Stable vacuum driving mechanism applied to sputter coating equipment

Abstract

The utility model discloses a stable vacuum driving mechanism applied to sputter coating equipment, which comprises a base, a driving cylinder laterally mounted on one side of the base, and a correction component arranged on a piston shaft of the driving cylinder and positioned on the other side of the base, two vacuum shaft sleeve assemblies are installed between the shaft sleeve and the piston shaft in a close fit mode and located at the two ends of the shaft sleeve respectively. The flexible expansion ring and the pressing ring which can be connected in an inserted mode are arranged in the shaft sleeve, the rigid lantern ring abutting against the flexible expansion ring is arranged at the end, away from the flexible ring, of the pressing ring, and along with extrusion of the rigid lantern ring to the pressing ring, the flexible expansion ring is expanded, the two side walls abut against the inner wall of the shaft sleeve and the outer wall of a piston shaft, and therefore the sealing effect of the shaft sleeve is enhanced. In addition, the hold-down ring can support and guide the piston shaft, so that the piston shaft is not easy to shake during radial movement, and the possibility of bending and breaking of the piston shaft is reduced.

Description

Technical Field

[0001] The utility model relates to the field of sputtering coating equipment, in particular to a stable vacuum driving mechanism used in sputtering coating equipment. Background Art

[0002] The correction component located inside the target base door is used to adjust the thickness of the workpiece coating film. It can be moved by controlling the horizontal drive cylinder to adjust the size of the positive ion transport channel. Since the sputtering coating equipment is a large-scale equipment, the cylinder that pushes the correction component to move cannot be installed inside the target base door. For this reason, the cylinder is basically installed on the outer wall of the target base door, and the cylinder output shaft penetrates the inner cavity of the target base door and is connected to the correction component. In order to ensure that the inner cavity of the target base door can maintain a vacuum, a shaft sleeve is set at the connection between the cylinder output shaft and the target base door, and the shaft sleeve is used to keep the target base door in a vacuum state during the coating detection.

[0003] In addition, compared with the longitudinal drive cylinder, the force points of the transverse drive cylinder are more dispersed. With the use of the sputtering coating equipment, the cylinder output shaft with the sleeve may shake, bend or break under the influence of the downward force brought by the correction component, and affect the sealing effect of the sleeve, making the entire sputtering coating unable to be used normally. Utility Model Content

[0004] In view of this, the present invention addresses the deficiencies in the prior art, and its main purpose is to provide a stable vacuum drive mechanism for use in sputtering coating equipment, which solves the problem that the force points of the transverse drive cylinder are more dispersed compared to the longitudinal drive cylinder. As the sputtering coating equipment is used, the cylinder output shaft with the sleeve connected may shake, bend or break under the influence of the downward force brought by the correction component, and affect the sealing effect of the sleeve, making the entire sputtering coating unable to be used normally.

[0005] To achieve the above-mentioned purpose, the present invention adopts the following technical solution: a stable vacuum drive mechanism used in sputtering coating equipment, comprising a base, a drive cylinder installed laterally on one side of the base, and a correction component provided on the piston shaft of the drive cylinder and located on the other side of the base.

[0006] The piston shaft passes through the shaft sleeve on the base, and two vacuum shaft sleeve assemblies are tightly installed between the shaft sleeve and the piston shaft, and the two vacuum shaft sleeve assemblies are respectively located at both ends of the shaft sleeve;

[0007] Each vacuum sleeve assembly includes a rigid sleeve located at the inner opening of the sleeve, a compression ring attached to the inner wall of the rigid sleeve, and a flexible expansion ring attached to the inner wall of the compression ring. The rigid sleeve and the compression ring squeeze the flexible expansion ring to deform.

[0008] Furthermore, an extrusion groove is provided on the wall of the flexible expansion ring close to the compression ring, and an extrusion part is provided on the corresponding wall of the compression ring. The extrusion part is inserted into the extrusion groove to deform the flexible expansion ring.

