Cooled plasma electrode and plasma processing system
By adopting multiple cooling channels side by side design in the cooling plasma electrode, the problem of temperature inhomogeneity within the electrode is solved, achieving higher performance and longer life.
Patent Information
- Application Number
- CN202422464679.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-11
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2034-10-11
AI Technical Summary
The cooling channel design of traditional cooling plasma electrodes results in uneven temperatures inside the electrode, resulting in reduced performance and shortened lifetime.
Using a side-by-side design of multiple cooling channels, including a first cooling channel, a second cooling channel and a third cooling channel, the coolant is uniformly distributed through the shunt and bus structure, ensuring that each cooling channel absorbs heat with the same efficiency, and the heated coolant is centrally outputted through the bus channel.
The uniform distribution of the temperature inside the electrode is achieved, which improves the performance of the electrode and extends the service life of the electrode.
Smart Images
Figure CN223207297U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of electrodes, in particular to a cooling type plasma electrode and a plasma processing system. Background Art
[0002] At present, in traditional plasma processing systems, the cooling channel in the cooled plasma electrode is a one-way channel. The coolant flows from the inlet end of the cooling channel through the inside of the electrode and then flows out from the outlet end of the cooling channel. The coolant will gradually absorb heat in the process of flowing through the inside of the electrode, causing the temperature of the coolant to gradually rise and the efficiency of absorbing heat to gradually decrease, making the front section of the cooling channel more efficient in absorbing heat and the rear section less efficient in absorbing heat, making the temperature of the electrode area close to the front section of the cooling channel lower and the temperature of the electrode area close to the rear section of the cooling channel higher. The front section of the cooling channel of the traditional cooled plasma electrode is usually distributed in a part of the area inside the electrode, and the rear section is distributed in another part of the area inside the electrode, resulting in different cooling degrees inside the electrode, large temperature difference, and poor uniformity, which in turn leads to decreased performance and shortened life of the electrode. Utility Model Content
[0003] The following is a summary of the subject matter described in detail herein and is not intended to limit the scope of the claims.
[0004] The utility model provides a cooling type plasma electrode and a plasma processing system, which can make the temperature distribution inside the electrode more uniform, thereby improving the performance of the electrode and increasing the life of the electrode.
[0005] A first aspect of the present utility model provides a cooled plasma electrode, comprising an electrode body, wherein a first shunt channel, a second shunt channel, a converging channel, a first cooling channel, a second cooling channel, and a plurality of third cooling channels are arranged inside the electrode body; wherein the first cooling channel, the third cooling channel, and the second cooling channel are arranged side by side in sequence, one end of the first cooling channel and one end of the second cooling channel are respectively sealed and connected to the first shunt channel, the other end of the first cooling channel and the other end of the second cooling channel are respectively sealed and connected to the second shunt channel, one end of each of the third cooling channels is respectively sealed and connected to the second shunt channel, the other end of each of the third cooling channels is respectively sealed and connected to the converging channel, the first shunt channel is used to input coolant, and the converging channel is used to output the coolant.
[0006] In some embodiments, one end of the first cooling channel is sealed and connected to one end of the first diverter channel, one end of the second cooling channel is sealed and connected to the other end of the first diverter channel, the other end of the first cooling channel is sealed and connected to one end of the second diverter channel, the other end of the second cooling channel is sealed and connected to the other end of the second diverter channel, the first cooling channel and the second cooling channel are parallel to each other, the first cooling channel and the first diverter channel are perpendicular to each other, and the first cooling channel and the second diverter channel are perpendicular to each other.
[0007] In some embodiments, the upper side wall of the second diversion channel is provided with a plurality of evenly distributed first return holes, the number of the first return holes is the same as the number of the third cooling channels, one end of each of the third cooling channels is sealed and connected to the corresponding first return hole, and the third cooling channel and the second diversion channel are perpendicular to each other.
