Anti-shaking X-axis and Y-axis sliding table
By providing synchronized first screw and second driving mechanism on both sides of the base, the problem of jitter between the XY two-axis sliding table is solved, and the smooth movement and high-precision processing of the carrier plate are achieved.
Patent Information
- Application Number
- CN202422138039.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-08-05
- Estimated Expiration
- 2034-08-30
AI Technical Summary
When the existing XY two-axis sliding table is hollow and the work surface is large, the bias of the power mechanism causes serious shaking of the work surface, affecting the processing accuracy and efficiency.
A first screw is arranged on both sides of the base and rotates synchronously through a synchronous mechanism, and the second driving mechanism drives the vertical movement of the carrier plate to achieve a smooth movement of the carrier plate.
It reduces the jitter of the carrier plate and improves the motion stability and machining accuracy of the XY two-axis slide platform.
Smart Images
Figure CN223186483U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of slides, in particular to an anti-shake XY two-axis slide. Background Art
[0002] Currently, high-precision alignment and displacement technologies are playing an increasingly important role in the micro-machining and manufacturing industry. Alignment technologies are widely used in industries such as semiconductor equipment, web-to-print equipment, LED and LCD panel manufacturing, fiber optic docking, and micro-mechanical electronic device processing and packaging. To improve part processing accuracy and increase alignment efficiency, related industries are placing higher demands on alignment and displacement technologies, which rely heavily on slides.
[0003] The XY two-axis slide in the prior art is composed of a stack of X-axial motion and Y-axial motion. When a hollow space is required and the work table is large in size, the power mechanisms that drive the X-axial motion and the Y-axial motion are both placed on one side of the work table. This results in one side of the work table being farther away from the power mechanism. This side (that is, the unpowered part) will vibrate during operation due to the large distance from the power mechanism.
[0004] In view of this, there is an urgent need for an anti-shake XY two-axis slide. Utility Model Content
[0005] In view of the problems existing in the prior art, the present invention solves the problem with the following technical structure.
[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0007] An anti-shake XY two-axis slide comprises: a base and a carrier plate slidably disposed on the base, mounting seats are disposed on both sides of the top surface of the base, and first screw rods are rotatably disposed on the mounting seats, the two first screw rods have the same axial direction, and the two first screw rods are both threadedly connected to the carrier plate;
[0008] The base is further provided with a first driving mechanism and a synchronization mechanism, wherein the first driving mechanism is used to drive one of the first screw rods to rotate, and the synchronization mechanism is used to make the two first screw rods rotate synchronously;
[0009] It also includes a second driving mechanism for driving the carrier plate to move in a direction perpendicular to the axial direction of the first screw rod.
[0010] It is further characterized in that
[0011] The first driving mechanism includes a first motor, and an output end of the first motor is coaxially connected to a first screw rod.
[0012] First connecting plates are provided on both sides of the bottom surface of the carrier plate, and the two first connecting plates are respectively threadedly connected to the two first screw rods.
[0013] Two first slides are provided on the base, the two mounting seats are respectively slidably provided on the top surfaces of the first slides, the two first connecting plates are respectively slidably provided on the two mounting seats, and the movement direction of the first connecting plates relative to the mounting seats is perpendicular to the movement direction of the mounting seats relative to the first slides.
[0014] The synchronization mechanism includes a chain and two sprockets. The two sprockets are coaxially arranged on two first screw rods respectively, and the chain is sleeved on the two sprockets.
[0015] The base is provided with a mounting plate between the two first screw rods. A transition wheel is rotatably provided on the mounting plate, and the transition wheel is engaged with the chain.
[0016] The second driving mechanism is arranged on one side of the bottom surface of the carrier plate.
[0017] The second driving mechanism includes a second motor and a second screw rod. The second screw rod is coaxially arranged at the output end of the second motor. The axial direction of the second screw rod is perpendicular to the axial direction of the first screw rod. The second screw rod is threadedly connected to the base.
