Electromagnetic drive type deflection structure and deflection mirror device thereof
By setting four permanent magnets and coil windings around the rotating shaft to form four magnetic field loops, combined with limit and bearing structures, the problem of insufficient stability and accuracy of existing electromagnetic drive deflection structures at high speeds is solved, achieving higher angle control accuracy and machining accuracy.
Patent Information
- Application Number
- CN202422387155.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-29
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-29
AI Technical Summary
Existing electromagnetically driven deflection structures suffer from insufficient speed stability and angle control accuracy at high speeds, making them particularly unsuitable for applications requiring high-precision optical path control.
Four permanent magnets are arranged around the rotating shaft, and four magnetic field loops are formed by energizing the corresponding coil windings. Combined with the limit and bearing structure, the rotation of the rotating shaft is stabilized, achieving more uniform speed output and higher angle control accuracy.
It improves the stability of rotation speed and the accuracy of angle control, ensuring that the laser beam can accurately illuminate the target position in laser precision machining and high-precision optical path control applications, thereby improving machining accuracy and equipment performance.
Smart Images
Figure CN223181989U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of deflection structures, and more particularly to an electromagnetic drive type deflection structure and a deflection mirror device thereof. Background Art
[0002] The electromagnetic drive type deflection structure is a structural design that uses an electromagnetic field to drive a rotating shaft to deflect within a certain angle. It has a wide range of application fields, including large laser processing equipment, high-speed laser engraving machines, etc.
[0003] In the existing field, the electromagnetic drive type deflection structure, as Figure 1 shown, usually uses a rotating shaft made of a magnet, and then a coil winding is arranged outside the rotating shaft. After the coil winding is energized, a magnetic field is generated to drive the rotating shaft to rotate. However, from the above magnetic field circuit, the existing structure has only two magnetic field circuits, that is, the so-called "two-stage" structure. Due to the small number of magnetic poles, the magnetic field changes violently and the rotation speed is relatively high. However, this high rotation speed may pose certain challenges in some application scenarios with high requirements for speed stability, such as easy occurrence of rotation speed fluctuations. In addition, in the closed-loop feedback control process in the galvanometer field, the two-stage structure cannot accurately respond to the change of the position signal and cannot achieve higher angle control accuracy. Summary of the Utility Model
[0004] To solve the above problems, the utility model provides an electromagnetic drive type deflection structure, which includes a rotor assembly and a coil winding. The rotor assembly is composed of a rotating shaft and four permanent magnets. The permanent magnets are fixedly covered adjacent to each other on the outer side of the circumferential direction of the rotating shaft. The coil winding includes a first winding and a second winding. The first winding and the second winding are respectively suspended outside the permanent magnets and are arranged opposite to each other in position. The first winding and the second winding respectively span the outer sides of two adjacent permanent magnets in space.
[0005] Furthermore, the permanent magnets are fixedly covered adjacent to each other equally on the outer side of the circumferential direction of the rotating shaft. The first winding and the second winding are covered on the outer side of the permanent magnets relatively at 90 degrees in space.
[0006] Furthermore, a wrapping body is arranged outside the coil winding. The wrapping body forms a wrapping on the outer side of the coil winding along the length direction of the coil winding. A channel for the rotor assembly to pass through is arranged in the wrapping body. The first winding and the second winding are closely attached to the inner wall of the channel through a fixing adhesive.
[0007] Furthermore, a supporting step is arranged in the channel. The first winding and the second winding stay on the supporting step in the channel.
[0008] Furthermore, a support shaft is fixed to one end of the rotating shaft. A clamping portion is arranged at the end of the support shaft away from the rotating shaft. A first bearing is provided between the support shaft and the channel. The outer ring and the inner ring of the first bearing are loosely fitted with the inner wall of the channel and the outer wall of the support shaft respectively.
[0009] Furthermore, a first limiting ring protrudes outward from the support shaft. A first limiting step is arranged in the channel. The front end and the rear end of the first bearing are respectively clamped between the first limiting ring and the first limiting step.
