Dust scraper assembly for process gas treatment chamber

Abstract

The utility model discloses a dust scraper assembly for a process gas processing chamber, which comprises a connecting rod connected with a driving part and a scraping head connected with the bottom end of the connecting rod, and the scraping head is used for scraping dust on the inner wall of the process gas processing chamber and / or the surface of a temperature sensor; a reinforcing rib is arranged on the scraping head in the length direction of the scraping head, and the maximum thickness of the reinforcing rib is 2-4 times of the thickness of the scraper. According to the dust scraper assembly for the process gas processing chamber, the top scraping part of the scraping head is provided with the reinforcing rib, the reinforcing rib at least needs to be arranged at the position of the scraping groove of the temperature sensor so as to increase the strength of the position, and the included angle between the first inclined face of the reinforcing rib and the side wall of the scraping head is limited so that the strength of the position can be improved. The reinforcing effect is better, the service life is prolonged by 50%-75%, the scraping head is not prone to deformation or fracture in the using process, scraping cleaning is better facilitated, after the service life is prolonged, the interval period time of equipment maintenance is longer, and labor cost is saved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a dust scraper assembly for a process gas treatment chamber. Background Art

[0002] In the semiconductor industry, process gas treatment equipment is required to treat process gases. The process gases are introduced into the process gas treatment chamber (combustion chamber) of the process gas treatment equipment for combustion treatment. The combustion temperature is strictly controlled. Therefore, a temperature sensor is often installed on the top wall of the process gas treatment chamber to monitor the temperature. However, a large amount of dust is generated during the combustion of the process gas. This dust will adhere to the inner wall of the process gas treatment chamber and the surface of the temperature sensor, thereby affecting the temperature sensor's detection of the temperature in the process gas treatment chamber. To this end, the process gas treatment equipment is generally equipped with a scraper assembly. A motor is installed on the top of the process gas treatment chamber. The scraper assembly is installed on the output shaft of the motor and its rotation is controlled by the motor. The scraper assembly scrapes the dust during rotation. However, it is found during use that after a period of use, the scraper assembly is prone to deformation or even breakage, especially in the area where the temperature sensor scraping groove is opened, which affects the scraping and cleaning effect and requires frequent replacement, which is time-consuming and labor-intensive. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a dust scraper assembly for a process gas treatment chamber, which can extend the service life of the scraper assembly and is not easy to deform.

[0004] In order to solve the above technical problems, the present invention provides a dust scraper assembly for a process gas treatment chamber, comprising:

[0005] a connecting rod, a top end of which is connected to the driving component;

[0006] a scraper head mounted on the bottom end of the connecting rod for scraping dust off the inner wall of the process gas treatment chamber and / or the surface of the temperature sensor;

[0007] The scraper head is provided with reinforcing ribs along its length direction, and the maximum thickness of the reinforcing ribs is 2-4 times the thickness of the scraper.

[0008] Preferably, the scraping head includes a top scraping portion and a side scraping portion, the top scraping portion is perpendicular to the connecting rod and connected to the connecting rod, and the side scraping portions are formed at two ends of the top scraping portion and extend toward a direction away from the top wall of the process gas treatment chamber;

[0009] The top scraping portion is used to scrape and clean the top wall of the process gas treatment chamber, and the side scraping portion is used to scrape and clean the side walls of the process gas treatment chamber.

[0010] Preferably, the top scraping portion is provided with a temperature sensor scraping groove running through the thickness direction thereof on the top side facing the process gas treatment chamber, the width of the temperature sensor scraping groove matches the size of the temperature sensor, and the depth of the temperature sensor scraping groove matches the length of the temperature sensor extending beyond the top wall of the process gas treatment chamber.

[0011] Preferably, the distance between the temperature sensor scraping groove and the connecting rod is equal to the distance between the connecting rod and the temperature sensor.

[0012] Preferably, the reinforcing rib is arranged on a top side of the top scraping portion away from the process gas treatment chamber.

[0013] Preferably, the reinforcing rib is arranged at the position of the temperature sensor scraping groove.

[0014] Preferably, the reinforcing rib is provided along the length direction of the top scraping portion and extends at least to the position of the temperature sensor scraping groove.

[0015] Preferably, the thickness of the scraper head is 2-5 mm.

[0016] Preferably, the maximum thickness of the reinforcing rib is 4-20 mm.

[0017] Preferably, the scraping head is made of stainless steel, titanium alloy or carbon fiber.

