 3 far from the target 4 and the connecting shaft sleeve 1 is closer to one end of the end head 3 than its body 61, and the convex portion 62 of the sealing member 6 between the other end of the end head 3 close to the target 4 and the connecting shaft sleeve 1 is closer to the other end of the end head 3 than its body 61.

[0043] By providing the seal 6 with such a structure, the accommodation spaces between the end 3 far from the target 4 and the connecting shaft bushing 1 and between the other end of the end 3 close to the target 4 and the connecting shaft bushing 1 can be filled, improving the sealing performance of the end 3, preventing air leakage, and ensuring that the seal 6 remains stable even when the connecting shaft bushing 1 rotates without tilting or jamming. Adding a sealing measure in front of the skeleton oil seal 5 not only serves a sealing function but also completely prevents external dust and foreign objects from entering the area around the skeleton oil seal 5, ensuring a good operating environment for the skeleton oil seal 5 and enhancing the stability of the end 3.

[0044] In this example, one side of the convex portion 62 of the seal 6 away from the body 61 is a flat surface, one side of the body 61 of the seal 6 away from the convex portion 62 is a flat surface, and the side of the body 61 where the convex portion 62 is provided is a flat surface, and these three flat surfaces are parallel. The end face of the convex portion 62 of the seal 6 between the end 3 far from the target 4 and the connecting shaft bushing 1 away from its body 61 is flush with the end face of the end 3 or has a small gap therebetween, and the end face of the convex portion 62 of the seal 6 between the other end of the end 3 close to the target 4 and the connecting shaft bushing 1 away from its body 61 is flush with the other end face of the end 3 or has a small gap therebetween.

[0045] Based on the seal 6 of this example, the gaps between the outer periphery of the body 61, the outer periphery of the convex portion 62 and the end 3 are less than or equal to 1 mm; the gap between the outer periphery of the convex portion 62 and the end 3 is less than or equal to 1 mm; the gaps between the inner periphery of the body 61, the inner periphery of the convex portion 62 and the connecting shaft bushing 1 are all less than or equal to 1 mm. This can further improve the sealing performance of the end 3, prevent air leakage, and avoid jamming of the end 3 during rotation while ensuring the sealing performance.

[0046] In some embodiments, a first sealing ring 63 is provided on the side of the body 61 where the convex portion 62 is provided. By providing the first sealing ring 63, the sealing performance of the contact between the body 61 and the end 3 is improved; multiple first sealing rings 63 can be provided, and the multiple first sealing rings 63 are concentrically arranged and are sequentially distributed in the direction from near the convex portion 62 to the edge of the body 61.

[0047] In some embodiments, a second sealing ring 64 is provided on the outer periphery of the convex portion 62. By providing the second sealing ring 64, the sealing performance of the contact between the convex portion 62 and the end 3 is improved; multiple second sealing rings 64 can be provided, and the multiple second sealing rings 64 are sequentially distributed from the side of the convex portion 62 close to the body 61 to the side of the convex portion 62 away from the body 61.

[0048] In some embodiments, a third sealing ring 65 is provided on the inner circumference of the body 61 and / or the convex part 62. By providing the third sealing ring 65, the sealing performance of the contact between the body 61 and the connecting shaft bushing 1 is improved. A plurality of third sealing rings 65 may be provided, and the plurality of third sealing rings 65 are sequentially distributed from the side of the convex part 62 close to the body 61 to the side of the convex part 62 away from the body 61.

[0049] In some embodiments, the material of the seal 6 is fluororubber, and the temperature range for fluororubber to withstand high temperatures is 200 - 250 °C.

[0050] The original skeleton oil seal 5 is made of fluororubber with a hardness of 70 HA. After using the seal 6 in this example, the material of the skeleton oil seal 5 can be changed to nitrile rubber with a hardness of 80 HA. The cost of fluororubber is 2 - 3 times that of nitrile rubber. Then, the unit price of each skeleton oil seal 5 can be saved by more than 60%, and due to the increased hardness, the sealing performance is better.

[0051] In some embodiments, the device further includes a gland sleeve 7. Refer to Figures 6-7 , the gland sleeve 7 is provided on one side of the end 3. The gland sleeve 7 includes a sleeve body 71 and a convex platform 72. The convex platform 72 is provided at one end of the sleeve body 71. The convex platform 72 is coaxial with the sleeve body 71. The inner circumference diameter of the convex platform 72 is the same as that of the inner circumference of the sleeve body 71, that is, the inner circumference of the convex platform 72 and the inner circumference of the sleeve body 71 form the same circle. The width of the convex platform 72 is smaller than the width of the sleeve body 71. The convex platform 72 is closer to the middle of the end 3 than the sleeve body 71. A sealing ring 73 is provided on the side of the sleeve body 71 where the convex platform 72 is provided.