[0010] Furthermore, a second bearing is provided between the end of the rotating shaft away from the support shaft and the channel. The outer ring and the inner ring of the second bearing are loosely fitted with the inner wall of the channel and the outer wall of the rotating shaft respectively.
[0011] Furthermore, an elastic gasket is provided between the side of the supporting step away from the coil winding and the second bearing. The elastic gasket is pre-pressed on one side of the second bearing. A second limiting ring is arranged on the side of the second bearing away from the elastic gasket. The elastic gasket and the second limiting ring form front and rear limits for the second bearing through cooperation.
[0012] Furthermore, the coil winding extends outwardly with a current-carrying wire. A wire groove for the current-carrying wire to pass through is arranged in the wrapping body.
[0013] The present application also provides a deflection mirror device, which includes a vibrating mirror fixed on the clamping portion, and a control circuit board fixed at the end of the wrapping body away from the vibrating mirror. The control circuit board is electrically connected to the current-carrying wire. A first gasket is covered on the side of the control circuit board away from the wrapping body. A plurality of guiding grating grids are arranged on the first gasket. A light shielding plate for shielding the guiding grating grids is arranged outside the first gasket. The rotating shaft passes through the first gasket. The light shielding plate is fixed on the rotating shaft and rotates synchronously with the rotating shaft.
[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0015] 1. The number of magnetic poles in the present application changes from 2 to 4, and the magnetic field change is relatively gentle, and its rotation speed is relatively more stable. It can maintain a relatively uniform speed output during the working process, which is very important for a galvanometer system that needs to accurately control the deflection angle and position of the light path. For example, in the field of laser fine processing, a stable rotation speed can ensure that the laser beam accurately irradiates the target position and improve the processing accuracy.
[0016] 2. Meanwhile, the rotational speed of this application is relatively low and stable. During the closed-loop feedback control process, it can respond more precisely to the changes in the position signal, thereby achieving higher angular control accuracy. In applications that require high-precision optical path control, such as laser medical treatment, semiconductor lithography, etc., it can better meet the precise control requirements for the deflection angle of optical elements, improving the processing accuracy and performance of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.
[0018] Figure 1 Schematic diagram of the prior art structure involved in the background technology of the present invention;
[0019] Figure 2 Schematic diagram of the structure of the rotor assembly and the coil winding in the electromagnetic drive type deflection structure of the present invention;
[0020] Figure 3 Schematic diagram of the structure of the rotor assembly and the coil winding in the electromagnetic drive type deflection structure of the present invention from another angle;
[0021] Figure 4 Schematic diagram of the magnetic field circuit of the rotor assembly and the coil winding in the electromagnetic drive type deflection structure of the present invention;
[0022] Figure 5 Overall exploded view of the electromagnetic drive type deflection structure of the present invention;
[0023] Figure 6 Cross-sectional view of the package of the electromagnetic drive type deflection structure of the present invention;
[0024] Figure 7 Cross-sectional view of the support shaft of the electromagnetic drive type deflection structure of the present invention;
[0025] Figure 8 Overall cross-sectional view of the electromagnetic drive type deflection structure of the present invention;
[0026] Figure 9 Overall exploded view of the deflection mirror device of the present invention.
[0027] The reference numerals and names in the drawings are as follows:
[0028] Rotor assembly 100, coil winding 200, rotating shaft 110, permanent magnet 120, first winding 210, second winding 220, wrapper 300, channel 310, fixing glue 230, supporting step 320, support shaft 130, clamping portion 131, first bearing 400, first limiting ring 132, first limiting step 330, second bearing 500, elastic gasket 340, second limiting ring 140, current-carrying wire 240, wire groove 350, vibrating lens 600, control circuit board 700, first gasket 800, diffraction grating 810, light blocking plate 900. Detailed implementation mode
[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0030] Now, with reference to the accompanying drawings, a further description of the preferred embodiments of the present invention will be given. Combining Figures 2 to 4 As shown, at least one embodiment of the present application provides an electromagnetic drive type deflection structure, including a rotor assembly 100 and a coil winding 200. The rotor assembly 100 is composed of a rotating shaft 110 and four permanent magnets 120. The shape of the rotating shaft 110 is a cylinder, and the shape of the permanent magnet 120 is an arc. The adjacent permanent magnets 120 are fixedly covered on the outer side of the circumferential direction of the rotating shaft 110. The coil winding 200 includes a first winding 210 and a second winding 220. The first winding 210 and the second winding 220 are respectively suspended on the outer side of the permanent magnet 120 and are arranged opposite to each other in position. The first winding 210 and the second winding 220 respectively span the outer sides of two adjacent permanent magnets 120 in space.
