Integrated storage tank for purifying, collecting and filling hydrogen bromide

Abstract

The utility model discloses an integrated storage tank for purifying, collecting and filling hydrogen bromide. The integrated storage tank comprises a lower container section and an upper container section, a cooling assembly is mounted on the lower container section and used for cooling and decompressing the interior of the lower container section, so that hydrogen bromide products in the production line enter the integrated storage tank; a heating assembly is mounted in the lower container section and is used for heating, boosting and pressurizing the interior of the lower container section, so that the hydrogen bromide product in the integrated storage tank is pressed into the filling tank body; and a purification assembly is arranged in the lower container section and is used for purifying light components. When the hydrogen bromide product is corroded to generate light component impurities, the hydrogen bromide product is slightly heated through the heating assembly, the light component is purified through the purification assembly, the light component impurities such as methane and carbon dioxide are discharged, the hydrogen bromide product reaches the qualified light component index, the structure is compact, and the integrated operation is efficient and convenient.

Description

Technical Field

[0001] The utility model specifically relates to an integrated storage tank for purifying, collecting and filling hydrogen bromide. Background Art

[0002] Hydrogen bromide, also known as hydrobromic acid, is a binary compound of HBr. It is highly corrosive and can react with some active metal powders. It is the basic raw material for the manufacture of various inorganic bromides and certain alkyl bromides.

[0003] In semiconductor manufacturing, electronic specialty gases are crucial throughout the entire semiconductor manufacturing process. Plasma etching technology using hydrogen bromide (HB) as a specialty electronic gas enables highly selective polysilicon etching in 8-inch and 12-inch chip manufacturing processes, making it a core gas in advanced chip manufacturing. Therefore, high-purity electronic-grade HB has become a core product for semiconductor technology.

[0004] In existing technologies, plasma hydrogen bromide etching technology can precisely control etching depth and verticality, while being ozone-safe and greenhouse gas-free, making it a promising alternative to fluorocarbon etching gases. The development of the semiconductor industry has placed higher demands on the purity of electronic-grade hydrogen bromide used in key process etching processes. Impurity contamination during the manufacturing process can easily damage circuit functionality within the chip, leading to integrated circuit failure and affecting the formation of geometric features. Therefore, high-purity hydrogen bromide gas is essential.

[0005] High-purity electronic-grade hydrogen bromide, due to its high etching selectivity and ability to precisely control etching morphology and angle, has become one of the core gases for etching semiconductor phosphorus-doped N-type polysilicon, phosphorus-doped single-crystalline silicon, or two-dimensional semiconductors. Therefore, the development of high-purity hydrogen bromide is of great practical significance to the future development of the electronics industry. Light component removal is key in the hydrogen bromide gas purification process. The lower the light component impurity content, the better the hydrogen bromide quality. Therefore, light components seriously affect product purity and application, which has become a technical bottleneck for the purification of high-purity electronic-grade hydrogen bromide.

[0006] In practice, it is found that due to the strong corrosiveness of hydrogen bromide, hydrogen bromide reacts with the inner wall of the equipment material, causing the light component hydrocarbon impurities in high-purity electronic-grade hydrogen bromide to exceed the standard, such as methane and carbon dioxide. Utility Model Content

[0007] In order to solve the above technical problems, the utility model proposes an integrated storage tank for purifying, collecting and filling hydrogen bromide.

[0008] In order to achieve the above object, the technical solution of the utility model is as follows:

[0009] The utility model discloses an integrated storage tank for purifying, collecting and filling hydrogen bromide, comprising: a lower container section and an upper container section which are interconnected internally;

[0010] A cooling assembly is installed on the lower container section, which is used to cool and reduce the pressure inside the lower container section so that the hydrogen bromide product in the production line can enter the integrated storage tank;

[0011] A heating component is installed inside the lower container section, which is used to increase the temperature and pressure inside the lower container section so that the hydrogen bromide product in the integrated storage tank is pressed into the filling tank body;

[0012] A purification component is installed inside the lower container section, and is used for purifying light components.

[0013] On the basis of the above technical solution, the following improvements can be made:

[0014] As a preferred solution, the cooling component is a jacket installed on the outer wall of the lower container section, and the jacket is filled with refrigerant.

[0015] As a preferred solution, the heating component is a pipe installed inside the lower container section, one end of the pipe is connected to the hot air source input pipe, and the other end is a free end for releasing the hot air source inside the lower container section.

[0016] As a preferred solution, the pipeline is a spirally arranged coil.

