Molecular pump sealing structure and gas leak detection device

Abstract

The utility model relates to a molecular pump sealing structure and a gas leak detection device, the molecular pump sealing structure comprises a vacuum pump joint and a mass spectrometer joint, the vacuum pump joint is fixedly connected with the mass spectrometer joint, and a center ring used for strengthening sealing is installed at the connection position of the vacuum pump joint and the mass spectrometer joint. The center ring comprises a sealing ring, an outer restraining ring and an inner restraining ring which are coaxially arranged, the outer restraining ring is arranged outside the inner restraining ring, the sealing ring is arranged between the outer restraining ring and the inner restraining ring, and the outer restraining ring and the inner restraining ring are used for conducting radial positioning on the sealing ring. According to the utility model, the inner side and the outer side of the sealing ring are respectively provided with the inner restraint ring and the outer restraint ring for limiting and shaping, so that when the sealing ring is subjected to fastening extrusion deformation by the vacuum pump joint and the mass spectrometer joint, the side edge displacement cannot be caused; the sealing failure between the vacuum pump joint and the mass spectrometer joint caused by deformation and displacement of the central ring is avoided, and the sealing effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas leakage detection, in particular to a molecular pump sealing structure and a gas leakage detection device. Background Art

[0002] Gas testing and helium testing are common methods for testing the airtightness of lithium batteries, with high accuracy and sensitivity. An airtightness tester is used to test the airtightness of the battery casing, while a helium mass spectrometer leak detector uses helium to check the airtightness of the battery's internal structure.

[0003] When testing the internal airtightness of lithium batteries, the molecular pump's pumping action draws the gas from the mass spectrometer into a high vacuum, enabling ionization and analysis of the sample. Specifically, the molecular pump draws air through the space formed between the high-speed rotating rotor and the stationary housing. When gas enters the molecular pump, the spatial structure within the pump causes the gas molecules to continuously collide and squeeze, reducing their pressure and concentration. Ultimately, the molecular pump draws the gas molecules into a high vacuum, enabling ionization and analysis of the sample.

[0004] However, when the molecular pump is evacuating the mass spectrometer, the excessive pressure can easily cause leakage at the connection between the molecular pump and the mass spectrometer, making it difficult for the mass spectrometer to form an absolute high vacuum state, making it impossible for the mass spectrometer to ionize lithium battery samples during gas leak detection. Utility Model Content

[0005] The first aspect of the present invention aims to solve the technical problem that when a molecular pump is evacuating a vacuum, excessive pressure easily causes leakage at the connection between the molecular pump and the mass spectrometer, resulting in insufficient sealing performance and making it difficult for the mass spectrometer to form an absolute high vacuum state. The present invention provides a molecular pump sealing structure that can prevent the sealing ring at the sealing position between the molecular pump and the mass spectrometer from misalignment and local deformation by arranging inner and outer constraint rings for limiting the position on the inner and outer sides of the center ring for sealing, thereby making the seal between the molecular pump and the mass spectrometer tighter. The main concepts are:

[0006] A molecular pump sealing structure includes a vacuum pump connector and a mass spectrometer connector, which are tightly connected. A center ring for strengthening the seal is installed at the connection position of the vacuum pump connector and the mass spectrometer connector. The center ring includes a coaxially arranged sealing ring, an outer constraint ring, and an inner constraint ring. The outer constraint ring is arranged outside the inner constraint ring, and the sealing ring is arranged between the outer constraint ring and the inner constraint ring. The outer constraint ring and the inner constraint ring are used to radially position the sealing ring. This solution limits and shapes the inner and outer sides of the sealing ring by respectively setting an inner constraint ring and an outer constraint ring, so that the sealing ring will not cause lateral displacement when it is deformed by the tightening, squeezing and deformation of the vacuum pump connector and the mass spectrometer connector, thereby avoiding the failure of the seal between the vacuum pump connector and the mass spectrometer connector due to deformation and displacement of the center ring, thereby improving the sealing effect.

[0007] Preferably, grooves are provided at the center positions of the end faces of the vacuum pump connector and the mass spectrometer connector that are relatively arranged, and the grooves are used for positioning and installing the center ring. The side positions of the vacuum pump connector and the mass spectrometer connector constitute pressing surfaces, and the pressing surfaces are used to apply force to the center ring to achieve compression sealing.

[0008] The second aspect of the present invention aims to solve the technical problem that the outer constraint ring arranged on the outer side of the sealing ring is difficult to install tightly. Furthermore, the outer constraint ring includes an elastic ring and an outer constraint strip, the outer wall of the outer constraint strip is provided with a card slot, and the inner wall of the outer constraint strip is provided with an inner limit slot. The outer constraint strip is a metal open ring, and the outer constraint strip is covered on the outer wall of the sealing ring through the inner limit slot, so that the relative opening positions of the head and tail of the outer constraint strip form an adapted annular structure, and then the elastic ring is installed in the card slot of the outer wall of the outer constraint strip forming the annular structure, so that the outer constraint strip can be maintained on the outer wall of the sealing ring.