[0008] In some embodiments, the lower side wall of the confluence channel is provided with a plurality of evenly distributed second reflow holes, the number of the second reflow holes is the same as the number of the third cooling channels, the other end of each of the third cooling channels is sealed and connected to the corresponding second reflow hole, and the third cooling channel and the confluence channel are perpendicular to each other.
[0009] In some embodiments, the first cooling channel, the second cooling channel, and the plurality of third cooling channels have the same length, and the upper sidewall of the converging channel is in contact with the lower sidewall of the first diverting channel.
[0010] In some embodiments, a guide block is further provided inside the electrode body, and the inner cavity of the guide block is provided with a liquid inlet cavity and a liquid outlet cavity, the first diversion channel is sealed and connected to the liquid inlet cavity, and the confluence channel is sealed and connected to the liquid outlet cavity through a bypass channel.
[0011] In some embodiments, the guide block is in the shape of an elongated strip, the guide block is in contact with the upper side wall of the first diversion channel, and the liquid inlet cavity and the liquid outlet cavity are separated by a spacer.
[0012] In some embodiments, the liquid inlet cavity inputs the cooling liquid through a liquid infusion pipe, and the liquid outlet cavity outputs the cooling liquid through a liquid outlet pipe.
[0013] In some embodiments, the first diverter channel, the second diverter channel, the converging channel, the first cooling channel, the second cooling channel, and the plurality of third cooling channels are all in the shape of long strips, and the center lines of the first diverter channel, the second diverter channel, the converging channel, the first cooling channel, the second cooling channel, and the plurality of third cooling channels extending along the length direction are all in a reference plane, and the center line of the bypass channel is not in the reference plane.
[0014] To achieve the above-mentioned purpose, a second aspect of an embodiment of the present invention provides a plasma processing system, comprising the cooled plasma electrode described in the first aspect.
[0015] The embodiment of the utility model includes at least the following beneficial effects: a first shunt channel, a second shunt channel, a converging channel, a first cooling channel, a second cooling channel and a plurality of third cooling channels are provided inside the electrode body, and one end of the first cooling channel and one end of the second cooling channel are sealedly connected to the first shunt channel respectively, so that the coolant can be evenly diverted to the first cooling channel and the second cooling channel, and the other end of the first cooling channel and the other end of the second cooling channel are sealedly connected to the second shunt channel respectively, so that the coolant is temporarily collected in the second shunt channel, and then one end of each third cooling channel is sealedly connected to the second shunt channel respectively, so that the coolant can be evenly diverted to the first cooling channel and the second cooling channel. The coolant is evenly distributed to each third cooling channel so that each cooling channel absorbs heat with the same efficiency. At the same time, since the first cooling channel, the third cooling channel and the second cooling channel are arranged side by side in sequence, the coolant flows evenly through the interior of the electrode, which can make the temperature distribution inside the electrode more uniform, thereby improving the performance of the electrode and increasing the life of the electrode. In addition, each third cooling channel outputs the heated coolant uniformly to the confluence channel. The confluence channel outputs the heated coolant in a centralized manner, which can prevent the heated coolant from destroying the uniformity of the temperature distribution inside the electrode, thereby improving the performance of the electrode and increasing the life of the electrode.
[0016] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The objectives and other advantages of the present invention can be achieved and obtained through the structures particularly pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The accompanying drawings are used to provide a further understanding of the technical solution of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the technical solution of the present invention and do not constitute a limitation on the technical solution of the present invention.
[0018] Figure 1A schematic structural diagram of a cross-section of a cooling plasma electrode provided in an embodiment of the present utility model;
[0019] Figure 2 A schematic structural diagram of a cooling plasma electrode surface provided by an embodiment of the present utility model;
[0020] Figure 3 A schematic structural diagram of a bypass cover plate and a partially cooled plasma electrode provided in an embodiment of the present utility model;
[0021] Figure 4 A schematic structural diagram of a bypass channel and a bypass cover provided in an embodiment of the present utility model;
[0022] Figure 5 This is a structural schematic diagram of a cooled plasma electrode provided in an embodiment of the present invention from another perspective. DETAILED DESCRIPTION
[0023] The following describes in detail embodiments of the present invention. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0024] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.
