Indium tin oxide (ITO) target material burning bearing structure

Abstract

The utility model relates to the technical field of target material production, in particular to an ITO target material burning bearing structure which comprises a burning bearing plate, an inclined groove is formed in the burning bearing plate, an air hole penetrating up and down is formed in the middle of the inclined groove, and a sliding piece used for containing a target material body is arranged on the inclined groove in a matched mode. The sliding piece comprises a plurality of sliding blocks which are evenly arranged at equal angles at intervals and define a ring, the lower end face of each sliding block is provided with an inclined face matched with the corresponding inclined groove, every two adjacent sliding blocks are slidably connected through an elastic arc-shaped connecting rod, and the inclined grooves are provided with a plurality of first sliding rails which are slidably matched with the sliding blocks at equal angles. The first sliding rail is arranged in the radial direction of the air hole. According to the utility model, the possibility of horn mouths generated by the self gravity of the target material body is reduced, and the utilization rate and the yield of the target material body are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a sintering structure for ITO targets. Background Technique

[0002] ITO (Tin-doped Indium Oxide) target belongs to indium tin composite oxide ceramics, which is an important optoelectronic functional material. It is often used as a magnetron sputtering target to prepare transparent conductive films on substrate materials such as glass and plastic, and is used in the production of flat panel display devices such as liquid crystal displays and touch screens.

[0003] With more and more ITO target manufacturers, the industry competition is becoming increasingly fierce, and the cost reduction requirements of ITO target enterprises are becoming more and more intense. During the sintering process of ITO targets, due to the influence of the self-gravity of the ITO target, an obvious flared mouth will be formed at the bottom of the ITO target, resulting in the exceeding of the outer diameter and inner diameter dimensions of the bottom of the ITO target. In the later stage of the production process, only this deformed area can be cut off, resulting in the processing utilization rate of the ITO target being only about 70%, reducing the utilization rate and increasing the processing cost.

[0004] For example, on September 7, 2021, a patent with the publication number CN113357925A and the name of a single-section long rotating ITO target sintering preparation process was published. By laying annular green body spacer rings on the bearing plate in the sintering furnace, spherical quartz sand is laid on both the upper and lower sides of each annular green body spacer ring to form an annular pad for placing the ITO target tube green body for sintering, improving the utilization rate of the ITO target. However, the applicant found that the improvement of the utilization rate of the ITO target is still limited, and the processing cost needs to be further reduced. Summary of the Invention

[0005] In view of this, the purpose of the present utility model is to propose a sintering structure for ITO targets to solve the problem of low utilization rate of ITO targets.

[0006] Based on the above purpose, the present utility model provides a sintering structure for ITO targets, including a bearing plate. An inclined groove is opened on the bearing plate, and a ventilation hole penetrating up and down is opened in the middle of the inclined groove. A sliding member for placing the target body is arranged in cooperation with the inclined groove. The sliding member includes a plurality of sliding blocks arranged at equal angular intervals and evenly spaced to form a ring. The lower end surfaces of the sliding blocks are all provided with inclined surfaces that cooperate with the inclined groove. Two adjacent sliding blocks are slidably connected by an elastic arc-shaped connecting rod. A plurality of first slide rails that are slidably matched with the sliding blocks at equal angles are opened on the inclined groove, and the first slide rails are arranged along the radial direction of the ventilation hole.

[0007] Optionally, a first slider fixedly connected to the sliding block is slidably arranged in the first slide rail.

[0008] Optionally, second slide rails are provided inside both side edges of the sliding block, and second sliders slidably connected to the second slide rails are provided at the ends of the arc-shaped connecting rod.

[0009] Optionally, the arc-shaped connecting rod is a rubber rod.

[0010] Optionally, a gasket ring coaxial with the vent hole and located on the bearing plate is provided around the inclined groove.

[0011] Optionally, the bearing plate, the sliding member, and the gasket ring are all made of alumina.

[0012] Optionally, a positioning ring coaxial with the vent hole is provided on the upper end surface of the bearing plate, and the diameter of the positioning ring is larger than the diameter of the gasket ring.