[0018] A connecting seat is provided on one side of the top surface of the base, and the connecting seat is threadedly connected to the second screw rod.
[0019] A third slide is provided on the base, and the connecting seat is slidably provided on the third slide. A fourth slide is provided on the bottom surface of the carrier plate, and the fourth slide is slidably provided on the connecting seat. The movement direction of the fourth slide relative to the connecting seat is perpendicular to the movement direction of the connecting seat relative to the third slide.
[0020] The above structure of the utility model can achieve the following beneficial effects:
[0021] When the base and the carrier plate are both hollow, first screw rods are provided on both sides of the base, and the two first screw rods are rotated synchronously by a synchronization mechanism. Since the two first screw rods are threadedly connected to the carrier plate, when the first driving mechanism drives the two first screw rods to rotate, thrust is applied to the carrier plate synchronously from both sides, so that the carrier plate moves smoothly on the base, and the occurrence of carrier plate shaking is reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is a schematic diagram of the structure of this application;
[0023] Figure 2 This is a structural diagram of part of the structure of this application.
[0024] In the figure: 1, base; 2, carrier plate; 3, mounting seat; 4, first screw rod; 5, first motor; 6, chain; 7, sprocket; 8, idler wheel; 9, first connecting plate; 10, second motor; 11, second screw rod; 12, connecting seat; 13, first sliding seat; 14, fourth sliding seat; 15, third sliding seat. Detailed implementation mode
[0025] In order to enable those skilled in the art to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.
[0026] It should be noted that the terms "comprising" and "having" and any variations thereof in the description and claims of the present utility model and the above accompanying drawings are intended to cover non-exclusive inclusion. For example, a process, method, device, product or equipment comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or equipment.
[0027] The following is a further detailed description of this application in conjunction with the attached Figure 1-Figure 2 Make a further detailed description of this application.
[0028] Refer to Figure 1-Figure 2 Shown is an anti-vibration XY two-axis slide table, including: a base 1 and a carrier plate 2 slidably disposed on the base 1. Mounting seats 3 are provided on both sides of the top surface of the base 1. First screw rods 4 are rotatably disposed on the mounting seats 3. The axial directions of the two first screw rods 4 are the same, and both first screw rods 4 are threadedly connected to the carrier plate 2. A first driving mechanism and a synchronization mechanism are further provided on the base 1. The first driving mechanism is used to drive one of the first screw rods 4 to rotate, and the synchronization mechanism is used to make the two first screw rods 4 rotate synchronously. A second driving mechanism is also provided for driving the carrier plate 2 to move in a direction perpendicular to the axial direction of the first screw rod 4. Thus, when both the base 1 and the carrier plate 2 are hollow (as Figure 1 shown, in a rectangular shape with a hole in the middle), by providing first screw rods 于两侧均设置第一丝杆4,并通过同步机构使两个第一丝杆4同步转动,由于两个第一丝杆4与载板2螺纹连接,因此,第一驱动机构驱动两个第一丝杆4转动时,从两侧对载板2同步施加推力,使载板2在底座1上运动平稳,降低了载板2抖动的情况出现,配合第二驱动机构驱动载板2朝着与第一丝杆4轴向垂直的方向运动,使载板2进行XY两轴的轴向运动。 It should be noted that there seems to be some garbled or incomplete content in your original text, especially in the part of "于两侧均设置第一丝杆4", which may affect the accuracy of the translation. You may want to check and correct the original text for a more accurate translation.