[0025] In the description of this utility model, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.
[0026] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0027] At present, in traditional plasma systems, the cooling channel inside the electrode is a one-way channel that follows a regular path, allowing the coolant to flow from the inlet end through the inside of the electrode and then out from the outlet end. The coolant will gradually absorb heat in the process of flowing through the inside of the electrode, causing the temperature of the coolant to gradually rise, making the front section of the cooling channel more efficient in absorbing heat, and the rear section less efficient in absorbing heat, making the temperature of the electrode area near the front section of the cooling channel lower, and the temperature of the electrode area near the rear section of the cooling channel higher, resulting in different degrees of cooling inside the electrode, large temperature difference, and poor uniformity, which in turn leads to decreased performance and shortened life of the electrode.
[0028] In response to the problems of different cooling degrees, large temperature differences and poor uniformity inside the electrode, the utility model provides a cooled plasma electrode and a plasma processing system. The cooled plasma electrode includes an electrode body, and the electrode body is internally provided with a first diversion channel, a second diversion channel, a converging channel, a first cooling channel, a second cooling channel and a plurality of third cooling channels.
[0029] Among them, the first cooling channel, the third cooling channel and the second cooling channel are arranged side by side in sequence, one end of the first cooling channel and one end of the second cooling channel are respectively sealed and connected with the first diversion channel, the other end of the first cooling channel and the other end of the second cooling channel are respectively sealed and connected with the second diversion channel, one end of each third cooling channel is respectively sealed and connected with the second diversion channel, the other end of each third cooling channel is respectively sealed and connected with the converging channel, the first diversion channel is used to input coolant, and the converging channel is used to output coolant.
[0030] According to the solution provided by the embodiment of the present invention, the interior of the electrode body is provided with a first shunt channel, a second shunt channel, a converging channel, a first cooling channel, a second cooling channel and a plurality of third cooling channels, and one end of the first cooling channel and one end of the second cooling channel are respectively sealed and connected with the first shunt channel, so that the coolant can be evenly diverted to the first cooling channel and the second cooling channel, and the other end of the first cooling channel and the other end of the second cooling channel are respectively sealed and connected with the second shunt channel, so that the coolant is temporarily collected in the second shunt channel, and then one end of each third cooling channel is respectively sealed and connected with the second shunt channel, so that the coolant can be evenly diverted to the first cooling channel and the second cooling channel, and the other end of the first cooling channel and the other end of the second cooling channel are respectively sealed and connected with the second shunt channel, so that the coolant can be evenly diverted to the first cooling channel and the second cooling channel, The cooling liquid is evenly distributed to each third cooling channel, so that each cooling channel absorbs heat with the same efficiency. At the same time, since the first cooling channel, the third cooling channel and the second cooling channel are arranged side by side in sequence, the cooling liquid flows evenly through the interior of the electrode, which can make the temperature distribution inside the electrode more uniform, thereby improving the performance of the electrode and increasing the life of the electrode. In addition, each third cooling channel outputs the heated cooling liquid to the confluence channel in a unified manner. The confluence channel outputs the heated cooling liquid in a centralized manner, which can prevent the heated cooling liquid from destroying the uniformity of the temperature distribution inside the electrode, thereby improving the performance of the electrode and increasing the life of the electrode.
[0031] The following is a further description of the embodiments of the present invention with reference to the accompanying drawings.
[0032] Reference Figure 1 and Figure 2 , Figure 1 This is a schematic structural diagram of a cross-section of a cooling plasma electrode provided by an embodiment of the present invention. Figure 2 This is a structural schematic diagram of the surface of a cooled plasma electrode provided in an embodiment of the present invention. An embodiment of the first aspect of the present invention provides a cooled plasma electrode, including an electrode body 100, wherein a first diversion channel 120, a second diversion channel 130, a converging channel 140, a first cooling channel 150, a second cooling channel 160 and a plurality of third cooling channels 170 are provided inside the electrode body 100.
