Spraying device for bell jar of reduction furnace

Abstract

The utility model belongs to the field of spraying, and discloses a reduction furnace bell jar spraying device which comprises a bell jar supporting part, a bell jar rotation driving part, a spraying tool part, a controller and a spraying tool base, the spraying tool base is arranged at the bottom of the spraying tool part, and the spraying tool part is used for spraying a bell jar; the bell jar supporting part is arranged on the operation side of the spraying tool part and used for supporting a bell jar. The bell jar rotation driving component is arranged on the bell jar supporting component in a sliding mode and used for controlling rotation of a bell jar, and the controller is arranged on the side edge of the spraying tool base, electrically connected with the spraying tool component and used for controlling the spraying distance, position and angle. According to the tool structure, the bell jar supporting component and the bell jar rotation driving component are arranged to achieve the synergistic effect, the reduction furnace bell jar can rotate along the axis, the tool structure can be matched with the spraying technology to drive the reduction furnace bell jar to rotate, and the stability of the overall structure can be guaranteed.

Description

Technical Field

[0001] The utility model belongs to the field of spraying, and in particular relates to a reduction furnace bell spraying device. Background Art

[0002] Polysilicon is a material that plays an important role in the photovoltaic, semiconductor and other industries. It can be widely used in the manufacturing of electronic parts and components with high technical requirements, such as capacitors, solar cells, aerospace equipment, etc.

[0003] Polysilicon production primarily utilizes the modified Siemens process, with the reduction furnace being the core equipment. The reduction furnace operates by reacting a mixture of silicon-containing gas and hydrogen to form polysilicon, which is then deposited onto silicon cores. The product is ultimately extracted from the reduction furnace in the form of polysilicon rods.

[0004] At present, spraying heat-reflective materials on the inner wall of the reduction furnace through cold spraying or hot spraying technology is a new method to effectively reduce the heat loss of the reduction furnace; however, due to the high precision requirements of the spraying operation, there is currently no tooling that meets the requirements for stable operation of the reduction furnace bell jar spraying, especially a device that can achieve high-speed and stable rotation. Utility Model Content

[0005] In response to the above problems, the utility model proposes a reduction furnace bell spraying device, including a bell support component, a bell rotation drive component, a spraying tool component, a controller and a spraying tool base, wherein the spraying tool base is arranged at the bottom of the spraying tool component, and the spraying tool component is used to spray the bell; the bell support component is arranged on the operating side of the spraying tool component, and is used to support the bell; the bell rotation drive component is slidably arranged on the bell support component, and is used to control the rotation of the bell, and the controller is arranged on the side of the spraying tool base, and the controller is electrically connected to the spraying tool component, and is used to control the distance, position and angle of the spraying.

[0006] Furthermore, the bell cover support component includes a base, a first support part, a second support part and a limiting groove, the first support part is arranged at one end of the top of the base, the second support part is arranged at the other end of the top of the base, the limiting groove is arranged at the top of the base and is located between the first support part and the second support part, and the bell cover rotation drive component is slidably arranged on the limiting groove.

[0007] Furthermore, the bell cover rotation drive component includes a movable base, a driving motor, a driving wheel, a guide wheel and a belt. The movable base is slidably engaged in the limit groove, the driving motor is arranged on one side of the movable base, the driving wheel is connected to the output end of the driving motor, the guide wheel is arranged on the base and on the same side as the driving wheel, the lower end of the belt is respectively sleeved on the driving wheel and the guide wheel, and the upper end of the belt is sleeved on the outer wall of the bell cover.

[0008] Furthermore, the guide wheel includes a first guide wheel, a second guide wheel and a third guide wheel. The first guide wheel is arranged at the other end of the base opposite to the driving wheel, and the second guide wheel and the third guide wheel are arranged at the middle of the upper end of the base opposite to each other. The distance between the second guide wheel and the third guide wheel is smaller than the diameter of the bell cover.

[0009] Furthermore, the spraying tooling component includes a control console and an adjustable shaft. The control console is arranged on the top of the spraying tooling base, and the adjustable shaft is movably arranged on the control console.