[0009] Furthermore, the opening of the extrusion groove is in a trumpet shape, the cross section of the extrusion portion is in a triangular shape, and the triangular extrusion portion extrude the flexible expansion to form a ring-shaped deformation.

[0010] Furthermore, the two vacuum sleeve assemblies are respectively a first vacuum sleeve assembly close to the driving cylinder and a second vacuum sleeve assembly close to the correction assembly, and a sealing assembly is sandwiched between the first vacuum sleeve assembly and the second vacuum sleeve assembly.

[0011] Furthermore, the second vacuum sleeve assembly is located in the inner cavity and at the installation position of the shaft sleeve and the base; the first rigid sleeve portion in the first vacuum sleeve assembly is exposed outside the inner cavity, and a shaft sleeve cap is provided on the corresponding end of the shaft sleeve, and the inner wall of the shaft sleeve cap squeezes the first rigid sleeve to move in the inner cavity toward the second vacuum sleeve assembly.

[0012] Furthermore, sealing rings are provided at the opening position of the shaft sleeve cap toward the driving cylinder and at the opening position of the shaft sleeve toward the correction assembly.

[0013] Furthermore, the sealing assembly includes a plurality of rings and a gasket arranged between two adjacent rings.

[0014] Furthermore, the position of the base corresponding to the installation shaft sleeve is a support portion, and the wall thickness of the support portion is greater than the wall thickness of other positions of the base.

[0015] Furthermore, the sealing ring is divided into a first ring body and a second ring body, and the opposite ends of the first ring body and the second ring body are provided with raised portions, which are integrally formed on the side edges of the first ring body and the second ring body adjacent to the piston shaft, and the two raised portions are respectively inserted into the gaps between the piston shaft and the shaft sleeve, and between the piston shaft and the shaft sleeve cap.

[0016] Furthermore, one end of the sealing ring away from the raised portion is arranged in the concave annular groove.

[0017] Compared with the prior art, the present invention has obvious advantages and beneficial effects. Specifically, it can be seen from the above technical scheme that vacuum sleeve assemblies are respectively provided at both ends of the shaft sleeve, and flexible expansion rings and compression rings that can be plugged into each other are provided in the shaft sleeve of the vacuum sleeve assembly, and a rigid sleeve ring that contacts the end of the compression ring away from the flexible ring is provided. As the rigid sleeve squeezes the compression ring, the flexible expansion ring expands, and the two side walls contact the inner wall of the shaft sleeve and the outer wall of the piston shaft to enhance the sealing effect of the shaft sleeve.

[0018] In addition, the combination of the clamping ring, the flexible expansion ring and the clamping ring can also form a support guide for the piston shaft, making it less likely for the piston shaft to shake during radial movement and reducing the possibility of bending and breaking of the piston shaft.

[0019] In order to more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a three-dimensional display diagram of Example 1 of the present utility model.

[0021] Figure 2 This is a diagram showing the driving cylinder of Example 1 of the present utility model.

[0022] Figure 3 It is a cross-sectional view of the driving cylinder of Example 1 of the present utility model.

[0023] Figure 4 It is an exploded view of the shaft sleeve of Example 1 of the present utility model.

[0024] Figure 5 It is a cross-sectional view of the driving cylinder of Example 1 of the present utility model.

[0025] Figure 6 This is the embodiment of the present invention 1 Figure 5 Enlarged view of point A.

[0026] Figure 7 This is a diagram showing the flexible expansion ring of Example 1 of the present utility model.

[0027] Figure 8 This is a diagram showing the clamping ring of Example 1 of the present utility model.