[0033] Among them, the first cooling channel 150, the third cooling channel 170 and the second cooling channel 160 are arranged side by side in sequence, one end of the first cooling channel 150 and one end of the second cooling channel 160 are respectively sealed and connected to the first diversion channel 120, the other end of the first cooling channel 150 and the other end of the second cooling channel 160 are respectively sealed and connected to the second diversion channel 130, one end of each third cooling channel 170 is respectively sealed and connected to the second diversion channel 130, the other end of each third cooling channel 170 is respectively sealed and connected to the converging channel 140, the first diversion channel 120 is used to input coolant, and the converging channel 140 is used to output coolant.
[0034] The shape of the electrode body 100 may be a hollow and flat rectangular parallelepiped or an elliptical disk, which is not limited in the embodiment of the present invention.
[0035] Among them, the shapes of the first diversion channel 120, the second diversion channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the plurality of third cooling channels 170 can be long strips or curved shapes, including serpentine, crescent, spiral or wavy shapes, and can also be a free combination of the above shapes, which is not limited in the embodiments of the present invention.
[0036] Based on this, the interior of the electrode body 100 is provided with a first shunt channel 120, a second shunt channel 130, a converging channel 140, a first cooling channel 150, a second cooling channel 160 and a plurality of third cooling channels 170. One end of the first cooling channel 150 and one end of the second cooling channel 160 are respectively sealed and connected with the first shunt channel 120, so that the coolant can be evenly diverted to the first cooling channel 150 and the second cooling channel 160. The other end of the first cooling channel 150 and the other end of the second cooling channel 160 are respectively sealed and connected with the second shunt channel 130, and the coolant is temporarily collected in the second shunt channel 130, and then the coolant is collected in the second shunt channel 130 through one end of each third cooling channel 170. 30 are sealed and connected, which can evenly divert the coolant to each third cooling channel 170, so that each cooling channel absorbs heat with the same efficiency. At the same time, since the first cooling channel 150, the third cooling channel 170 and the second cooling channel 160 are arranged side by side in sequence, the coolant flows evenly through the interior of the electrode, which can make the temperature distribution inside the electrode more uniform, thereby improving the performance of the electrode and increasing the life of the electrode. In addition, each third cooling channel 170 outputs the heated coolant to the confluence channel 140 in a unified manner. The confluence channel 140 outputs the heated coolant in a centralized manner, which can prevent the heated coolant from destroying the uniformity of the temperature distribution inside the electrode, thereby improving the performance of the electrode and increasing the life of the electrode.
[0037] refer to Figure 1 and Figure 2 An embodiment of the present utility model provides a cooled plasma electrode, wherein one end of a first cooling channel 150 is sealedly connected to one end of a first diverter channel 120, one end of a second cooling channel 160 is sealedly connected to the other end of the first diverter channel 120, the other end of the first cooling channel 150 is sealedly connected to one end of the second diverter channel 130, the other end of the second cooling channel 160 is sealedly connected to the other end of the second diverter channel 130, the first cooling channel 150 and the second cooling channel 160 are parallel to each other, the first cooling channel 150 and the first diverter channel 120 are perpendicular to each other, and the first cooling channel 150 and the second diverter channel 130 are perpendicular to each other.
[0038] Among them, the first diversion channel 120 is provided with a diversion hole 121 at each end, the second diversion channel 130 is provided with a collecting hole 131 at each end, one end of the first cooling channel 150 and one end of the second cooling channel 160 are respectively provided with a first inlet 151 and a second inlet 161, and the other end of the first cooling channel 150 and the other end of the second cooling channel 160 are respectively provided with a first outlet 152 and a second outlet 162, the first inlet 151 and the second inlet 161 are respectively sealed and connected to the diversion holes 121 at both ends of the first diversion channel 120, and the first outlet 152 and the second outlet 162 are respectively sealed and connected to the collecting holes 131 at both ends of the second diversion channel 130.