[0029] As shown in the reference Figure 1-Figure 2 shown, the first driving mechanism includes a first motor 5. The output end of the first motor 5 is coaxially connected to a first lead screw 4. The synchronization mechanism includes a chain 6 and two sprockets 7. The two sprockets 7 are coaxially arranged on the two first lead screws 4 respectively. The chain 6 is sleeved on the two sprockets 7. In this way, between the first motor, the base 1 and the two first lead screws 4, there is a mounting plate. A transition wheel 8 is rotatably arranged on the mounting plate. The transition wheel 8 meshes with the chain 6. Thus, the first motor 5 drives the corresponding first lead screw 4 to rotate, so as to make the chain 6 rotate, and make the other first lead screw 4 rotate synchronously, so as to exert a thrust on the carrier plate 2 from both sides, making the carrier plate 2 move along the axial direction of the first lead screw 4. And because the distance between the two sprockets 7 is relatively far, a transition wheel 8 is arranged between the two sprockets 7 to play a承接 role and prevent the chain 6 from sagging. And in order to better connect the first lead screw 4 with the carrier plate 2, both sides of the bottom surface of the carrier plate 2 are provided with first connecting plates 9. The two first connecting plates 9 are respectively threadedly connected to the two first lead screws 4 (nuts are arranged on the first connecting plates 9 and are threadedly connected to the first lead screws 4 through the nuts).
[0030] As shown in the reference Figure 1-Figure 2 shown, two first sliding seats 13 are arranged on the base 1. The two mounting seats 3 are respectively slidably clamped on the top surface of the first sliding seats 13. The sliding direction of the first connecting plate 9 relative to the mounting seat 3 is the axial direction of the first lead screw 4. The two first connecting plates 9 are respectively slidably clamped on the two mounting seats 3. The movement direction of the first connecting plate 9 relative to the mounting seat 3 and the movement direction of the mounting seat 3 relative to the first sliding seat 13 are perpendicular. Thus, when the mounting seat 3 moves on the first sliding seat 13, the carrier plate 2 moves along the Y-axis axial direction. When the first connecting plate 9 slides on the mounting seat 3, the carrier plate 2 moves along the X-axis axial direction, so as to make the carrier plate 2 perform axial movement in the XY two axes.
[0031] As shown in the reference Figure 1-Figure 2 shown, in order to make the carrier plate 2 and the middle hole of the base 1 (in a shape of a square frame), the second driving mechanism is arranged on one side of the bottom surface of the carrier plate 2. The second driving mechanism includes a second motor 10 and a second lead screw 11. The second lead screw 11 is coaxially arranged at the output end of the second motor 10. The axial direction of the second lead screw 11 is perpendicular to the axial direction of the first lead screw 4. The second lead screw 11 is threadedly connected to the base 1. Thus, the second motor 10 drives the second lead screw 11 to rotate, making the carrier plate 2 threadedly connected to the second lead screw 11 move along the axial direction of the second lead screw 11. In order to better connect the carrier plate 2 with the second lead screw 11, a connecting seat 12 is arranged on one side of the top surface of the base 1. The connecting seat 12 is threadedly connected to the second lead screw 11 (nuts are arranged on the connecting seat 12 and are threadedly connected to the second lead screw 11 through the nuts).
[0032] As shown in the reference Figure 1-Figure 2As shown, a third slide 15 is provided on the base 1, and the connecting seat 12 is slidably provided on the third slide 15. A fourth slide 14 is provided on the bottom surface of the carrier plate 2, and the fourth slide 14 is slidably provided on the connecting seat 12. The movement direction of the fourth slide 14 relative to the connecting seat 12 and the movement direction of the connecting seat 12 relative to the third slide 15 are perpendicular. In this way, when the connecting seat 12 moves on the third slide 15, the carrier plate 2 moves axially toward the X-axis. When the fourth slide 14 slides on the connecting seat 12, the carrier plate 2 moves axially toward the Y-axis, thereby causing the carrier plate 2 to perform axial movement in both the X and Y axes.