[0028] Description of the accompanying drawings:

[0029] 1 correction component, 2 gap, 10 base, 11 support part;

[0030] 20 driving cylinder, 21 piston shaft;

[0031] 30 shaft sleeve, 301 inner cavity;

[0032] 40 vacuum sleeve assembly, 401 first vacuum sleeve assembly, 4011 first rigid sleeve ring, 402 second vacuum sleeve assembly, 41 rigid sleeve ring, 42 compression ring, 421 extrusion portion, 43 flexible expansion ring, 431 extrusion groove;

[0033] 50 sealing assembly, 51 O-ring, 52 gasket;

[0034] 60 : shaft sleeve cap, 70 : sealing ring, 71 : first ring body, 72 : second ring body, 73 : raised portion, 74 : annular groove. DETAILED DESCRIPTION

[0035] Please refer to Figure 1-8As shown, it shows the specific structure of the preferred first embodiment of the present invention, which is a stable vacuum drive mechanism used in sputtering coating equipment, a base 10, a drive cylinder 20 installed laterally on one side of the base, and a correction component 1 provided on the drive cylinder piston shaft 21 and located on the other side of the base 10.

[0036] The piston shaft passes through the shaft sleeve 30 on the base 10, and two vacuum sleeve assemblies 40 are tightly installed between the shaft sleeve 30 and the piston shaft 21. The two vacuum sleeve assemblies 40 are respectively located at both ends of the shaft sleeve 30;

[0037] Each vacuum sleeve assembly 40 includes a rigid sleeve 41 located at the opening of the inner cavity 301 of the sleeve 30, a clamping ring 42 attached to the inner wall of the rigid sleeve 41, and a flexible expansion ring 43 attached to the inner wall of the clamping ring 42. The rigid sleeve 41 and the clamping ring 42 squeeze the flexible expansion ring 43 to deform. Compared with the existing vacuum drive mechanism used in sputtering coating equipment, the sleeve is used to seal the gap between the base and the piston shaft on the transverse drive mechanism, but the piston shaft is prone to shaking, bending or breaking during use, resulting in the sleeve being unable to maintain sealing. The present application greatly improves the sealing performance of the sleeve 30 by providing vacuum sleeve assemblies 40 at both ends of the sleeve 30, and the sequential squeezing of the rigid sleeve 41, the clamping ring 42 and the flexible expansion ring 43 makes the sleeve 30 have a stronger sealing effect. The rigid collar 41 and the clamping ring 42 in the two vacuum sleeve assemblies 40 simultaneously provide stable support for the piston shaft, thereby supporting and guiding the piston shaft 21 of the drive cylinder to prevent it from shaking, bending or breaking.

[0038] Specifically, the base 10 can be a movable target door installed on the sputtering coating equipment, or it can be a door panel or push box installed on the sputtering coating equipment. In addition, whether it is the target door or door panel or push box, it needs to be aligned with the product to be targeted and coated, so that the driving cylinder 20 installed on the base 10 can drive the correction component 1 to adjust the size of the channel for the plasma to pass through by the radial movement of the piston shaft 21 thereon, so that the film thickness of the coating on the product can be adjusted according to demand.

[0039] The piston shaft 21 of the drive cylinder 20 passes through the shaft sleeve 30 installed on the base 10. The traditional shaft sleeve 30 is mainly used to seal the piston shaft 21, but in this application, the piston shaft 21 is used horizontally, and one end of the piston shaft 21 is connected to the drive cylinder 20, and the other end is connected to the weight correction assembly 1, which causes the piston shaft 21 to shake easily when moving radially, affecting the sealing effect of the shaft sleeve 30.

[0040] To this end, a flexible expansion ring 43 and a compression ring 42 that can be plugged into each other are provided in the shaft sleeve 30, and a rigid sleeve 41 that contacts the end of the compression ring 42 away from the flexible ring 43 is provided. As the rigid sleeve 41 squeezes the compression ring 42, the flexible expansion ring 43 deforms and expands, and the two side walls contact the inner wall of the shaft sleeve 30 and the outer wall of the piston shaft 21, so as to enhance the sealing effect of the shaft sleeve 30.