[0039] The diverter hole 121 , the collecting hole 131 , the first inlet 151 , the first outlet 152 , the second inlet 161 and the second outlet 162 are of the same size and may be circular, elliptical, rectangular or the like, which is not limited in the embodiment of the present invention.
[0040] Based on this, by sealingly connecting one end of the first cooling channel 150 with one end of the first diverter channel 120, and sealingly connecting one end of the second cooling channel 160 with the other end of the first diverter channel 120, the coolant can be evenly diverted to the first cooling channel 150 and the second cooling channel 160, so that the first cooling channel 150 and the second cooling channel 160 absorb heat with the same efficiency. The other end of the first cooling channel 150 is sealed and connected to one end of the second diverter channel 130, and the other end of the second cooling channel 160 is sealed and connected to the other end of the second diverter channel 130, so that the coolant can be temporarily collected in the second diverter channel 130 in preparation for the next step; the first cooling channel 150 and the second cooling channel 160 are parallel to each other, the first cooling channel 150 and the first diverter channel 120 are perpendicular to each other, and the first cooling channel 150 and the second diverter channel 130 are perpendicular to each other, forming the basic shape of the electrode body 100. The vertical structural design can enhance the overall structural strength of the electrode. The change in the flow state of the coolant at the bend helps to remove deposits that may adhere to the tube wall and reduce blockage.
[0041] In one possible implementation, the number of the first cooling channels 150 and the second cooling channels 160 can be multiple. Correspondingly, in addition to the diversion holes 121 at both ends of the first diversion channel 120, multiple diversion holes 121 are also provided on the lower side wall. The number of diversion holes 121 is equal to the sum of the number of the first cooling channels 150 and the number of the second cooling channels 160, and is used to be sealed and connected with each first inlet 151 and each second inlet 161. Specifically, each first cooling channel 150 is arranged on one side of the first diversion channel 120, and each second cooling channel 160 is arranged on the other side of the first diversion channel 120.
[0042] Similarly, the number of first cooling channels 150 and second cooling channels 160 can be multiple. Correspondingly, in addition to the collecting holes 131 at both ends of the second diversion channel 130, multiple collecting holes 131 are also provided on the upper side wall. The number of collecting holes 131 is equal to the sum of the number of first cooling channels 150 and the number of second cooling channels 160, and is used to be sealed and connected with each first outlet 152 and each second outlet 162. Specifically, each first cooling channel 150 is arranged on one side of the second diversion channel 130, and each second cooling channel 160 is arranged on the other side of the second diversion channel 130.
[0043] refer to Figure 1 and Figure 2 An embodiment of the present invention provides a cooled plasma electrode, wherein the upper side wall of the second shunt channel 130 is provided with a plurality of evenly distributed first reflow holes 132, the number of the first reflow holes 132 being the same as the number of the third cooling channels 170, one end of each third cooling channel 170 being sealed and connected to the corresponding first reflow hole 132, and the third cooling channel 170 and the second shunt channel 130 being perpendicular to each other.
[0044] Among them, the inlet of the third cooling channel 170 is the third inlet 171, the outlet of the third cooling channel 170 is the third outlet 172, the first return hole 132 is sealed and connected to the third inlet 171, the first return hole 132 and the third inlet 171 are the same size, and the shapes can be circular, elliptical, rectangular, etc., which are not limited in the embodiments of the present utility model.
[0045] Based on this, a plurality of evenly distributed first reflow holes 132 are provided through the upper side wall of the second diversion channel 130. The number of the first reflow holes 132 is the same as the number of the third cooling channels 170. One end of each third cooling channel 170 is sealed and connected to the corresponding first reflow hole 132, which can evenly divert the coolant to each third cooling channel 170, so that each third cooling channel 170 absorbs heat with the same efficiency. The third cooling channel 170 and the second diversion channel 130 are perpendicular to each other, which can enhance the overall structural strength of the electrode. The change in the flow state of the coolant at the turning point helps to remove deposits that may be attached to the tube wall and can reduce blockage.
