Direct-connection track device and high-altitude transporter

Abstract

The utility model discloses a direct-connection track device and a high-altitude conveyor. The direct connection rail device comprises a hoisting mechanism and a first conveying mechanism, the hoisting mechanism comprises a first upper cross beam, a first lower cross beam, a second upper cross beam, a second lower cross beam and a plurality of longitudinal beams, the first upper cross beam and the second upper cross beam are oppositely arranged, the first lower cross beam is connected to the lower portion of the first upper cross beam through the longitudinal beams, and the second upper cross beam is connected to the lower portion of the second lower cross beam through the longitudinal beams. The second lower cross beam is connected to the lower portion of the second upper cross beam through the longitudinal beam, and the first conveying mechanism is installed on the first lower cross beam and the second lower cross beam. According to the scheme, the travelling route of the crown block can be saved, the wafer boxes on different rails can be conveniently and quickly carried, and the material transportation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of automated transportation, in particular to a direct-connected track device and a high-altitude transport machine. Background Art

[0002] In the semiconductor industry, overhead cranes are commonly used to transport wafer cassettes (cassettes) between different workstations. These cranes typically consist of a lifting mechanism and a gripper mechanism connected to the lifting mechanism. During operation, the crane travels on rails. Once it reaches a preset position, the lifting mechanism drives the gripper mechanism up and down to grab the wafer cassette.

[0003] Sometimes wafer cassettes need to be transported between two parallel tracks. The current solution is to connect circular tracks at both ends of the two parallel tracks, allowing an overhead crane to move from one track to the other. Alternatively, the overhead cranes on the two parallel tracks can each move to the circular track to transfer materials. However, this approach presents a problem: the overhead crane must travel a considerable distance in a circular motion between the two tracks, hindering transport efficiency. Utility Model Content

[0004] In order to overcome the defects in the prior art, the embodiment of the present invention provides a direct-connected track device and an aerial transport aircraft, which can save the operation route of the overhead crane, realize convenient and fast transportation of wafer boxes on different tracks, and improve material transportation efficiency.

[0005] An embodiment of the present application discloses: a direct-connected rail device, comprising: a lifting mechanism and a first transport mechanism, the lifting mechanism comprising a first upper crossbeam, a first lower crossbeam, a second upper crossbeam, a second lower crossbeam and a plurality of longitudinal beams, the first upper crossbeam and the second upper crossbeam are arranged opposite to each other, the first lower crossbeam is connected to the bottom of the first upper crossbeam through the longitudinal beam, the second lower crossbeam is connected to the bottom of the second upper crossbeam through the longitudinal beam, and the first transport mechanism is installed on the first lower crossbeam and the second lower crossbeam.

[0006] Specifically, the first transport mechanism includes a plurality of side-by-side first transmission groups, the first transmission group includes a first roller frame, a second roller frame, a first motor, a first connecting shaft, a first transmission wheel, a second transmission wheel, a plurality of first idler wheels, a plurality of second idler wheels and a plurality of support rods, the two ends of the support rods are respectively connected to the first lower cross beam and the second lower cross beam, the first roller frame and the second roller frame are relatively installed on the support rods, the first transmission wheel and the plurality of the first idler wheels are installed on the first roller frame and connected by a first belt, the second transmission wheel and the plurality of the second idler wheels are installed on the second roller frame and connected by a second belt, the first transmission wheel and the second transmission wheel are connected by the first connecting shaft, and the first connecting shaft is connected to the output shaft of the first motor.

[0007] Specifically, the direct-connected rail device also includes a first rotating mechanism and a second rotating mechanism, the first rotating mechanism is embedded in the first transport mechanism, the lifting mechanism also includes a third upper beam and a third lower beam connected to the bottom of the third upper beam through the longitudinal beam, the third upper beam is located on the side of the second upper beam away from the first upper beam, a second transport mechanism is connected between the third lower beam and the second lower beam, the second rotating mechanism is embedded in the second transport mechanism, and a third transport mechanism is provided between the first rotating mechanism and the second rotating mechanism.

