Foaming machine for SIP packaging

Abstract

The utility model relates to a foaming machine for SIP packaging, and relates to the field of foaming machines, the foaming machine comprises a filter and a carbon dioxide recovery device, the top of the filter is detachably provided with an air inlet pipeline, a piston is arranged in the air inlet pipeline in a lifting mode, the air inlet pipeline is provided with an exhaust pipeline in a communicating mode, and the exhaust pipeline is provided with an exhaust pipeline in a communicating mode; a pipe opening of the exhaust pipeline is communicated with the carbon dioxide recovery device, the inlet end of the exhaust pipeline is located below the piston, and an exhaust valve and an air pump are installed on the exhaust pipeline. The position sensing module is used for detecting the position of the piston and outputting an exhaust control signal when the piston reaches a certain height; the exhaust valve and the signal input end of the air pump are in signal connection with the signal output end of the position sensing module. The use amount of carbon dioxide gas can be saved, and the use cost of the foaming machine is saved.

Description

Technical Field

[0001] The present application relates to the field of foaming machines, and in particular to a foaming machine for SIP packaging. Background Art

[0002] During the SIP module packaging process, it is often necessary to use a carbon dioxide foaming machine for auxiliary processing in semiconductor, TFT and other processing processes such as wafer dicing and cleaning.

[0003] A carbon dioxide foaming machine, also known as an ultrapure water anti-static device, carbon dioxide bubbler, deionized water resistivity regulator, or carbon doser, works by adding high-purity carbon dioxide to high-resistivity pure water. This creates an appropriate amount of ions in the water, enhancing its conductivity and reducing its resistivity. This prevents static electricity from damaging products during wafer scribing, cleaning, and other semiconductor and TFT processing processes. It also eliminates static electricity on silicon chips to facilitate cleaning. Finally, after drying, the carbon dioxide evaporates, leaving no impurities and preventing secondary pollution.

[0004] In the prior art, a common carbon dioxide foaming machine mainly includes a chassis, in which a carbon dioxide supply cylinder, a deionized water tank, a gas-liquid mixing cylinder and a filter are installed. The carbon dioxide supply cylinder is connected to a carbon dioxide supply pipe, and the deionized water tank is connected to a deionized water supply pipe. The outlets of the carbon dioxide supply pipe and the deionized water supply pipe are both connected to the gas-liquid mixing cylinder, and a mixing pipe is connected to the gas-liquid mixing cylinder. The pipe mouth of the mixing pipe is connected to the filter. When the carbon dioxide gas and the deionized water are mixed in the gas-liquid mixing cylinder and the mixing pipe and pass through the filter, the larger bubbles formed by the carbon dioxide that is not completely dissolved in the deionized water are filtered by the filter.

[0005] However, since part of the carbon dioxide gas is not completely dissolved in the water, it is retained in the filter to form bubbles, thereby causing waste of carbon dioxide gas. Utility Model Content

[0006] In order to save the amount of carbon dioxide gas and save the cost of using a foaming machine, the present application provides a foaming machine for SIP packaging.

[0007] The present application provides a foaming machine for SIP packaging that adopts the following technical solution:

[0008] A foaming machine for SIP packaging, comprising a filter and a carbon dioxide recovery device, wherein an air intake pipe is detachably mounted on the top of the filter, a piston is provided in the air intake pipe for lifting, an exhaust pipe is provided in communication with the air intake pipe, an exhaust pipe is provided in communication with the exhaust pipe, the pipe opening of the exhaust pipe is in communication with the carbon dioxide recovery device, the inlet end of the exhaust pipe is located below the piston, and an exhaust valve and an air pump are provided on the exhaust pipe; and:

[0009] a position sensing module, configured to detect the position of the piston and output an exhaust control signal when the piston reaches a certain height;

[0010] The signal input end of the exhaust valve and the air pump is connected to the signal output end of the position sensing module. The exhaust valve receives the exhaust control signal and is connected to the exhaust pipe. The air pump and the carbon dioxide recovery device receive the exhaust control signal and start.