[0010] Furthermore, the adjustable shaft includes a sleeve, a rotating shaft, a first gear, a second gear, an adjustable motor, a third gear, a fourth gear and a fourth gear output shaft and a clamping portion, the sleeve is arranged on the console, the rotating shaft is arranged in the sleeve, the first gear is arranged at one end of the rotating shaft close to the console, the second gear is arranged at the other end of the rotating shaft, the adjustable motor is arranged on the sleeve and close to one side of the console, the third gear is arranged on the output end of the adjustable motor, the third gear is meshed with the first gear, the fourth gear is meshed with the second gear, one end of the fourth gear output shaft is connected to the fourth gear, the other end of the fourth gear output shaft passes through the sleeve and is connected to the clamping portion, and the adjustable motor is electrically connected to the controller.

[0011] Furthermore, the console includes a support and a radially adjustable screw, the radially adjustable screw is arranged on the support, the bushing is arranged at the bottom of the radially adjustable screw, and the controller is electrically connected to the radially adjustable screw.

[0012] Furthermore, the console also includes an axially adjustable motor, an axially adjustable gear and an axially adjustable rack. The axially adjustable motor is arranged on a radially adjustable screw, the axially adjustable gear is arranged on the output end of the axially adjustable motor, and the axially adjustable rack is arranged on the axial outer wall of the sleeve. The axially adjustable gear and the axially adjustable rack are engaged to realize axial displacement of the adjustable shaft, and the controller is electrically connected to the axially adjustable motor.

[0013] Furthermore, the first supporting portion and the second supporting portion further include rollers, and the rollers include at least two.

[0014] Furthermore, the first gear and the second gear are both bevel gears.

[0015] Compared with the prior art, this application has the following beneficial effects:

[0016] 1. The present application cooperates by setting a bell jar supporting component and a bell jar rotating driving component. Specifically, the bell jar is supported by a first supporting part and a second supporting part provided on the bell jar supporting component, and the bell jar is driven to rotate by a driving motor, a belt and other structures provided on the bell jar rotating driving component. The bell jar of the reduction furnace can be rotated along the axis by the coordinated action of the bell jar supporting component and the bell jar rotating driving component. The tooling structure can not only drive the bell jar of the reduction furnace to rotate in cooperation with the spraying process, but also ensure the stability of the overall structure.

[0017] 2. The spray gun support part of this scheme, through the radially adjustable screw, axially adjustable motor, axially adjustable gear, axially adjustable rack and other structures, can realize the adjustable shaft to drive the spray gun to rotate accurately and realize the east-west function in the X / Z axis direction, and can realize the change of spraying distance, spraying position and spraying angle, so as to realize the stable and efficient spraying of any part of the inner wall of the reduction furnace bell jar.

[0018] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be achieved and obtained by the structures indicated in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It shows a front view of the spraying device in the embodiment of the present utility model;

[0021] Figure 2 A schematic diagram of the bell jar rotation drive component in an embodiment of the present utility model is shown;

[0022] Figure 3 A schematic diagram showing an adjustable shaft of a spraying device in an embodiment of the present utility model is shown;

[0023] Figure 4 A schematic diagram of a radially adjustable screw rod in an embodiment of the present utility model is shown.

[0024] In the figure, 1. bell jar supporting component; 11. base; 12. first supporting part; 13. second supporting part; 14. limiting groove; 2. bell jar rotating driving component; 21. movable base; 22. driving motor; 23. driving wheel; 24. guide wheel; 241. first guide wheel; 242. second guide wheel; 243. third guide wheel; 25. belt; 3. spraying tool component; 31. control console; 311. support; 312. radially adjustable screw; 313. axially adjustable motor; 314. axially adjustable gear; 315. axially adjustable rack; 32. adjustable shaft; 321. bushing; 322. rotating shaft; 323. first gear; 324. second gear; 325. adjustable motor; 326. third gear; 327. fourth gear; 328. fourth gear output shaft; 329. clamping part; 4. controller; 5. spraying tool base. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0026] like Figure 1 As shown, a reduction furnace bell spraying device is used to spray the bell of the reduction furnace, and the spraying device includes a bell support component 1, a bell rotation drive component 2, a spraying tool component 3, a controller 4 and a spraying tool base 5, wherein the spraying tool base 5 is arranged at the bottom of the spraying tool component 3, and the spraying tool component 3 is used to spray the bell; the bell support component 1 is arranged on the side where the spraying tool component 3 operates, and is used to support the bell; the bell rotation drive component 2 is slidably arranged on the bell support component 1, and is used to control the rotation of the bell, and the controller 4 is arranged on the side of the spraying tool base 5, and the controller 4 is electrically connected to the spraying tool component 3, and is used to control the distance, position and angle of the spraying.