[0017] As a preferred solution, the purification component includes: a bubble cap and a spray device, the bubble cap is used for purifying light components, and the spray device is used for liquid hydrogen bromide.

[0018] As a preferred solution, a multi-layer plate body is installed inside the upper container section, and a plurality of blisters are installed on each layer of the plate body.

[0019] As a preferred solution, a temperature sensor is installed on the lower container section, and the temperature sensor is used to detect the temperature inside the lower container section.

[0020] As a preferred solution, a pressure sensor is installed on the lower container section, and the pressure sensor is used to detect the pressure in the lower container section.

[0021] As a preferred solution, a liquid level sensor is installed on the lower container section, and the liquid level sensor is used to detect the liquid level in the lower container section.

[0022] As a preferred solution, the internal volume of the upper container section is the same as the internal volume of the lower container section.

[0023] The utility model discloses an integrated storage tank for purifying, collecting and filling hydrogen bromide, which has the following beneficial effects:

[0024] First, the utility model can realize industrialized continuous operation, and utilizes the cooling component to transfer the hydrogen bromide product purified in the front-end process into the integrated storage tank.

[0025] Second, the present invention utilizes a heating component to increase the temperature and pressure inside the tank, thereby pressing the hydrogen bromide product into a subsequent filling tank.

[0026] Third, when hydrogen bromide products corrode and light component impurities appear, they are slightly heated by the heating component, and the light components are purified by the purification component, so that light component impurities such as methane and carbon dioxide are discharged, so that the hydrogen bromide products meet the qualified light component indicators.

[0027] Fourthly, the utility model saves space, has a compact structure, and is efficient and convenient in integrated operation, and can well avoid excessive process introduction of hydrogen bromide to corrode equipment and pipelines. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a schematic structural diagram of an integrated storage tank provided in an embodiment of the present utility model.

[0030] Among them: 1-lower container section, 11-inlet, 12-outlet, 2-upper container section, 21-exhaust port, 3-jacket, 31-jacket inlet, 32-jacket outlet, 4-pipeline, 41-one end, 42-other end, 5-bubble cap, 6-spraying device, 7-temperature sensor, 8-pressure sensor, 9-liquid level sensor. DETAILED DESCRIPTION

[0031] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] In addition, the expression “including” an element is an “open” expression, which simply means that corresponding components exist and should not be interpreted as excluding additional components.

[0034] In order to achieve the purpose of the present invention, some embodiments of the integrated storage tank for purifying, collecting and filling hydrogen bromide, such as Figure 1 As shown, the integrated storage tank includes: a lower container section 1 and an upper container section 2 which are interconnected internally.

[0035] A cooling assembly is installed on the lower container section 1 , which is used to cool and reduce the pressure inside the lower container section 1 so that the hydrogen bromide product in the production line enters the integrated storage tank through the inlet 11 on the lower container section 1 .

[0036] A heating component is installed inside the lower container section 1, which is used to increase the temperature and pressure inside the lower container section 1 so that the hydrogen bromide product in the integrated storage tank is pressed into the filling tank body (such as a cylinder) through the outlet 12 on the lower container section 1.

[0037] A purification component is installed inside the lower container section 1 , and is used for purifying light components. The tail gas of the light components flows out from the exhaust port 21 at the top of the upper container section 2 .

[0038] The utility model comprises an integrated storage tank: a lower container section 1 and an upper container section 2. The lower container section 1 mainly stores liquid hydrogen bromide and maintains some gas phase safety space to achieve equilibrium between the gas and liquid phases; the upper container section 2 is mainly used for purifying light components.

[0039] The integrated storage tank of the utility model has the function of purifying light component impurities, can effectively collect hydrogen bromide products in the process, and can fill the purified qualified hydrogen bromide into the filling tank body.

[0040] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the cooling component is a jacket 3 installed on the outer wall of the lower container section 1, and the jacket 3 is filled with refrigerant (such as liquid nitrogen, etc.).

[0041] The jacket 3 has a simple structure, and liquid nitrogen is introduced into the jacket from the jacket inlet 31 and flows out from the jacket outlet 32, thereby ensuring that the temperature and pressure inside the lower container section 1 are reduced. Of course, in other embodiments, other cooling components may also be used.

[0042] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, the difference is that the heating component is a pipe 4 installed inside the lower container section 1, one end 41 of the pipe 4 is connected to the hot air source input pipe, and the other end 42 is a free end for releasing the hot air source inside the lower container section 1.

[0043] Furthermore, the pipeline 4 is a spirally arranged coil.