[0018] The utility model provides a dust scraper assembly for a process gas treatment chamber, wherein the top scraping portion of the scraper head is provided with reinforcing ribs, and the reinforcing ribs need to be provided at least at the position of the temperature sensor scraping groove to increase the strength at this position, and by limiting the angle between the first inclined surface of the reinforcing rib and the side wall of the scraper head, the reinforcing effect is better, the service life is increased by 50%-75%, and the scraper head is not easy to deform or break during use, which is more conducive to scraping and cleaning. After the service life is increased, the interval period of equipment maintenance is longer, saving labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the present invention, the following is a brief introduction to the drawings required for the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 1 is a schematic diagram of an embodiment of a dust scraper assembly for a process gas treatment chamber according to the present invention;

[0021] Figure 2 yes Figure 1 Cross-sectional view at AA in the middle;

[0022] Figure 3 This is a side view of the connection position of the top scraping part and the side scraping part of one embodiment of the dust scraper assembly for a process gas treatment chamber of the present invention;

[0023] Figure 4 This is a schematic diagram of an embodiment of a dust scraper assembly for a process gas treatment chamber according to the present invention, wherein the reinforcing rib is only provided at the location of the temperature sensor scraping groove;

[0024] Figure 5 1 is a schematic diagram of an embodiment of a dust scraper assembly for a process gas treatment chamber according to the present invention, wherein the reinforcing ribs extend along the length direction of the top scraping portion to the position of the temperature sensor scraping groove.

[0025] In the figure, 1-connecting rod; 2-scraping head; 21-top scraping part; 22-side scraping part; 23-temperature sensor hanging groove; 3-reinforcement rib; 31-first inclined surface; 32-second inclined surface. DETAILED DESCRIPTION

[0026] The following is a clear and complete description of the technical solutions of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0027] refer to Figure 1 , shows a dust scraper assembly for a process gas treatment chamber of the utility model, which can extend the service life of the scraper assembly and is not easy to deform.

[0028] In order to solve the above technical problems, the present invention provides a dust scraper assembly for a process gas treatment chamber, comprising:

[0029] a connecting rod, a top end of which is connected to the driving component;

[0030] a scraper head mounted on the bottom end of the connecting rod for scraping dust off the inner wall of the process gas treatment chamber and / or the surface of the temperature sensor;

[0031] The scraper head is provided with reinforcing ribs along its length direction, and the maximum thickness of the reinforcing ribs is 2-4 times the thickness of the scraper.

[0032] The scraping head includes a top scraping portion and a side scraping portion, the top scraping portion is perpendicular to the connecting rod and connected to the connecting rod, the side scraping portions are formed at the two ends of the top scraping portion and extend toward the top wall away from the process gas treatment chamber; the reinforcing ribs are arranged on the top side of the top scraping portion away from the process gas treatment chamber.

[0033] The top scraping portion is used to scrape and clean the top wall of the process gas treatment chamber, and the side scraping portion is used to scrape and clean the side walls of the process gas treatment chamber.

[0034] Preferably, the scraping head includes a top scraping portion and a side scraping portion, the top scraping portion is perpendicular to the connecting rod and connected to the connecting rod, and the side scraping portions are formed at two ends of the top scraping portion and extend toward the direction away from the top wall of the process gas treatment chamber; the top scraping portion is used to scrape and clean the top wall of the process gas treatment chamber, and the side scraping portion is used to scrape the side wall of the process gas treatment chamber.

[0035] More preferably, the top scraping portion is provided with a temperature sensor scraping groove extending through the thickness of the top scraping portion, on a side facing the top of the process gas treatment chamber. The width of the temperature sensor scraping groove matches the size of the temperature sensor, and the depth of the temperature sensor scraping groove matches the length of the temperature sensor extending beyond the top wall of the process gas treatment chamber. The distance between the temperature sensor scraping groove and the connecting rod is equal to the distance between the connecting rod and the temperature sensor.

