High-sealing-performance vacuum chamber angle valve

Abstract

The utility model discloses a high-sealing-performance vacuum chamber angle valve, and relates to improvement of angle valves. Comprising a valve body, an air inlet hole, a first air outlet hole and a second air outlet hole are formed in the valve body, the first air outlet hole, the second air outlet hole and the air inlet hole are communicated with one another, the valve body is fixed to the outer wall of the vacuum chamber, the air inlet hole is communicated with the vacuum chamber, the first air outlet hole is communicated with a molecular pump, and the second air outlet hole is communicated with a mechanical pump. The valve body is provided with a sealing assembly, and the sealing assembly extends into the valve body and is used for closing or opening the first air outlet hole. The sealing assembly comprises a first sealing part and a second sealing part, and the second sealing part is arranged on the end face, facing the first air outlet hole, of the first sealing part. When the first sealing part abuts against the periphery of the first air outlet hole, the second sealing part is extruded by the first sealing part to deform and abuts against the periphery of the first air outlet hole. The sealing structure has the advantage of being better in sealing performance.

Description

Technical Field

[0001] The utility model relates to the improvement of an angle valve, in particular to a vacuum chamber angle valve with high sealing performance. Background Art

[0002] Angle valves are a type of valve that connects pipes and controls the flow of gas within them. With the continuous emergence of various high-tech technologies, the application areas of angle valves have continued to expand. For example, in nanotechnology, it is often necessary to first create a vacuum environment—that is, to generate, improve, and maintain a vacuum in a closed space using certain vacuum equipment. However, during vacuuming, the vacuuming device often requires a sealed connection with the vacuum chamber, the enclosed space being evacuated, through an angle valve.

[0003] To meet the vacuum requirements of actual production, the sealing structure of common angle valves used during the vacuum pumping process is to fix a sealing sheet to the top of a pressure rod. During operation, the sealing sheet is covered on the angle valve interface by the pressure rod through external pressure to achieve a sealing effect. However, during this process, when the sealing sheet covers the angle valve interface, the connection between the sealing sheet and the angle valve interface does not always fit together completely, resulting in uneven force on the sealing sheet, which in turn affects the sealing effect. In summary, the problem that needs to be solved urgently is to improve the existing angle valve structure to improve its sealing and stability. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a vacuum chamber angle valve with high sealing performance.

[0005] The utility model adopts the following technical solution: a high-sealing vacuum chamber angle valve, comprising a valve body, an air inlet, a first air outlet, and a second air outlet are provided on the valve body, the first air outlet, the second air outlet and the air inlet are connected to each other, the valve body is fixed to the outer wall of the vacuum chamber, the air inlet is connected to the vacuum chamber, the first air outlet is connected to a molecular pump, and the second air outlet is connected to a mechanical pump, the valve body is provided with a sealing component, and the sealing component extends into the valve body for closing or opening the first air outlet;

[0006] The sealing assembly includes a first sealing portion and a second sealing portion. The second sealing portion is arranged on the end surface of the first sealing portion facing the first air outlet. When the first sealing portion abuts against the periphery of the first air outlet, the second sealing portion is squeezed and deformed by the first sealing portion and abuts against the periphery of the first air outlet.

[0007] The first sealing portion includes a cylinder, a piston rod of the cylinder is inserted into the valve body and extends toward the first air outlet, a pressing sheet is provided on the piston rod, and the second sealing portion is provided on the pressing sheet;

[0008] When the piston rod pushes the pressing sheet to abut against the first air outlet, the second sealing portion abuts against the first air outlet and is squeezed and deformed by the first sealing portion.

[0009] The pressing plate is connected to the piston rod through a movable joint, a connecting groove is provided on the pressing plate, and the movable joint includes an arc-shaped joint, one end of the arc-shaped joint is fixed on the piston rod, and the other end of the arc-shaped joint is inserted into and engaged in the connecting groove, and a gap is provided between the arc-shaped joint and the connecting groove.

[0010] The connecting groove is a square groove, and the top of the square groove is open.

[0011] The second sealing portion includes an airbag fixed on the end surface of the pressing sheet. An air cavity is formed between the airbag and the pressing sheet. When the pressing sheet abuts against the first air outlet, the air cavity is inflated and expanded.

[0012] The rod body of the piston rod is hollow to form an air flow channel, one end of the air flow channel is communicated with the air cavity, and an air supply hole is provided on the side wall of the rod body, and the air supply hole is communicated with the air flow channel.