[0041] In addition, the clamping ring 42 can also support and guide the piston shaft 21, making it less likely for the piston shaft 21 to shake during radial movement and reducing the possibility of bending or breaking the piston shaft 21. Of course, the clamping ring 42 can support the piston shaft 21 because the clamping ring 42 is made of metal or rigid material and has good rigidity.

[0042] like Figure 4 As shown, for example, an extrusion groove 431 is provided on the wall of the flexible expansion ring 43 near the compression ring 42, and an extrusion portion 421 is provided on the corresponding wall of the compression ring 42. The extrusion portion 421 is inserted into the extrusion groove 431 to deform the flexible expansion ring 43. To facilitate the deformation of the flexible expansion ring 43 under the pressure of the compression ring 42 so as to closely contact the inner wall of the shaft sleeve 30 and the outer wall of the piston shaft 21, an extrusion groove 431 is provided on the side of the flexible expansion ring 43 opposite the compression ring 42. The end of the compression ring 42 corresponding to the flexible expansion ring 43 is provided with an extrusion portion 421 integrally formed on the compression ring 42. When the extrusion portion 421 is inserted into the extrusion groove 431, the flexible expansion ring 43 is deformed.

[0043] Specifically, the flexible expansion ring 43 has displacement space corresponding to the side wall of the extrusion groove 431 as the extrusion groove 431 is opened. When the extrusion portion 421 is inserted into the extrusion groove 431 and the extrusion portion 421 is larger than the extrusion groove 431, the flexible expansion ring 43 is deformed at the position where the extrusion groove 431 is opened, and tightly contacts the inner wall of the shaft sleeve 30 and the outer wall of the piston shaft 21 to enhance the sealing effect of the shaft sleeve 30.

[0044] like Figure 7 As shown, the extrusion groove 431 has an opening in the shape of a bell mouth, and the extrusion portion 421 has a triangular cross-section. The triangular extrusion portion 421 squeezes the flexible expansion ring 43 to deform it. To allow the extrusion groove 431 to expand after the extrusion portion 421 is inserted, the extrusion groove 431 is configured in the shape of a bell mouth, which is wider at the insertion end and narrower at the rear end. The extrusion portion 421 inserted into the extrusion groove 431 has a triangular cross-section that matches the bell mouth to ensure tightness between the extrusion portion 421 and the extrusion groove 431 after insertion.

[0045] Of course, the extrusion portion 421 is larger than the extrusion groove 431 so that the flexible expansion ring 43 can be deformed and expanded after the extrusion portion 421 is inserted into the extrusion groove 431 .

[0046] like Figure 6 As shown, the two vacuum sleeve assemblies 40 are exemplarily shown: a first vacuum sleeve assembly 401 located near the drive cylinder and a second vacuum sleeve assembly 402 located near the correction assembly. A sealing assembly 50 is interposed between the first vacuum sleeve assembly 401 and the second vacuum sleeve assembly 402. Two vacuum sleeve assemblies 40 are positioned opposite each other at the inlet and outlet ends of the shaft sleeve 30 to enhance the sealing effect of the shaft sleeve 30. Furthermore, the sealing assembly 50 interposed between the two vacuum sleeve assemblies 40 further enhances the sealing effect of the shaft sleeve 30.

[0047] It should be noted that the rigid collar 41 is made of copper. This ensures excellent lubrication while maintaining rigidity. During assembly, the rigid collar 41 in one vacuum sleeve assembly 40 sequentially compresses the compression ring 42, the flexible expansion ring 43, the sealing assembly 50, the other flexible expansion ring 43 in the other vacuum sleeve assembly 40, the compression ring 42, and the rigid collar 41 to enhance the sealing performance of the shaft sleeve 30. Furthermore, the copper rigid collar 41 guides the radial movement of the piston shaft 21.