[0031] In the above embodiment, in the rotor assembly 100, since the permanent magnets 120 completely cover and are fixed on the outer side of the circumferential direction of the rotating shaft 110, and the first winding 210 and the second winding 220 respectively span the outer sides of two adjacent permanent magnets 120 in space, when the first winding 210 and the second winding 220 are energized, opposite polarities will be generated at the adjacent ends of the permanent magnets 120 covering the rotating shaft 110, and the rotating shaft 110 will be driven to rotate inside the coil winding 200 under the magnetic field effect.
[0032] In this application, four permanent magnets 120 are arranged around the rotating shaft 110 in a surrounding manner. After the coil windings 200 suspended outside the permanent magnets 120 are energized, the polarities of the adjacent ends of the permanent magnets 120 are opposite, thereby forming four magnetic field circuits. Compared with the prior art, the number of magnetic poles in this application changes from 2 to 4, the magnetic field change is relatively gentle, and its rotational speed is relatively more stable. It can maintain a relatively uniform speed output during the working process, which is very important for a galvanometer system that needs to accurately control the deflection angle and position of the optical path. For example, in the field of laser microfabrication, a stable rotational speed can ensure that the laser beam accurately irradiates the target position, improving the processing accuracy. At the same time, the rotational speed of this application is relatively low and stable. During the closed-loop feedback control process, it can more accurately respond to the change of the position signal, thereby achieving a higher angle control accuracy. In applications that require high-precision optical path control, such as laser medicine, semiconductor lithography, etc., it can better meet the requirements for accurately controlling the deflection angle of optical components, improving the processing accuracy and performance of the equipment.
[0033] Furthermore, based on the above-mentioned embodiment, as Figure 3 and Figure 4 shown, the permanent magnets 120 are evenly and adjacently fixed to cover the outer side of the circumferential direction of the rotating shaft 110, that is, each permanent magnet 120 covers 90 degrees in space and is fixed to the outer side of the circumferential direction of the rotating shaft 110. The first winding 210 and the second winding 220 cover the outer side of the permanent magnets 120 in a 90-degree relative manner in space. In this way, when the first winding 210 and the second winding 220 are energized, the magnetic field circuits generated between the first winding 210 and the second winding 220 and the permanent magnets 120 are equal. Thus, when the rotating shaft 110 rotates, it can output at a more uniform speed.
[0034] Furthermore, based on the above-mentioned embodiment, in combination with Figure 5 and Figure 8 shown, a wrapping body 300 is arranged outside the coil winding 200. The wrapping body 300 forms a wrapping around the outer side of the coil winding 200 along the length direction of the coil winding 200. A channel 310 for the rotor assembly 100 to pass through is arranged in the wrapping body 300. The first winding 210 and the second winding 220 are closely attached to the inner wall of the channel 310 through a fixing glue 230. In this way, the first winding 210 and the second winding 220 are suspended outside the permanent magnets 120.
[0035] In some embodiments, in combination with Figure 6 and Figure 8As shown, a supporting step 320 is provided in the channel 310. When assembling the present application, after wrapping the first winding 210 and the second winding 220 with a fixing adhesive 230, they can be loaded from the side of the channel 310 far from the supporting step 320 and stay on the supporting step 320 when entering the channel 310, thereby preventing the first winding 210 and the second winding 220 from moving in the channel 310, which may cause deviation of the magnetic field circuit, and further making the assembly method of the present application simpler.