[0009] Preferably, the depth of the slot is greater than the cross-sectional width of the elastic ring, so that the elastic ring can be better placed in the slot, and the elastic ring can be prevented from failing and coming out of the slot, causing the sealing ring to lose external support and move out of position, affecting the sealing performance.

[0010] Preferably, the inner restraining ring comprises a positioning ring and an inner restraining strip. The inner wall of the inner restraining strip is provided with a positioning groove for accommodating the positioning ring, and the outer wall of the inner restraining strip is provided with an outer limiting groove. The inner restraining strip is a metal open ring. The positioning ring is positioned inside the inner restraining strip through the positioning groove. The inner restraining strip is supported by the positioning ring and extended to the corresponding position. The sealing ring is then installed on the outer wall of the inner restraining strip through the outer limiting groove.

[0011] The third aspect of the present invention aims to solve the technical problem of inaccurate positioning of the inner constraint ring that needs to be expanded by the positioning ring and the groove of the vacuum pump connector and the mass spectrometer connector. Furthermore, the inner constraint strip is provided with a positioning boss, and the width of the positioning boss is the same as the depth of the positioning groove. The initial outer diameter of the inner constraint strip is smaller than the inner diameter of the groove, and the positioning groove is embedded in the positioning ring that is compatible with the vacuum pump connector and the mass spectrometer connector. The inner constraint strip will be expanded radially so that the outer diameter of the positioning ring is equal to the inner diameter of the groove of the vacuum pump connector and the mass spectrometer connector. By selecting a positioning ring with the same outer diameter as the inner diameter of the groove through this solution, the positioning boss corresponding to the depth of the positioning groove can be quickly embedded in the sealing end face of the vacuum pump connector and the mass spectrometer connector for positioning.

[0012] Preferably, the sealing ring is an O-ring having an elliptical cross-section and arcuate surfaces on its inner and outer sides. The elliptical cross-section of the sealing ring allows the arcuate surfaces on both sides of the sealing ring to mate with the inner and outer limit grooves defined by the outer and inner constraint rings, respectively. The arcuate mate-forming surfaces allow the sealing ring to deform uniformly in all directions when squeezed, ensuring a continuous and tight fit.

[0013] A gas leak detection device comprises a molecular pump sealing structure.

[0014] The beneficial effects of the present invention are:

[0015] By setting an inner constraint ring and an outer constraint ring on the inner and outer sides of the sealing ring to limit and shape them, the sealing ring will not cause lateral displacement when it is tightened and squeezed by the vacuum pump connector and the mass spectrometer connector, thereby avoiding sealing failure between the vacuum pump connector and the mass spectrometer connector due to deformation and displacement of the center ring, and improving the sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the present utility model.

[0017] Figure 2 This is a structural diagram of the outer restraint ring of the utility model.

[0018] Figure 3 This is a partial enlarged view of the outer restraint ring of the utility model.

[0019] Figure 4 This is a structural diagram of the inner restraint ring of the utility model.

[0020] Figure 5 This is a structural cross-sectional view of the inner restraint ring of the utility model.

[0021] Figure 6 It is a structural schematic diagram of the inner restraint strip of the utility model.

[0022] The reference numerals include: 1. sealing ring; 11. arc-shaped surface; 2. outer constraint ring; 21. elastic ring; 22. outer constraint strip; 23. slot; 24. inner limit groove 24; 3. inner constraint ring; 31. positioning ring; 32. inner constraint strip; 33. positioning groove; 34. outer limit groove; 35. positioning boss; 4. mass spectrometer connector; 5. vacuum pump connector; 6. groove; 7. pressing surface. DETAILED DESCRIPTION

[0023] To make the objectives, technical solutions, and advantages of the embodiments more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, identical numbers in different drawings represent identical or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.

[0024] It should be noted that all actions of obtaining signals, information or data in this application are carried out in compliance with the relevant data protection laws and policies of the country where they are located and with the authorization given by the owner of the corresponding device.

[0025] In this disclosure, unless otherwise specified, directional terms such as "inner" and "outer" are defined based on the contours of the corresponding components. Terms such as "first" and "second" are used in this disclosure to distinguish one element from another and do not convey order or importance.