[0048] like Figure 6 As shown, illustratively, the second vacuum sleeve assembly 402 is located in the inner cavity 301 and is located at the installation position of the shaft sleeve 30 and the base 10; the first rigid sleeve ring 4011 in the first vacuum sleeve assembly 401 is partially exposed outside the inner cavity 301, and a shaft sleeve cap 60 is provided on the corresponding end of the shaft sleeve 30. The inner wall of the shaft sleeve cap 60 squeezes the first rigid sleeve ring 4011 to move toward the second vacuum sleeve assembly 402 in the inner cavity 301, and the shaft sleeve cap 60 is provided at one end of the shaft sleeve 30 adjacent to the drive cylinder 20. The first rigid sleeve ring 4011 adjacent to the shaft sleeve cap 60 partially extends out of the shaft sleeve 30 to the inner cavity of the shaft sleeve cap 60.

[0049] Exemplarily, the inner wall of the shaft sleeve cap 60 is provided with an internal thread, and the corresponding end of the shaft sleeve 30 is provided with an external thread, and the two threads are installed in a threaded manner. As the user twists the shaft sleeve 30, the inner wall of the shaft sleeve 30 contacts the first rigid sleeve 4011 and moves into the inner cavity 301, and squeezes the clamping ring 42, the flexible expansion ring 43, the sealing assembly 50, another flexible expansion ring 43 in another vacuum shaft sleeve assembly 40, the clamping ring 42 and the rigid sleeve 41 in turn.

[0050] like Figure 4 As shown, for example, a sealing ring 70 is provided at the opening of the shaft sleeve cap 60 facing the drive cylinder 20 and at the opening of the shaft sleeve 30 facing the correction assembly 1. There are two sealing rings 70, one of which is located in the inner cavity of the shaft sleeve cap 60 and the other is located in the inner cavity of the shaft sleeve 30, to enhance the sealing effect between the shaft sleeve cap 60 and the shaft sleeve 30.

[0051] like Figure 6 As shown, the sealing assembly 50 exemplarily includes a plurality of O-rings 51 and a gasket 52 disposed between two adjacent O-rings 51. The O-rings 51 and the gasket 52 cooperate to ensure the sealing of the shaft sleeve 30.

[0052] like Figure 1 As shown, for example, the position of the base 10 corresponding to the installation of the shaft sleeve 30 is a support portion 11, and the wall thickness of the support portion 11 is greater than the wall thickness of other positions of the base 10. The base 10 is relatively thin, while the shaft sleeve 30 is longer than the thickness of the base 10. In order to better support the shaft sleeve 30, the support portion 11 is added to the base 10 to better support the shaft sleeve 30.

[0053] like Figure 6 As shown, for example, the sealing ring 70 is divided into a first ring body 71 and a second ring body 72, and the opposite ends of the first ring body 71 and the second ring body 72 are provided with a protrusion 73, and the protrusion 73 is integrally formed on the side edges of the first ring body 71 and the second ring body 72 adjacent to the piston shaft 21, and the two protrusions 73 are respectively inserted into the gap 2 between the piston shaft 21 and the shaft sleeve 30, and the piston shaft 21 and the shaft sleeve cap 60.

[0054] The end of the sealing ring 70, away from the raised portion 73, is provided with a concave annular groove 74. The raised portion 73 on the first ring body 71 is inserted into the gap 2 between the piston shaft 21 and the shaft sleeve cap 60, while the raised portion 73 on the second ring body 72 is inserted into the gap 2 between the piston shaft 21 and the shaft sleeve 30. This ensures the sealing and protective effect of the shaft sleeve 30 and the shaft sleeve cap 60. Furthermore, to ensure that the sealing ring 70 can better fill the gap 2, an annular groove 74 is provided on the end of the sealing ring 70 away from the raised portion 73. When the sealing ring 70 is squeezed by an external force, the diameter of the annular groove 74 is narrowed, and the raised portion 73 is squeezed and moved toward the inner cavity of the gap 2.