[0046] refer to Figure 1 and Figure 2An embodiment of the present invention provides a cooled plasma electrode, wherein a plurality of evenly distributed second reflow holes 141 are provided on the lower side wall of the confluence channel 140, and the number of the second reflow holes 141 is the same as the number of the third cooling channels 170. The other end of each third cooling channel 170 is sealed and connected to the corresponding second reflow hole 141, and the third cooling channel 170 and the confluence channel 140 are perpendicular to each other.
[0047] The second return hole 141 is sealed and connected to the third outlet 172 . The second return hole 141 and the third outlet 172 are of the same size and can be circular, elliptical, rectangular, etc., which is not limited in the embodiment of the present invention.
[0048] Based on this, a plurality of evenly distributed second reflow holes 141 are provided through the lower side wall of the converging channel 140. The number of the second reflow holes 141 is the same as the number of the third cooling channels 170. The other end of each third cooling channel 170 is sealed and connected with the corresponding second reflow hole 141. Each third cooling channel 170 can output the heated coolant to the converging channel 140 in a uniform manner. The converging channel 140 outputs the heated coolant in a concentrated manner, which can prevent the heated coolant from destroying the uniformity of the temperature distribution inside the electrode, thereby improving the performance of the electrode and increasing the life of the electrode. The third cooling channel 170 and the converging channel 140 are perpendicular to each other, which can enhance the overall structural strength of the electrode. The change in the flow state of the coolant at the turning point helps to remove deposits that may adhere to the pipe wall and can reduce blockage.
[0049] refer to Figure 1 and Figure 2 An embodiment of the present invention provides a cooled plasma electrode, wherein the first cooling channel 150 , the second cooling channel 160 and the plurality of third cooling channels 170 have the same length, and the upper side wall of the converging channel 140 is in contact with the lower side wall of the first diverting channel 120 .
[0050] One end of the converging channel 140 is in contact with the side wall of the first cooling channel 150 , and the other end is in contact with the side wall of the second cooling channel 160 , which can make the electrode have a higher structural strength.
[0051] Based on this, the first cooling channel 150, the second cooling channel 160 and the plurality of third cooling channels 170 have the same length, and the upper side wall of the converging channel 140 fits with the lower side wall of the first diverting channel 120, which can enhance the overall structural strength of the electrode.
[0052] refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 , Figure 3This is a schematic diagram of the structure of the bypass cover and partially cooled plasma electrode provided in an embodiment of the present utility model. Figure 4 This is a structural schematic diagram of the bypass channel and bypass cover provided in an embodiment of the present invention. The embodiment of the present invention provides a cooled plasma electrode. A guide block 180 is further provided inside the electrode body 100. The inner cavity of the guide block 180 is provided with a liquid inlet cavity 181 and a liquid outlet cavity 183. The first diversion channel 120 is sealed and connected to the liquid inlet cavity 181, and the confluence channel 140 is sealed and connected to the liquid outlet cavity 183 through the bypass channel 186.
[0053] refer to Figure 1 and Figure 2 The embodiment of the present invention provides a cooled plasma electrode, wherein the guide block 180 is in a long strip shape, the guide block 180 is in contact with the upper side wall of the first diversion channel 120 , and the liquid inlet cavity 181 and the liquid outlet cavity 183 are separated by a spacer 185 .
[0054] refer to Figure 1 and Figure 2 The embodiment of the present utility model provides a cooling type plasma electrode, wherein the liquid inlet cavity 181 inputs the cooling liquid through the liquid infusion pipe 187 , and the liquid outlet cavity 183 outputs the cooling liquid through the liquid outlet pipe 188 .
[0055] The liquid inlet cavity 181 and the liquid outlet cavity 183 have the same volume and shape.
