Auxiliary structure for cleaning crystal support

Abstract

The utility model belongs to the technical field of crystal support cleaning, and particularly relates to an auxiliary structure for cleaning a crystal support, which comprises a mounting bottom plate, a bottom plate of the mounting bottom plate is fixedly connected with a polishing housing frame; the top of the mounting bottom plate is fixedly connected with a motor fixing seat; the top of the mounting bottom plate is fixedly connected with an air cylinder fixing seat; one side of the motor fixing seat is fixedly connected with a main shaft motor; the output end of the main shaft motor is fixedly connected with a synchronous wheel II; the surface of the second synchronous wheel is connected with a synchronous belt in an engaged mode. The other end of the synchronous belt is connected with a first synchronous wheel in an engaged mode. The top of the synchronous wheel I is fixedly connected with a bearing II; the top of the second bearing is connected with a second locking nut. The auxiliary structure for cleaning the crystal support solves the problem that when an existing auxiliary structure for cleaning the crystal support is used for cleaning the crystal support through ultrasonic waves, part of impurities can be left on the surface of the crystal support, and therefore use of the crystal support is affected.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal tray cleaning, in particular to an auxiliary structure for crystal tray cleaning. Background Art

[0002] A crystal tray is a device used to support and fix the seed crystal during the crystal growth process. In the production process of semiconductor materials, especially silicon and silicon carbide crystals, crystal trays play an important role. They are usually made of high-temperature resistant materials with a small thermal expansion coefficient, such as graphite or quartz, to ensure that the crystal will not be damaged by temperature changes during growth. During the production and processing of the crystal tray, it needs to be cleaned, so an auxiliary structure for cleaning the crystal tray is needed.

[0003] Currently, the auxiliary structure for cleaning the wafer tray in the prior art generally refers to a device or apparatus used to remove impurities, residues or coatings on the wafer tray surface during the crystal rod processing process, and cleans it through ultrasonic waves to reduce impurity residues on the wafer tray surface.

[0004] However, when the existing auxiliary structure for cleaning the crystal tray is used to clean the crystal tray by ultrasonic cleaning, some impurities will remain on the surface of the crystal tray, thereby affecting the use of the crystal tray. Therefore, to solve the above problem, an auxiliary structure for cleaning the crystal tray is proposed. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background art, the present invention proposes an auxiliary structure for cleaning a wafer tray.

[0006] The technical solution adopted by the utility model to solve its technical problems is: the auxiliary structure for crystal support cleaning described in the utility model comprises a mounting base; the bottom plate of the mounting base is fixedly connected to the polishing cover frame; the top of the mounting base is fixedly connected to the motor mounting seat; the top of the mounting base is fixedly connected to the cylinder mounting seat; one side of the motor mounting seat is fixedly connected to the spindle motor; the output end of the spindle motor is fixedly connected to the synchronous wheel 2; the surface of the synchronous wheel 2 is meshedly connected to the synchronous belt; the other end of the synchronous belt is meshedly connected to the synchronous wheel 1; the top of the synchronous wheel 1 is fixedly connected to the bearing 2; the top of the bearing 2 is connected to the locking nut 2; one side of the cylinder mounting seat is fixedly connected to the cylinder; the output end of the cylinder is fixedly connected to the shaft pressure plate bracket; the bottom of the shaft pressure plate bracket is connected to the puller fixing plate, and the bottom of the shaft pressure plate bracket The top of the gear train is connected to the gear of the driven pulley, and the bottom of the gear train is connected to the gear of the driven pulley, and the bottom of the gear train is connected to the gear of the driven pulley, and the bottom of the gear train is connected to the gear of the driven pulley.

[0007] Preferably, auxiliary plates are fixedly connected to both sides of the polishing cover frame; an electric telescopic column is fixedly connected to the top of the auxiliary plate; a concave block is fixedly connected to the output end of the electric telescopic column; and a moving wheel is rotatably connected to the inner side of the concave block.