[0055] The above description is merely a preferred embodiment of the present invention and does not limit the technical scope of the present invention. Therefore, any minor modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A stable vacuum drive mechanism for use in a sputtering coating device, comprising a base (10), a drive cylinder (20) laterally mounted on one side of the base, and a correction assembly (1) disposed on a piston shaft (21) of the drive cylinder and located on the other side of the base (10), characterized in that: The piston shaft passes through the shaft sleeve (30) on the base (10), and two vacuum shaft sleeve assemblies (40) are tightly mounted between the shaft sleeve (30) and the piston shaft (21), and the two vacuum shaft sleeve assemblies (40) are respectively located at two ends of the shaft sleeve (30); Each of the vacuum sleeve assemblies (40) comprises a rigid sleeve (41) located at the opening of the inner cavity (301) of the sleeve (30), a compression ring (42) attached to the inner wall of the rigid sleeve (41), and a flexible expansion ring (43) attached to the inner wall of the compression ring (42). The rigid sleeve (41) and the compression ring (42) squeeze the flexible expansion ring (43) to deform.

2. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 1, characterized in that: An extrusion groove (431) is provided on the wall of the flexible expansion ring (43) close to the pressure ring (42), and an extrusion portion (421) is provided on the corresponding wall of the pressure ring (42). The extrusion portion (421) is inserted into the extrusion groove (431) to deform the flexible expansion ring (43).

3. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 2, characterized in that: The opening of the extrusion groove (431) is in the shape of a trumpet, and the cross-section of the extrusion portion (421) is in the shape of a triangle. The triangular-shaped extrusion portion (421) squeezes the flexible expansion ring (43) to deform.

4. The stable vacuum drive mechanism for sputtering coating equipment according to claim 1, characterized in that: The two vacuum sleeve assemblies (40) are respectively a first vacuum sleeve assembly (401) close to the driving cylinder and a second vacuum sleeve assembly (402) close to the correction assembly, and a sealing assembly (50) is further sandwiched between the first vacuum sleeve assembly (401) and the second vacuum sleeve assembly (402).

5. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 4, characterized in that: The second vacuum sleeve assembly (402) is located in the inner cavity (301) and at the installation position of the shaft sleeve (30) and the base (10); the first rigid collar (4011) in the first vacuum sleeve assembly (401) is partially exposed outside the inner cavity (301), and a sleeve cap (60) is provided on the corresponding end of the shaft sleeve (30), and the inner wall of the sleeve cap (60) squeezes the first rigid collar (4011) to move in the inner cavity (301) toward the second vacuum sleeve assembly (402).

6. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 5, characterized in that: A sealing ring (70) is provided at the opening position of the shaft sleeve cap (60) facing the drive cylinder (20) and at the opening position of the shaft sleeve (30) facing the correction assembly (1).

7. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 4, characterized in that: The sealing assembly (50) comprises a plurality of O-rings (51) and a gasket (52) disposed between two adjacent O-rings (51).

8. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 1, characterized in that: The position of the base (10) corresponding to the mounting shaft sleeve (30) is a support portion (11), and the wall thickness of the support portion (11) is greater than the wall thickness of other positions of the base (10).

9. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 6, characterized in that: The sealing ring (70) is divided into a first ring body (71) and a second ring body (72). The first ring body (71) and the second ring body (72) are provided with protrusions (73) at opposite ends. The protrusions (73) are integrally formed on the side edges of the first ring body (71) and the second ring body (72) adjacent to the piston shaft (21). The two protrusions (73) are respectively inserted into the gaps (2) between the piston shaft (21) and the shaft sleeve (30), and between the piston shaft (21) and the shaft sleeve cap (60).

10. The stable vacuum drive mechanism used in sputtering coating equipment according to claim 9, characterized in that: One end of the sealing ring (70) away from the raised portion (73) is arranged in a concave annular groove (74).

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