[0033] The working principle of the utility model is as follows: when the base 1 and the carrier plate 2 are both hollow, first screw rods 4 are provided on both sides of the base 1, and the two first screw rods 4 are rotated synchronously by a synchronization mechanism. Since the two first screw rods 4 are threadedly connected to the carrier plate 2, when the first driving mechanism drives the two first screw rods 4 to rotate, thrust is applied to the carrier plate 2 synchronously from both sides, so that the carrier plate 2 moves smoothly on the base 1, and the shaking of the carrier plate 2 is reduced. In cooperation with the second driving mechanism, the carrier plate 2 is driven to move in a direction perpendicular to the axial direction of the first screw rod 4, so that the carrier plate 2 performs axial movement in the X and Y axes.
[0034] The above are only preferred embodiments of the present application, and the present invention is not limited to the above embodiments. It is understood that other improvements and variations directly derived or imagined by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included in the scope of protection of the present invention.
Claims
1. An anti-shake XY two-axis slide, characterized in that: include: A base (1) and a carrier plate (2) slidably arranged on the base (1); mounting seats (3) are arranged on both sides of the top surface of the base (1); first screw rods (4) are rotatably arranged on the mounting seats (3); the two first screw rods (4) have the same axial direction, and the two first screw rods (4) are threadedly connected to the carrier plate (2); The base (1) is further provided with a first driving mechanism and a synchronization mechanism, wherein the first driving mechanism is used to drive one of the first screw rods (4) to rotate, and the synchronization mechanism is used to make the two first screw rods (4) rotate synchronously; It also includes a second driving mechanism for driving the carrier plate (2) to move in a direction perpendicular to the axial direction of the first screw rod (4).
2. The anti-shake XY two-axis slide according to claim 1, characterized in that: The first driving mechanism comprises a first motor (5), the output end of the first motor (5) being coaxially connected to a first screw rod (4).
3. The anti-shake XY two-axis slide according to claim 2, characterized in that: First connecting plates (9) are provided on both sides of the bottom surface of the carrier plate (2), and the two first connecting plates (9) are respectively threadedly connected to the two first screw rods (4).
4. The anti-shake XY two-axis slide according to claim 3, characterized in that: Two first slides (13) are provided on the base (1), the two mounting seats (3) are respectively slidably provided on the top surfaces of the first slides (13), the two first connecting plates (9) are respectively slidably provided on the two mounting seats (3), and the movement direction of the first connecting plates (9) relative to the mounting seats (3) is perpendicular to the movement direction of the mounting seats (3) relative to the first slides (13).
5. The anti-shake XY two-axis slide according to claim 1, characterized in that: The synchronization mechanism comprises a chain (6) and two sprockets (7), the two sprockets (7) are coaxially arranged on two first screw rods (4), and the chain (6) is sleeved on the two sprockets (7).
6. The anti-shake XY two-axis slide according to claim 5, characterized in that: The base (1) is provided with a mounting plate between the two first screw rods (4), and a transition wheel (8) is rotatably provided on the mounting plate, and the transition wheel (8) is engaged with the chain (6).
7. The anti-shake XY two-axis slide according to claim 1, characterized in that: The second driving mechanism is arranged on one side of the bottom surface of the carrier plate (2).
8. The anti-shake XY two-axis slide according to claim 7, characterized in that: The second driving mechanism comprises a second motor (10) and a second screw rod (11), wherein the second screw rod (11) is coaxially arranged at the output end of the second motor (10), the axial direction of the second screw rod (11) is perpendicular to the axial direction of the first screw rod (4), and the second screw rod (11) is threadedly connected to the base (1).
9. The anti-shake XY two-axis slide according to claim 8, characterized in that: A connecting seat (12) is provided on one side of the top surface of the base (1), and the connecting seat (12) is threadedly connected to the second screw rod (11).
10. The anti-shake XY two-axis slide according to claim 9, characterized in that: A third slide (15) is provided on the base (1), and the connecting seat (12) is slidably provided on the third slide (15). A fourth slide (14) is provided on the bottom surface of the carrier plate (2), and the fourth slide (14) is slidably provided on the connecting seat (12). The movement direction of the fourth slide (14) relative to the connecting seat (12) is perpendicular to the movement direction of the connecting seat (12) relative to the third slide (15).