[0026] Example 1

[0027] like Figures 1-6 As shown, a molecular pump sealing structure provided in this embodiment includes a vacuum pump connector 5 and a mass spectrometer connector 4, which are tightly connected. A center ring for strengthening the seal is installed at the connection position of the vacuum pump connector 5 and the mass spectrometer connector 4. The center ring includes a coaxially arranged sealing ring 1, an outer constraint ring 2 and an inner constraint ring 3. The outer constraint ring 2 is arranged outside the inner constraint ring 3, and the sealing ring 1 is arranged between the outer constraint ring 2 and the inner constraint ring 3. The outer constraint ring 2 and the inner constraint ring 3 are used to radially position the sealing ring 1.

[0028] In this embodiment, the inner and outer sides of the sealing ring 1 are limited and shaped by respectively setting an inner constraint ring 13 and an outer constraint ring 12, so that the sealing ring 1 will not cause lateral displacement when it is tightened and squeezed and deformed by the vacuum pump connector 5 and the mass spectrometer connector 4, thereby avoiding the failure of the seal between the vacuum pump connector 5 and the mass spectrometer connector 4 due to deformation and displacement of the center ring, and improving the sealing effect.

[0029] Grooves 6 are provided at the center positions of the end faces of the vacuum pump connector 5 and the mass spectrometer connector 4 which are relatively arranged. The grooves 6 are used for positioning and installing the center ring. The side positions of the vacuum pump connector 5 and the mass spectrometer connector 4 constitute a pressing surface 7 which is used to apply force to the center ring to achieve compression and sealing.

[0030] Example 2

[0031] like Figure 1-Figure 3 As shown, the outer restraint ring 2 of this embodiment includes an elastic ring 21 and an outer restraint strip 22 . A clamping groove 23 is provided on the outer wall of the outer restraint strip 22 , and an inner limiting groove 24 is provided on the inner wall of the outer restraint strip 22 .

[0032] The outer constraint strip 22 of this embodiment is a metal open ring. The initial inner diameter of the metal open ring of the outer constraint strip 22 is larger than the outer diameter of the sealing ring 1. When the outer constraint strip 22 and the sealing ring 1 are installed, the outer wall of the outer constraint strip 22 is squeezed inward so that the outer constraint strip can be adjusted to a size that matches the sealing ring 1.

[0033] The outer restraining strip 22 is wrapped around the outer side wall of the sealing ring 1 through the inner limiting groove 24 so that the opening positions of the outer restraining strip 22 relative to each other form an adaptive annular structure, and the inner limiting groove 24 fits tightly against the outer side of the sealing ring 1.

[0034] In order to prevent the outer restraint strip 22 from resetting, the elastic ring 21 is installed in the groove 23 on the outer wall of the outer restraint strip 22 constituting the annular structure, so that the outer restraint strip 22 can be retained on the outer wall of the sealing ring 1 .

[0035] The depth of the slot 23 is greater than the cross-sectional width of the elastic ring 21. The elastic ring 21 can be better placed in the slot 23, preventing the elastic ring 21 from failing and escaping from the slot 23, causing the sealing ring 1 to lose external support and move out of position, affecting the sealing performance.

[0036] Furthermore, the inner side of the slot 23 is arc-shaped. Under the radial inward force of the elastic ring 21 , the elastic ring 21 abuts against the arc-shaped concave surface of the slot 23 , and the slot 23 and the elastic ring 21 fit more tightly.

[0037] Example 3

[0038] like Figure 4-Figure 6 As shown, the inner constraint ring 3 of this embodiment includes a positioning ring 31 and an inner constraint strip 32 . The inner wall of the inner constraint strip 32 is provided with a positioning groove 33 for accommodating the positioning ring 31 , and the outer wall of the inner constraint strip 32 is provided with an outer limiting groove 34 .

[0039] The inner constraint strip 32 of this embodiment is a metal open ring. The initial outer diameter of the metal open ring of the inner constraint strip 32 is smaller than the inner diameter of the groove of the vacuum pump connector 5 and the mass spectrometer connector 4. The inner constraint strip 32 can be adjusted to an outer diameter that can cooperate with the groove 6 by being expanded in the radial outward direction along the inside of the inner constraint strip 32. Before the inner constraint strip 32 cooperates with the groove, the inner constraint strip 32 can be easily cooperated with the inner side wall of the sealing ring 1 in the state that has not yet been expanded, so that the outer limit groove 34 of the inner constraint strip 32 is in contact with the inner side of the sealing ring 1.

[0040] The positioning ring 31 is set on the inner side of the inner constraint bar 32 through the positioning groove 33. The inner constraint bar 32 is stretched to the corresponding position under the support of the positioning ring 31, and then the sealing ring 1 is installed on the outer wall of the inner constraint bar 32 through the outer limiting groove 34.

[0041] The inner restraining bar 32 is provided with a positioning boss 35 , and the width of the positioning boss 35 is the same as the depth of the positioning groove 33 .

