Chip soaking clamp

Abstract

The utility model discloses a chip soaking clamp, which relates to the field of chip soaking and comprises a placing plate, a clamping block for clamping a chip is axially mounted above the placing plate in a sliding manner, and a fixed rod and a transmission mechanism arranged on the placing plate and the fixed rod are further fixed at the top end of the placing plate; the transmission mechanism comprises a transmission unit and a clamping unit; the transmission unit is used for providing thrust for movement of the clamping unit. And the clamping unit is used for clamping and limiting the chip. According to the chip cleaning device, the transmission mechanism is arranged, when a chip needs to be cleaned, the chip is placed between the placing plate and the clamping block, the chip is clamped through the clamping block, and then the placing plate and the chip can be placed in the cleaning tank together, so that the chip can be stably clamped, the situation that the chip slips can be effectively avoided, and the chip cleaning efficiency is improved. And the stability of chip cleaning operation is further improved.

Description

Technical Field

[0001] The utility model relates to the field of chip immersion, in particular to a chip immersion fixture. Background Technique

[0002] In the production of semiconductor devices, silicon wafers must be strictly cleaned, and even trace contamination can cause device failure. The purpose of cleaning is to remove surface contamination impurities, including organic and inorganic substances. Some of these impurities exist in the form of atoms or ions, and some exist in the form of thin films or particles on the surface of the silicon wafer, which can cause various defects.

[0003] In the prior art, when cleaning a semiconductor chip, the chip is generally placed in a cleaning liquid, and the semiconductor chip is cleaned by ultrasonic waves. After cleaning, the chip is generally taken out by tweezers. Since the contact surface between the tweezers and the chip surface is small, when the chip is clamped by the tweezers in the cleaning liquid, the chip is likely to slip off. Based on this, the utility model provides a chip immersion fixture. Summary of the Invention

[0004] The purpose of the utility model is to provide a chip immersion fixture to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A chip immersion fixture includes a placement plate, above which a clamping block for clamping the chip is axially slidably installed. A fixed rod is also fixed at the top end of the placement plate, and a transmission mechanism arranged on the placement plate and the fixed rod;

[0006] The transmission mechanism includes a transmission unit and a clamping unit;

[0007] The transmission unit is used to provide a thrust for the movement of the clamping unit;

[0008] The clamping unit is used to clamp and limit the chip.

[0009] As a further scheme of the utility model: The clamping unit includes a movable block and a movable rod;

[0010] The movable rod is fixed at the bottom end of the clamping block, and the movable rod is used to drive the clamping block to move synchronously;

[0011] The movable block is fixed at one end of the movable rod and extends into the placement plate and is axially slidably connected to the placement plate. The movable block is used to drive the movable rod to move synchronously.

[0012] As a further scheme of the utility model: The transmission unit includes a pressing rod, a spring, a transmission rod, a push rod, and a guide groove;

[0013] The pressing rod is vertically and slidably installed on the inner wall of the fixed rod and extends to the outside of the placing plate. The pressing rod is used to drive the transmission rod to move synchronously.

[0014] Both ends of the spring are respectively clamped on the inner wall of the fixed rod and the outer wall of the pressing rod. The spring is used to always provide an elastic thrust in one direction for the pressing rod.

[0015] The transmission rod is fixed at the bottom end of the pressing rod. The transmission rod is used to drive the push rod to move synchronously.

[0016] The push rod is fixed inside the transmission rod. The push rod is used to apply a thrust to the guiding groove.

[0017] The guiding groove is formed inside the movable block. The movable block is used to provide guidance for the axial movement of the movable block.

[0018] As a further solution of the present utility model: The number of the transmission rods is set to two. The two transmission rods are fixed at the bottom end of the pressing rod and fixedly connected to both ends of the push rod.

[0019] As a further solution of the present utility model: The outer wall of the pressing rod is integrally in a "cross" shape structure. A sliding groove for the vertical movement of the pressing rod is formed on the inner wall of the fixed rod.

[0020] As a further solution of the present utility model: The outer wall of the push rod matches the inner side of the guiding groove. The outer wall of the guiding groove is integrally in an inclined state.

