Quartz reaction tube mounting structure

Abstract

The utility model belongs to the technical field of semiconductor vapor phase epitaxy system process equipment, and particularly relates to a quartz reaction tube mounting structure which comprises a mounting cabinet, the mounting cabinet is divided into an upper cabinet body, a middle cabinet body and a lower cabinet body through an upper partition plate and a lower partition plate, an opening and closing furnace body is arranged in the middle cabinet body, a quartz reaction tube is arranged in the opening and closing furnace body, and the quartz reaction tube is arranged in the quartz reaction tube. A quartz disc flange is arranged at the top of the quartz reaction tube, the quartz disc flange is fixed with an upper water-cooling flange through a fixing flange, a fixing groove for mounting the quartz reaction tube is formed in the upper partition plate, the fixing groove extends inwards from the edge of the upper partition plate, the upper water-cooling flange is located below the quartz disc flange, and the upper water-cooling flange is located below the quartz disc flange. According to the utility model, the quartz reaction tube is of an annular structure formed by splicing the two semicircular rings, so that the quartz reaction tube is convenient to disassemble, the harsh requirement of equipment on the height space is effectively met, and the cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of process equipment of semiconductor vapor phase epitaxy systems, and particularly relates to a quartz reaction tube installation structure. Background Technique

[0002] A semiconductor vapor phase epitaxy system is a hydride vapor deposition system, mainly used for the growth of crystal and thick film processes of compound semiconductors such as GaN and Ga2O3 in industries such as semiconductor power devices and LEDs.

[0003] The semiconductor vapor phase epitaxy system uses a quartz tube as the reaction chamber. However, due to the particularity of the process, a large number of by-products will be generated during the reaction and deposited on the inner wall of the quartz tube, and the quartz tube reaction chamber needs to be cleaned or replaced frequently. Although the conventional semiconductor vapor phase epitaxy system also adopts a vertical opening and closing heating body, each time the quartz tube is disassembled, the quartz tube needs to be pulled out from the top of the heating body, which is troublesome to operate and also has a certain requirement for the height space at the top of the equipment. Content of the Utility Model

[0004] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides a quartz reaction tube installation structure.

[0005] A quartz reaction tube installation structure includes an installation cabinet, which is divided into an upper cabinet body, a middle cabinet body and a lower cabinet body by an upper partition board and a lower partition board. An opening and closing furnace body is arranged in the middle cabinet body, and a quartz reaction tube is arranged in the opening and closing furnace body. A quartz disc flange is arranged at the top of the quartz reaction tube, and the quartz disc flange is fixed to an upper water-cooled flange through a fixed flange. A fixing groove for installing the quartz reaction tube is arranged on the upper partition board, and the fixing groove extends inwards from the edge of the upper partition board. The upper water-cooled flange is located below the quartz disc flange and is a ring structure formed by splicing two semi-circular rings.

[0006] Further, the fixed flange is fixedly installed on the upper end surface of the upper partition board, and the quartz disc flange is clamped between the fixed flange and the upper water-cooled flange and is fixedly connected through bolts.

[0007] Further, a support flange fixedly installed on the lower partition board is arranged below the quartz reaction tube, and the support flange cooperates with a lower water-cooled flange to fix the bottom of the quartz reaction tube. The support flange and the lower water-cooled flange are fixedly connected through bolts.

[0008] Further, sealing rings are arranged at the joints of the fixed flange and the quartz disc flange and at the joints of the support flange and the lower water-cooled flange.

[0009] Further, the opening and closing furnace body has an open structure at both the upper and lower ends. A furnace door is provided at the open end of the side portion. One side of the furnace door is hinged to the opening and closing furnace body, and a handle is provided on the other side.

[0010] Due to the adoption of the above technical solutions, the beneficial technical effects of the present utility model are as follows: A quartz disc flange is provided at the top of the quartz reaction tube of the present utility model. The quartz disc flange is fixed through the upper water-cooled flange and the fixed flange. When it is necessary to disassemble and clean the quartz reaction tube, the connection between the upper water-cooled flange and the fixed flange is released, and the quartz reaction tube is horizontally removed from the fixed groove, so that the disassembly of the quartz reaction tube can be realized. The disassembly is convenient, which very effectively solves the harsh requirements of the equipment for the height space, saves costs, and the upper water-cooled flange is a ring structure formed by splicing two semi-circular rings, which further improves the convenience of disassembling the quartz reaction tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is the front view of an installation structure of a quartz reaction tube of the present utility model;

[0012] Figure 2 For the present utility model Figure 1 is the schematic cross-sectional structure view in the A-A reverse direction;

[0013] Figure 3 is the schematic cross-sectional installation structure view of the upper part of the quartz reaction tube of the present utility model;

[0014] Figure 4 is the schematic cross-sectional installation structure view of the lower part of the quartz reaction tube of the present utility model;

[0015] Figure 5 is the front view of the quartz reaction tube of the present utility model.

[0016] In the figure, 1 is the upper cabinet body, 2 is the middle cabinet body, 3 is the lower cabinet body, 4 is the upper partition board, 5 is the lower partition board, 6 is the opening and closing furnace body, 7 is the quartz reaction tube, 8 is the quartz disc flange, 9 is the fixed flange, 10 is the upper water-cooled flange, 11 is the fixed groove, 12 is the support flange, 13 is the lower water-cooled flange, 14 is the sealing ring, 15 is the furnace door, and 16 is the handle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] In order to more clearly illustrate the technical solutions of the present utility model, the present utility model will be further described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only one embodiment of the present utility model. For those of ordinary skill in the art, without creative efforts, other embodiments obtained based on this drawing and embodiment all fall within the protection scope of the present utility model.