[0042] The initial outer diameter of the inner constraint strip 32 is smaller than the inner diameter of the groove 6. The positioning groove 33 is embedded in the positioning ring 31 that is compatible with the vacuum pump connector 5 and the mass spectrometer connector 4. The inner constraint strip 32 will expand radially so that the outer diameter of the positioning ring 31 is equal to the inner diameter of the groove 6 of the vacuum pump connector 5 and the mass spectrometer connector 4. By selecting the positioning ring 31 with the same outer diameter as the inner diameter of the groove 6 in this scheme, the positioning boss 35 corresponding to the depth of the positioning groove 33 can be quickly embedded in the sealing end surface of the vacuum pump connector 5 and the mass spectrometer connector 4 for positioning.

[0043] like Figures 1-6 As shown, the sealing ring 1 is an O-ring with an elliptical cross-section. Arc-shaped surfaces 11 are provided on the inner and outer sides of the sealing ring 1. The elliptical cross-section of the sealing ring 1 allows the arc-shaped surfaces on both sides of the sealing ring 1 to mate with the inner limiting grooves 24 and outer limiting grooves 34 defined by the outer restraining ring 2 and inner restraining ring 3. The arc-shaped mate surfaces allow the sealing ring 1 to deform uniformly in all directions when squeezed, ensuring a continuous and tight fit.

[0044] In this embodiment, since the inner confinement ring 3 and the outer confinement ring 2 will form an opening position after installation, in order to ensure that the center ring is subjected to uniform force when squeezed by the vacuum pump connector 5 and the mass spectrometer connector 4, the inner confinement ring 3 and the outer confinement ring 2 are symmetrically arranged during the installation process, so that the opening positions of the inner confinement ring 3 and the outer confinement ring 2 are staggered to avoid unilateral leakage during the extrusion process.

[0045] A gas leak detection device includes a molecular pump sealing structure. The molecular pump sealing structure is applied to

[0046] The above is only an embodiment of the present invention, and the commonly known specific structures and characteristics of the scheme are not described in detail here. It should be pointed out that for those skilled in the art, several modifications and improvements can be made without departing from the structure of the present invention, and these should also be regarded as the scope of protection of the present invention. These will not affect the effect of the implementation of the present invention and the practicality of the patent. The scope of protection claimed by this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A molecular pump sealing structure, characterized in that: The invention comprises a vacuum pump connector (5) and a mass spectrometer connector (4), wherein the vacuum pump connector (5) and the mass spectrometer connector (4) are tightly connected, and a center ring for strengthening the seal is installed at the connection position of the vacuum pump connector (5) and the mass spectrometer connector (4), wherein the center ring comprises a coaxially arranged sealing ring (1), an outer constraint ring (2) and an inner constraint ring (3), wherein the outer constraint ring (2) is arranged outside the inner constraint ring (3), and the sealing ring (1) is arranged between the outer constraint ring (2) and the inner constraint ring (3), and the outer constraint ring (2) and the inner constraint ring (3) are used for radially positioning the sealing ring (1).

2. A molecular pump sealing structure according to claim 1, characterized in that: The center positions of the end faces of the vacuum pump connector (5) and the mass spectrometer connector (4) which are arranged opposite to each other are both provided with grooves (6), and the grooves (6) are used for positioning and installing the center ring. The side positions of the vacuum pump connector (5) and the mass spectrometer connector (4) constitute pressing surfaces (7), and the pressing surfaces (7) are used to apply force to the center ring to achieve compression and sealing.

3. A molecular pump sealing structure according to claim 1, characterized in that: The outer constraint ring (2) comprises an elastic ring (21) and an outer constraint strip (22); the outer wall of the outer constraint strip (22) is provided with a clamping groove (23); and the inner wall of the outer constraint strip (22) is provided with an inner limiting groove (24).

4. A molecular pump sealing structure according to claim 3, characterized in that: The depth of the clamping groove (23) is greater than the cross-sectional width of the elastic ring (21).

5. The molecular pump sealing structure according to claim 1, characterized in that: The inner constraint ring (3) comprises a positioning ring (31) and an inner constraint strip (32); the inner wall of the inner constraint strip (32) is provided with a positioning groove (33) for accommodating the positioning ring (31); and the outer wall of the inner constraint strip (32) is provided with an outer limiting groove (34).

6. A molecular pump sealing structure according to claim 5, characterized in that: The inner constraint strip (32) is provided with a positioning boss (35), and the width of the positioning boss (35) is the same as the depth of the positioning groove (33).

7. The molecular pump sealing structure according to claim 1, characterized in that: The sealing ring (1) is an O-type sealing ring, the cross section of the sealing ring (1) is an elliptical structure, and arc-shaped surfaces (11) are provided on the inner side and the outer side of the sealing ring (1).

8. A gas leak detection device, characterized in that: The molecular pump sealing structure comprises the molecular pump sealing structure according to any one of claims 1 to 7.

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