[0011] By adopting the above technical solution, during the actual use of the foaming machine, the carbon dioxide gas in the filter flows into the air intake pipe. As the amount of carbon dioxide gas increases, the pressure applied to the piston increases, and the piston is forced to move upward. When the piston reaches a certain height, the position sensing module outputs an exhaust control signal. After receiving the exhaust control signal, the exhaust valve is connected to the exhaust pipe, and the air pump and the carbon dioxide recovery device are started to recover and compress the carbon dioxide gas in the filter and the air intake pipe for recycling, thereby saving the use cost of the foaming machine.

[0012] Preferably, a top plate is fixedly connected to the top of the air intake pipe, a push rod is fixedly installed on the top of the piston, and a rod hole is formed on the top plate for the push rod to extend out;

[0013] An installation box is fixedly mounted on the inner wall of the chassis, a through hole is opened at the bottom of the installation box, and the end of the push rod extending out of the rod hole passes through the through hole and extends into the installation box;

[0014] The position sensing module includes:

[0015] a thin film pressure sensor, fixedly mounted on the inner wall of the top of the installation box, for detecting the contact pressure between the thin film pressure sensor and the ejector rod and outputting a contact pressure signal;

[0016] A comparator chip, whose signal input end is signal-connected to the signal output end of the thin film pressure sensor, and whose signal output end is signal-connected to the signal input ends of the exhaust valve, the air pump and the carbon dioxide recovery device, is used to receive the contact pressure signal and output the exhaust control signal when the contact pressure reaches a set value.

[0017] By adopting the above technical solution, as the carbon dioxide in the filter increases, the piston moves upward, driving the push rod upward. When the push rod contacts the film pressure sensor, the contact pressure sensed by the film pressure sensor increases. When the contact pressure rises to a certain value, the comparator chip outputs an exhaust control signal, which can automatically control the exhaust valve to connect to the exhaust pipe and automatically start the air pump and carbon dioxide recovery device when the carbon dioxide gas in the filter reaches a certain amount.

[0018] Preferably, two mounting rods are fixedly mounted on the top inner wall of the mounting box, a reset plate is fixedly mounted on the top rod, and both ends of the reset plate are slidably mounted on the two mounting rods respectively;

[0019] Reset springs are coaxially mounted on the two mounting rods, and two ends of the two reset springs are fixedly connected to the inner wall of the mounting box and the reset plate, respectively.

[0020] By adopting the above technical solution, when the foaming machine is turned off and the amount of carbon dioxide in the filter is reduced, the return spring can exert downward pressure on the return plate and the push rod, thereby improving the smoothness and stability of the piston reset.

[0021] Preferably, a sleeve is fixedly connected to the top plate, and the sleeve is sleeved on the outside of the top rod.

[0022] By adopting the above technical solution, the sleeve can limit the position of the push rod during the lifting process, thereby reducing the occurrence of tilting of the push rod.

[0023] Preferably, an inspection opening is provided on the installation box, and a box door is hinged on the inspection opening.

[0024] By adopting the above technical solution, when it is necessary to maintain or inspect the film pressure sensor, reset spring, etc. in the installation box, the operator can open the box door and perform relevant operations through the inspection port.

[0025] Preferably, a first connecting portion is formed at the bottom of the exhaust duct, and an internal thread is provided in the first connecting portion;

[0026] A mounting seat is fixedly mounted on the filter, a second connecting portion is integrally formed on the mounting seat, an external thread is provided on the outer side of the second connecting portion, and the first connecting portion is threadedly mounted on the second connecting portion.

[0027] By adopting the above technical solution, through the mutual coordination and use of the first connecting part and the second connecting part, the technical effect of detachable connection between the exhaust duct and the filter can be achieved, which facilitates subsequent maintenance of the exhaust duct or the filter.

[0028] In summary, the foaming machine for SIP packaging in this application has at least one of the following beneficial technical effects:

[0029] 1. During actual use of the foaming machine, the carbon dioxide gas in the filter flows into the air intake pipe. As the amount of carbon dioxide gas increases, the pressure exerted on the piston increases, and the piston is forced to move upward. When the piston reaches a certain height, the position sensing module outputs an exhaust control signal. After receiving the exhaust control signal, the exhaust valve is connected to the exhaust pipe. The air pump and carbon dioxide recovery device are started to recover and compress the carbon dioxide gas in the filter and the air intake pipe for recycling, which can save the cost of using the foaming machine.