[0008] Preferably, a hinge is fixedly connected to the front side of the polishing cover frame; a sealing door panel is fixedly connected to one side of the hinge; and a locking mechanism is provided on the surface of the sealing door panel.

[0009] Preferably, the locking mechanism includes a locking card; one side of the locking card is movably connected to the sealing door panel; one side of the locking card is connected to a clamping ring; one side of the polishing cover frame is fixedly connected to a hook; the hook is used in conjunction with the clamping ring.

[0010] Preferably, the top of the dish brush is fixedly connected with a fixing bolt; the fixing bolt is threadedly connected to the grinding wheel fixing plate; and the surface of the fixing bolt is threadedly connected with a fixing nut.

[0011] Preferably, a heat dissipation slot is provided on one side of the polishing cover frame; the heat dissipation slot is used in conjunction with the bamboo tube.

[0012] Preferably, the number of the electric telescopic columns and movable wheels is four; the electric telescopic columns and movable wheels are evenly distributed on both sides of the polishing cover frame.

[0013] Beneficial effects of the utility model:

[0014] 1. The utility model provides an auxiliary structure for cleaning the crystal tray. When the crystal tray enters under this structure, the bamboo tube sprays water on the upper surface of the crystal tray, and the motor rotates in advance to rotate the ball spline shaft through the synchronous belt, driving the bowl brush to rotate at high speed, and then the cylinder extends downward, the spring presses downward, and the bowl brush quickly grinds the surface of the crystal tray. The grinding area covers the entire area through the movement of the crystal tray. When the crystal tray is polished, the motor stops rotating, the cylinder retracts upward, and the bowl brush is lifted up and out of the grinding area. When the bowl brush is worn to a specified height after working for a long time, the proximity sensor cannot sense the shaft pressure plate bracket, and an alarm prompts that the bowl brush needs to be replaced, thereby assisting in cleaning the crystal tray, making the crystal tray cleaner, reducing the residual impurities, improving the cleaning efficiency, saving time, and improving the practicality of the device.

[0015] 2. The utility model provides an auxiliary structure for cleaning the crystal tray. By starting the electric telescopic column, the electric telescopic column drives the concave block to move, and the concave block drives the moving wheel to move, so that the moving wheel contacts the ground and the device is lifted off the ground, thereby enabling the device to move, making it convenient for the user to change the position of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0017] Figure 1 It is a three-dimensional diagram of the utility model;

[0018] Figure 2 This is a three-dimensional diagram of the cleaning structure of the auxiliary structure for cleaning the crystal support in the utility model;

[0019] Figure 3 This is an exploded perspective view of the matching structure of the cylinder and the bowl brush in the utility model;

[0020] Figure 4 It is a three-dimensional diagram of the bowl brush structure of the utility model.

[0021] Legend:

[0022] 1. Mounting base; 101. Proximity switch; 102. Motor mounting base; 103. Cylinder mounting base; 104. Spindle sleeve mounting base; 105. Spline sleeve; 106. Grinding wheel mounting plate; 107. Connecting plate; 108. Movable shaft connecting plate; 109. Bearing mounting plate; 110. Axis pressure plate bracket; 111. Puller mounting plate; 112. Induction bracket; 113. Grinding cover frame; 114. Ball spline; 115. Synchronous wheel 1; 116. Synchronous wheel 2; 117. Synchronous belt; 118, spindle motor; 119, locking nut 1; 120, bearing 1; 121, cylinder; 122, dish brush; 123, locking nut 2; 124, bearing 2; 125, bamboo tube; 126, spring; 2, auxiliary plate; 201, electric telescopic column; 202, concave block; 203, moving wheel; 3, hinge; 301, sealing door panel; 4, locking clamp; 401, clamp ring; 402, hook; 5, fixing bolt; 501, fixing nut; 6, heat dissipation slot. DETAILED DESCRIPTION

[0023] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Specific examples are given below.