[0056] Among them, the lower side wall of the guide block 180 is provided with a first guide hole 182, the first guide hole 182 is connected to the liquid inlet chamber 181, and the upper side wall of the first diversion channel 120 is provided with a second guide hole 122. The first guide hole 182 and the second guide hole 122 are sealed and connected. The coolant passes through the first guide hole 182 and the second guide hole 122 in turn, and flows from the liquid inlet chamber 181 into the first diversion channel 120.
[0057] Among them, the guide block 180 is provided with a third guide hole 184, the third guide hole 184 is connected to the liquid outlet cavity 183, and the side wall of the confluence channel 140 is provided with a fourth guide hole 142. The third guide hole 184 and the fourth guide hole 142 are located on the same side of the electrode body 100 and are aligned in the height direction of the electrode body 100. The cooled plasma electrode also includes a bypass cover plate 189. One side of the bypass cover plate 189 is connected to the outer confluence channel of the guide block 180. 140 is fitted to the outer side, the bypass cover 189 covers the third guide hole 184 and the fourth guide hole 142 at the same time, the bypass channel 186 is arranged on the side of the bypass cover 189 close to the confluence channel 140, the bypass channel 186 can be sealed and connected with the third guide hole 184 and the fourth guide hole 142 respectively, and the coolant passes through the fourth guide hole 142, the bypass channel 186 and the third guide hole 184 in turn, and flows into the liquid outlet cavity 183 from the confluence channel 140.
[0058] Based on this, by setting a guide block 180 inside the electrode body 100, the inner cavity of the guide block 180 is provided with a liquid inlet cavity 181 and a liquid outlet cavity 183, the first shunt channel 120 is sealed and connected to the liquid inlet cavity 181, and the liquid inlet cavity 181 is input with coolant through the liquid infusion pipe 187, which can form a coolant buffer zone to prevent the coolant from directly contacting the hotter part inside the electrode, reducing the thermal stress inside the electrode, and helping to increase the life of the electrode; the confluence channel 140 and the liquid outlet cavity 183 are connected through a bypass channel 186 is sealed and connected, and the liquid outlet cavity 183 outputs the coolant through the liquid outlet pipe 188, which can form a thermal buffer zone to prevent the heated coolant from being directly input into the liquid outlet pipe 188, thereby reducing the pressure of the liquid outlet pipe 188 and improving the stability of the cooled plasma electrode during operation; the guide block 180 is long and narrow, and the guide block 180 is in contact with the upper side wall of the first diversion channel 120, and the liquid inlet cavity 181 and the liquid outlet cavity 183 are separated by the spacer 185, which can reduce the volume of the electrode and is beneficial to the installation and disassembly of the electrode.
[0059] refer to Figure 5 , Figure 5 This is a structural schematic diagram of another perspective of a cooled plasma electrode provided by an embodiment of the present invention. The embodiment of the present invention provides a cooled plasma electrode, wherein the first diverter channel 120, the second diverter channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the plurality of third cooling channels 170 are all in the shape of elongated strips, and the center lines of the first diverter channel 120, the second diverter channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the plurality of third cooling channels 170 extending in the length direction are all in the reference plane, and the center line of the bypass channel 186 is not in the reference plane.
[0060] Among them, the cross-sections of the first diversion channel 120, the second diversion channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the plurality of third cooling channels 170 can be circular, elliptical or polygonal, which is not limited in the embodiment of the present invention.
[0061] Based on this, the first diversion channel 120, the second diversion channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the multiple third cooling channels 170 are all long strips, which can disperse the thermal stress caused by the temperature gradient, reduce the deformation and crack risks of the electrode material, and thus extend the service life of the electrode; the center lines of the first diversion channel 120, the second diversion channel 130, the converging channel 140, the first cooling channel 150, the second cooling channel 160 and the multiple third cooling channels 170 extending along the length direction are all in the reference plane, and the center line of the bypass channel 186 is not in the reference plane, which can enhance the overall structural strength of the electrode.