[0021] As a further solution of the present utility model: The outer walls of the movable rod and the movable block are integrally in an "L" shape structure. A sliding groove for the axial movement of the movable rod is formed on the inner wall of the placing plate.

[0022] Compared with the prior art, the beneficial effects of the present utility model are:

[0023] By setting the transmission mechanism, when it is necessary to clean the chip, the chip can be placed between the placing plate and the clamping block, and the chip can be clamped by the clamping block. Then, the placing plate and the chip can be placed in the cleaning tank together. In this way, the chip can be firmly clamped, and the situation of chip slippage can be effectively avoided, further improving the stability of the chip cleaning operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic structural diagram of the present utility model;

[0025] Figure 2 is a partial enlarged view at A of the present utility model;

[0026] Figure 3 is a cross-sectional view of the internal structure of the fixed rod of the present utility model.

[0027] In the figure: 1. Placing plate; 2. Clamping block; 3. Fixed rod; 4. Transmission mechanism; 401. Pressing rod; 402. Spring; 403. Transmission rod; 404. Push rod; 405. Guide groove; 406. Movable block; 407. Movable rod. Specific embodiments

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Please refer to Figures 1 - 3 , in the embodiment of the present invention, a chip soaking fixture includes a placing plate 1, a clamping block 2 for clamping the chip is axially slidably installed above the placing plate 1, a fixed rod 3 is further fixed at the top end of the placing plate 1, and a transmission mechanism 4 provided on the placing plate 1 and the fixed rod 3;

[0030] The transmission mechanism 4 includes a transmission unit and a clamping unit;

[0031] The transmission unit is used to provide a thrust for the movement of the clamping unit;

[0032] The clamping unit is used to clamp and limit the chip;

[0033] The clamping unit includes a movable block 406 and a movable rod 407;

[0034] The movable rod 407 is fixed at the bottom end of the clamping block 2, and the movable rod 407 is used to drive the clamping block 2 to move synchronously;

[0035] The movable block 406 is fixed at one end of the movable rod 407 and extends into the placing plate 1 and is axially slidably connected to the placing plate 1. The movable block 406 is used to drive the movable rod 407 to move synchronously;

[0036] The transmission unit includes a pressing rod 401, a spring 402, a transmission rod 403, a push rod 404, and a guide groove 405;

[0037] The pressing rod 401 is vertically slidably installed on the inner wall of the fixed rod 3 and extends to the outside of the placing plate 1. The pressing rod 401 is used to drive the transmission rod 403 to move synchronously;

[0038] The two ends of the spring 402 are respectively clamped on the inner wall of the fixed rod 3 and the outer wall of the pressing rod 401. The spring 402 is used to always provide an elastic thrust in one direction for the pressing rod 401;

[0039] The transmission rod 403 is fixed to the bottom end of the pressing rod 401, and the transmission rod 403 is used to drive the push rod 404 to move synchronously;

[0040] The push rod 404 is fixed inside the transmission rod 403, and the push rod 404 is used to apply a thrust to the guide groove 405;

[0041] The guide groove 405 is formed inside the movable block 406, and the movable block 406 is used to provide guidance for the axial movement of the movable block 406.

[0042] In this embodiment: By applying a downward squeezing force to the pressing rod 401, the pressing rod 401 is forced to move downward. The downward-moving pressing rod 401 will apply a squeezing force to the spring 402 and simultaneously drive the transmission rod 403 to move downward, so that the push rod 404 between the transmission rods 403 will also move downward synchronously, causing the push rod 404 to move along the inner side of the guide groove 405. Since the outer wall of the guide groove 405 is inclined as a whole, the stressed guide groove 405 transmits the thrust to the movable block 406, causing the movable block 406 to be forced to drive the movable rod 407 to move synchronously, and the clamping block 2 fixed to one end of the movable rod 407 to move synchronously, thereby opening the clamping block 2. At this time, the chip can be placed between the placement plate 1 and the clamping block 2. Release the extrusion of the pressing rod 401, so that the pressing rod 401 moves upward under the action of the spring 402, then the fixing rod 3 will also move closer to the chip synchronously to clamp the chip. At this time, the clamped chip can be placed in the cleaning tank for cleaning, which can effectively avoid the situation of chip slippage, further improve the stability of the chip cleaning operation. In addition, the spring is not in direct contact with the cleaning liquid, thus avoiding the pollution of the cleaning liquid.