[0025] See also Figure 1 - Figure 4The present invention provides an auxiliary structure for cleaning a crystal support, comprising a mounting base 1; the bottom plate of the mounting base 1 is fixedly connected to a polishing cover frame 113; the top of the mounting base 1 is fixedly connected to a motor fixing seat 102; the top of the mounting base 1 is fixedly connected to a cylinder fixing seat 103; a spindle motor 118 is fixedly connected to one side of the motor fixing seat 102; a second synchronous wheel 116 is fixedly connected to the output end of the spindle motor 118; a synchronous belt 117 is meshedly connected to the surface of the second synchronous wheel 116; the other end of the synchronous belt 117 is meshedly connected to a first synchronous wheel 115; a second bearing 124 is fixedly connected to the top of the second bearing 124; a second locking nut 123 is connected to the top of the second bearing 124 ; One side of the cylinder fixing seat 103 is fixedly connected to the cylinder 121; the output end of the cylinder 121 is fixedly connected to the shaft pressure plate bracket 110; the bottom of the shaft pressure plate bracket 110 is connected to the puller fixing plate 111, and the bottom of the shaft pressure plate bracket 110 is connected to the movable shaft connecting plate 108; the surface of the movable shaft connecting plate 108 is provided with a spring 126; the movable shaft connecting plate 108 is threadedly connected to the locking nut 123; the surface of the bearing 124 is fixedly connected to the bearing fixing plate 109; the bottom of the synchronous wheel 115 is fixedly connected to the main shaft sleeve mounting seat 104; the bottom of the main shaft sleeve mounting seat 104 is connected to the locking nut 119; the bottom of the locking nut 119 is fixedly connected to the shaft Bearing 120; a spline sleeve 105 is connected between the bearings 120; the bottom of the bearing 120 is connected to a ball spline 114; the bottom of the ball spline 114 is connected to a connecting plate 107; the bottom of the connecting plate 107 is fixedly connected to a grinding wheel fixing plate 106; a bowl brush 122 is installed at the bottom of the grinding wheel fixing plate 106; a bamboo tube 125 is hingedly connected to one side of the mounting base 1; the bamboo tube 125 is located in the grinding cover frame 113; one side of the grinding cover frame 113 and the cylinder fixing seat 103 are fixedly connected to the induction bracket 112; the surface of the induction bracket 112 is connected to the proximity switch 101; when working, when the crystal support enters under this structure, the bamboo tube 125 sprays water on the surface of the crystal support. The motor rotates in advance and rotates the ball spline 114 shaft through the synchronous belt 117, driving the bowl brush 122 to rotate at high speed, and then the cylinder 121 extends downward, the spring 126 presses downward, and the bowl brush 122 quickly grinds the surface of the crystal drag. The grinding area covers the entire area through the movement of the crystal support. When the crystal drag is polished, the motor stops rotating and the cylinder 121 retracts upward, lifting the bowl brush 122 upward and out of the grinding area. When the bowl brush 122 is worn to the specified height after working for a long time, the proximity sensor cannot sense the shaft pressure plate bracket 110, and an alarm prompts that the bowl brush 122 needs to be replaced, thereby assisting in cleaning the crystal support, making the crystal support cleaner, reducing the residual impurities, improving the cleaning efficiency, saving time, and improving the practicality of the device.

[0026] Further, such as Figure 1 As shown, auxiliary plates 2 are fixedly connected to both sides of the polishing cover frame 113; an electric telescopic column 201 is fixedly connected to the top of the auxiliary plate 2; the output end of the electric telescopic column 201 is fixedly connected to a concave block 202; the inner side of the concave block 202 is rotatably connected to a moving wheel 203; the number of the electric telescopic columns 201 and the moving wheels 203 is four; the electric telescopic columns 201 and the moving wheels 203 are evenly distributed on both sides of the polishing cover frame 113; when working, by starting the electric telescopic column 201, the electric telescopic column 201 drives the concave block 202 to move, and the concave block 202 drives the moving wheel 203 to move, so that the moving wheel 203 contacts the ground, so that the device is off the ground, so that the device can be moved, which is convenient for the user to change the position of the device.