[0013] Optionally, an annular inclined guide surface is provided on the inner side of the upper end of the positioning ring.

[0014] Optionally, the inclination angle of the inclined surface with respect to the horizontal plane ranges from five degrees to eight degrees.

[0015] Optionally, the shape of the inclined groove is conical or inverted quadrangular pyramidal.

[0016] Advantages of the present utility model: An ITO target bearing structure provided by the present utility model. During sintering, due to its own gravity, the target body is released onto the sliding block, and the sliding block is slidably connected to the inclined groove on the bearing plate, reducing the friction between the inclined groove and the sliding member caused by the shrinkage of the target body during sintering, reducing the possibility of a flare caused by the self-gravity of the target body, and improving the utilization rate and yield rate of the target body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is an enlarged structural diagram at A in the figure;

[0020] Figure 3 is a partial top view structural diagram of the present utility model;

[0021] Figure 4It is a top view structural schematic diagram of the cooperation between the inclined groove of the present utility model and the sliding member.

[0022] In the figure: 1, carrier plate; 2, ventilation hole; 3, target body; 4, positioning ring; 5, inclined guide surface; 6, inclined groove; 7, sliding member; 8, sliding block; 9, arc-shaped connecting rod; 10, first slide rail; 11, second slide rail; 12, cushion ring. Specific embodiments

[0023] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the following further details the present utility model in combination with specific embodiments and with reference to the accompanying drawings.

[0024] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present utility model should have the ordinary meanings understood by those with ordinary skills in the field to which the present utility model belongs. The "first", "second" and similar terms used in the present utility model do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0025] As Figures 1 to 4 shown, an ITO target carrier structure includes a carrier plate 1, an inclined groove 6 is formed on the carrier plate 1, a ventilation hole 2 penetrating up and down is formed in the middle of the inclined groove 6, a sliding member 7 for placing the target body 3 is cooperatively arranged on the inclined groove 6, the sliding member 7 includes a plurality of sliding blocks 8 arranged at equal angles and spaced evenly to form a ring, the lower end surfaces of the sliding blocks 8 are all provided with inclined surfaces cooperating with the inclined groove 6, and two adjacent sliding blocks 8 are slidably connected by an elastic arc-shaped connecting rod 9. A plurality of first slide rails 10 slidably cooperating with the sliding blocks 8 at equal angles are formed on the inclined groove 6, and the first slide rails 10 are arranged along the radial direction of the ventilation hole 2.

[0026] When the target body 3 needs to be sintered, the target body 3 is placed on the sliding block 8. By sintering the target body 3, the target body 3 is released onto the sliding block 8 due to its own gravity problem. The sliding block 8 is slidably connected to the inclined groove 6 on the bearing plate 1, reducing the friction between the inclined groove 6 and the sliding member 7 caused by the shrinkage during the sintering of the target body 3, reducing the flare of the target body 3 caused by its own gravity, improving the utilization rate of the target body 3, significantly improving the target body 3, reducing the amount of defective products during large-scale production, and increasing the yield rate.

[0027] A first slider fixedly connected to the sliding block 8 is slidably arranged in the first slide rail 10, facilitating the restriction that the sliding block 8 can only move along the first slide rail 10.

[0028] Second slide rails 11 are respectively formed in two side edges of the sliding block 8, and second sliders slidably connected to the second slide rails 11 are arranged at the ends of the arc-shaped connecting rod 9, in order to prevent the arc-shaped connecting rod 9 from detaching from the sliding block 8.

[0029] The arc-shaped connecting rod 9 is a rubber rod, and the material of the rubber rod facilitates the small-range bending of the arc-shaped connecting rod 9 without affecting its structure.