[0030] 2. When the foaming machine is turned off and the amount of carbon dioxide in the filter decreases, the return spring can exert downward pressure on the return plate and the ejector rod, improving the smoothness and stability of the piston return;

[0031] 3. By setting the threaded connection between the first connecting part and the second connecting part, the technical effect of a detachable connection between the exhaust duct and the filter can be achieved, which is convenient for subsequent maintenance of the exhaust duct or the filter. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram used to illustrate the overall structure of the foaming machine in an embodiment of the present application.

[0033] Figure 2 The embodiment of the present application is a schematic diagram for showing the internal system connection structure of the foaming machine.

[0034] Figure 3 This is a schematic diagram of an embodiment of the present application used to illustrate the connection structure between the filter and the air intake duct.

[0035] Figure 4 This is a schematic diagram of an embodiment of the present application used to illustrate the internal signal transmission of the foaming machine.

[0036] Explanation of the accompanying drawings: 1. Filter; 11. Second connecting part; 2. Carbon dioxide recovery device; 3. Inlet pipe; 31. Limiting convex ring; 32. Top plate; 33. Rod hole; 34. Sleeve; 35. First connecting part; 4. Piston; 41. Push rod; 42. Reset plate; 5. Exhaust pipe; 51. Exhaust valve; 52. Air pump; 6. Mounting box; 61. Through hole; 62. Mounting rod; 63. Reset spring; 64. Inspection port; 65. Box door; 7. Thin film pressure sensor; 8. Chassis. DETAILED DESCRIPTION

[0037] The following is combined with Figure 1-4 This application is described in further detail.

[0038] Example

[0039] The embodiment of the present application discloses a foaming machine for SIP packaging. Figures 1-4It mainly includes a filter 1 and a carbon dioxide recovery device 2. An intake pipe 3 is detachably installed on the top of the filter 1. A piston 4 is installed in the intake pipe 3 for lifting. A limiting convex ring 31 is fixedly installed on the inner wall of the intake pipe 3 for limiting the lowest position of the piston 4.

[0040] The intake pipe 3 is connected to an exhaust pipe 5, and the exhaust pipe 5 is connected to an exhaust pipe 5. The pipe mouth of the exhaust pipe 5 is connected to the carbon dioxide recovery device 2. The inlet end of the exhaust pipe 5 is located below the piston 4. An exhaust valve 51 and an air pump 52 are installed on the exhaust pipe 5.

[0041] And: a position sensing module, used to detect the position of the piston 4 and output an exhaust control signal when the piston 4 reaches a certain height; the signal input end of the exhaust valve 51 and the air pump 52 is connected to the signal output end of the position sensing module, the exhaust valve 51 receives the exhaust control signal and connects to the exhaust pipe 5, the air pump 52 and the carbon dioxide recovery device 2 receive the exhaust control signal and start.

[0042] During the actual use of the foaming machine, the carbon dioxide gas in the filter 1 flows into the air intake pipe 3. As the amount of carbon dioxide gas increases, the pressure applied to the piston 4 increases, and the piston 4 is forced to move upward. When the piston 4 reaches a certain height, the position sensing module outputs an exhaust control signal. After receiving the exhaust control signal, the exhaust valve 51 is connected to the exhaust pipe 5, and the air pump 52 and the carbon dioxide recovery device 2 are started to recover and compress the carbon dioxide gas in the filter 1 and the air intake pipe 3 for recycling, which can save the use cost of the foaming machine.

[0043] It should be noted that the carbon dioxide recovery device 2 used in this application is a small carbon dioxide recovery device 2 of model RE80 / 160. This device can realize the recovery and storage of carbon dioxide, which will not be described in detail here.

