Furnace body heat dissipation mechanism of pseudo-single crystal ingot furnace

Abstract

The utility model discloses a furnace body heat dissipation mechanism of a pseudo-single crystal ingot furnace, which relates to the technical field of single crystal furnaces and comprises a furnace body, a furnace top cover is arranged at the top of the furnace body, a furnace barrel is fixedly mounted at the bottom of the furnace top cover, a feeding hole is formed in the top of the furnace top cover, and a water cooling circulation mechanism is arranged on one side of the surface of the furnace barrel. And a refrigerating mechanism is fixedly mounted at the bottom of the water-cooling circulating mechanism. The input pipe and the conveying pipe are arranged to be matched with the water pump and the treatment box, so that cold water is conveyed into the water cooling pipe through the input pipe and the upper fixed circular groove in the treatment box, heat generated by the furnace body is taken away, and a water source taking away the heat is conveyed back into the treatment box again through the lower fixed circular groove and the conveying pipe; and the device can perform water circulation, so that the waste of voluntary application is reduced, the cost is saved, and the environmental protection property of the equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a quasi-single crystal ingot casting furnace body heat dissipation mechanism. Background Art

[0002] A quasi-single crystal ingot furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment. It is based on the process of growing single crystals without dislocation using the quasi-single crystal ingot furnace. Quasi-single crystals are based on the process of polycrystalline ingots. By partially using single crystal seed crystals during crystal growth, polycrystalline silicon wafers with appearance and electrical properties similar to single crystals are obtained.

[0003] The Chinese patent publication number is CN208869712U, which discloses a heat dissipation mechanism for the lower furnace body of a quasi-single crystal ingot casting furnace. The technical solution provided in the patent document is as follows: it includes a lower furnace bottom shell, a support seat, a guide rail seat, and a damper mechanism. The middle part of the lower furnace bottom shell is provided with a support shaft sleeve, and the top of the support shaft sleeve is provided with multiple guide rail seats through a connecting arm. The guide rail seats are provided with guide rails, and the guide rails are provided with sliding trolleys. The damper mechanism includes a bottom plate and a hot plate. The bottom plate is located on a water-cooled plate. The hot plate includes a first damper and a second damper. Each sliding trolley is respectively driven by a connecting rod to the corresponding first damper and second damper. Its beneficial effects are: simple structure, easy use, avoidance of jamming, guaranteed heat dissipation effect, and controllable water-cooled heat exchange at the bottom. The bottom is auxiliary heated during the melting stage and dissipated vertically downward during the crystal growth stage, effectively protecting the bottom seed crystal and ensuring the safety of the furnace.

[0004] In order to solve the problem that the existing heat dissipation method cannot meet the temperature gradient requirements of quasi-single crystals, the existing technology uses high-temperature resistant stainless steel for secondary nitriding heat treatment process to ensure that the design requirements can be met under high temperature conditions. Tungsten alloy steel guide rails are then used to enable the sliding trolley to slide smoothly according to the design requirements, and the gap between the pulley and the guide rail is designed and handled. However, water resources are wasted during heat exchange, which leads to poor environmental protection. Utility Model Content

[0005] The purpose of the utility model is to provide a heat dissipation mechanism for a quasi-single crystal ingot casting furnace body, so as to solve the problems raised in the above background technology.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0007] A quasi-single crystal ingot casting furnace body heat dissipation mechanism comprises a furnace body, a furnace top cover is arranged on the top of the furnace body, a furnace drum is fixedly installed on the bottom of the furnace top cover, and a material inlet is opened on the top of the furnace top cover.

[0008] A water-cooling circulation mechanism is provided on one side of the surface of the furnace drum, and a refrigeration mechanism is fixedly installed on the bottom of the water-cooling circulation mechanism.