[0018] According to Figures 1-5As shown in the figure, a quartz reaction tube installation structure includes an installation cabinet. The installation cabinet is divided into an upper cabinet body 1, a middle cabinet body 2, and a lower cabinet body 3 by an upper partition plate 4 and a lower partition plate 5. A split furnace body 6 is provided in the middle cabinet body 2, and a quartz reaction tube 7 is provided in the split furnace body 6. A quartz disc flange 8 is provided at the top of the quartz reaction tube 7. The quartz disc flange 8 is fixed to the upper water-cooled flange 10 through a fixed flange 9. A fixing groove 11 for installing the quartz reaction tube 7 is provided on the upper partition plate 4. The fixing groove 11 extends inward from the edge of the upper partition plate 4. The upper water-cooled flange 10 is located below the quartz disc flange 8 and is a ring structure formed by splicing two semi-circular rings.

[0019] In the above specific technical solution, a quartz disc flange 8 is provided at the top of the quartz reaction tube 7, and the quartz disc flange 8 is fixed through the upper water-cooled flange 10 and the fixed flange 9. When the quartz reaction tube 7 needs to be disassembled and cleaned, the connection between the upper water-cooled flange 10 and the fixed flange 9 is released, and the quartz reaction tube 7 is horizontally removed from the fixing groove 11, so that the disassembly of the quartz reaction tube 7 can be realized. The disassembly is convenient. Preferably, the upper water-cooled flange 10 is a ring structure formed by splicing two semi-circular rings, which further facilitates the disassembly and installation of the quartz reaction tube 7.

[0020] The fixed flange 9 is fixedly installed on the upper end surface of the upper partition plate 4, and the quartz disc flange 8 is clamped between the fixed flange 9 and the upper water-cooled flange 10 and is fixedly connected by bolts.

[0021] A support flange 12 fixedly installed on the lower partition plate 5 is provided below the quartz reaction tube 7. The support flange 12 cooperates with the lower water-cooled flange 13 to fix the bottom of the quartz reaction tube 7. The support flange 12 and the lower water-cooled flange 13 are fixedly connected by bolts.

[0022] Sealing rings 14 are provided at the joints of the fixed flange 9 and the quartz disc flange 8 and at the joints of the support flange 12 and the lower water-cooled flange 13, which increases the sealing performance of the installation of the quartz reaction tube 7. The lower water-cooled flange 13 and the upper water-cooled flange 10 effectively cool the sealing ring 14 and effectively protect the service life of the sealing ring 14.

[0023] The split furnace body 6 is a structure with openings at both the upper and lower ends. An opening end on the side is provided with a furnace door 15. One side of the furnace door 15 is hinged to the split furnace body 6, and a handle 16 is provided on the other side.

[0024] The specific working process of the present utility model is as follows: When it is necessary to disassemble the quartz reaction tube 7 for cleaning, first open the furnace door 15. The staff loosens the bolts connecting the support flange 12 and the lower water-cooled flange 13, and then releases the connection between the fixed flange 9 and the upper water-cooled flange 10. Lift the quartz reaction tube 7 upward above the lower water-cooled flange 13, and the quartz reaction tube 7 can be horizontally removed from the fixed groove 11. The disassembly is simple, which very effectively solves the harsh requirements of the equipment for height space and saves costs.

[0025] The above embodiments are only exemplary embodiments of the present utility model and are not used to limit the present utility model. The protection scope of the present utility model is defined by the claims. Those skilled in the art can make various modifications or equivalent replacements within the essence and protection scope of the present utility model, and such modifications or equivalent replacements should also be regarded as falling within the protection scope of the present utility model.

Claims

1. A quartz reaction tube installation structure, comprising an installation cabinet, characterized in that, The installation cabinet is divided into an upper cabinet body (1), a middle cabinet body (2) and a lower cabinet body (3) by an upper partition plate (4) and a lower partition plate (5). An opening and closing furnace body (6) is arranged in the middle cabinet body (2). A quartz reaction tube (7) is arranged in the opening and closing furnace body (6). A quartz disc flange (8) is arranged at the top of the quartz reaction tube (7). The quartz disc flange (8) is fixed to the upper water-cooled flange (10) through a fixed flange (9). A fixing groove (11) for installing the quartz reaction tube (7) is arranged on the upper partition plate (4). The fixing groove (11) extends inwards from the edge of the upper partition plate (4). The upper water-cooled flange (10) is located below the quartz disc flange (8) and is an annular structure formed by splicing two semi-circular rings.

2. The quartz reaction tube mounting structure according to claim 1, wherein The fixed flange (9) is fixedly installed on the upper end surface of the upper partition plate (4). The quartz disc flange (8) is clamped between the fixed flange (9) and the upper water-cooled flange (10) and is fixedly connected by bolts.

3. The installation structure of a quartz reaction tube according to claim 2, characterized in that, A support flange (12) fixedly installed on the lower partition plate (5) is arranged below the quartz reaction tube (7). The support flange (12) cooperates with the lower water-cooled flange (13) to fix the bottom of the quartz reaction tube (7). The support flange (12) and the lower water-cooled flange (13) are fixedly connected by bolts.

4. A quartz reaction tube installation structure according to claim 3, characterized in that, Sealing rings (14) are arranged at the joints of the fixed flange (9) and the quartz disc flange (8) and at the joints of the support flange (12) and the lower water-cooled flange (13).

5. The installation structure of a quartz reaction tube according to claim 1, characterized in that, The opening and closing furnace body (6) is a structure with openings at both the upper and lower ends. An opening end on the side is provided with a furnace door (15). One side of the furnace door (15) is hinged to the opening and closing furnace body (6), and a handle (16) is arranged on the other side.

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