[0008] Specifically, the first rotating mechanism includes a first base plate, a second base plate, a third roller frame, a fourth roller frame, a fifth roller frame, a sixth roller frame, a third transmission wheel, a fourth transmission wheel, a plurality of third idler wheels, a plurality of fourth idler wheels, a plurality of fifth transmission wheels, a second motor, a second connecting shaft and a rotating motor, the first base plate is connected to the first lower crossbeam and the second lower crossbeam, the rotating motor is mounted on the first base plate, the second base plate is connected to the output shaft of the rotating motor, the third roller frame and the fourth roller frame are relatively arranged on both sides of the second base plate along the first direction, the third transmission wheel and the plurality of third idler wheels are mounted on the third roller frame and connected by a third belt, the fourth transmission wheel and the plurality of fourth idler wheels are mounted on the fourth roller frame and connected by a fourth belt, the second connecting shaft is connected to the output shaft of the second motor and is used to connect the third transmission wheel and the fourth transmission wheel, the fifth roller frame and the sixth roller frame are relatively arranged on both sides of the second base plate along the second direction, and the fifth transmission wheel is respectively mounted on the fifth roller frame and the sixth roller frame.

[0009] Specifically, the device further includes an electrical box connected to the hoisting mechanism.

[0010] The embodiments of the present application also disclose: an aerial transporter, including a first track, a second track, and a direct connection track device as described in this embodiment. The direct connection track device includes a first upper crossbeam and a second upper crossbeam arranged oppositely. One end of the first upper crossbeam and the second upper crossbeam is connected to the first track, and the other end of the first upper crossbeam and the second upper crossbeam is connected to the second track.

[0011] The utility model has at least the following beneficial effects: The direct connection track device and the aerial transporter in this embodiment can save the running route of the overhead crane, realize the convenient and fast handling of the wafer cassette on different tracks, and improve the material transportation efficiency.

[0012] To make the above and other objects, features, and advantages of the utility model more obvious and understandable, the following specifically enumerates preferred embodiments and, in conjunction with the accompanying drawings, makes a detailed description as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 It is a schematic structural diagram of the direct connection track device in the embodiment of the present utility model;

[0015] Figure 2 It is a schematic structural diagram of the first transportation mechanism in one perspective in the embodiment of the present utility model;

[0016] Figure 3 It is a schematic structural diagram of the first transportation mechanism in another perspective in the embodiment of the present utility model;

[0017] Figure 4 It is a schematic structural diagram of the first rotating mechanism in one perspective in the embodiment of the present utility model;

[0018] Figure 5 It is a schematic structural diagram of the first rotating mechanism in another perspective in the embodiment of the present utility model;

[0019] Figure 6 It is a schematic structural diagram of the first rotating mechanism embedded in the first transportation mechanism in the embodiment of the present utility model;

[0020] Figure 7 It is a schematic structural diagram of the aerial transporter in the embodiment of the present utility model.

[0021] Reference numerals in the above drawings: 1, lifting mechanism; 11, first upper crossbeam; 12, first lower crossbeam; 13, second upper crossbeam; 14, second lower crossbeam; 15, longitudinal beam; 16, third upper crossbeam; 17, third lower crossbeam; 2, first transportation mechanism; 21, first roller rack; 22, second roller rack; 23, first motor; 24, first connecting shaft; 251, first driving wheel; 252, first idler wheel; 253, first belt; 261, second driving wheel; 262, second idler wheel; 263, second belt; 27, support rod; 3, first rotating mechanism; 31, first bottom plate; 32, second bottom plate; 331, third roller rack; 332, third driving wheel; 333, third idler wheel; 334, third belt; 341, fourth roller rack; 342, fourth driving wheel; 343, fourth idler wheel; 344, fourth belt; 351, fifth roller rack; 352, sixth roller rack; 353, fifth driving wheel; 36, second motor; 37, second connecting shaft; 38, rotating motor; 4, second rotating mechanism; 5, second transportation mechanism; 6, third transportation mechanism; 7, electrical box. Detailed implementation manners

[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly defined and limited, the terms "installation", "connection", "fixation", and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood through specific situations.