[0009] The water-cooling circulation mechanism includes an upper fixed circular groove, which is fixedly installed on the top surface of the furnace drum. The output end of the fixed circular groove is fixedly connected to a water-cooling pipe, the input end of the water-cooling pipe is fixedly connected to an input pipe, the output end of the delivery pipe is fixedly connected to a water pump, and the output end of the water pump is fixedly connected to the delivery pipe.

[0010] A further improvement of the technical solution of the present invention is that the furnace top cover is hemispherical in shape, and a discharge port is provided at the bottom of the furnace drum. The furnace top cover is easy to open for maintenance of the interior of the furnace drum, and the furnace drum discharges the crystals through the discharge port.

[0011] A further improvement of the technical solution of the present utility model is that the water supply pipe and the delivery pipe are respectively installed at the upper and lower ends of the water pump, and also extend to the interior of the processing box. The water supply pipe delivers cold water into the upper fixed circular groove, so that the water takes away the heat from the surface of the furnace through the water-cooling pipe, and then transmits the cold water after absorbing heat back to the processing box through the lower fixed circular groove and the delivery pipe.

[0012] A further improvement of the technical solution of the present utility model is that: the output end of the delivery pipe is fixedly connected with a lower fixed circular groove, the bottom of the lower fixed circular groove water-cooling pipe is fixedly connected, a processing box is fixedly installed on one side of the water pump, and a water inlet and a water outlet are respectively provided on the surface of the processing box. The processing box replaces the internal water source through the water inlet and the water outlet.

[0013] A further improvement of the technical solution of the present utility model is that the refrigeration mechanism includes a mounting frame, which is fixedly mounted on the bottom of the processing box and is used to mount the entire refrigeration mechanism.

[0014] A further improvement of the technical solution of the present invention is that a power supply is fixedly installed on one side of the installation frame, and a refrigeration pipe is fixedly installed inside the installation frame, and the refrigeration pipe is used to cool the water source in the processing box.

[0015] A further improvement of the technical solution of the present utility model is that: the refrigeration pipe is connected to the power wire, and mounting blocks are installed on the top periphery of the mounting frame and the bottom axial edge of the processing box, and the surface of the mounting block is hinged with bolts. The power supply provides electrical energy to the refrigeration pipe, and the mounting block cooperates with the bolts to install the mounting frame to the bottom of the processing box.

[0016] Due to the adoption of the above technical solution, the present invention has achieved the following technical advancements compared to the prior art:

[0017] 1. The utility model provides a heat dissipation mechanism for the body of a quasi-monocrystalline ingot furnace. By setting an input pipe and a delivery pipe in cooperation with a water pump and a treatment tank, the cold water in the treatment tank is conveyed into the water-cooling pipe through the input pipe and the upper fixed circular groove to take away the heat generated by the furnace body. And the water source that has taken away the heat is re-conveyed back into the treatment tank through the lower fixed circular groove and the delivery pipe. In cooperation with the refrigeration mechanism, the device can carry out water circulation, reduce waste of resources, save costs, and improve the environmental protection performance of the equipment.

[0018] 2. The utility model provides a heat dissipation mechanism for the body of a quasi-monocrystalline ingot furnace. By setting an installation frame in cooperation with installation blocks, it is convenient to install the refrigeration mechanism at the bottom of the treatment tank. At the same time, the installation frame cooperates with the power supply to cool the water source inside the treatment tank, improving the practicality of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is the front view structural schematic diagram of the present utility model;

[0020] Figure 2 is the side view structural schematic diagram of the present utility model;

[0021] Figure 3 For the present utility model Figure 2 is the enlarged view of the structure at A in;

[0022] Figure 4 is the sectional view structural schematic diagram of the refrigeration mechanism of the present utility model.