[0027] In the above device, the bell jar support component 1 is used to stably support the bell jar; the bell jar rotation drive component 2 is used to drive the bell jar to rotate so that the inner wall surface of the bell jar can be evenly sprayed; the spraying tooling component 3 and the controller 4 work together to adjust the spraying distance, spraying angle, and spraying position.

[0028] The bell cover support component 1 includes a base 11, a first support part 12, a second support part 13 and a limiting groove 14, the first support part 12 is arranged at one end of the top of the base 11, the second support part 13 is arranged at the other end of the top of the base 11, the limiting groove 14 is arranged at the top of the base 11 and is located between the first support part 12 and the second support part 13, and the bell cover rotation driving component 2 is slidably arranged on the limiting groove 14.

[0029] The tops of the first support portion 12 and the second support portion 13 are designed as grooves, the shape of the grooves is exactly the same as the shape of the outer wall of the bell jar, but the outer wall of the bell jar does not contact the grooves of the first support portion 12 and the second support portion 13 to avoid friction during rotation.

[0030] The first support portion 12 and the second support portion 13 further include rollers, and the rollers include at least two. Specifically, the first support portion 12 and the second support portion 13 are each provided with at least two rollers, which are respectively provided at both ends of the groove, and the outer wall of the bell housing contacts the rollers.

[0031] Furthermore, in order to improve stability, three rollers are provided on each of the first support portion 12 and the second support portion 13 .

[0032] like Figure 2 As shown, the bell jar rotation drive component 2 includes a movable base 21, a driving motor 22, a driving wheel 23, a guide wheel 24 and a belt 25. The movable base 21 is slidably engaged on the limiting groove 14, and the driving motor 22 is arranged on one side of the movable base 21. The driving wheel 23 is connected to the output end of the driving motor 22. The guide wheel 24 is arranged on the base 11 and on the same side as the driving wheel 23. The lower end of the belt 25 is respectively sleeved on the driving wheel 23 and the guide wheel 24, and the upper end of the belt 25 is sleeved on the outer wall of the bell jar.

[0033] The guide wheel 24 includes a first guide wheel 241, a second guide wheel 242 and a third guide wheel 243. The first guide wheel 241 and the driving wheel 23 are arranged opposite to each other at the other end of the base 11, and the second guide wheel 242 and the third guide wheel 243 are arranged opposite to each other in the middle of the upper end of the base 11. The distance between the second guide wheel 242 and the third guide wheel 243 is less than the diameter of the bell cover.

[0034] The movable base 21 can slide left and right in the limiting groove 14. The position of the movable base 21 can be adjusted to adjust the position of the belt 25. The position change of the belt 25 can be set at different positions of the bell cover.

[0035] After the drive motor 22 is turned on, the driving wheel 23 connected to the output end of the drive motor 22 will rotate, and the belt 25 is mounted on the first guide wheel 241, the second guide wheel 242 and the third guide wheel 243. The driving wheel 23 drives the belt 25 to rotate through the friction between the driving wheel 23 and the belt 25. The rotation of the belt 25 will drive the bell cover to rotate, thereby realizing spraying of different surfaces of multiple bell covers.

[0036] like Figure 3 As shown, the spraying tooling component 3 includes a control console 31 and an adjustable shaft 32 . The control console 31 is arranged on the top of the spraying tooling base 5 , and the adjustable shaft 32 is movably arranged on the control console 31 .

[0037] The adjustable shaft 32 includes a sleeve 321, a rotating shaft 322, a first gear 323, a second gear 324, an adjustable motor 325, a third gear 326, a fourth gear 327, a fourth gear output shaft 328 and a clamping portion 329. The sleeve 321 is set on the console 31, and the rotating shaft 322 is set in the sleeve 321. The first gear 323 is set at one end of the rotating shaft 322 close to the console 31, and the second gear 324 is set at the other end of the rotating shaft 322. The adjustable motor 325 is arranged on the sleeve 321 and close to the side of the console 31. The third gear 326 is arranged on the output end of the adjustable motor 325. The third gear 326 is engaged with the first gear 323. The fourth gear 327 is engaged with the second gear 324. One end of the output shaft of the fourth gear 327 is connected to the fourth gear 327. The other end of the fourth gear output shaft 328 passes through the sleeve 321 and is connected to the clamping part 329. The adjustable motor 325 is electrically connected to the controller 4.