[0024] In the present utility model, unless otherwise clearly specified or limited, the first feature being "above" or "below" the second feature may include the first feature and the second feature being in direct contact, or may also include the first feature and the second feature not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "below", and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "underneath" the second feature includes the first feature being below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is less than that of the second feature.

[0025] In the description of this embodiment, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as limiting the protection scope of this application.

[0026] In addition, the terms "first", "second", etc. are only used for distinction in description and have no special meaning.

[0027] The direct connection track device of this embodiment can be used to connect parallel tracks, so that the overhead crane can realize the transfer of the wafer cassette between the parallel tracks without running too much distance (to the arc connection of the two tracks), improving the convenience of material transfer between the tracks. This embodiment is described by taking the direct connection track device used for transferring the wafer cassette between the parallel first track and the second track as an example.

[0028] As Figure 1 shown, the direct connection track device of this embodiment mainly includes a hoisting mechanism 1 and a first transportation mechanism 2. Among them, the hoisting mechanism 1 includes a first upper crossbeam 11, a first lower crossbeam 12, a second upper crossbeam 13, a second lower crossbeam 14, and a plurality of longitudinal beams 15. The first upper crossbeam 11 and the second lower crossbeam 14 are oppositely arranged, and the two are used to connect to the workshop ceiling. The first lower crossbeam 12 is connected below the first upper crossbeam 11 through the longitudinal beams 15, the second lower crossbeam 14 is connected below the second upper crossbeam 13 through the longitudinal beams 15, and the first transportation mechanism 2 is installed on the first lower crossbeam 12 and the second lower crossbeam 14.

[0029] Combined Figure 2 and Figure 3As shown, the first transport mechanism 2 of this embodiment primarily comprises a plurality of first transmission groups, which are sequentially connected side by side along the length of the first lower crossbeam 12 and the second lower crossbeam 14. The first transmission group comprises a first roller frame 21, a second roller frame 22, a first motor 23, a first connecting shaft 24, a first transmission wheel 251, a second transmission wheel 261, a plurality of first idler wheels 252, a plurality of second idler wheels 262, and a plurality of support rods 27. The support rods 27 are used to support the entire first transmission group. One end of the support rod 27 is connected to the first lower crossbeam 12, and the other end is connected to the second lower crossbeam 14. The first roller frame 21 and the second roller frame 22 are mounted opposite each other on the support rod 27. Specifically, the first roller frame 21 is located at the end of the support rod 27 closer to the first lower crossbeam 12, and the second roller frame 22 is located at the end of the support rod 27 closer to the second lower crossbeam 14. The first transmission wheel 251 and multiple first idler wheels 252 are installed on the first roller frame 21 and are connected by a first belt 253; the second transmission wheel 261 and multiple second idler wheels 262 are installed on the second roller frame 22 and are connected by a second belt 263; the first transmission wheel 251 and the second transmission wheel 261 are connected by a first connecting shaft 24, and the first connecting shaft 24 is also connected to the output shaft of the first motor 23.

[0030] With the above solution, when the output shaft of the first motor 23 drives the first connecting shaft 24 to rotate, the first transmission wheel 251 and the second transmission wheel 261 rotate synchronously, and the first belt 253 and the second belt 263 respectively drive the first idler wheel 252 and the second idler wheel 262 to rotate, thereby moving the wafer box.