[0023] In the figure: 1. Furnace body; 11. Furnace top cover; 12. Furnace barrel; 13. Feeding port; 2. Water-cooling circulation mechanism; 21. Upper fixed circular groove; 22. Water-cooling pipe; 23. Input pipe; 24. Water pump; 25. Delivery pipe; 26. Lower fixed circular groove; 27. Treatment tank; 3. Refrigeration mechanism; 31. Installation frame; 32. Power supply; 33. Refrigeration pipe; 34. Installation block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The following further describes the present utility model in detail with reference to the embodiments:

[0025] Embodiment 1

[0026] As Figures 1-4As shown, this embodiment provides a quasi-single crystal ingot casting furnace body heat dissipation mechanism, including a furnace body 1, a furnace top cover 11 is provided on the top of the furnace body 1, a furnace drum 12 is fixedly installed at the bottom of the furnace top cover 11, a material inlet 13 is provided on the top of the furnace top cover 11, a water-cooling circulation mechanism 2 is provided on one side of the surface of the furnace drum 12, a refrigeration mechanism 3 is fixedly installed at the bottom of the water-cooling circulation mechanism 2, the water-cooling circulation mechanism 2 includes an upper fixed circular groove 21, the upper fixed circular groove 21 is fixedly installed on the top of the surface of the furnace drum 12, and the output end of the upper fixed circular groove 21 is fixedly connected to a water-cooling pipe 22 The input end of the water-cooling pipe 22 is fixedly connected to the input pipe 23, the output end of the input pipe 23 is fixedly connected to the water pump 24, and the output end of the water pump 24 is fixedly connected to the delivery pipe 25. The shape of the furnace top cover 11 is hemispherical. A discharge port is provided at the bottom of the furnace drum 12. The furnace top cover 11 is convenient to open for maintenance inside the furnace drum 12. The furnace drum 12 discharges the crystals through the discharge port. The input pipe 23 and the delivery pipe 25 are respectively installed at the upper and lower ends of the water pump 24, and also extend to the interior of the processing box 27. The input pipe 23 delivers cold water to the fixed circular groove upward so that it passes through The water cooling pipe 22 takes away the heat from the surface of the furnace drum 12, and then transmits the cold water after absorbing heat back to the processing box 27 through the lower fixed circular groove 26 and the delivery pipe 25. The output end of the delivery pipe 25 is fixedly connected with the lower fixed circular groove 26, and the bottom of the lower fixed circular groove 26 water cooling pipe 22 is fixedly connected. A processing box 27 is fixedly installed on one side of the water pump 24. The surface of the processing box 27 is respectively provided with a water inlet and a water outlet. The processing box 27 replaces the internal water source through the water inlet and the water outlet. The refrigeration mechanism 3 includes a mounting frame 31, which is fixedly mounted on the processing box 27. At the bottom of the box 27, the mounting frame 31 is used to mount the entire box refrigeration mechanism 3. By arranging the input pipe 23 and the delivery pipe 25 in conjunction with the water pump 24 and the processing box 27, the cold water in the processing box 27 is transported to the water-cooling pipe 22 through the input pipe 23 and the upper fixed circular groove 21 to take away the heat generated by the furnace body 1. The water source that takes away the heat is transported back to the processing box 27 through the lower fixed circular groove 26 and the delivery pipe 25, and in conjunction with the refrigeration mechanism, the device can perform water circulation, reduce voluntary waste, save costs, and improve the environmental protection of the equipment.

[0027] Example 2

[0028] like Figures 1-4As shown, on the basis of Example 1, the present invention provides a technical solution: preferably, a power supply 32 is fixedly installed on one side of the mounting frame 31, and a refrigeration pipe 33 is fixedly installed inside the mounting frame 31. The refrigeration pipe 33 is used to perform cold treatment on the water source in the treatment box 27, and the refrigeration pipe 33 is connected to the power supply 32 by wires. The top periphery of the mounting frame 31 and the bottom axial edge of the treatment box 27 are both installed with mounting blocks 34, and the surface of the mounting blocks 34 is hinged with bolts. The power supply 32 provides electrical energy for the refrigeration pipe 33, and the mounting blocks 34 cooperate with the bolts to install the mounting frame 31 to the bottom of the treatment box 27. By setting the mounting frame 31 to cooperate with the mounting block 34, it is convenient to install the refrigeration mechanism 3 to the bottom of the treatment box 27. At the same time, the mounting frame 31 cooperates with the power supply 32 to enable it to cool the water source inside the treatment box, thereby improving the practicality of the device.