[0013] The air supply hole is communicated with the air outlet of the mechanical pump through a branch pipe. An air release pipe is provided on the branch pipe. The air release pipe and the branch pipe are connected through a switching valve.

[0014] Compared to the prior art, the second sealing portion of the present invention is squeezed and deformed by the first sealing portion when the first sealing portion abuts the periphery of the first vent, and then abuts the periphery of the first vent. When the first vent needs to be sealed, the first and second sealing portions simultaneously abut the periphery of the first vent, thereby sealing the first vent. At the same time, the second sealing portion has the ability to deform, which can more accurately fill the gap between the sealing component and the first vent, resulting in a better sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of the vacuum chamber angle valve in the utility model;

[0016] Figure 2 yes Figure 1 Schematic diagram of the structure of the medium-pressure tablet;

[0017] In the figure: 1. valve body; 11. air inlet; 12. first air outlet; 13. second air outlet; 2. vacuum chamber; 3. molecular pump; 4. mechanical pump; 5. sealing assembly; 51. first sealing part; 511. cylinder; 512. pressing piece; 513. connecting groove; 514. arc joint; 515. air flow channel; 52. second sealing part; 521. air bag; 522. air cavity; 523. branch pipe; 524. switching valve. DETAILED DESCRIPTION

[0018] Below, the present invention is further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0019] Reference Figure 1-2 A high-sealing vacuum chamber angle valve includes a valve body 1. The valve body 1 is provided with an air inlet 11, a first air outlet 12, and a second air outlet 13. The first air outlet 12, the second air outlet 13, and the air inlet 11 are interconnected. The valve body 1 is fixed to the outer wall of the vacuum chamber 2. The air inlet 11 is connected to the vacuum chamber 2. The first air outlet 12 is connected to the molecular pump 3, and the second air outlet 13 is connected to the mechanical pump 4. The valve body 1 is provided with a sealing assembly 5. The sealing assembly 5 extends into the valve body 1 and is used to close or open the first air outlet 12. The sealing assembly 5 includes a first sealing portion 51 and a second sealing portion 52. The second sealing portion 52 is provided on the end surface of the first sealing portion 51 facing the first air outlet 12. When the first sealing portion 51 abuts the periphery of the first air outlet 12, the second sealing portion 52 is squeezed and deformed by the first sealing portion 51 and abuts the periphery of the first air outlet 12. When it is necessary to seal the first air outlet 12, the first sealing part 51 and the second sealing part 52 are simultaneously pressed against the periphery of the first air outlet 12, thereby closing the first air outlet 12. At the same time, the second sealing part 52 has a deformation function, which can be used to make up the gap between the sealing component 5 and the first air outlet 12 with higher precision, thereby achieving a better sealing effect.

[0020] The first sealing portion 51 includes a cylinder 511. The piston rod of the cylinder 511 is inserted into the valve body 1 and extends toward the first air outlet 12. A pressing plate 512 is provided on the piston rod, and the second sealing portion 52 is provided on the pressing plate 512. When the piston rod pushes the pressing plate 512 to abut against the first air outlet 12, the second sealing portion 52 abuts against the first air outlet 12 and is squeezed and deformed by the first sealing portion 51. The pressing plate 512 is connected to the piston rod through a movable joint. A connecting groove 513 is provided on the pressing plate 512. The movable joint includes an arc-shaped joint 514. One end of the arc-shaped joint 514 is fixed to the piston rod, and the other end of the arc-shaped joint 514 is inserted into and engaged with the connecting groove 513. A gap is provided between the arc-shaped joint 514 and the connecting groove 513. The connecting groove 513 is a square groove with an open top. In this embodiment, the pressing piece 512 is mounted on the top of the piston rod via a movable joint. The arcuate joint 514 of the movable joint is locked within the connecting groove 513, with a gap remaining between the arcuate joint 514 and the connecting groove 513. Therefore, when the pressing piece 512 seals the air inlet of the molecular pump 3 through the pressure of the piston rod, if the pressing piece 512 and the air inlet of the molecular pump 3 do not fit completely together, the arcuate joint 514 can automatically adjust the fit by moving within the connecting groove 513, ensuring that the pressing piece 512 and the air inlet are evenly and tightly connected, thereby improving the sealing effect and sealing stability.