[0030] A gasket ring 12 coaxial with the air vent hole 2 and located on the bearing plate 1 is arranged outside the inclined groove 6. The inner diameter of the gasket ring 12 is not greater than the outer diameter of the target body 3. The gasket ring 12 restricts the outside of the lower part of the target body 3. When the target body 3 is sintered subsequently, the problem of the self-gravity of the target body 3 is released onto the gasket ring 12, reducing the flare of the target body 3 caused by its own gravity, improving the utilization rate of the target body 3, and significantly reducing the target body 3.

[0031] A positioning ring 4 coaxial with the air vent hole 2 is arranged on the upper end surface of the bearing plate 1. The diameter of the positioning ring 4 is greater than the diameter of the gasket ring 12. The arrangement of the positioning ring 4 facilitates the operator to limit the target body 3 through the positioning ring 4 and reduce the movement of the target body 3 during the sintering operation.

[0032] An annular inclined guide surface 5 is arranged on the inner side of the upper end of the positioning ring 4. The arrangement of the inclined guide surface 5 facilitates the easy placement of the target body 3 on the sliding member 7.

[0033] The inclination angle range of the inclined surface with respect to the horizontal plane is from five degrees to eight degrees. The arrangement of the inclined surface can reduce the friction between the target body 3 and the sliding member 7 caused by shrinkage during sintering, which is beneficial to the densification of the target body 3 and prevents the target body 3 from deforming.

[0034] The shape of the inclined groove 6 can be conical or inverted quadrangular pyramidal, etc.

[0035] The materials of the carrier plate 1, the sliding member 7, and the spacer ring 12 are all alumina.

[0036] Those of ordinary skill in the art should understand that the discussion of any above embodiment is only exemplary and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the present invention as described above, which are not provided in detail for the sake of brevity.

[0037] Embodiments of the present invention are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An ITO target carrier structure, comprising a carrier plate (1), characterized in that, The bearing plate (1) is provided with an inclined groove (6). An air vent hole (2) penetrating up and down is provided in the middle of the inclined groove (6). A sliding member (7) for placing the target body (3) is cooperatively arranged on the inclined groove (6). The sliding member (7) includes a plurality of sliding blocks (8) arranged at equal angular intervals and evenly spaced to form a ring. The lower end surfaces of the sliding blocks (8) are all provided with inclined surfaces that cooperate with the inclined groove (6). Two adjacent sliding blocks (8) are slidably connected through an elastic arc-shaped connecting rod (9). A plurality of first slide rails (10) that are slidably matched with the sliding blocks (8) at equal angles are provided on the inclined groove (6). The first slide rails (10) are arranged along the radial direction of the air vent hole (2).

2. The ITO target carrier structure according to claim 1, characterized in that A first slider fixedly connected to the sliding block (8) is slidably arranged in the first slide rail (10).

3. The ITO target carrier structure according to claim 1, wherein, Second slide rails (11) are respectively provided in the two side edges of the sliding block (8). The ends of the arc-shaped connecting rod (9) are provided with second sliders slidably connected to the second slide rails (11).

4. The ITO target carrier structure according to claim 1, characterized in that The arc-shaped connecting rod (9) is a rubber rod.

5. The ITO target carrier structure according to claim 1, characterized in that, A gasket ring (12) located on the bearing plate (1) and coaxially arranged with the air vent hole (2) is provided on the periphery of the inclined groove (6).

6. The ITO target carrier structure according to claim 5, wherein, The bearing plate (1), the sliding member (7), and the gasket ring (12) are all made of alumina.

7. The ITO target carrier structure according to claim 5, characterized in that, A positioning ring (4) coaxially arranged with the air vent hole (2) is provided on the upper end surface of the bearing plate (1). The diameter of the positioning ring (4) is larger than the diameter of the gasket ring (12).

8. The ITO target carrier structure according to claim 7, wherein, An annular inclined guide surface (5) is provided on the inner side of the upper end of the positioning ring (4).

9. The ITO target carrier structure according to claim 1, characterized in that, The inclination angle range of the inclined surface relative to the horizontal plane is from five degrees to eight degrees.

10. The ITO target carrier structure according to claim 1, characterized in that, The shape of the inclined groove (6) is conical or inverted quadrangular pyramid-shaped.

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