[0029] The following is a detailed description of the working principle of the heat dissipation mechanism of the quasi-single crystal ingot casting furnace.

[0030] like Figures 1-4 As shown, when the device is used, when the furnace body 1 is running, the water cooling circulation mechanism 2 is started at the same time, and the input pipe 23 and the delivery pipe 25 cooperate with the water pump 24 and the processing box 27, so that the cold water in the processing box 27 is transported to the water cooling pipe 22 through the input pipe 23 and the upper fixed circular groove 21, taking away the heat generated by the furnace body 1, and the water source that takes away the heat is transported back to the processing box 27 through the lower fixed circular groove 26 and the delivery pipe 25, and cooperates with the refrigeration mechanism to enable the device to circulate water, reduce voluntary waste, save costs, and improve the environmental protection of the equipment. The mounting frame 31 cooperates with the mounting block 34 to facilitate the installation of the refrigeration mechanism 3 to the bottom of the processing box 27. At the same time, the mounting frame 31 cooperates with the power supply 32 to cool the water source inside the processing box, thereby improving the practicality of the equipment.

[0031] The above generally describes the present invention in detail. However, it is obvious to those skilled in the art that modifications or improvements may be made to the present invention. Therefore, modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A quasi-single crystal ingot casting furnace body heat dissipation mechanism, comprising a furnace body (1), characterized in that: A furnace top cover (11) is provided on the top of the furnace body (1), a furnace drum (12) is fixedly installed on the bottom of the furnace top cover (11), and a material inlet (13) is opened on the top of the furnace top cover (11); A water-cooling circulation mechanism (2) is provided on one side of the surface of the furnace drum (12), and a refrigeration mechanism (3) is fixedly installed on the bottom of the water-cooling circulation mechanism (2); The water-cooling circulation mechanism (2) comprises an upper fixed circular groove (21), the upper fixed circular groove (21) is fixedly mounted on the top surface of the furnace drum (12), the output end of the upper fixed circular groove (21) is fixedly connected to a water-cooling pipe (22), the input end of the water-cooling pipe (22) is fixedly connected to an input pipe (23), the output end of the input pipe (23) is fixedly connected to a water pump (24), and the output end of the water pump (24) is fixedly connected to a delivery pipe (25).

2. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 1, characterized in that: The furnace top cover (11) is hemispherical in shape, and a discharge port is provided at the bottom of the furnace drum (12).

3. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 1, characterized in that: The input pipe (23) and the delivery pipe (25) are respectively installed at the upper and lower ends of the water pump (24), and also extend to the interior of the processing box (27).

4. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 3, characterized in that: The output end of the delivery pipe (25) is fixedly connected with a lower fixed circular groove (26), and the lower fixed circular groove (26) is fixedly connected to the bottom of the water cooling pipe (22). A processing box (27) is fixedly installed on one side of the water pump (24), and a water inlet and a water outlet are respectively opened on the surface of the processing box (27).

5. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 4, characterized in that: The refrigeration mechanism (3) comprises a mounting frame (31), and the mounting frame (31) is fixedly mounted on the bottom of the processing box (27).

6. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 5, characterized in that: A power source (32) is fixedly installed on one side of the installation frame (31), and a refrigeration pipe (33) is fixedly installed inside the installation frame (31).

7. The heat dissipation mechanism of a quasi-single crystal ingot casting furnace according to claim 6, characterized in that: The refrigeration pipe (33) is connected to the power supply (32) wire. The top periphery of the installation frame (31) and the bottom axial edge of the processing box (27) are both installed with installation blocks (34), and the surface of the installation block (34) is hinged with bolts.

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