Built-in network chain cleaning structure of drying furnace

Abstract

The utility model discloses a drying oven built-in net chain cleaning structure which comprises a cover body and a box body, a rotatable metal particle adsorption body is hung in the cover body, a nylon rolling brush is arranged in the box body, a gap is reserved between the metal particle adsorption body and the nylon rolling brush, a net chain can penetrate through the gap, strip brushes are arranged at an inlet and an outlet of the box body, and the strip brushes are connected with the nylon rolling brush. And the brushing surfaces of the strip brush and the nylon rolling brush are opposite. Compared with the prior art, the metal particles adhered to the net chain can be cleaned in a non-stop state, a magnetic cleaning mode is adopted during cleaning, the metal particles can be directly adsorbed through magnetic force, and the whole cleaning process is efficient.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer manufacturing, in particular to a built-in mesh chain cleaning structure of a drying furnace. Background Art

[0002] During the sintering and drying process of silicon wafers, metal particle impurities are easily generated. These impurities will accumulate on the mesh chain and will need to be manually cleaned over time. The cleaning process requires downtime and takes a long time. Utility Model Content

[0003] In order to solve the above-mentioned technical problems, a drying furnace built-in mesh chain cleaning structure is provided.

[0004] To achieve the above-mentioned purpose, the present invention is configured in a preferred embodiment to include a cover body and a box body, a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is provided inside the box body, a gap is left between the metal particle adsorbent and the nylon roller brush, the gap is for the mesh chain to pass through, and strip brushes are provided at the inlet and outlet of the box body, and the strip brush and the nylon roller brush have opposite cleaning surfaces.

[0005] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, wherein a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged inside the box body, and a gap is left between the metal particle adsorbent and the nylon roller brush for the mesh chain to pass through the gap, strip brushes are arranged at the inlet and outlet of the box body, and the strip brushes are opposite to the cleaning surfaces of the nylon roller brush, and the metal particle adsorbent includes a magnetic axis, and a plurality of silicone rings are sleeved on the axis of the magnetic axis.

[0006] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, wherein a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged inside the box body, and a gap is left between the metal particle adsorbent and the nylon roller brush for the mesh chain to pass through the gap, strip brushes are arranged at the inlet and outlet of the box body, and the strip brushes are opposite to the cleaning surface of the nylon roller brush, the metal particle adsorbent includes a magnetic axis, and a plurality of silicone rings are sleeved on the axis of the magnetic axis, and two groups of support bars are arranged in the gap for the mesh chain to pass through.

[0007] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged in the box body, a gap is left between the metal particle adsorbent and the nylon roller brush, and the gap is for the mesh chain to pass through, strip brushes are arranged at the inlet and outlet of the box body, and the strip brush is opposite to the cleaning surface of the nylon roller brush, the metal particle adsorbent includes a magnetic axis, and a plurality of silicone rings are sleeved on the axis of the magnetic axis, and two groups of support strips are arranged in the gap for the mesh chain to pass through, and a dust collection box is provided at the bottom of the box body, and the collection box is pull-out.

[0008] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged in the box body, a gap is left between the metal particle adsorbent and the nylon roller brush, and the gap is for the mesh chain to pass through, strip brushes are arranged at the inlet and outlet of the box body, and the strip brush is opposite to the cleaning surface of the nylon roller brush, the metal particle adsorbent includes a magnetic axis, and a plurality of silicone rings are sleeved on the axis of the magnetic axis, and two groups of support strips are arranged in the gap for the mesh chain to pass through, a dust collection box is provided at the bottom of the box body, and the collection box is pull-out, and a quick-release buckle is provided at the closing part of the cover body and the box body.

[0009] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged in the box body, a gap is left between the metal particle adsorbent and the nylon roller brush, the gap is for the mesh chain to pass through, strip brushes are arranged at the inlet and outlet of the box body, the strip brush is opposite to the cleaning surface of the nylon roller brush, the metal particle adsorbent includes a magnetic axis, a plurality of silicone rings are sleeved on the axis of the magnetic axis, two groups of support strips are arranged in the gap for the mesh chain to pass through, a dust collection box is provided at the bottom of the box body, the collection box is pull-out, a quick-release buckle is provided at the closing part of the cover body and the box body, an observation port is provided on the top surface of the cover body, and an observation cover is provided on the observation port.