[0044] Reference Figure 3 The top of the air intake pipe 3 is fixedly connected with a top plate 32, and the top of the piston 4 is fixedly installed with a push rod 41. The top plate 32 is penetrated by a rod hole 33 for the push rod 41 to extend out; the inner wall of the chassis 8 is fixedly installed with an installation box 6, and the bottom of the installation box 6 is provided with a through hole 61. The end of the push rod 41 extending through the rod hole 33 extends into the installation box 6 through the through hole 61.

[0045] Reference Figure 3 and Figure 4The position sensing module includes: a thin film pressure sensor 7, which is fixedly installed on the top inner wall of the installation box 6, and is used to detect the contact pressure between the thin film pressure sensor 7 and the push rod 41 and output a contact pressure signal; a comparator chip, whose signal input end is connected to the signal output end of the thin film pressure sensor 7, and whose signal output end is connected to the signal input end of the exhaust valve 51, the air pump 52 and the carbon dioxide recovery device 2, and is used to receive the contact pressure signal and output an exhaust control signal when the contact pressure reaches a set value.

[0046] As the carbon dioxide in the filter 1 increases, the piston 4 moves upward, driving the push rod 41 upward. When the push rod 41 contacts the film pressure sensor 7, the contact pressure sensed by the film pressure sensor 7 increases. When the contact pressure rises to a certain value, the comparator chip outputs an exhaust control signal, which can automatically control the exhaust valve 51 to connect to the exhaust pipe 5 and automatically start the air pump 52 and the carbon dioxide recovery device 2 when the carbon dioxide gas in the filter 1 reaches a certain amount.

[0047] It should be noted that in the embodiment of the present application, when the piston 4 moves up until the contact pressure between the push rod 41 and the film pressure sensor 7 reaches the set pressure, the air pump 52 extracts the carbon dioxide gas, and the carbon dioxide gas flowing in and out of the intake pipe 3 is balanced, and the positions of the piston 4 and the push rod 41 remain unchanged, and pressure is continuously applied to the film pressure sensor 7; when the amount of carbon dioxide decreases and the piston 4 moves down, the exhaust valve 51 cuts off the exhaust pipe 5, and the air pump 52 and the carbon dioxide recovery device 2 are turned off, which can achieve the technical effect of automatically starting and closing the exhaust valve 51, the air pump 52 and the carbon dioxide recovery device 2.

[0048] Reference Figure 3 Two mounting rods 62 are fixedly installed on the top inner wall of the mounting box 6, and a reset plate 42 is fixedly installed on the top rod 41. The two ends of the reset plate 42 are respectively slidably set on the two mounting rods 62; reset springs 63 are respectively coaxially installed on the two mounting rods 62, and the two ends of the two reset springs 63 are respectively fixedly connected to the inner wall of the mounting box 6 and the reset plate 42.

[0049] When the foaming machine is turned off and the amount of carbon dioxide in the filter 1 decreases, the return spring 63 returns to its original position and applies downward pressure to the return plate 42 and the push rod 41 , thereby improving the smoothness and stability of the return of the piston 4 .

[0050] Reference Figure 3 A sleeve 34 is fixedly connected to the top plate 32, and the sleeve 34 is sleeved on the outside of the top rod 41. The sleeve 34 can limit the position of the top rod 41 during the lifting process, thereby reducing the tilt of the top rod 41.

[0051] In the embodiment of the present application, the installation box 6 is provided with an inspection port 64, to which a door 65 is hinged. When maintenance or repair of the membrane pressure sensor 7, the return spring 63, etc. in the installation box 6 is required, the operator can open the door 65 and perform relevant operations through the inspection port 64.

[0052] Reference Figure 3 A first connecting portion 35 is formed at the bottom of the exhaust pipe 5, and an internal thread is provided in the first connecting portion 35; a second connecting portion 11 is integrally formed on the mounting seat fixedly installed on the filter 1, and an external thread is provided on the outer side of the second connecting portion 11, and the first connecting portion 35 is threadedly installed on the second connecting portion 11.

[0053] By coordinating and using the first connecting portion 35 and the second connecting portion 11 , a technical effect of a detachable connection between the exhaust duct 5 and the filter 1 can be achieved, facilitating subsequent maintenance of the exhaust duct 5 or the filter 1 .