[0027] Further, such as Figure 1 As shown, the front side of the polishing cover frame 113 is fixedly connected to a hinge 3; one side of the hinge 3 is fixedly connected to a sealing door panel 301; the surface of the sealing door panel 301 is provided with a locking mechanism; when working, the user opens the sealing door panel 301 to allow the crystal holder to enter the polishing cover frame 113, and then covers the cover to seal the polishing cover frame 113, thereby reducing the splashing of the crystal holder and reducing the harm to the user.

[0028] Further, such as Figure 1 As shown, the locking mechanism includes a locking card plate 4; one side of the locking card plate 4 is movably connected to the sealing door panel 301; a clamping ring 401 is connected to one side of the locking card plate 4; a hook 402 is fixedly connected to one side of the polishing cover frame 113; the hook 402 is used in conjunction with the clamping ring 401; when working, the user clamps the clamping ring 401 on the hook 402, and then presses and fixes the locking card plate 4, thereby fixing the sealing door panel 301 and making the sealing effect of the sealing door panel 301 better.

[0029] Further, such as Figure 4 As shown, the top of the dish brush 122 is fixedly connected with a fixing bolt 5; the fixing bolt 5 is threadedly connected to the grinding wheel fixing plate 106; the surface of the fixing bolt 5 is threadedly connected with a fixing nut 501; during operation, the user rotates the fixing stud and the nut to disassemble the dish brush 122, thereby enabling the dish brush 122 to be replaced.

[0030] Further, such as Figure 1 As shown, a heat dissipation slot 6 is provided on one side of the polishing cover frame 113; the heat dissipation slot 6 is used in conjunction with the bamboo tube 125; during operation, the condition of the bamboo tube 125 can be observed through the heat dissipation slot 6, and the internal components of the polishing cover frame 113 can also be cooled.

[0031] Working principle: when the crystal support enters under this structure, the bamboo tube 125 sprays water on the upper surface of the crystal support, the motor rotates in advance and rotates the ball spline 114 shaft through the synchronous belt 117, driving the bowl brush 122 to rotate at high speed, and then the cylinder 121 extends downward, the spring 126 presses downward, and the bowl brush 122 quickly grinds the surface of the crystal drag, and the grinding area covers the entire area through the movement of the crystal support. When the crystal drag is polished, the motor stops rotating, and the cylinder 121 retracts upward, lifting the bowl brush 122 upward and out of the grinding area. When the bowl brush 122 is worn to the specified height after working for a long time, the proximity sensor cannot sense the shaft pressure plate bracket 110, and an alarm prompts that the bowl brush 122 needs to be replaced, thereby assisting in cleaning the crystal support, making the crystal support cleaner, reducing the residual impurities, improving the cleaning efficiency, saving time, and improving the practicality of the device. By starting the electric telescopic column 201, the electric telescopic The shrinkage column 201 drives the concave block 202 to move, and the concave block 202 drives the moving wheel 203 to move, so that the moving wheel 203 contacts the ground, so that the device is off the ground, so that the device can be moved, which is convenient for the user to replace the position of the device. The user opens the sealing door panel 301 to allow the crystal holder to enter the polishing cover frame 113, and then covers the cover to seal the polishing cover frame 113, thereby reducing the crystal holder from splashing out and reducing the harm to the user. When the user is using, the clamping ring 401 is stuck on the hook 402, and then the locking clamping plate 4 is pressed and fixed, thereby fixing the sealing door panel 301, so that the sealing effect of the sealing door panel 301 is better. The user rotates the fixing studs and nuts to disassemble the bowl brush 122, so that the bowl brush 122 can be replaced. The situation of the bamboo tube 125 is observed through the heat dissipation slot 6, and the internal components of the polishing cover frame 113 can also be cooled.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention as claimed.

