Uninterrupted special gas supply device

Abstract

The utility model discloses an uninterrupted special gas supply device which comprises a control cabinet, a main gas supply pipe and an auxiliary gas pipe, a ball valve, a tee joint, a pressure gauge, an electromagnetic valve and a pneumatic valve are sequentially arranged on the main gas supply pipe, the tee joint, the pressure gauge and the electromagnetic valve are all arranged in the control cabinet, one end of the auxiliary gas pipe is communicated with the tee joint, and the other end of the auxiliary gas pipe is communicated with the pneumatic valve. The other end of the auxiliary air pipe is communicated with the pneumatic valve after being connected with the pressure monitoring box; according to the uninterrupted special gas supply device, the pressure monitoring box is additionally arranged between the electromagnetic valve and the pneumatic valve, and the auxiliary gas pipe is additionally arranged, so that when the pressure of the pressure gauge is normal and the pressure of the main gas supply pipe between the electromagnetic valve and the pneumatic valve is monitored to be reduced, the pressure switch is turned on, and auxiliary gas supply of compressed air is performed through the auxiliary gas pipe; and normal special gas supply of equipment is ensured.

Description

Technical Field

[0001] The utility model relates to gas equipment technology, in particular to an uninterrupted gas supply device for special gas equipment. Background Art

[0002] In the semiconductor industry, specialty gases are essential process raw materials. Their use is accomplished through highly automated, specialized supply equipment. This high level of automation means numerous pneumatic valves are opened and closed via solenoid valves. Failure of a solenoid valve can result in serious process failures. For expensive wafers, the resulting losses are undoubtedly enormous. For example, at the peak price of 300mm wafers using the 27nm process, if a simultaneous specialty gas process interruption across multiple pieces of equipment were to occur, the economic losses could reach tens of millions, or even higher.

[0003] At present, all special gas supply equipment only monitors the pressure of the total air intake (CDA) or does not monitor the pressure at all during the supply process. In addition, there is no pressure monitoring in the air path from the solenoid valve to the pneumatic valve. This means that after the solenoid valve fails, the pressure monitoring at the air intake end is normal, but there is no pressure monitoring in the air path from the solenoid valve to the pneumatic valve. As a result, even if the pressure in the pipeline drops, there will be no alarm or prompt information, resulting in the interruption of special gas supply. Utility Model Content

[0004] In order to solve the defects of the above-mentioned prior art, the utility model provides a special gas uninterrupted gas supply device, which additionally adds an auxiliary gas pipe to provide auxiliary compressed air supply when the solenoid valve is damaged to ensure normal production of the equipment.

[0005] In order to achieve the above technical objectives, the present invention adopts the following technical solutions: a special gas uninterrupted gas supply device, including a control cabinet, a main gas supply pipe and an auxiliary gas pipe, the main gas supply pipe is provided with a ball valve, a tee, a pressure gauge, a solenoid valve and a pneumatic valve in sequence, the tee, the pressure gauge and the solenoid valve are all arranged in the control cabinet, one end of the auxiliary gas pipe is connected to the tee, and the other end of the auxiliary gas pipe is connected to the pressure monitoring box and then connected to the pneumatic valve.

[0006] Preferably, a pressure switch and a pressure sensor are provided in the pressure monitoring box. The pressure switch is arranged in the auxiliary air pipe, and the pressure sensor is arranged in the main air supply pipe and is located between the solenoid valve and the pneumatic valve. The pressure sensor is used to control the on and off of the pressure switch, and the pressure switch is used to open and close the auxiliary air pipe.

[0007] Preferably, the auxiliary air pipe is provided with a through-plate joint, and the through-plate joint is used to guide the auxiliary air pipe to pass through the outer wall of the control cabinet.

[0008] Preferably, a pressure gauge and a pressure reducing valve are further provided in the control cabinet, and the pressure gauge and the pressure reducing valve are sequentially arranged in the main air supply pipe and located between the three-way valve and the solenoid valve.

[0009] Preferably, an air release valve is provided in the control cabinet, and the air release valve is connected to the pressure reducing valve and is used to empty the remaining special gas in the main air supply pipe.

[0010] In summary, the present invention has achieved the following technical effects:

[0011] The utility model provides an uninterrupted special gas supply device, which adds a pressure monitoring box between the solenoid valve and the pneumatic valve, and also adds an auxiliary air pipe. When the pressure gauge pressure is normal and the pressure drop of the main air supply pipe between the solenoid valve and the pneumatic valve is detected, the pressure switch is turned on and auxiliary compressed air is supplied through the auxiliary air pipe to ensure the normal special gas supply of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a structural diagram of the uninterrupted special gas supply device of the utility model;

[0013] Explanation of the reference numerals in the accompanying drawings in the specification: 1. Control cabinet; 2. Pressure monitoring box; 3. Main air supply pipe; 4. Ball valve; 5. Tee; 6. Pressure gauge; 7. Pressure reducing valve; 8. Solenoid valve; 9. Pneumatic valve; 10. Air release valve; 11. Auxiliary air pipe; 12. Through-plate connector; 13. Pressure switch. DETAILED DESCRIPTION

[0014] The present invention will be described in further detail below with reference to the accompanying drawings.