[0043] Please refer specifically to Figures 1 - 3 There are two transmission rods 403. The two transmission rods 403 are fixed to the bottom end of the pressing rod 401 and fixedly connected to both ends of the push rod 404. The outer wall of the pressing rod 401 is in a "cross" shape structure as a whole. A chute for the vertical movement of the pressing rod 401 is formed on the inner wall of the fixing rod 3. The outer wall of the push rod 404 matches the inner side of the guide groove 405. The outer wall of the guide groove 405 is inclined as a whole. The outer walls of the movable rod 407 and the movable block 406 are in an "L" shape structure as a whole. A chute for the axial movement of the movable rod 407 is formed on the inner wall of the placement plate 1.

[0044] In this embodiment: With this structure, when a downward squeezing force is applied to the pressing rod 401, the push rod 404 can move along with the movement of the pressing rod 401. The transmission force is transmitted to the guide groove 405 through the push rod 404, so that the inclined guide groove 405 pushes the movable block 406 and the movable rod 407 to move axially.

[0045] The above are only the preferred specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent substitutions or changes, and should be covered within the protection scope of the present utility model.

Claims

1. A chip immersion fixture, comprising a placement plate (1), above which a clamping block (2) for clamping the chip is axially slidably mounted, and a fixing rod (3) is further fixed to the top end of the placement plate (1), characterized in that, The transmission mechanism (4) arranged on the placement plate (1) and the fixed rod (3); The transmission mechanism (4) includes a transmission unit and a clamping unit; The transmission unit is used to provide a thrust for the movement of the clamping unit; The clamping unit is used to clamp and limit the chip.

2. The chip immersion fixture according to claim 1, wherein, The clamping unit includes a movable block (406) and a movable rod (407); The movable rod (407) is fixed to the bottom end of the clamping block (2), and the movable rod (407) is used to drive the clamping block (2) to move synchronously; The movable block (406) is fixed to one end of the movable rod (407) and extends into the interior of the placement plate (1) and is axially slidably connected to the placement plate (1), and the movable block (406) is used to drive the movable rod (407) to move synchronously.

3. A chip immersion fixture according to claim 1, wherein, The transmission unit includes a pressing rod (401), a spring (402), a transmission rod (403), a push rod (404), and a guide groove (405); The pressing rod (401) is vertically slidably installed on the inner wall of the fixed rod (3) and extends to the outside of the placement plate (1), and the pressing rod (401) is used to drive the transmission rod (403) to move synchronously; Both ends of the spring (402) are respectively clamped to the inner wall of the fixed rod (3) and the outer wall of the pressing rod (401), and the spring (402) is used to always provide an elastic thrust in one direction for the pressing rod (401); The transmission rod (403) is fixed to the bottom end of the pressing rod (401), and the transmission rod (403) is used to drive the push rod (404) to move synchronously; The push rod (404) is fixed to the inside of the transmission rod (403), and the push rod (404) is used to apply a thrust to the guide groove (405); The guide groove (405) is formed inside the movable block (406), and the movable block (406) is used to provide guidance for the axial movement of the movable block (406).

4. A chip soaking fixture according to claim 3, characterized in that The number of the transmission rods (403) is set to two, and the two transmission rods (403) are fixed to the bottom end of the pressing rod (401) and are fixedly connected to both ends of the push rod (4); 5. The chip soaking fixture according to claim 3, wherein The outer wall of the pressing rod (401) is integrally in a "cross" shape structure, and a sliding groove for the vertical movement of the pressing rod (401) is formed on the inner wall of the fixed rod (3).

6. The chip soaking fixture according to claim 3, wherein The outer wall of the push rod (404) matches the inner side of the guide groove (405), and the outer wall of the guide groove (405) is integrally in an inclined state.

7. The chip soaking fixture according to claim 2, characterized in that, The outer walls of the movable rod (407) and the movable block (406) are integrally in an "L" shape structure, and a sliding groove for the axial movement of the movable rod (407) is formed on the inner wall of the placement plate (1).

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