[0036] Furthermore, on the basis of the above embodiments, in combination with Figure 7 and Figure 8 As shown, a support shaft 130 is fixed at one end of the rotating shaft 110, and a clamping portion 131 is arranged at the end of the support shaft 130 far from the rotating shaft 110. The clamping portion 131 can clamp different functional components according to different application scenarios of this structure. For example, when this structure is applied to a galvanometer system, the clamping portion 131 can be used to clamp an optical lens. Another example is when this structure is applied to an electric toothbrush, the clamping portion 131 can be used to clamp a brush head, etc., which will not be elaborated here. A first bearing 400 is arranged between the support shaft 130 and the channel 310. The outer ring and the inner ring of the first bearing 400 are loosely fitted with the inner wall of the channel 310 and the outer wall of the support shaft 130 respectively. In this way, the support shaft 130 and the channel 310 limit the radial movement of the first bearing 400, so that when the rotating shaft 110 rotates, its radial movement depends on the radial runout accuracy of the first bearing 400, eliminating the influence of other factors (such as machining accuracy), and thus making the radial movement of the rotating shaft 110 more controllable.
[0037] In some embodiments, as Figure 8 shown, a first limiting ring 132 protrudes from the support shaft 130, and a first limiting step 330 is arranged in the channel 310. The front end and the rear end of the first bearing 400 are respectively clamped between the first limiting ring 132 and the first limiting step 330. In this way, the cooperation between the first limiting ring 132 and the first limiting step 330 forms front and rear limits for the first bearing 400, thereby preventing the first bearing 400 from moving back and forth when the rotating shaft 110 rotates.
[0038] Furthermore, on the basis of the above embodiments, as Figure 8As shown, a second bearing 500 is provided between the end of the rotating shaft 110 away from the support shaft 130 and the channel 310. The outer ring and the inner ring of the second bearing 500 are loosely fitted with the inner wall of the channel 310 and the outer wall of the rotating shaft 110 respectively. In this way, the rotating shaft 110 and the channel 310 limit the radial movement of the second bearing 500. When the rotating shaft 110 rotates, its radial movement depends on the radial runout accuracy of the second bearing 500, eliminating the influence of other factors (such as machining accuracy), so that the radial movement of the rotating shaft 110 is more controllable.
[0039] In some embodiments, as Figure 8 shown, an elastic gasket 340 is provided between the side of the supporting step 320 away from the coil winding 200 and the second bearing 500. The elastic gasket 340 is pre-pressed on one side of the second bearing 500. In this way, when the rotating shaft 110 deflects radially, it will drive the second bearing 500 to squeeze the elastic gasket 340, so that the second bearing 500 can operate in a stable state as a whole. It should be noted that in this embodiment, the supporting step 320 not only serves to support the first winding 210 and the second winding 220, but also serves to support the elastic gasket 340 when the elastic gasket 340 is squeezed, thus saving redundant components, which is of significant significance when this structure is applied to small products. A second limiting ring 140 is provided on the side of the second bearing 500 away from the elastic gasket 340. In this way, the elastic gasket 340 and the second limiting ring 140 cooperate to form front and rear limits for the second bearing 500.
[0040] In some embodiments, as Figure 5 shown, the coil winding 200 extends outwardly with a current-carrying wire 240, and a wire groove 350 for the current-carrying wire 240 to pass through is provided in the package 300.
[0041] This application also discloses a deflection mirror device applied to the above electromagnetic drive type deflection structure. As Figure 9 shown, it includes a vibrating lens 600 fixed on the clamping part 131 and a control circuit board 700 fixed at one end of the package 300 away from the vibrating lens 600. The control circuit board 700 is electrically connected to the current-carrying wire 240. A first gasket 800 is covered on the side of the control circuit board 700 away from the package 300. A plurality of guide grating grids 810 are provided on the first gasket 800. A light shielding plate 900 for shielding the guide grating grids 810 is provided outside the first gasket 800. The rotating shaft 110 passes through the first gasket 800, and the light shielding plate 900 is fixed on the rotating shaft 110 and rotates synchronously with the rotating shaft 110.
[0042] Details of the above exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model.