[0010] In a preferred embodiment, the present invention can be further configured to include a cover body and a box body, a rotatable metal particle adsorbent is mounted inside the cover body, a nylon roller brush is arranged in the box body, a gap is left between the metal particle adsorbent and the nylon roller brush, and the gap is for the mesh chain to pass through, and strip brushes are provided at the inlet and outlet of the box body, and the strip brush is opposite to the cleaning surface of the nylon roller brush, the metal particle adsorbent includes a magnetic axis, and a plurality of silicone rings are sleeved on the axis of the magnetic axis, and two groups of support strips are provided in the gap for the mesh chain to pass through, a dust collection box is provided at the bottom of the box body, and the collection box is pull-out, and a quick-release buckle is provided at the closing part of the cover body and the box body, an observation port is provided on the top surface of the cover body, and an observation cover is provided on the observation port, an exhaust pipe is provided on the outside of the box body, one end of the exhaust pipe is connected to the inner cavity of the box body, and a stainless steel filter element is provided in the exhaust pipe.

[0011] Beneficial effect: The drying furnace of the utility model has a built-in mesh chain cleaning structure, which can clean the metal particles adhered to the mesh chain without stopping the machine, and the magnetic cleaning method is adopted during cleaning, which can directly magnetically adsorb the metal particles, and the entire cleaning process is more efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0014] Figure 2 It is a schematic diagram of the internal structure of the utility model.

[0015] In the figure, 1 is the cover; 2 is the box body; 3 is the observation cover; 4 is the exhaust pipe; 5 is the nylon roller brush; 6 is the magnetic axis; 7 is the silicone ring; 8 is the support bar; and 9 is the collection box. DETAILED DESCRIPTION

[0016] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] like Figure 1 and Figure 2As shown, a drying furnace has a built-in mesh chain cleaning structure, including a cover body 1 and a box body 2. A rotatable metal particle adsorbent is mounted inside the cover body 1, and a nylon roller brush 5 is provided in the box body 2. A gap is left between the metal particle adsorbent and the nylon roller brush 5, and the gap is for the mesh chain to pass through. Strip brushes are provided at the inlet and outlet of the box body 2. The strip brush and the nylon roller brush 5 have opposite cleaning surfaces, so the mesh chain can be cleaned without stopping the machine, which greatly increases the cleaning efficiency.

[0018] The metal particle adsorbent includes a magnetic shaft 6 , on the shaft of which a plurality of silicone rings 7 are sleeved. The silicone rings 7 restrict the mesh chain from being adsorbed by the magnetic shaft 6 .

[0019] Two groups of support bars are provided in the gap for the network chain to pass through, for supporting the network chain.

[0020] A dust collecting box 9 is provided at the bottom of the box body 2, and the collecting box 9 is pullable.

[0021] The closing portion of the cover body 1 and the box body 2 is provided with a quick release buckle.

[0022] An observation port is provided on the top surface of the cover body 1 , and an observation cover 3 is provided on the observation port.

[0023] An exhaust pipe 4 is provided outside the box body 2 , one end of the exhaust pipe 4 is communicated with the inner cavity of the box body 2 , and a stainless steel filter element is provided inside the exhaust pipe 4 .

[0024] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity from another entity, but do not necessarily require or imply any actual relationship or order between these entities.

[0025] The above examples are merely illustrative of the present invention and do not limit the scope of protection of the present invention. Any design that is identical or similar to the present invention falls within the scope of protection of the present invention.

Claims

1. A drying furnace with a built-in net chain cleaning structure, characterized in that: The invention comprises a cover body (1) and a box body (2), wherein a rotatable metal particle adsorbent is mounted inside the cover body (1), and a nylon roller brush (5) is arranged inside the box body (2), and a gap is left between the metal particle adsorbent and the nylon roller brush (5) for the mesh chain to pass through the gap, and strip brushes are arranged at the inlet and outlet of the box body (2), and the cleaning surfaces of the strip brush and the nylon roller brush (5) are opposite.

2. A drying furnace built-in mesh chain cleaning structure according to claim 1, characterized in that: The metal particle adsorption body comprises a magnetic shaft (6), and a plurality of silicone rings (7) are sleeved on the shaft of the magnetic shaft (6).

3. A drying furnace built-in mesh chain cleaning structure according to claim 2, characterized in that: Two groups of support bars are provided in the gap for the network chain to pass through.

4. A drying furnace built-in mesh chain cleaning structure according to claim 3, characterized in that: A dust collection box (9) is provided at the bottom of the box body (2), and the collection box (9) is retractable.

5. A drying furnace built-in mesh chain cleaning structure according to claim 4, characterized in that: A quick-release buckle is provided at the closing portion of the cover body (1) and the box body (2).

6. A drying furnace built-in mesh chain cleaning structure according to claim 5, characterized in that: An observation port is provided on the top surface of the cover body (1), and an observation cover (3) is provided on the observation port.

7. A drying furnace built-in mesh chain cleaning structure according to claim 6, characterized in that: An exhaust pipe (4) is provided outside the box body (2), one end of the exhaust pipe (4) is in communication with the inner cavity of the box body (2), and a stainless steel filter element is provided inside the exhaust pipe (4).

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