[0044] A coil is set inside the lower container section 1, and a hot gas source (such as high-temperature nitrogen) is introduced to increase the temperature and pressure of the hydrogen bromide in the storage tank so that it can be smoothly filled into the filling tank.

[0045] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the purification component includes: a bubble cap 5 and a spray device 6, the bubble cap 5 is used for light component purification, and the spray device 6 is used for liquid hydrogen bromide.

[0046] Furthermore, a multi-layer plate body is installed inside the upper container section 2 , and a plurality of blisters 5 are installed on each layer of the plate body.

[0047] A bubble tower is installed in the upper container section 2. The size of the bubble 5 is φ15-30 cm and the arrangement density is 5-7%, so that it can be sealed.

[0048] The spraying device 6 is used to achieve full contact between the gas and liquid phases and liquid hydrogen bromide.

[0049] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that a temperature sensor 7 is installed on the lower container section 1, and the temperature sensor 7 is used to detect the temperature inside the lower container section 1.

[0050] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that a pressure sensor 8 is installed on the lower container section 1, and the pressure sensor 8 is used to detect the pressure inside the lower container section 1.

[0051] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, the difference is that a liquid level sensor 9 is installed on the lower container section 1, and the liquid level sensor 9 is used to detect the liquid level in the lower container section 1.

[0052] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the internal volume of the upper container section 2 is the same as the internal volume of the lower container section 1.

[0053] The utility model discloses an integrated storage tank for purifying, collecting and filling hydrogen bromide, which has the following beneficial effects:

[0054] First, the utility model can realize industrialized continuous operation, and utilizes the cooling component to transfer the hydrogen bromide product purified in the front-end process into the integrated storage tank.

[0055] Second, the present invention utilizes a heating component to increase the temperature and pressure inside the tank, thereby pressing the hydrogen bromide product into a subsequent filling tank.

[0056] Third, when hydrogen bromide products corrode and light component impurities appear, they are slightly heated by the heating component, and the light components are purified by the purification component, so that light component impurities such as methane and carbon dioxide are discharged, so that the hydrogen bromide products meet the qualified light component indicators.

[0057] Fourthly, the utility model saves space, has a compact structure, and is efficient and convenient in integrated operation, and can well avoid excessive process introduction of hydrogen bromide to corrode equipment and pipelines.

[0058] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "two ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0059] In the present invention, unless otherwise clearly stipulated and limited, the terms "install", "set", "connect", "fix", "screw" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0060] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements shall fall within the scope of the present invention to be protected. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. An integrated storage tank for hydrogen bromide purification, collection and filling, characterized in that: include: A lower container section and an upper container section that are internally interconnected; A cooling assembly is installed on the lower container section, and the cooling assembly is used to cool and reduce the pressure inside the lower container section so that the hydrogen bromide product in the production line enters the integrated storage tank; A heating component is installed inside the lower container section, and the heating component is used to increase the temperature and pressure inside the lower container section so that the hydrogen bromide product in the integrated storage tank is pressed into the filling tank body; A purification component is installed inside the lower container section, and the purification component is used for purifying light components.

2. The integrated storage tank according to claim 1, characterized in that: The cooling component is a jacket installed on the outer wall of the lower container section, and the jacket is filled with refrigerant.

3. The integrated storage tank according to claim 1, characterized in that: The heating component is a pipe installed inside the lower container section. One end of the pipe is connected to the hot air source input pipe, and the other end is a free end for releasing the hot air source inside the lower container section.

4. The integrated storage tank according to claim 3, characterized in that: The pipeline is a coiled pipe arranged in a spiral shape.

5. The integrated storage tank according to claim 1, characterized in that: The purification component includes: a bubble cap and a spray device, the bubble cap is used for purifying light components, and the spray device is used for liquid hydrogen bromide.

6. The integrated storage tank according to claim 5, characterized in that: A multi-layer plate body is installed inside the upper container section, and a plurality of blisters are installed on each layer of the plate body.

7. The integrated storage tank according to claim 1, characterized in that: A temperature sensor is installed on the lower container section, and the temperature sensor is used to detect the temperature inside the lower container section.

8. The integrated storage tank according to claim 1, characterized in that: A pressure sensor is installed on the lower container section, and the pressure sensor is used to detect the pressure in the lower container section.

9. The integrated storage tank according to claim 1, characterized in that: A liquid level sensor is installed on the lower container section, and the liquid level sensor is used to detect the liquid level in the lower container section.

10. The integrated storage tank according to claim 1, characterized in that: The internal volume of the upper container section is the same as the internal volume of the lower container section.

Images