[0015] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

[0016] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0017] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0018] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0019] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0020] Example 1:

[0021] like Figure 1 As shown, a special gas uninterrupted gas supply device includes a control cabinet, a main gas supply pipe 3 and an auxiliary gas pipe 11, the main gas supply pipe 3 is provided with a ball valve 4, a tee 5, a pressure gauge 6, a solenoid valve 8 and a pneumatic valve 9 in sequence, the tee 5, the pressure gauge 6 and the solenoid valve 8 are all arranged in the control cabinet, one end of the auxiliary gas pipe 11 is connected with the tee 5, and the other end of the auxiliary gas pipe 11 is connected with the pressure monitoring box 2 and then connected with the pneumatic valve 9; a pressure switch 13 and a pressure sensor are provided in the pressure monitoring box, the pressure switch 13 is arranged in the auxiliary gas pipe 11, the pressure sensor is arranged in the main gas supply pipe 3 and is located between the solenoid valve 8 and the pneumatic valve 9, the pressure sensor is used to control the on and off of the pressure switch 13, and the pressure switch 13 is used to switch the auxiliary gas pipe 11 on and off.

[0022] Among them, the solenoid valve 8 can branch out into multiple main air supply pipes 3. Multiple pressure switches 13, sensors and auxiliary air pipes 11 are set in the pressure monitoring box 2 to realize the air supply to multiple air supply equipment. A buzzer for alarm is set in the pressure monitoring box 2. The buzzer is connected to the pressure sensor. When the pressure gauge 6 pressure is normal and the pressure sensor detects a drop in the main air supply pipe 3 between the solenoid valve 8 and the pneumatic valve 9, the pressure sensor will sound an alarm to remind workers that the solenoid valve 8 may be damaged.

[0023] Moreover, the button switch provided on the pressure monitoring box 2 can control the on and off of the pneumatic valve 9. When the equipment is powered off, the pneumatic valve 9 can be forcibly opened by the button switch provided on the pressure monitoring box 2; ensuring normal supply even in the temporary power off state;

[0024] In addition, pneumatic valve 9 utilizes compressed air to propel the movement of multiple pneumatic diaphragms within an actuator. A pressure transducer is a device or apparatus that senses pressure signals and converts them into a usable electrical output signal according to a specific pattern. Pressure gauge 6 is a digital pressure gauge, also known as a digital pressure gauge, and is an online measuring instrument. It utilizes a battery for long-term power, requiring no external power supply, making it easy to install and use. It can also send a low-voltage alarm to the CPU when the battery power is low. This product has metrological and explosion-proof certifications and has been widely used in the petroleum, chemical, and power industries. Pressure switch 13 utilizes a high-precision, high-stability pressure sensor and transmitter circuit, coupled with dedicated CPU modular signal processing technology to detect, display, generate alarms, and output control signals for the medium's pressure signal. Pressure switch 13 can be widely used in the petroleum, chemical, metallurgical, power, and water supply industries to measure and control the gauge and absolute pressures of various gases and liquids, making it an ideal intelligent measurement and control instrument for industrial sites.

[0025] The auxiliary air pipe 11 is provided with a through-plate joint 12 , and the through-plate joint 12 is used to guide the auxiliary air pipe 11 to pass through the outer wall of the control cabinet.

[0026] The control cabinet is also provided with a pressure gauge 6 and a pressure reducing valve 7, which are arranged in sequence on the main air supply pipe 3 and located between the three-way valve 5 and the solenoid valve 8; the control cabinet is provided with an air release valve 10, which is connected to the pressure reducing valve 7 and is used to empty the remaining special gas in the main air supply pipe 3.

[0027] The uninterrupted special gas supply device of the present invention adds a pressure monitoring box 2 between the solenoid valve 8 and the pneumatic valve 9, and an additional auxiliary air pipe. When the pressure of the pressure gauge 6 is normal and the pressure of the main air supply pipe 3 between the solenoid valve 8 and the pneumatic valve 9 is detected to drop, the pressure switch 13 is opened, and auxiliary air supply of compressed air is performed through the auxiliary air pipe 11 to ensure the normal special gas supply of the equipment.

[0028] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are within the scope of the technical solution of the present invention.

Claims

1. A special gas uninterrupted gas supply device, characterized in that: It includes a control cabinet, a main air supply pipe and an auxiliary air pipe. The main air supply pipe is provided with a ball valve, a tee, a pressure gauge, a solenoid valve and a pneumatic valve in sequence. The tee, pressure gauge and solenoid valve are all arranged in the control cabinet. One end of the auxiliary air pipe is connected to the tee, and the other end of the auxiliary air pipe is connected to the pressure monitoring box and then connected to the pneumatic valve.

2. The uninterrupted gas supply device for special gases according to claim 1, characterized in that: The pressure monitoring box is provided with a pressure switch and a pressure sensor. The pressure switch is arranged in the auxiliary air pipe. The pressure sensor is arranged in the main air supply pipe and is located between the solenoid valve and the pneumatic valve. The pressure sensor is used to control the on and off of the pressure switch. The pressure switch is used to open and close the auxiliary air pipe.

3. The uninterrupted gas supply device for special gases according to claim 1, characterized in that: The auxiliary air pipe is provided with a through-plate joint, and the through-plate joint is used to guide the auxiliary air pipe to pass through the outer wall of the control cabinet.

4. The uninterrupted gas supply device for special gases according to claim 1, characterized in that: A pressure gauge and a pressure reducing valve are also provided in the control cabinet. The pressure gauge and the pressure reducing valve are sequentially arranged on the main air supply pipe and located between the three-way valve and the solenoid valve.

5. The uninterrupted gas supply device for special gases according to claim 4, characterized in that: The control cabinet is provided with an air release valve, which is connected to the pressure reducing valve and is used to empty the remaining special gas in the main air supply pipe.

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