[0038] The controller 4 controls the activation of the adjustable motor 325, which drives the third gear 326 to rotate. Since the third gear 326 is engaged with the first gear 323, the first gear 323 is driven to rotate. The rotation of the first gear 323 drives the rotation shaft 322 to rotate. The rotation of the rotation shaft 322 drives the second gear 324 to rotate. Since the fourth gear 327 is engaged with the second gear 324, the second gear 324 drives the fourth gear 327 to rotate. The fourth gear 327 drives the fourth gear output shaft 328 to rotate. Since the clamping part 329 is connected to the fourth gear output shaft 328, the angle of the clamping part 329 is also rotatable. During the spraying process, the clamping part 329 is connected to the spray gun. In order to achieve the best spraying effect, the controller 4 pre-sets a program to rotate the clamping part 329 by 90 degrees, ensuring that the spray gun can adjust the spraying angle within a range of 90 degrees.

[0039] The console 31 includes a support 311, a radially adjustable screw 312 (such as Figure 4As shown), the radially adjustable screw rod 312 is arranged on the support 311, the shaft sleeve 321 is arranged at the bottom of the radially adjustable screw rod 312, and the controller 4 is electrically connected to the radially adjustable screw rod 312.

[0040] The console 31 also includes an axially adjustable motor 313, an axially adjustable gear 314 and an axially adjustable rack 315. The axially adjustable motor 313 is arranged on a radially adjustable screw 312, the axially adjustable gear 314 is arranged on the output end of the axially adjustable motor 313, and the axially adjustable rack 315 is arranged on the axial outer wall of the sleeve 321. The axially adjustable gear 314 and the axially adjustable rack 315 are engaged to realize the axial displacement of the adjustable shaft 32, and the controller 4 is electrically connected to the axially adjustable motor 313.

[0041] During the spraying process, it is necessary to spray from the entrance of the bell jar to the bottom of the bell jar, so the position of the spray gun installed on the adjustable shaft 32 needs to be continuously moved from the entrance to the bottom of the bell jar, so the controller 4 will control the axially adjustable motor 313 to start, and the axially adjustable motor 313 controls the axially adjustable gear 314 to rotate. Since the axially adjustable rack 315 is engaged with the axially adjustable gear 314, the rotation of the axially adjustable gear 314 will drive the axially adjustable rack 315 to perform axial reciprocating motion. By setting the axial movement speed and distance of the controller 4 in advance, the movement position and speed of the spray gun on the adjustable shaft 32 relative to the bell jar can be controlled, thereby realizing spraying of different positions of the bell jar from front to back.

[0042] If the spray gun sprays unevenly, or some positions of the bell jar need to be sprayed with different thicknesses, the distance between the spray gun and the bell jar can be adjusted. Therefore, the controller 4 will control the radially adjustable screw 312 to perform radial displacement to adjust the distance between the spray gun on the adjustable shaft 32 and the inner wall of the bell jar.

[0043] The first gear 323 and the second gear 324 are both bevel gears.

[0044] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A reduction furnace bell spraying device, characterized in that: The invention comprises a bell jar supporting component (1), a bell jar rotating driving component (2), a spraying tool component (3), a controller (4) and a spraying tool base (5), wherein the spraying tool base (5) is arranged at the bottom of the spraying tool component (3), and the spraying tool component (3) is used for spraying the bell jar; the bell jar supporting component (1) is arranged on the side where the spraying tool component (3) operates, and is used for supporting the bell jar; the bell jar rotating driving component (2) is slidably arranged on the bell jar supporting component (1), and is used for controlling the rotation of the bell jar; the controller (4) is arranged on the side of the spraying tool base (5), and the controller (4) is electrically connected to the spraying tool component (3) and is used for controlling the distance, position and angle of spraying.