[0031] Continue to refer to Figure 1 As shown, the lifting mechanism 1 of this embodiment also includes a third upper beam 16 and a third lower beam 17 connected to the bottom of the third upper beam 16 through a longitudinal beam 15. The third upper beam 16 is located on the side of the second upper beam 13 away from the first upper beam 11, and a second transport mechanism 5 is connected between the third lower beam 17 and the second lower beam 14. Furthermore, the direct-connected rail device of this embodiment also includes a first rotating mechanism 3 and a second rotating mechanism 4. The first rotating mechanism 3 is embedded in the first transport mechanism 2, the second rotating mechanism 4 is embedded in the second transport mechanism 5, and a third transport mechanism 6 is provided between the first rotating mechanism 3 and the second rotating mechanism 4. By adopting the above scheme, by setting the second transport mechanism 5, and setting the first rotating mechanism 3, the second rotating mechanism 4 and the third transport mechanism 6 in the first transport mechanism 2 and the second transport mechanism 5, the convenience of wafer box transportation can be improved.

[0032] The structures of the second transport mechanism 5 and the third transport mechanism 6 may be substantially the same as that of the first transport mechanism 2 .

[0033] Combine Figure 4 and Figure 5As shown in the figure, the first rotating mechanism 3 of this embodiment includes: a first bottom plate 31, a second bottom plate 32, a third roller frame 331, a fourth roller frame 341, a fifth roller frame 351, a sixth roller frame 352, a third driving wheel 332, a fourth driving wheel 342, a plurality of third idler wheels 333, a plurality of fourth idler wheels 343, a plurality of fifth driving wheels 353, a second motor 36, a second connecting shaft 37, and a rotating motor 38. Among them, the first bottom plate 31 is respectively connected to the first lower cross beam 12 and the second lower cross beam 14, and the rotating motor 38 is installed on the first bottom plate 31; the second bottom plate 32 is connected to the output shaft of the rotating motor 38, and the third roller frame 331 and the fourth roller frame 341 are relatively installed on both sides of the second bottom plate 32 along the first direction, and the fifth roller frame 351 and the sixth roller frame 352 are relatively installed on both sides of the second bottom plate 32 along the second direction, and the first direction and the second direction are perpendicular. The third driving wheel 332 and the plurality of third idler wheels 333 are installed on the third roller frame 331 and are connected by a third belt 334, the fourth driving wheel 342 and the plurality of fourth idler wheels 343 are installed on the fourth roller frame 341 and are connected by a fourth belt 344, both ends of the second connecting shaft 37 are respectively connected to the third driving wheel 332 and the fourth driving wheel 342, and the second connecting shaft 37 is also connected to the output shaft of the second motor 36. A plurality of fifth driving wheels 353 are respectively installed on the fifth roller frame 351 and the sixth roller frame 352, and the driving direction of the fifth driving wheels 353 is the same as that of the third driving wheel 332 and the fourth driving wheel 342.

[0034] The structure of the second rotating mechanism 4 is generally the same as that of the first rotating mechanism 3.

[0035] As Figure 6 shown, adopting the above scheme, the first rotating mechanism 3 is embedded in the first transportation mechanism 2, and there is a certain gap between its two ends and the first transmission groups on the left and right sides, so that the rotating motor 38 can drive the second bottom plate 32 and the components thereon to rotate, and the fifth driving wheels 353 on the fifth roller frame 351 and the sixth roller frame 352 can be used to compensate for the lack of the third idler wheels 333 and the fourth idler wheels 343 in the above gap, thereby ensuring that the transmission of the wafer cassette is not affected by the lack of these idler wheels.

[0036] As Figure 1 shown, the direct connection track device of this embodiment further includes an electric box 7, and the electric box 7 is installed on the hoisting mechanism 1 and is used to provide power for the entire device.

[0037] To sum up, combining Figure 1 and Figure 7As shown in the figure, the working process of the high-altitude transport aircraft formed by the device of this embodiment in cooperation with the first track and the second track is as follows: The overhead crane on the first track lowers the wafer cassette to one end of the first transport mechanism 2, and the wafer cassette is transported by the first transport mechanism 2 to the first rotating mechanism 3. The first rotating mechanism 3 transports the wafer cassette to the other end of the first transport mechanism 2, and then transports it to below a point on the second track; alternatively, the wafer cassette placed at one end of the first transport mechanism 2 is sequentially transported to the second transport mechanism 5 through the first rotating mechanism 3, the third transport mechanism, and the second rotating mechanism 4, and then transported to below another point on the second track.