Claims
1. An electromagnetic drive type deflection structure, characterized in that, It includes a rotor assembly (100) and a coil winding (200). The rotor assembly (100) is composed of a rotating shaft (110) and four permanent magnets (120). The shape of the rotating shaft (110) is cylindrical, and the shape of the permanent magnet (120) is arc-shaped. The adjacent permanent magnets (120) are fixedly covered on the outer side of the circumferential direction of the rotating shaft (110). The coil winding (200) includes a first winding (210) and a second winding (220). The first winding (210) and the second winding (220) are respectively suspended on the outer side of the permanent magnet (120) and are arranged oppositely in position. The first winding (210) and the second winding (220) respectively span the outer sides of two adjacent permanent magnets (120) in space.
2. The electromagnetic drive type deflection structure according to claim 1, wherein The permanent magnets (120) are equally and adjacently fixedly covered on the outer side of the circumferential direction of the rotating shaft (110). The first winding (210) and the second winding (220) are relatively covered on the outer side of the permanent magnet (120) at 90 degrees in space.
3. The electromagnetic drive type deflection structure according to claim 2, characterized in that A wrapper (300) is arranged outside the coil winding (200). The wrapper (300) forms a wrap on the outer side of the coil winding (200) along the length direction of the coil winding (200). A channel (310) for the rotor assembly (100) to pass through is arranged in the wrapper (300). The first winding (210) and the second winding (220) are closely attached to the inner wall of the channel (310) through a fixing glue (230).
4. The electromagnetic drive type deflection structure according to claim 3, wherein A supporting step (320) is arranged in the channel (310). The first winding (210) and the second winding (220) stay on the supporting step (320) in the channel (310).
5. The electromagnetic drive type deflection structure according to claim 4, characterized in that, A supporting shaft (130) is fixed at one end of the rotating shaft (110). A clamping part (131) is arranged at the end of the supporting shaft (130) far from the rotating shaft (110). A first bearing (400) is arranged between the supporting shaft (130) and the channel (310). The outer ring and the inner ring of the first bearing (400) are respectively loosely fitted with the inner wall of the channel (310) and the outer wall of the supporting shaft (130).
6. The electromagnetic drive type deflection structure according to claim 5, characterized in that, A first limiting ring (132) protrudes outside the supporting shaft (130). A first limiting step (330) is arranged in the channel (310). The front end and the rear end of the first bearing (400) are respectively clamped between the first limiting ring (132) and the first limiting step (330).
7. The electromagnetic drive type deflection structure according to claim 5, wherein, A second bearing (500) is arranged between the end of the rotating shaft (110) far from the supporting shaft (130) and the channel (310). The outer ring and the inner ring of the second bearing (500) are respectively loosely fitted with the inner wall of the channel (310) and the outer wall of the rotating shaft (110).
8. The electromagnetic drive type deflection structure according to claim 7, wherein An elastic gasket (340) is provided between the side of the supporting step (320) away from the coil winding (200) and the second bearing (500). The elastic gasket (340) is pre-pressed against one side of the second bearing (500). A second limiting ring (140) is provided on the side of the second bearing (500) away from the elastic gasket (340). The elastic gasket (340) and the second limiting ring (140) cooperate to form front and rear limits for the second bearing (500).
9. The electromagnetic drive type deflection structure according to claim 5, characterized in that, The coil winding (200) extends outwardly with a live wire (240). A wire groove (350) for the live wire (240) to pass through is provided in the wrapper (300).
10. A deflection mirror device, characterized in that, It includes the electromagnetic drive type deflection structure according to any one of claims 5 to 9.
11. The deflecting mirror device according to claim 10, characterized in that, It includes a vibrating lens (600) fixed on the clamping portion (131), and a control circuit board (700) fixed at one end of the wrapper (300) away from the vibrating lens (600). The control circuit board (700) is electrically connected to the live wire (240). A first gasket (800) is covered on the side of the control circuit board (700) away from the wrapper (300). A plurality of grating grids (810) are provided on the first gasket (800). A light shielding plate (900) for shielding the grating grids (810) is provided outside the first gasket (800). The rotating shaft (110) passes through the first gasket (800). The light shielding plate (900) is fixed on the rotating shaft (110) and rotates synchronously with the rotating shaft (110).