[0054] The implementation principle of a foaming machine for SIP packaging in an embodiment of the present application is as follows: during the actual use of the foaming machine, the carbon dioxide gas in the filter 1 flows into the air intake pipe 3. As the amount of carbon dioxide gas increases, the pressure applied to the piston 4 increases, and the piston 4 is forced to move upward. When the piston 4 reaches a certain height, the position sensing module outputs an exhaust control signal. After receiving the exhaust control signal, the exhaust valve 51 is connected to the exhaust pipe 5, and the air pump 52 and the carbon dioxide recovery device 2 are started to recover and compress the carbon dioxide gas in the filter 1 and the air intake pipe 3 for recycling, thereby saving the use cost of the foaming machine.

[0055] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A foaming machine for SIP packaging, characterized in that: The invention comprises a filter (1) and a carbon dioxide recovery device (2); an air intake pipe (3) is detachably mounted on the top of the filter (1); a piston (4) is lifted and lowered in the air intake pipe (3); an exhaust pipe (5) is connected to the air intake pipe (3); an exhaust pipe (5) is connected to the exhaust pipe (5); the pipe mouth of the exhaust pipe (5) is connected to the carbon dioxide recovery device (2); the inlet end of the exhaust pipe (5) is located below the piston (4); an exhaust valve (51) and an air pump (52) are mounted on the exhaust pipe (5); and: A position sensing module, for detecting the position of the piston (4) and outputting an exhaust control signal when the piston (4) reaches a certain height; The signal input ends of the exhaust valve (51) and the air pump (52) are connected to the signal output end of the position sensing module; the exhaust valve (51) receives the exhaust control signal and is connected to the exhaust pipe (5); the air pump (52) and the carbon dioxide recovery device (2) receive the exhaust control signal and are started.

2. A foaming machine for SIP packaging according to claim 1, characterized in that: A top plate (32) is fixedly connected to the top of the air intake pipe (3), a top rod (41) is fixedly installed on the top of the piston (4), and a rod hole (33) is formed on the top plate (32) for the top rod (41) to extend out. An installation box (6) is fixedly mounted on the inner wall of the chassis (8), a through hole (61) is provided at the bottom of the installation box (6), and the end of the push rod (41) extending out of the rod hole (33) passes through the through hole (61) and extends into the installation box (6); The position sensing module includes: a thin film pressure sensor (7), fixedly mounted on the top inner wall of the installation box (6), for detecting contact pressure with the ejector rod (41) and outputting a contact pressure signal; A comparator chip, wherein the signal input end is signal-connected to the signal output end of the film pressure sensor (7), and the signal output end is signal-connected to the signal input end of the exhaust valve (51), the air pump (52) and the carbon dioxide recovery device (2), and is used to receive the contact pressure signal and output the exhaust control signal when the contact pressure reaches a set value.

3. A foaming machine for SIP packaging according to claim 2, characterized in that: Two mounting rods (62) are fixedly mounted on the top inner wall of the mounting box (6), a reset plate (42) is fixedly mounted on the top rod (41), and both ends of the reset plate (42) are respectively slidably mounted on the two mounting rods (62); A reset spring (63) is coaxially mounted on each of the two mounting rods (62), and both ends of the two reset springs (63) are fixedly connected to the inner wall of the mounting box (6) and the reset plate (42).

4. A foaming machine for SIP packaging according to claim 2, characterized in that: A sleeve (34) is fixedly connected to the top plate (32), and the sleeve (34) is sleeved on the outside of the top rod (41).

5. The foaming machine for SIP packaging according to claim 2, characterized in that: The installation box (6) is provided with an inspection opening (64), and a box door (65) is hinged on the inspection opening (64).

6. The foaming machine for SIP packaging according to claim 1, characterized in that: A first connecting portion (35) is formed at the bottom of the exhaust pipe (5), and an internal thread is provided in the first connecting portion (35); A mounting seat is fixedly mounted on the filter (1), a second connecting portion (11) is integrally formed on the mounting seat, an external thread is provided on the outer side of the second connecting portion (11), and the first connecting portion (35) is threadedly mounted on the second connecting portion (11).

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