[0021] The second sealing portion 52 can be fixed on the pressing plate 512. The second sealing portion 52 includes an airbag 521, which is fixed on the end face of the pressing plate 512. An air cavity 522 is formed between the airbag 521 and the pressing plate 512. When the pressing plate 512 abuts against the first air outlet 12, the air cavity 522 is inflated and expanded. The rod body of the piston rod is hollow to form an air flow channel 515. One end of the air flow channel 515 is connected to the air cavity 522. An air supply hole is provided on the side wall of the rod body, and the air supply hole is connected to the air flow channel 515. The air supply hole is connected to the air outlet of the mechanical pump 4 through a branch pipe 523. An air release pipe is provided on the branch pipe 523. The air release pipe and the branch pipe 523 are connected by a switching valve 524. That is, the air extracted from the vacuum chamber 2 by the mechanical pump 4 can be returned through the rod body of the piston rod. The piston rod can be a two-stage retractable piston rod. The first-stage rod body can be directly fixed to the housing and does not participate in the extension and retraction. The second-stage rod body passes through the first-stage rod body and retracts and retracts from the first-stage rod body. The air flow channel 515 runs through the first-stage rod body and the second-stage rod body. The air replenishment hole is provided on the first-stage rod body and communicates with the air flow channel 515. When the pressing plate 512 abuts the first air outlet 12, air flows through the branch pipe 523 to replenish air to the air cavity 522, causing the air cavity 522 to expand, thereby causing the air bag 521 to press against the first air outlet 12. As the air pressure increases, the pressing force between the air bag 521 and the first air outlet 12 increases, thereby achieving a better sealing effect.

[0022] Compared to the prior art, in the present invention, when the first sealing portion 51 abuts the periphery of the first air outlet 12, the second sealing portion 52 is squeezed and deformed by the first sealing portion 51 and abuts the periphery of the first air outlet 12. When the first air outlet 12 needs to be sealed, the first sealing portion 51 and the second sealing portion 52 simultaneously abut the periphery of the first air outlet 12, thereby sealing the first air outlet 12. At the same time, the second sealing portion 52 has the function of deformation, which can be used to more accurately fill the gap between the sealing assembly 5 and the first air outlet 12, thereby achieving a better sealing effect.

[0023] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A high-sealing vacuum chamber angle valve, comprising a valve body, an air inlet, a first air outlet, and a second air outlet, the first air outlet, the second air outlet, and the air inlet being interconnected, the valve body being fixed to the outer wall of the vacuum chamber, the air inlet being in communication with the vacuum chamber, the first air outlet being in communication with a molecular pump, and the second air outlet being in communication with a mechanical pump, characterized in that: The valve body is provided with a sealing assembly, which extends into the valve body and is used to close or open the first air outlet; The sealing assembly includes a first sealing portion and a second sealing portion. The second sealing portion is arranged on the end surface of the first sealing portion facing the first air outlet. When the first sealing portion abuts against the periphery of the first air outlet, the second sealing portion is squeezed and deformed by the first sealing portion and abuts against the periphery of the first air outlet.

2. A high-sealing vacuum chamber angle valve according to claim 1, characterized in that: The first sealing portion includes a cylinder, a piston rod of the cylinder is inserted into the valve body and extends toward the first air outlet, a pressing sheet is provided on the piston rod, and the second sealing portion is provided on the pressing sheet; When the piston rod pushes the pressing sheet to abut against the first air outlet, the second sealing portion abuts against the first air outlet and is squeezed and deformed by the first sealing portion.

3. The high-sealing vacuum chamber angle valve according to claim 2, characterized in that: The pressing plate is connected to the piston rod through a movable joint, a connecting groove is provided on the pressing plate, and the movable joint includes an arc-shaped joint, one end of the arc-shaped joint is fixed on the piston rod, and the other end of the arc-shaped joint is inserted into and engaged in the connecting groove, and a gap is provided between the arc-shaped joint and the connecting groove.

4. A high-sealing vacuum chamber angle valve according to claim 3, characterized in that: The connecting groove is a square groove, and the top of the square groove is open.

5. The high-sealing vacuum chamber angle valve according to claim 2, characterized in that: The second sealing portion includes an airbag fixed on the end surface of the pressing sheet. An air cavity is formed between the airbag and the pressing sheet. When the pressing sheet abuts against the first air outlet, the air cavity is inflated and expanded.

6. The high-sealing vacuum chamber angle valve according to claim 5, characterized in that: The rod body of the piston rod is hollow to form an air flow channel, one end of the air flow channel is communicated with the air cavity, and an air supply hole is provided on the side wall of the rod body, and the air supply hole is communicated with the air flow channel.

7. The high-sealing vacuum chamber angle valve according to claim 6, characterized in that: The air supply hole is communicated with the air outlet of the mechanical pump through a branch pipe. An air release pipe is provided on the branch pipe. The air release pipe and the branch pipe are connected through a switching valve.

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