[0052] In some embodiments, a plurality of sealing rings 73 are provided, and the plurality of sealing rings 73 are sequentially arranged from the direction close to the convex platform 72 to the direction away from the convex platform 72. Refer to Figures 6-7 , preferably two sealing rings 73 are provided.

[0053] The connecting shaft 2 in this example is preferably a hexagonal shaft head.

[0054] The advantages of the vacuum magnetron sputtering device in this example are as follows:

[0055] 1. The life of the end is extended by at least more than twice. After tracking, the life of the end using the existing flat gasket is 6 - 9 months. The end using the seal in this example has not leaked air after being used for more than 1 year, ensuring that the service life of the driving end is at least 1 year without air leakage, greatly improving the sealing performance of the end, extending the service life of the end, and greatly improving the vacuum stability of the magnetron sputtering for coating.

[0056] 2. The cost for maintaining each drive end is approximately 900 yuan. Taking a coating production line as an example, there are a total of 196 ends. The previous maintenance cycle was 9 months, and after using the seals in this example, the maintenance cycle is 12 months. The number of ends that can be saved in maintenance per year is: 196*(12 - 9) / 12 = 65.3. The maintenance cost saved per year is at least: 65.3 * 900 = 58,800 yuan. Other hidden benefits are: reducing the time for replacing the ends and improving the equipment continuity.

[0057] The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it should not be used to limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A vacuum magnetron sputtering coating device, characterized in that, It includes a connecting shaft bushing, a connecting shaft, an end head, and a target. The connecting shaft bushing is arranged outside one end of the connecting shaft. A through hole is formed in the middle of the end head. The connecting shaft bushing is arranged in the through hole of the end head. The other end of the connecting shaft is used to connect with the target; a skeleton oil seal is respectively arranged between the opposite two ends of the connecting shaft bushing and the end head. Sealing members are respectively arranged between one end of the end head far from the target and the connecting shaft bushing, and between the other end of the end head close to the target and the connecting shaft bushing. The sealing members are arranged adjacent to the corresponding skeleton oil seals; the sealing member includes a body and a convex portion. Both the body and the convex portion are annular. The convex portion is arranged at one end of the body. The convex portion is coaxial with the body. The inner diameter of the inner circumference of the convex portion is the same as that of the inner circumference of the body. The width of the convex portion is smaller than the width of the body; the convex portion of one sealing member is closer to one end of the end head than its body, and the convex portion of the other sealing member is closer to the other end of the end head than its body.

2. The vacuum magnetron sputtering coating device according to claim 1, wherein, A first sealing ring is arranged on one side surface of the body where the convex portion is arranged.

3. The vacuum magnetron sputtering coating device according to claim 1, characterized in that A second sealing ring is arranged on the outer circumference of the convex portion.

4. The vacuum magnetron sputtering coating device according to claim 1, characterized in that, A third sealing ring is arranged on the inner circumference of the body and / or the convex portion.

5. The vacuum magnetron sputtering coating apparatus according to claim 1, wherein The material of the sealing member is fluororubber.

6. The vacuum magnetron sputtering coating device according to claim 1, characterized in that The gap between the outer circumference of the body and the end head is less than or equal to 1 mm; the gap between the outer circumference of the convex portion and the end head is less than or equal to 1 mm.

7. The vacuum magnetron sputtering coating device according to claim 1, wherein The gap between the inner circumference of the body, the inner circumference of the convex portion and the connecting shaft bushing is less than or equal to 1 mm.

8. The vacuum magnetron sputtering coating apparatus according to claim 1, characterized in that The side surface of the convex portion of the sealing member away from the body is a plane, the side surface of the body of the sealing member away from the convex portion is a plane, and the side surface of the body where the convex portion is arranged is a plane.

9. The vacuum magnetron sputtering coating device according to claim 1, characterized in that, The material of the skeleton oil seal is nitrile rubber, and the hardness of the skeleton oil seal is 80 HA.

10. The vacuum magnetron sputtering coating device according to claim 1, characterized in that, The device further includes a gland sleeve. The gland sleeve is arranged on one side of the end head. The gland sleeve includes a sleeve body and a convex platform. The convex platform is arranged at one end of the sleeve body. The convex platform is coaxial with the sleeve body. The inner diameter of the inner circumference of the convex platform is the same as that of the inner circumference of the sleeve body. The width of the convex platform is smaller than the width of the sleeve body; the convex platform is closer to the middle of the end head than the sleeve body. A sealing ring is arranged on the side surface of the sleeve body where the convex platform is arranged. There are multiple sealing rings, and the multiple sealing rings are arranged in sequence from the side close to the convex platform to the side far from the convex platform.

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