2. The reduction furnace bell spraying device according to claim 1, characterized in that: The bell cover supporting component (1) comprises a base (11), a first supporting portion (12), a second supporting portion (13) and a limiting groove (14); the first supporting portion (12) is arranged at one end of the top of the base (11); the second supporting portion (13) is arranged at the other end of the top of the base (11); the limiting groove (14) is arranged at the top of the base (11) and is located between the first supporting portion (12) and the second supporting portion (13); and the bell cover rotating driving component (2) is slidably arranged on the limiting groove (14).

3. The reduction furnace bell spraying device according to claim 2, characterized in that: The bell jar rotation driving component (2) comprises a movable base (21), a driving motor (22), a driving wheel (23), a guide wheel (24) and a belt (25); the movable base (21) is slidably engaged in the limiting groove (14); the driving motor (22) is arranged on one side of the movable base (21); the driving wheel (23) is connected to the output end of the driving motor (22); the guide wheel (24) is arranged on the base (11) and on the same side as the driving wheel (23); the lower end of the belt (25) is respectively sleeved on the driving wheel (23) and the guide wheel (24); and the upper end of the belt (25) is sleeved on the outer wall of the bell jar.

4. The reduction furnace bell spraying device according to claim 3, characterized in that: The guide wheel (24) comprises a first guide wheel (241), a second guide wheel (242) and a third guide wheel (243); the first guide wheel (241) and the driving wheel (23) are arranged at the other end of the base (11) relative to each other; the second guide wheel (242) and the third guide wheel (243) are arranged at the middle of the upper end of the base (11) relative to each other; and the distance between the second guide wheel (242) and the third guide wheel (243) is smaller than the diameter of the bell housing.

5. The reduction furnace bell spraying device according to claim 1, characterized in that: The spraying tool component (3) comprises a control console (31) and an adjustable shaft (32); the control console (31) is arranged on the top of the spraying tool base (5); and the adjustable shaft (32) is movably arranged on the control console (31).

6. The reduction furnace bell spraying device according to claim 5, characterized in that: The adjustable shaft (32) comprises a sleeve (321), a rotating shaft (322), a first gear (323), a second gear (324), an adjustable motor (325), a third gear (326), a fourth gear (327), a fourth gear output shaft (328) and a clamping portion (329); the sleeve (321) is arranged on the console (31); the rotating shaft (322) is arranged in the sleeve (321); the first gear (323) is arranged at one end of the rotating shaft (322) close to the console (31); the second gear (324) is arranged at the other end of the rotating shaft (322); The adjustable motor (325) is arranged on the shaft sleeve (321) and close to one side of the console (31); the third gear (326) is arranged on the output end of the adjustable motor (325); the third gear (326) is engaged with the first gear (323); the fourth gear (327) is engaged with the second gear (324); one end of the output shaft of the fourth gear (327) is connected to the fourth gear (327); the other end of the output shaft of the fourth gear (327) passes through the shaft sleeve (321) and is connected to the clamping portion (329); and the adjustable motor (325) is electrically connected to the controller (4).

7. The reduction furnace bell spraying device according to claim 6, characterized in that: The console (31) comprises a support (311) and a radially adjustable screw (312), wherein the radially adjustable screw (312) is arranged on the support (311), the shaft sleeve (321) is arranged at the bottom of the radially adjustable screw (312), and the controller (4) is electrically connected to the radially adjustable screw (312).

8. The reduction furnace bell spraying device according to claim 7, characterized in that: The console (31) further comprises an axially adjustable motor (313), an axially adjustable gear (314) and an axially adjustable rack (315); the axially adjustable motor (313) is arranged on a radially adjustable screw (312); the axially adjustable gear (314) is arranged on an output end of the axially adjustable motor (313); the axially adjustable rack (315) is arranged on an axial outer wall of a shaft sleeve (321); the axially adjustable gear (314) and the axially adjustable rack (315) are engaged to achieve axial displacement of the adjustable shaft (32); and the controller (4) is electrically connected to the axially adjustable motor (313).

9. The reduction furnace bell spraying device according to claim 2, characterized in that: The first supporting portion (12) and the second supporting portion (13) further include rollers, and the rollers include at least two.

10. The reduction furnace bell spraying device according to claim 6, characterized in that: The first gear (323) and the second gear (324) are both bevel gears.

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