[0036] In the embodiment of the present invention, by providing a reinforcing rib with a total thickness 2-4 times the thickness of the scraping head on the scraping head, the strength of the scraping head is increased. Even if it is subjected to stress for a long time during the process of rotating to scrape dust, it is not easy to deform or break, and its service life is effectively extended. Preferably, the reinforcing rib is provided on the top side of the top scraping part away from the process gas treatment chamber, and the reinforcing rib is provided at least at the position of the temperature sensor scraping groove to overcome the problem of easy deformation or even breakage here. It is understandable that the reinforcing rib can also be provided in whole or in part along the length direction of the top scraping part, but the reinforcing rib must be provided at least at the position of the temperature sensor scraping groove, such as Figure 4 and Figure 5 As shown; It should be noted that the preferred shape of the reinforcement rib of the present invention is as follows Figure 2 As shown, the reinforcing ribs are protruded and formed on the two side surfaces of the scraper head, and the reinforcing ribs include a first inclined surface (close to the top wall of the process gas treatment chamber). The first inclined surface makes the thickness of the reinforcing rib gradually increase from close to the top wall of the process gas treatment chamber to away from the top wall of the process gas treatment chamber, and forms a plane at the bottom surface of the top scraping portion, that is, the cross section of the reinforcing rib is formed into a triangle, and the angle θ1 between the first inclined surface and the side wall of the scraper head (that is, the side wall of the top scraping portion) is generally 30°-60°, preferably 45°, and the width of the reinforcing rib is 25%-45% of the width of the top scraping portion. It has been verified by use that its effective service life can be extended by 50%-75%; in addition, if the reinforcing rib extends to the side scraping portion, refer to Figure 1 and Figure 3Preferably, the reinforcing rib forms a second inclined surface (away from the top wall of the process gas treatment chamber) on the side scraping portion. The angle θ2 between the second inclined surface and the side scraping portion is preferably between 30° and 90°. It should be noted that since the temperature sensor is generally mounted on the top wall of the process gas treatment chamber and protrudes relative to the top wall, it is necessary to define a temperature sensor scraping groove on the top scraping portion at a location corresponding to the temperature sensor. This facilitates both the scraping of the top scraping portion to clean the top wall of the process gas treatment chamber and the scraping of the temperature sensor by the sidewalls of the temperature sensor scraping groove. Furthermore, the addition of the reinforcing rib increases the strength of this location, making it less susceptible to deformation or breakage.

[0037] In a specific embodiment, the scraper head has a thickness of 2-5 mm (i.e., the main body thickness of the top scraper portion and the side scraper portion is 2-5 mm), and the maximum thickness of the reinforcing ribs is 4-20 mm. Furthermore, to ensure the strength of the scraper head, a relatively high-strength material, such as stainless steel, titanium alloy, or carbon fiber, is preferred.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A dust scraper assembly for a process gas treatment chamber, characterized in that: include: a connecting rod, a top end of which is connected to the driving component; a scraper head mounted on the bottom end of the connecting rod for scraping dust off the inner wall of the process gas treatment chamber and / or the surface of the temperature sensor; The scraper head is provided with reinforcing ribs along its length, and the maximum thickness of the reinforcing ribs is 2-4 times the thickness of the scraper; The reinforcing rib includes a first inclined surface, and an included angle θ1 between the first inclined surface and the side wall of the scraping head is 30°-60°.

2. The dust scraper assembly for a process gas treatment chamber according to claim 1, wherein: The scraping head includes a top scraping portion and a side scraping portion, wherein the top scraping portion is perpendicular to the connecting rod and connected to the connecting rod, and the side scraping portions are formed at two ends of the top scraping portion and extend toward a direction away from the top wall of the process gas treatment chamber; The top scraping portion is used to scrape and clean the top wall of the process gas treatment chamber, and the side scraping portion is used to scrape and clean the side walls of the process gas treatment chamber.

3. The dust scraper assembly for a process gas treatment chamber according to claim 2, wherein: The top scraping portion is provided with a temperature sensor scraping groove running through the thickness direction thereof on the top side facing the process gas treatment chamber. The width of the temperature sensor scraping groove matches the size of the temperature sensor, and the depth of the temperature sensor scraping groove matches the length of the temperature sensor extending beyond the top wall of the process gas treatment chamber.

4. The dust scraper assembly for a process gas treatment chamber according to claim 3, wherein: The distance between the temperature sensor scraping groove and the connecting rod is equal to the distance between the connecting rod and the temperature sensor.

5. The dust scraper assembly for a process gas treatment chamber according to claim 3, wherein: The reinforcing rib is arranged on a top side of the top scraping portion away from the process gas treatment chamber.

6. The dust scraper assembly for a process gas treatment chamber according to claim 5, wherein: The reinforcing rib is arranged at the position of the temperature sensor scraping groove.

7. The dust scraper assembly for a process gas treatment chamber according to claim 5, wherein: The reinforcing rib is arranged along the length direction of the top scraping portion and extends at least to the position of the temperature sensor scraping groove.

8. The dust scraper assembly for a process gas treatment chamber according to claim 1, wherein: The thickness of the scraping head is 2-5 mm.

9. The dust scraper assembly for a process gas treatment chamber according to claim 1, wherein: The maximum thickness of the reinforcing rib is 4-20 mm.

10. The dust scraper assembly for a process gas treatment chamber according to claim 1, wherein: The scraping head is made of one of stainless steel, titanium alloy or carbon fiber.

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