[0038] In the present utility model, specific embodiments are used to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model; at the same time, for those of ordinary skill in the art, according to the idea of the present utility model, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present utility model.

Claims

1. A direct-connect track device, characterized in that: include: A lifting mechanism and a first transport mechanism, the lifting mechanism includes a first upper crossbeam, a first lower crossbeam, a second upper crossbeam, a second lower crossbeam and multiple longitudinal beams, the first upper crossbeam and the second upper crossbeam are arranged opposite to each other, the first lower crossbeam is connected to the bottom of the first upper crossbeam through the longitudinal beam, the second lower crossbeam is connected to the bottom of the second upper crossbeam through the longitudinal beam, and the first transport mechanism is installed on the first lower crossbeam and the second lower crossbeam.

2. The direct-connected track device according to claim 1, characterized in that: The first transport mechanism includes a plurality of side-by-side first transmission groups, the first transmission group including a first roller frame, a second roller frame, a first motor, a first connecting shaft, a first transmission wheel, a second transmission wheel, a plurality of first idler wheels, a plurality of second idler wheels and a plurality of support rods, the two ends of the support rods are respectively connected to the first lower cross beam and the second lower cross beam, the first roller frame and the second roller frame are relatively installed on the support rods, the first transmission wheel and the plurality of the first idler wheels are installed on the first roller frame and connected by a first belt, the second transmission wheel and the plurality of the second idler wheels are installed on the second roller frame and connected by a second belt, the first transmission wheel and the second transmission wheel are connected by the first connecting shaft, and the first connecting shaft is connected to the output shaft of the first motor.

3. The direct-connected track device according to claim 2, characterized in that: The direct-connected rail device also includes a first rotating mechanism and a second rotating mechanism. The first rotating mechanism is embedded in the first transport mechanism. The lifting mechanism also includes a third upper beam and a third lower beam connected to the bottom of the third upper beam through the longitudinal beam. The third upper beam is located on the side of the second upper beam away from the first upper beam. A second transport mechanism is connected between the third lower beam and the second lower beam. The second rotating mechanism is embedded in the second transport mechanism. A third transport mechanism is provided between the first rotating mechanism and the second rotating mechanism.

4. The direct-connected track device according to claim 3, characterized in that: The first rotating mechanism includes a first base plate, a second base plate, a third roller frame, a fourth roller frame, a fifth roller frame, a sixth roller frame, a third transmission wheel, a fourth transmission wheel, a plurality of third idler wheels, a plurality of fourth idler wheels, a plurality of fifth transmission wheels, a second motor, a second connecting shaft and a rotating motor, the first base plate is connected to the first lower crossbeam and the second lower crossbeam, the rotating motor is mounted on the first base plate, the second base plate is connected to the output shaft of the rotating motor, the third roller frame and the fourth roller frame are relatively arranged on both sides of the second base plate along the first direction, the third transmission wheel and the plurality of third idler wheels are mounted on the third roller frame and connected by a third belt, the fourth transmission wheel and the plurality of fourth idler wheels are mounted on the fourth roller frame and connected by a fourth belt, the second connecting shaft is connected to the output shaft of the second motor and is used to connect the third transmission wheel and the fourth transmission wheel, the fifth roller frame and the sixth roller frame are relatively arranged on both sides of the second base plate along the second direction, and the fifth transmission wheel is respectively mounted on the fifth roller frame and the sixth roller frame.

5. The direct-connected track device according to claim 4, characterized in that: The device also includes an electrical box connected to the hanging mechanism.

6. A high-altitude transport aircraft, characterized in that: The invention comprises a first rail, a second rail and a direct-connected rail device as claimed in any one of claims 1 to 4, wherein the direct-connected rail device comprises a first upper beam and a second upper beam arranged opposite to each other, one end of the first upper beam and the second upper beam being connected to the first rail, and the other end of the first upper beam and the second upper beam being connected to the second rail.

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