[0062] According to the plasma processing system of the second embodiment of the present invention, the plasma processing system includes the above-mentioned cooled plasma electrode.
[0063] According to the plasma processing system of the embodiment of the present invention, since it includes the above-mentioned cooled plasma electrode, it has all the technical effects of the above-mentioned cooled plasma electrode.
[0064] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A cooled plasma electrode, characterized in that: The electrode body comprises an electrode body, wherein a first shunt channel, a second shunt channel, a converging channel, a first cooling channel, a second cooling channel and a plurality of third cooling channels are provided inside the electrode body; Among them, the first cooling channel, the third cooling channel and the second cooling channel are arranged side by side in sequence, one end of the first cooling channel and one end of the second cooling channel are respectively sealed and connected with the first shunt channel, the other end of the first cooling channel and the other end of the second cooling channel are respectively sealed and connected with the second shunt channel, one end of each of the third cooling channels is respectively sealed and connected with the second shunt channel, the other end of each of the third cooling channels is respectively sealed and connected with the converging channel, the first shunt channel is used to input coolant, and the converging channel is used to output the coolant.
2. A cooled plasma electrode according to claim 1, characterized in that: One end of the first cooling channel is sealed and connected to one end of the first diverter channel, one end of the second cooling channel is sealed and connected to the other end of the first diverter channel, the other end of the first cooling channel is sealed and connected to one end of the second diverter channel, the other end of the second cooling channel is sealed and connected to the other end of the second diverter channel, the first cooling channel and the second cooling channel are parallel to each other, the first cooling channel and the first diverter channel are perpendicular to each other, and the first cooling channel and the second diverter channel are perpendicular to each other.
3. The cooled plasma electrode according to claim 1, characterized in that: The upper side wall of the second diversion channel is provided with a plurality of evenly distributed first return holes, the number of the first return holes is the same as the number of the third cooling channels, one end of each of the third cooling channels is sealed and connected with the corresponding first return hole, and the third cooling channel and the second diversion channel are perpendicular to each other.
4. A cooled plasma electrode according to claim 3, characterized in that: The lower side wall of the confluence channel is provided with a plurality of evenly distributed second return holes, the number of the second return holes is the same as the number of the third cooling channels, the other end of each of the third cooling channels is sealed and connected with the corresponding second return hole, and the third cooling channel and the confluence channel are perpendicular to each other.
5. The cooled plasma electrode according to claim 1, characterized in that: The first cooling channel, the second cooling channel, and the plurality of third cooling channels have the same length, and the upper side wall of the converging channel is in contact with the lower side wall of the first diverting channel.
6. The cooled plasma electrode according to claim 1, characterized in that: A guide block is further provided inside the electrode body. The inner cavity of the guide block is provided with a liquid inlet cavity and a liquid outlet cavity. The first diversion channel is sealed and connected to the liquid inlet cavity. The converging channel is sealed and connected to the liquid outlet cavity through a bypass channel.
7. The cooled plasma electrode according to claim 6, characterized in that: The guide block is in an elongated strip shape and fits against the upper side wall of the first diversion channel. The liquid inlet cavity and the liquid outlet cavity are separated by a spacer.
8. The cooled plasma electrode according to claim 6, characterized in that: The cooling liquid is input into the liquid inlet cavity through a liquid infusion pipe, and the cooling liquid is output from the liquid outlet cavity through a liquid outlet pipe.
9. The cooled plasma electrode according to claim 6, characterized in that: The first diverter channel, the second diverter channel, the converging channel, the first cooling channel, the second cooling channel and the plurality of third cooling channels are all in the shape of long strips, and the center lines of the first diverter channel, the second diverter channel, the converging channel, the first cooling channel, the second cooling channel and the plurality of third cooling channels extending in the length direction are all in the reference plane, and the center line of the bypass channel is not in the reference plane.
10. A plasma processing system, characterized in that: A cooled plasma electrode comprising the cooled plasma electrode according to any one of claims 1 to 9.