Claims

1. An auxiliary structure for cleaning a wafer tray, comprising a mounting base (1); characterized in that: The bottom plate of the mounting base (1) is fixedly connected to a polishing housing frame (113); the top of the mounting base (1) is fixedly connected to a motor fixing seat (102); the top of the mounting base (1) is fixedly connected to a cylinder fixing seat (103); one side of the motor fixing seat (102) is fixedly connected to a spindle motor (118); the output end of the spindle motor (118) is fixedly connected to a second synchronous wheel (116); the surface of the second synchronous wheel (116) is meshedly connected to a synchronous belt (117); the other end of the synchronous belt (117) is meshedly connected to a first synchronous wheel (115) ; The top of the synchronous wheel 1 (115) is fixedly connected to the bearing 2 (124); the top of the bearing 2 (124) is connected to the locking nut 2 (123); one side of the cylinder fixing seat (103) is fixedly connected to the cylinder (121); the output end of the cylinder (121) is fixedly connected to the shaft pressure plate bracket (110); the bottom of the shaft pressure plate bracket (110) is connected to the puller fixing plate (111), and the bottom of the shaft pressure plate bracket (110) is connected to the movable shaft rod connecting plate (108); the surface of the movable shaft rod connecting plate (108) is provided with a spring (126); The movable shaft connecting plate (108) is threadedly connected to the locking nut 2 (123); the surface of the bearing 2 (124) is fixedly connected to the bearing fixing plate (109); the bottom of the synchronous wheel 1 (115) is fixedly connected to the main shaft sleeve mounting seat (104); the bottom of the main shaft sleeve mounting seat (104) is connected to the locking nut 1 (119); the bottom of the locking nut 1 (119) is fixedly connected to the bearing 1 (120); the spline sleeve (105) is connected between the bearings 1 (120); the bottom of the bearing 1 (120) is connected to the ball spline (114); The bottom of the ball spline (114) is connected to a connecting plate (107); the bottom of the connecting plate (107) is fixedly connected to a grinding wheel fixing plate (106); a bowl brush (122) is installed at the bottom of the grinding wheel fixing plate (106); a bamboo tube (125) is hingedly connected to one side of the mounting base (1); the bamboo tube (125) is located in the grinding cover frame (113); one side of the grinding cover frame (113) and the cylinder fixing seat (103) are both fixedly connected to a sensing bracket (112); the surface of the sensing bracket (112) is connected to a proximity switch (101).

2. The auxiliary structure for cleaning a wafer tray according to claim 1, characterized in that: Both sides of the polishing cover frame (113) are fixedly connected to auxiliary plates (2); the top of the auxiliary plate (2) is fixedly connected to an electric telescopic column (201); the output end of the electric telescopic column (201) is fixedly connected to a concave block (202); the inner side of the concave block (202) is rotatably connected to a moving wheel (203).

3. The auxiliary structure for cleaning a wafer tray according to claim 1, characterized in that: The front side of the polishing cover frame (113) is fixedly connected to a hinge (3); one side of the hinge (3) is fixedly connected to a sealing door panel (301); and a locking mechanism is provided on the surface of the sealing door panel (301).

4. The auxiliary structure for cleaning a wafer tray according to claim 3, characterized in that: The locking mechanism comprises a locking clamping plate (4); one side of the locking clamping plate (4) is movably connected to the sealing door plate (301); one side of the locking clamping plate (4) is connected to a clamping ring (401); one side of the polishing cover frame (113) is fixedly connected to a clamping hook (402); the clamping hook (402) is used in conjunction with the clamping ring (401).

5. The auxiliary structure for cleaning a wafer tray according to claim 1, characterized in that: The top of the dish brush (122) is fixedly connected with a fixing bolt (5); the fixing bolt (5) is threadedly connected to the grinding wheel fixing plate (106); and the surface of the fixing bolt (5) is threadedly connected with a fixing nut (501).

6. The auxiliary structure for cleaning a wafer tray according to claim 1, characterized in that: A heat dissipation notch (6) is provided on one side of the polishing cover frame (113); the heat dissipation notch (6) is used in conjunction with the bamboo tube (125).

7. The auxiliary structure for cleaning a wafer tray according to claim 2, characterized in that: The number of the electric telescopic columns (201) and the moving wheels (203) is four; the electric telescopic columns (201) and the moving wheels (203) are evenly distributed on both sides of the polishing cover frame (113).

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